近红外瞬态脉冲波前高精度干涉检测技术

惯性约束聚变(ICF)系统中高能瞬态脉冲激光由于脉冲时间短、能量高、波前畸变大,通常的检测方法难于检测脉冲激光波前。提出了一种基于空间相位调制技术可用于近红外瞬态波前高精度检测的环形径向剪切干涉仪。该系统可以以30~150 mm的圆瞳和方瞳口径、对波长为1064 nm的近红外纳秒级脉宽的脉冲激光波前实现共路、无参考面的瞬态、高精度的检测。系统的波前重构理论经过计算机仿真验证,精度达1/1000λ以上;检测结果与ZYGO数字波面干涉仪进行了比对,峰谷值、均方根值均优于1/15λ,并具有很好的可重复性。该系统目前已用于惯性约束聚变系统的脉冲检测,并且该技术适用于各种可见光和红外波段激光。     

Roughness measurement of metals using a modified binary speckle image and adaptive optics

This paper proposes an integrated roughness measurement system that is based on adaptive optics (AO) and binary analysis of speckle pattern images. The aim of this study was to demonstrate the necessity for AO compensation in regions containing both heat and fluid flow turbulences. A speckle image was obtained by projecting a laser beam onto the specimen surface, and the laser pattern image reflected from the surface was binarized to experimentally correlate the intensity with the surface roughness. In the absence of the AO correction scheme, induced turbulences can severely increase the residual rms error from 0.14 to 1.4 μm. After a real-time closed-loop AO correction, we can reduce the wavefront root mean square (rms) error to 0.12 μm, which not only compensates for the aberration error from induced disturbances but also improves the overall performance of the optical system. In addition, an AO system having different gains was investigated, and a threshold gain value was found to be able to steadily compensate for the wavefront errors in less than 2 s. Measurement results of five steel samples having roughness ranging from 0.2 to 3.125 μm (0.3λ and 5λ, where λ is the diode laser wavelength) demonstrate an excellent correlation between the intensity distribution of binary images and average roughness with a correlation coefficient of 0.9982. Furthermore, the proposed AO-assisted system is in good agreement with the stylus method and less than 9.73% error values can be consistently obtained.     

大口径光学元件波前功率谱密度检测

波前功率谱密度（PSD）被用于评价惯性约束聚变激光驱动器光学元件在中频区域的波前误差。高功率固体激光装置对大口径光学元件波前质量的要求有别于传统光学系统,要求对波前误差进行较高空间频率的测量。探讨了大口径光学元件波前的高空间分辨率检测技术,采用大口径相移干涉仪作为波前检测仪器,通过傅里叶变换获得波前一维功率谱密度分布。对惯性约束聚变激光驱动器的典型光学元件进行了波前功率谱密度的的检测和分析。     

Recursive wavefront aberration correction method for LCoS spatial light modulators

We present two accurate and relatively simple interferometric methods for the correction of wavefront aberrations of about 3 wavelengths (3λ) in spatial light modulators (SLMs) of the liquid crystal on silicon (LCoS) type. The first is based on a recursive use of a wavefront fitting algorithm in a Wyko™ interferometer, in which Zernike polynomials are employed as the basis functions. We show here that the successive use of only three measurements is required to obtain a peak-to-valley (PV) error as low as λ/10, with an uncertainty of λ/30, in the compensated wavefront. The second method makes use of the actual optical path difference (OPD) computed by the interferometer at each pixel of the image of the interferogram of the LCoS modulator (LCoS-M). From numerical interpolation of these OPD values we were able to assign the required OPD compensation at each pixel of the LCoS-M. With this method, PV errors of the compensated wavefront as low as λ/16, with an uncertainty of λ/30, were obtained for the entire LCoS-M, or of λ/33 for the disk that we used as the domain of the Zernike polynomials in the first method.     

干涉仪系统传递函数测量及影响因素的分析

波前功率谱密度(PSD)被用于评价惯性约束聚变(ICF)激光驱动器光学元件中频段的波前误差。干涉仪对PSD较高空间频率分量的测量存在失真效应,可通过干涉仪系统传递函数(STF)的检测标定来获得真实的波前PSD分布。采用台阶板位相比较法测得大口径菲索相移干涉仪检测系统在透射和反射检测情形下的传递函数。对传递函数测试算法进行了比较分析,明确了干涉仪系统zoom倍率的改变等因素对传递函数测量的影响,为波前PSD的准确检测奠定了基础。     

大口径干涉仪系统传递函数校准

 波前功率谱密度(PSD)被用于评价ICF激光驱动器光学元件在中频区域的波前误差。目前主要采用大口径相移干涉仪检测ICF光学元件的波前畸变,通过付立叶变换获得波前的PSD分布。相移干涉仪在较高空间频率分量的测量上存在失真效应,因此需对干涉仪的空间频率传递函数进行校准。本文采用位相比较法测量大口径相移干涉仪的系统传递函数。我们采用衍射光学元件的制造工艺,设计、制作了标准的透射和反射位相元件,比较理论计算值与实测PSD值,分别获得了大口径相移干涉仪透射、反射测量模式的系统传递函数。     

波前功率谱密度函数评价方法探讨

 波前功率谱密度PSD（Power Spectral Density）能定量给出波前畸变的空间频率分布、限定波纹度和粗糙度指标，全面反映ICF驱动器对高功率激光光学元件加工质量的特殊要求。给出了波前功率谱密度PSD的定义及计算方法，并使用大口径相移干涉仪作为波前检测仪器，对光学磷酸盐钕玻璃透射波前进行了测试实验，获得波前一维PSD分布，证实功率谱密度为高功率激光光学元件波前参数的一种有效表征方式。同时，还对PSD与均方根RMS之间的关系进行了初步的讨论。     

A novel optical subdivision method for dual-frequency interferometer

The theory of optical subdivision techniques of dual-frequency laser interferometers is stated. And a novel optical subdivision technique is proposed originally to enhance resolution of a commercial interferometer by adding some corner-cubes. Then the performance of the interferometer is tested. The interferometer resolution of 1.24 nm and the average error of below 2 nm are achieved by using the technique. The most novel of the optical subdivision technique is without λ/4 plates. It is less sensitive to environmental changes, it has prodigious potential to improve resolution farther and it can reduce polarization mixing error.     

Null test of aspheric surface based on digital phase-shift interferometer

In order to implement the null test of aspheric surfaces as simply as that of spherical ones in a commercial digital phase-shift interferometer, computer generated holograms (CGHs) that are composed of a main CGH, which produces the ideal aspheric wavefront, and an alignment CGH, which aids in calibration, were utilized. The principle of testing aspheric surface in an interferometer with CGHs is explained and critical aspects in designing, fabricating and calibrating CGHs are discussed in detail. Error analysis of the experimental results demonstrated that the uncertainty of the testing system is better than λ/10 (λ=0.6328 μm).     

光学材料光学均匀性检测方法分析

光学均匀性是光学材料的重要指标,直接影响到透射光学系统的波面质量,改变系统的波相差。惯性约束聚变（Inertial Confine Fusion,ICF）激光驱动器的研制要求对材料的光学均匀性进行高精度的检测,同时兼顾洁净度要求。实验中利用斐索干涉仪实现了大口径光学材料光学均匀性的检测,并与国外检测数据进行了对比,对检测过程中的影响因素主要包括样品的厚度测量偏差及折射系数偏差进行了分析。结果表明,样品的厚度测量偏差及折射系数偏差对结果的影响较小,可以忽略。同时用两种干涉仪专用软件对大量样品测量数据进行处理,对比了不同干涉仪光学均匀性的计算结果,表明这两种情况下对光学均匀性的处理结果相符,解决了大口径光学坯件光学均匀性的检测问题。     

子孔径拼接技术应用的研究

大口径光学元件的检测开拓了子孔径拼接应用的新领域。采用小口径干涉仪对大口径被测元件不同区域进行波前检测,然后恢复计算出被测波前。使用光学设计软件ZEMAX对子孔径检测拼接技术进行了模拟,模拟结果表明：波前检测相对误差小于4.3λ‰,实现了对大口径光学元件面形的高精度检测,避免了相同口径检测干涉仪的使用,降低了检测成本及难度。     

Initial wavefunction dependence on atom interferometry phases

In this paper we present a mathematical procedure to analytically calculate the output signal of a pulsed atom interferometer in an inertial field. Using the well-known ABCDξ method we take into account the full wave dynamics of the atoms with a first order treatment of the wavefront distortion by the laser pulses. Using a numerical example we study the effect of both the length of the beam splitting laser pulses and of the width of the initial spatial distribution of the atoms. First, we find that in a general inertial field the interferometer only has a limited window in terms of the initial width (centered around 100 μm in the example calculation) in which interference fringes are visible at all. This effect is caused by the inevitable statistical spread in atomic parameters, such as initial position and momentum, and the dependence of the interferometer phase on these. In the optimum case, the useful range of the initial width is formed by the range in which both the spatial distribution and the diffraction limited momentum spread are small enough to avoid large phase differences over the atomic wavefunction. As a second result we find that the interferometer phase depends strongly on the length of the laser pulses and, to a smaller extent, on the initial width of the atomic cloud. This spatial dependency is relatively small (～10^?5 rad) and justifies semiclassical approximations, as used in other calculations, for most experiments. New high-accuracy experiments, however, will come in the range where this effect is no longer negligible.     

Absolute calibration of Hartmann-Shack wavefront sensor by spherical wavefronts

A method for absolute calibration of Hartmann-Shack wavefront sensor (HSWFS), in which the wavefront differences of several spherical wavefronts are used to determine parameters of HSWFS, is proposed in this paper. The calibration method is introduced and the experiment results and error analysis are presented. Across a pupil with diameter of 2.6 mm, a lenslet array of 20 × 20 sub-apertures with square configuration, and focal length 4 mm, is used to sample the incident wave. The results indicate the uncertainty of the Hartmann-Shack wavefront sensor calibrated by the proposed method, is improved to less than λ/60 PV value and λ/500 RMS value (λ = 635 nm) with modal reconstruction method. Furthermore, the factors affected the results are analyzed. The error analysis suggested that the influences of the factors on the accuracy of reconstruction can be controlled to an accept level.     

Modified polarization point diffraction interferometer with extended measurable NA for spherical surface testing

The small pinhole of point diffraction interferometer based on pinhole-point diffraction places ultra-high requirement on both the adjustment of testing system and performance of CCD camera. Besides, poor fringe contrast due to the low reflectivity of test spherical surface would limit the measurement precision in the processing of fringe pattern. A modified polarization point diffraction interferometer with extended measurable numerical aperture (NA) is presented for testing the spherical surfaces with low reflectivity. Measurement error factors as well as the corresponding calibration procedure are introduced in detail. Comparing with the results of Zygo interferometer, measurement accuracy with root-mean-square (RMS) value about 0.0026λ and peak-to-valley (PV) 0.0134λ is achieved. The system has good measurement repeatability, and the standard deviation of measurement results RMS better than 0.0010λ is obtained. The proposed interferometer reduces the difficulty in the adjustment of the system and provides a feasible way for testing the surfaces with low reflectivity and high NA.     

Longitudinal coherence and spectral profile of a nickel-like silver transient soft X-ray laser

The spectral width of a Ni-like silver transient soft X-ray laser (4d-4p λ= 13.9 nm) was experimentally inferred from the measurement of its temporal coherence, performed with a novel wavefront division interferometer. The measured coherence time of 3 ps corresponds to a spectral linewidth of 0.7 m? which is narrow. We compare this experimental result to numerical simulations of the amplified line profile, performed along two different approaches. Both calculations predict a spectral linewidth that is about 3 times larger than the experimental value. We discuss several effects that might explain this discrepancy. We show that, due to the short duration of the X-ray laser pulse, the assumption of a stationary electromagnetic field used in both the experimental analysis and in the calculations need to be reconsidered.     

数字式激光平面干涉仪校准规范介绍

数字式激光平面干涉仪是用于测量光学元件面形和无焦光学系统波像差的光学仪器。为了统一数字式激光平面干涉仪测量量值，保证其测量结果的准确性和溯源性，编写数字式激光平面干涉仪校准规范。简要介绍了数字式激光平面干涉仪校准规范的构成，被校仪器的技术指标和校准方法等。     

基于神光Ⅲ原型装置的主动式冲击波测试技术北大核心CSCD

主动式冲击波双灵敏度精密诊断技术是惯性约束聚变物理实验精密化的关键技术之一,其主要功能是精密诊断惯性约束聚变中多个整形脉冲产生的冲击波加载、追赶的速度历程。对基于神光Ⅲ原型的成像型速度干涉仪技术进行了较全面的介绍。主要包括具有快速自校准能力的高分辨成像技术,束靶耦合物理对象分析与靶型设计技术,高置信度图像提取处理技术等关键技术。该系统空间分辨达到5μm、时间分辨10～30ps、测速不确定度小于2％,可对透明介质材料中的多次冲击过程进行连续测量。     

微型光学元件的透过波面畸变的数字化检测

介绍了由浙江大学研制的CQG II型车间数字干涉仪检测 φ3 6mm× 0 5mm平行平面玻璃的透过波面畸变的情况。最近研制出的干涉仪测量的最大口径为 φ60mm ,采用移相式条纹扫描数字化处理 ,基于WINDOWS操作系统实现实时检测 ,以优于λ/ 30的精度计算出被检件的波面误差。工厂生产检测表明 :在上述仪器上增加一个 4倍口径的放大系统 ,可以使通光口径 φ3 1mm的工件达到 42 0 0个采样点 ,仪器的透射测量标准干涉腔误差PV≤ 0 0 2 8λ ,仪器隔日多次测量重复性PV≤ 0 0 3λ。该仪器已经正常投入使用 ,生产的用于光学信息产品的微型光学件已为日本先锋公司 (PIONEER)复检通过 ,成为工厂批量生产过程质量控制 (QC)的重要手段。     

整形高功率激光装置的任意电脉冲发生器设计(英文)

基于GaAs场效应管电压控制电流和开关的特性,设计了一种任意电脉冲发生器,并成功应用于激光脉冲整形装置。该电脉冲发生器利用超宽带窄脉冲触发多个GaAs场效应管,产生多路负脉冲,通过模拟延时线依次将各路负脉冲延迟一定时间后经微带线耦合输出多路负脉冲叠加的波形;通过多路不同幅度的脉冲堆积效应来获得形状任意可调的整形电脉冲。为了满足惯性约束聚变(ICF)实验中对电脉冲幅度不能过小的要求,在电路的输出端接入增益可调的超宽带电压放大器,使脉冲幅度达到实验要求。利用设计的任意电脉冲发生器实现了脉冲幅度0～5 V可调、脉宽0～10ns可调、时域调节精度为330 ps,整形方波脉冲下降沿为330 ps、上升沿为240 ps。实验结果表明,将产生的电脉冲注入光波导调制器,可获得理想形状的整形激光脉冲,提高激光脉冲的输出能量。     

Shack-Hartmann波前传感器在光学检验中的应用

介绍用于光学检测的Shack-Hartmann(S-H)波前传感器,以及相应的检测实验结果。在实验室内,通过与Zygo干涉仪的测量结果对比,得出传感器的测量精度优于/50 RMS(=632.8 nm)。在外场利用星光作为光源,对口径1 m、焦距11 m的望远镜进行了系统波像差检验,测量结果为0.39~0.46RMS之间,并随着俯仰角的增加而增大,主要像差形式为三阶像散。