椭偏光谱测量中椭偏参数的灵敏度分析

在对椭圆偏振测量的基本原理进行了简单介绍和推导后,讨论了椭圆偏振测量中椭偏参数关于薄膜参数的灵敏度以及入射角对椭偏参数的影响,并进行了具体的仿真分析,得到如下结论：椭偏参数Delta对薄膜光学常数和薄膜厚度变化的灵敏度明显高于椭偏参数Psi。在椭偏数据处理中,椭偏参数Delta的测量精度直接影响薄膜光学常数和薄膜厚度的拟合精度。为了提高椭偏参数Delta的测量精度,可以选择入射角在膺布儒斯特角附近。所得结论对高精度椭偏测量具有指导意义。     

Features of interpreting ellipsometric measurement results

Modifications of commonly used Malin-Vedam and minimization methods for solving the inverse problem of ellipsometry are proposed. The fields and features of their application are described. Examples of using these methods for interpreting results of ellipsometric measurements of a diamond-like a-C:N film and La_0.7Sr_0.3MnO₃ films are presented.     

Removal of nonperiodic structures from a periodic image by means of spatial filtering

Simple spatial amplitude filters are used for restoration of periodic images. With modified filters the restoration of images and detection on faults can be done simultaneously.     

Random response of periodic structures by a finite element technique

A finite element method is presented for analysing the response of periodic structures to convected random pressure fields. It is shown that the problem reduces to one of finding the response of a single periodic section to a harmonic pressure wave. In this case the inertia, stiffness and damping matrices become functions of the phase difference between the pressures at corresponding points in adjacent sections. The method is applied to a skin-rib type structure.     

Determination of the optical constants and thickness of a thin slightly absorbing film by ellipsometric measurement

On the basis of an analysis of the properties of space constructed in coordinates of the ellipsometric angles and and the thicknessd ₁ of a thin slightly absorbing film, a graphical method of determining its index of refraction, index of absorption and thickness is proposed and discussed. From the two ellipsometric measurements, either for two different angles of incidence or for two different surrounding media, it is in principle possible to determine the chosen parameters characterizing the thin slightly absorbing film. The graphical method, however, seems to be less accurate and very laborious. The calculation is therefore proposed for an automatic computer. The ellipsometric measurements were carried out on a SAAB computer, according to a program elaborated in Algol. The results obtained and the values computed for the optical constants and the thickness of the thin slightly absorbing film are in good agreement with those found independently.     

Response of periodic structures by modal analysis

A periodic structure is a structure consisting of identical substructures, coupled together in identical ways to form the complete system. The undamped response of such a system is derived by using a modal analysis technique. The procedure allows for arbitrary loads and takes full advantage of the periodic properties of the structure. The algorithm is based on a technique previously developed by the authors.     

Unidirectional invisibility induced by PT-symmetric periodic structures

Parity-time (PT) symmetric periodic structures, near the spontaneous PT-symmetry breaking point, can act as unidirectional invisible media. In this regime, the reflection from one end is diminished while it is enhanced from the other. Furthermore, the transmission coefficient and phase are indistinguishable from those expected in the absence of a grating. The phenomenon is robust even in the presence of Kerr nonlinearities, and it can also effectively suppress optical bistabilities.     

Scattering and absorption of light by periodic and nearly periodic metallodielectric structures

We consider the effect of different approximations to the dielectric function of a silver sphere on the absorption of light by two-dimensional and three-dimensional periodic and non-periodic arrays of non-overlapping silver spheres in a host dielectric medium. We also present some results on the band structure and the absorption coefficient of light by photonic crystals consisting of non-overlapping silver-coated spheres in a dielectric medium.     

Two modes of laser lithography fabrication of three-dimensional submicrometer structures

The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.     

The Reflection of electromagnetic waves from almost periodic structures

We investigate the reflection of electromagnetic waves from structures charaterized by a spatially varying dielectric permittivity of an almost periodic nature. The reflection from almost periodic structures is compared and contrasted with the reflection from periodic structures. Paradoxically, it is found that almost periodic structures may prove superior to their periodic counterparts when these structures are used as filters. The major portion of this work was performed while the author was with the California Institute of Technology, Pasadena, California 91125, USA     

Effect of the transition layer on ellipsometric measurement of nanodimensional layers

The results of numerical simulation of a nanodimensional film-transition layer-absorbing substrate structure are presented. It is found that the transition layer affects the accuracy of determining the refractive index and thickness of the nanodimensional coating. It is shown that the introduction of the effective values of the refractive index and absorption coefficient of the substrate improves the accuracy of ellipsometric measurements of the nanodimensional film parameters. Physical (full-scale) and numerical experiments demonstrate that, when the thickness and refractive index of a nanodimensional film on a substrate with an unknown transition layer comparable in thickness with the film are measured, it is appropriate to replace the substrate-transition layer structure by a substrate with effective optical parameters. It is found that a change in the thickness of the transition layer does not noticeably affect the accuracy of determining the thickness and refractive index of the film deposited when the effective values of the refractive index and absorption coefficient of the substrate are used.     

Anisotropic mass density by radially periodic fluid structures

This Letter reports physical realization of acoustic metamaterials with anisotropic mass density. These metamaterials consist of a superlattice of two fluidlike components radially periodic. Several structures are spectroscopically characterized at large wavelengths (homogenization limit) by studying the acoustic resonances existing in the circular cavity where they are embedded. This characterization method allows us to extract the diagonal components of the sound speed tensor. Analytical expressions describing the anisotropic behavior as a function of the corrugation parameter are also developed and their predictions are in agreement with measurements.     

Sensitivity analysis for indirect measurement in scatterometry and the reconstruction of periodic grating structures

We discuss numerical algorithms for the determination of periodic surface structures from light diffraction patterns. With decreasing details of lithography masks, increasing demands on metrology techniques arise. Scatterometry as a non-imaging indirect optical method is applied to simple periodic line structures in order to determine parameters like side-wall angles, heights, top and bottom widths and to evaluate the quality of the manufacturing process. The numerical simulation of diffraction is based on the finite element solution of the Helmholtz equation. The inverse problem seeks to reconstruct the grating geometry from measured diffraction patterns. Restricting the class of gratings and the set of measurements, this inverse problem can be reformulated as a non-linear operator equation in Euclidean spaces. The operator maps the grating parameters to special efficiencies of diffracted plane-wave modes. We employ a Gauß –Newton type iterative method to solve this operator equation. The reconstruction properties and the convergence of the algorithm, however, is controlled by the local conditioning of the non-linear mapping. To improve reconstruction and convergence, we determine optimal sets of efficiencies optimizing the condition numbers of the corresponding Jacobians. Numerical examples for chrome-glass masks and for inspecting light of wavelength 632.8 nm are presented.     

神经网络反演算法在超声测量单向复合纤维材料特性中的应用

提出了一种神经网络反演算法,用于超声测量单向复合纤维材料的参数。算法基于Chistoffel方程,将单向复合纤维材料视作六角对称晶体,通过测量纤维样品中的声速,可以反演出五个独立的弹性系数C₁₁,C₁₂,C₁₃,C₃₃和C₄₄。反演方法则利用了神经网络反复学习不断用较好样例更新的训练样本集,克服了由于学习样例数目有限而使神经网络在预测过程中所产生的误差,提高了计算精度。并将该方法用于单向复合材料S2/DET85的弹性系数的实验测量和反演,所得声速与实验测量值吻合较好。该方法实现了超声测量单向复合纤维材料特性的自动递进反演过程。     

Formation of periodic surface structures by ultrashort laser pulses

The formation of periodic surface structures by ultrashort laser pulses was observed experimentally and explained theoretically. The experiments were performed on graphite with picosecond laser pulses. The spatial period of the structures is of the order of the wavelength of the incident radiation, and the orientation of the structures is correlated with the direction of polarization of the light. The key point of the theoretical model proposed is resonance excitation of surface electromagnetic waves, which under conditions such that the temperature of the electronic subsystem is decoupled from the temperature of the crystal lattice causes a “temperature grating” to be written on the flat solid surface of the sample while the laser pulse is being applied on account of the temperature dependence of the surface impedance. The formation of a periodic surface profile from the temperature grating occurs by the volume expansion of a melted layer near the surface of the material. For typical values of the surface tension and viscosity for metals, there is not enough time for the periodic profile to be resorbed before the liquid layer solidifies. The formation of periodic surface structures is delayed in time relative to the laser pulse. Zh. éksp. Teor. Fiz. 115, 675–688 (February 1999)     

Light scattering from rough surfaces with superimposed periodic structures

0 ), where K is the wave vector of the periodic structure and λ₀ is the correlation length for random roughness. The surface height h of the periodic structure plays a less important role in the suppression of the diffuse scattering, but it gives an oscillating term in grating scattering intensity that can produce the “rainbowing” (or coloration) effect for such a surface. In practice, this may result in increased visual brightness of textured metallic surfaces and also in a new and interesting method of surface coloration control. The rapid development of focused beam texturing technologies leaves no doubt that patterns with a given spatial frequency and amplitude can be easily produced in experiments. Received: 16 January 1997/Revised version: 19 June 1997     

Formation of periodic phase structures in a photopolymerizable layer by nonstationary light beams

Photopolymerization of a composite containing a nonpolymerizable component under the action of nonstationary optical radiation is studied. It is shown that the diffusion displacement of the nonpolymerizable component at the illuminated region boundary is caused by the appearance of the monomer concentration gradient, which, in turn, is induced by nonuniform photoinitiation. The action of radiation with a nonstationary intensity distribution makes it possible to form a periodic refractive index structure in the volume of the photopolymerizable material. The possibility of optical formation of polymer phase gratings by moving the shadow boundary stepwise along the polymerizable layer is studied numerically and experimentally.