非离子型产酸剂——N-羟基邻苯二甲酰亚胺对甲苯磺酸酯的合成与性能研究

以邻苯二甲酸酐、盐酸羟胺和对甲苯磺酰氯为起始原料,合成了非离子型光致产酸剂——N-羟基邻苯二甲酰亚胺对甲苯磺酸酯,对其进行了红外、核磁共振和紫外表征,测定了其化学结构、溶解性和紫外吸收等性能.结果表明,这种非离子型产酸剂较离子型产酸剂在常用溶剂中有非常良好的溶解性,并在248 nm处有好的透明性,可用于深紫外光刻工艺体系.     

Novel Anionic Photoacid Generators (PAGs) and Corresponding PAG Bound Polymers

Summary: A new series of functionalized anionic photoacid generators (PAGs), and corresponding polymers were prepared in moderate to good yield and characterized. The thermostability of PAG bound polymers was superior to PAG blend polymers. The fluorine‐free PAG bound or blend polymers exhibited higher stability than fluorine‐substituted PAG bound or blend polymers. Although the acid generating efficiency of PAG blend polymers was higher than that of PAG bound polymers, yet it is anticipated that PAG incorporated into the polymer main chain may improve acid diffusion compared with the PAG blend polymers. This was demonstrated by preliminary electron beam lithography (EBL) results: the fluorine PAG bound polymer resist HE‐F4‐MBS‐TPS gave 35 nm 1:1 L/S and showed better resolution than the blend sample HE Blend F4‐IBBS‐TPS. The PAG bound resist showed the capability for higher resolution, since 30 nm 2:1 L/S patterned. Based on these preliminary EBL results, the PAG bound polymer samples are anticipated to have a resolution capability for the 32 nm node for EUVL.

Design of microstructures for EUV lithography.     

硫鎓盐产酸剂的合成及其产酸效率

合成了6种适用于248 nm光致抗蚀剂的硫鎓盐产酸剂,其中吩噻(噁)体系的产酸剂为自行设计合成. 利用IR、H NMR、UV等测试技术进行了结构表征和紫外吸收测定,各化合物的最大紫外吸收在250～285 nm之间,吸收域较宽,适用性较强.同时,利用酸敏染料罗丹明B遇酸异构变色的特点,使用紫外!可见分光光度计定量检测了6种产酸剂在乙腈溶剂中的产酸效率,其中硫杂蒽酮系列的产酸剂产酸性能最好. 最后使用荧光追踪法研究了溶剂极性对产酸效率的影响,发现产酸剂的产酸性能同溶剂的选取密切相关,随着溶剂极性的减小,产酸效率随之降低. 对6种硫鎓盐的产酸效率检测结果可以为产酸剂进一步用于248 nm光致抗蚀剂配方提供详细的参考.     

三嗪类化合物的合成及其产酸性能研究

合成了一系列的三嗪类光生酸剂1a—1e,确定了它们的结构,并对1e在乙腈溶剂中365和405nm光下的曝光分解产酸性能进行了初步的定量研究.结果表明,在测定浓度范围内分解量子产率和产酸量子产率基本上都不随浓度的变化而变化,在405nm光下比在365nm光下有更高的分解和产酸量子效率.有关这类化合物的光生酸性能与曝光波长的关系正在进一步研究中.     

A Simple Method to Fabricate a Conductive Polymer Micropattern on an Organic Polymer Substrate

Summary: Under UV irradiation plus a photomask, a hydrophilic/hydrophobic hybrid polymer surface is created by sandwiching an ammonium persulfate solution between two polymer films. It is demonstrated that an effective conductive PANI micropattern can be fabricated on such a wettability patterned surface. For PET, a stable negative micropattern could be formed directly by the selective deposition of PANI onto the hydrophobic region. Alternatively, for PP or PI, direct deposition of PANI is non‐selective, however, the PANI layer remains preferentially on the hydrophilic region by peeling off the PANI layer on the hydrophobic region to form a positive micropattern.

Schematic illustration of the procedure used for the formation of a conducting polymer (PANI) micropattern on a wettability patterned polymer substrate.     

磺酸肟酯类光产酸剂的制备及性能研究

本文合成了4种磺酸肟酯类非离子型光产酸剂,用核磁氢谱确认了产物结构,并测试了其热稳定性、紫外吸收特性及产酸效率.结果表明,合成的4种磺酸肟酯类光产酸剂在350-450 nm和深紫外区(DUV,248 nm)都有很好的吸收,在420 nm波段曝光下,(5-对三氟甲基苯磺酸酯亚胺-5H-噻吩-2-亚胺)-苯乙腈(P-2)产酸率最高,可达0.96;(5-对甲基苯磺酸酯亚胺-5H-噻吩-2-亚胺)-苯乙腈(P-1)在365 nm和420 nm两个波段下,均有较高的产酸率.利用实时红外(RT-IR)研究了相同浓度下4种光产酸剂对乙烯基醚化合物引发的光聚合动力学,同时研究了光产酸剂浓度对光聚合反应的影响,发现产酸剂浓度为2%时,光照30 s乙烯基醚化合物的双键转化率(DC%)即能达到80%.     

Photolithographic patterning of highly conductive PEDOT:PSS and its application in organic light‐emitting diodes

Photolithographically patterned highly conductive (～1400 S/cm) poly(3,4‐ethylenedioxythio‐phene):poly(styrenesulfonate) (PEDOT:PSS) films are demonstrated as electrodes for organic light emitting diodes (OLEDs). With the assistance of hydrofluoroether (HFE) solvents and fluorinated photoresists, high‐resolution passive‐matrix OLEDs with PEDOT:PSS electrodes are fabricated, in which the OLEDs show comparable performance to those devices prepared on the indium tin oxide (ITO) electrodes. This photolithographic patterning process for PEDTO:PSS has great potential for applications which require flexible electrodes. © 2014 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2014 , 52, 1221–1226     

Electrochemical Synthesis of a Microporous Conductive Polymer Based on a Metal–Organic Framework Thin Film

A new approach to preparing 3D microporous conductive polymer has been demonstrated in the electrochemical synthesis of a porous polyaniline network with the utilization of a MOF thin film supported on a conducting substrate. The prepared porous polyaniline with well‐defined uniform micropores of 0.84 nm exhibits a high BET surface area of 986 m² g^?1 and a high electric conductivity of 0.125 S cm^?1 when doped with I₂, which is superior to existing porous conducting materials of porous MOFs, CMPs, and COFs.     

Preparation,Micro-Patterning and Electrical Characterization of Functionalized Carbon-Nanotube Polydimethylsiloxane Nanocomposite Polymer

Summary : We present the preparation, improved micro-patterning, and electrical property characterization of COOH- functionalized mutli-walled carbon nanotube (MWCNT) and polydimethylsiloxane (PDMS) conductive nanocomposite polymers that can be employed for lab on a chip applications. The nanocomposites are prepared by mixing functionalized MWCNTs into an uncured PDMS matrix and employing high frequency ultrasonics (∼ 42-50 kHz) using a horn tip probe. The prepared nanocomposites are micromolded using soft lithography techniques down to a feature size of 25 µm against a micropatterned SU-8 polymer master. An array of peg like microstructures have been fabricated with a radii of 25 µm and height of 100 µm, that are embedded on a non-conductive PDMS substrate using novel and improved fabrication techniques. The percolation threshold of the prepared nanocomposite is achieved at 1.5 weight percentage (wt.%) of COOH- functionalized MWCNT in the PDMS matrix. Resistivity levels at 2 wt.% of functionalized MWCNTs are 62 Ω-cm or better, which is an improvement over our previously reported nanocomposite resistivity value of 100 Ω-cm at 2 wt.% of nonfunctionalized MWCNT's in a PDMS matrix. The nanocomposites also have fairly uniform dispersion and no agglomeration of COOH- functionalized MWCNT as shown by SEM analysis. Furthermore, the nanocomposites show a negative temperature coefficient of resistivity (NTCR), making them ideal candidates for micropatternable temperature microsensors for lab on a chip systems.     

New Organic Dispersions of Conducting Polymers Using Polymeric Ionic Liquids as Stabilizers

Summary: Polypyrrole (PPy), polyaniline (PANI), and poly(ethylenedioxythiophene) (PEDOT) aqueous dispersions were prepared by polymerizing the corresponding monomer in the presence of a polymeric ionic liquid (PIL), poly(1‐vinyl‐3‐ethylimidazolium bromide). By addition of bispentafluoroethanesulfonimide lithium salt, the PIL stabilizer becomes hydrophobic and precipitates in water and traps the conducting polymer microparticles inside. The dispersion of the recovered powders in organic solvents leads to organic conducting dispersions. After casting the organic dispersions, hydrophobic films with electrical conductivity values as high as 0.1 S · cm⁻¹ were obtained.

A new synthetic route to new organic dispersions.     

Photosensitive polybenzoxazole based on a poly(o‐hydroxy amide), a dissolution inhibitor,and a photoacid generator

A positive‐type photosensitive polybenzoxazole (PSPBO), based on a poly(o‐hydroxy amide) (PHA), the dissolution inhibitor (DI) 9,9‐bis(4‐tert‐butoxycarbonyloxyphenyl)fluorene (t‐Boc BHF), and the photoacid generator (5‐propylsulfonyloxyimino‐5H‐thiophene‐2‐ylidene)‐(2‐methylphenyl)acetonitrile (PTMA), was developed. Several new tert‐butoxycarbonylated compounds as DIs for PSPBOs were prepared from phenolic compounds having a cardolike structure with di‐tert‐butyl dicarbonate in the presence of 4‐dimethylaminopyridine. Among them, t‐Boc BHF and 5,5′,6,6′‐tetra(tert‐butoxycarbonyl)‐3,3,3′,3′‐tetramethyl‐1,1′‐spirobiindane acted as excellent DIs, giving a large dissolution contrast between the exposed and unexposed areas in a 2.38 wt % tetramethylammonium hydroxide solution (TMAHaq)/5 wt % iso‐propanol (i‐PrOH). The dissolution behavior of this PSPBO system was studied in relation to the PTMA and t‐Boc BHF loadings and postexposure baking temperature. A PSPBO consisting of PHA (77 wt %), t‐Boc BHF (20 wt %), and PTMA (3 wt %) exhibited a sensitivity of 34 mJ/cm² and a contrast of 5.8 when exposed to 365‐nm light (i‐line) and developed with an aqueous alkaline developer, 2.38 wt % TMAHaq/5 wt % i‐PrOH. A clear, positive image with 6‐μm features and a 10‐μm‐thick pattern with high sensitivity and contrast was produced by contact printing and converted into polybenzoxazole patterns upon heating at 350 °C for 1 h. © 2006 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 45: 661–668, 2007     

Development of 1‐Hydroxy‐2(1H)‐quinolone‐Based Photoacid Generators and Photoresponsive Polymer Surfaces

A new class of carboxylate and sulfonate esters of 1‐hydroxy‐2(1H)‐quinolone has been demonstrated as nonionic photoacid generators (PAGs). Irradiation of carboxylates and sulfonates of 1‐hydroxy‐2(1H)‐quinolone by UV light (λ≥310 nm) resulted in homolysis of weak N? O bond leading to efficient generation of carboxylic and sulfonic acids, respectively. The mechanism for the homolytic N? O bond cleavage was supported by time‐dependent DFT calculations. Photoresponsive 1‐(p‐styrenesulfonyloxy)‐2‐quinolone–methyl methacrylate (SSQL‐MMA) and 1‐(p‐styrenesulfonyloxy)‐2‐quinolone–lauryl acrylate (SSQL‐LA) copolymers were synthesized from PAG monomer 1‐(p‐styrenesulfonyloxy)‐2‐quinolone, and subsequently controlled surface wettability was demonstrated for the above‐mentioned photoresponsive polymers.     

Fabrication of a Novel Polymeric Scaffold for Amperometric Laccase Biosensor

Present work displays the preparation of an electrochemical biosensor using a conjugated polymer and laccase enzyme for catechol quantification in samples. The biosensing system is based on an enzyme immobilization on polymer modified graphite transducer surface. For that purpose, a random conjugated polymer, thienothiophene‐benzoxadiazole‐alt‐benzodithiophene (BOTT), was coated onto a graphite electrode surface via drop casting method followed by immobilization of a biomolecule (laccase) for sensing experiments. Herein, for the first time, we proposed a BOTT polymer as an inexpensive and effective way to fabricate highly sensitive and fast response biosensors. The proposed sensing system possessed superior properties with 0.38 μM limit of detection and 110.81 μA mM^?1 sensitivity. Furthermore, cyclic voltammetry and scanning electron microscopy techniques were used to examine the surface modifications. The proposed system could be useful for many future studies for catechol quantification in environmental samples.© 2019 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2019, 57, 2333–2339     

First Preparations and Characterization of Conductive Polymer Crystalline Nanoneedles

Single crystalline nanoneedles of three families of the most studied conductive organic polymers - polythiophene, polyaniline and polypyrrole - were synthesized for the first time using an interfacial polymerization process that takes place with simultaneous crystallization. As the crystal growth is concurrent with polymerization, more ordered crystal packing can be expected. Most of the bulk conducting-polymer systems studied contains regions that are inhomogeneous. Single nanocrystals of conducting polymers have not been reported, although needle-shaped bulk crystals of the quarterphenyl cation radical salt have previously been studied. The investigation of processes in a nanodomain of a single crystal is critical in ascertaining the inherent electronic properties of polymer nanoelements. The organic conductive nanoneedles were characterized using TEM, HRTEM, electron diffraction, EDS, and EPR to establish their crystal structure and composition. Scanning tunneling microscopy/spectroscopy (STM/STS) investigation were conducted to examine their electronic behaviors, leading to the discovery of a field-induced conductance switching with response times on the millisecond level. The switch voltages are in the range of 3 to 4 volts in STM experiments, consistent with the trend of the band gap of the three polymers. The organic conductive nanoneedles with nano-tip having high density of mobile electron may serve as interesting elements for nanoscale electronics.     

The Cyano Group as a Traceless Activation Group for the Intermolecular [3+2] Cycloaddition of Azomethine Ylides: A Five‐Step Synthesis of (±)‐Isoretronecanol

The cyano group was used as a traceless activation group for the [3+2] cycloaddition of azomethine ylides in a two‐step process, thereby providing a highly effective approach to 5‐unsubstituted pyrrolidines. The transformation includes the silver acetate catalyzed intermolecular 1,3‐dipolar cycloaddition of α‐iminonitriles and an unprecedented sodium borohydride induced reductive decyanation reaction. A diverse array of substrates is amenable to this transformation. The methodology was further extended to a five‐step total synthesis of the pyrrolizidine natural product isoretronecanol.     

Polymeric Semiconductors with a Pre‐Specified Alternation of Conjugated Bonds and Metal Clusters

Summary: In this work the first samples of polymeric semiconductors of a new structure are produced. Their electric conductivity is of the order ∼10⁻² Ohm⁻¹ · cm⁻¹ and it increases with temperature. Their synthesis includes a stage of radiation grafting of a matrix‐type on stretched polyamide films. Conducting molecular circuits in such materials include fragments with conjugated bonds and metal clusters. The alternation of these fragments is determined by the polyamide matrix.

Plot of voltage versus current determined for new polymer semiconducting films where fragments with conjugated bonds alternate with silver clusters.     

Study on the Structure and Properties of Ordered Conductive Polymer Ultrathin Film

A Langmuir-Blodgett (LB) inducing method was firstly used to prepare single layer and multilayer conducting composite PEDOT-PSS film. The film-forming ability of ionization ODA and ODA-SA monolayer spread on PEDOT-PSS nanoparticle sub-phase and the behavior of ODA/PEDOT-PSS assembly particles on pure water were firstly investigated. The results indicated that nanoparticles in the suphase are packed in the ionization monolayer and stable complex Langmuir film is formed at the air/water interface. It has been found that the best film-forming conditions for composite film are as follows:distinct interface was formed between ODA and PEDOT-PSS layer and single layer thickness of PEDOT-PSS was about 23 nm,well accordant to the size of PEDOT-PSS nanoparticles. Different structures were designed to test the conductive ability of these composite films and a variable range hopping (VRH) model was used to explain the film conductive mechanism. The results indicated that a 3D-VRH model explained well the transferring of charge carrier in the multilayer film.     

Novel Novolac Phenolic Polymeric Network of Chalcones: Synthesis,Characterization, and Thermal–Electrical Conductivity Investigation

A series of novolac phenolic polymeric networks (NPPN) were prepared via an acid-catalyzed polycondensation reaction of formaldehyde with chalcones possessing a p-phenolic OH group. When p-hydroxybenzaldehyde was treated with formaldehyde under the same conditions, a phenolic polymer (PP) was obtained. The resulting polymers were isolated in excellent yields (83–98%). Isolated polymers (NPPN, PP) were characterized using FTIR, TGA, and XRD. The results obtained from the TGA revealed that all prepared phenolic polymers have high thermal stability at high temperatures and can act as thermosetting materials. XRD data analysis showed a high degree of amorphousness for all polymers (78.8–89.2%). The electrical conductivities and resistivities of all chalcone-based phenolic networks (NPPN) and p-hydroxybenzaldehyde polymer (PP) were also determined. The physical characteristics obtained from the I-V curve showed that the conductivity of phenolic polymers has a wide range from ultimately negligible values of 0.09 µS/cm up to 2.97 μS/cm. The degree of polarization of the conjugated system’s carbonyl group was attributed to high, low, or even no conductivity for all phenolic polymers since the electronic effects (inductive and mesomeric) could impact the polarization of the carbonyl group and, consequently, change the degree of the charge separation to show varied conductivity values.