Electrochemistry-assisted microstructuring of reduced graphene oxide-based microarrays with adjustable electrical behavior

An electrochemistry-assisted microstructuring process is developed for fabricating well-aligned reduced graphene oxide (rGO)-based micropatterns on arbitrary substrates using a combined method of photolithography, electrochemical reduction and wet etching techniques. The dimension of special-shaped rGO microarrays localized in an insulating GO matrix is effectively adjusted by changing GO reduction time without multi-mask patterning. The increased conductivity of rGO micropatterns by several orders of magnitude is achieved by controlling GO thickness and reduction time. The electrochemical activity of rGO micropatterns as microarray electrodes is confirmed by using ferricyanide in aqueous solution as the redox probe. The present method could be a scalable technology to conventional photolithography for fabricating arbitrary rGO micropatterns in an insulating GO matrix for their potential applications in next generation electronic and electrochemical devices.     

Nanoscale three‐dimensional optical visualization method for a deformation of elastomer printing plate to realize soft nano‐printing technology

Printed electronics, in which microcircuit patterns are fabricated using printing methods, are the focus of considerable attention for the fabrication of devices such as flat panel displays, solar cells, and flexible electronics. In particular, gravure offset printing is considered to be a highly promising approach for rapid printing of fine patterns with well‐controlled thickness. At present, however, because of the occurrence of side etching during fabrication of metal printing plates, features with dimensions of less than 10 µm cannot be printed. In order to overcome this problem, we have previously proposed the use of a rubber printing plate fabricated by photolithography and molding, which is free from side‐etching issues. However, deformation of the printing plate can have a detrimental influence on the transferred pattern. In the present study, we developed a method for visualizing the deformation of a printing plate containing both micropatterns and nanopatterns, in order to study its effect on the printing process. The results were compared with those predicted by an analytic equation under a uniform controlled pressure. Copyright © 2015 John Wiley & Sons, Ltd.     

Area-selective formation of macropore array by anisotropic electrochemical etching on an n-Si(100) surface in aqueous HF solution

A photoassisted anodization process to fabricate arrays of uniform and straight macropores at selected areas of a Si wafer surface was developed. The front- and backside surfaces of n-type Si(100) wafers were coated with a thin Si(3)N(4) layer, and the frontside layer was micro-patterned using photolithography and reactive ion etching to form an array of microscopic openings at selected areas. The inverted pyramid-shape micropits were formed at these openings by anisotropic etching using aqueous KOH solution; these pits act as the initiation sites for the anodization to form macropores. The electrochemical etching was carried out in aqueous HF solution under illumination from the backside of the wafer, on which Au/Cr electric contact was formed following removal of the Si(3)N(4) layer. To improve the uniformity of the formation condition of the macropores at the selected area, holes were area-selectively generated by controlling the illumination condition during the anodization. For this, micropatterns were formed on the Au/Cr layer at the backside surface, which were aligned to those at the frontside surface. The parameters, such as HF concentration, current density, and wafer thickness, i.e., hole diffusion length, were optimized, and the arrays of uniform and high-aspect-ratio macropores were formed at the selected area of the domain at the silicon surface.     

Fabrication of interdigitated micropatterns of self-assembled polymer nanofilms containing cell-adhesive materials

Micropatterns of different biomaterials with micro- and nanoscale features and defined spatial arrangement on a single substrate are useful tools for studying cellular-level interactions, and recent reports have highlighted the strong influence of scaffold compliance in determining cell behavior. In this paper, a simple yet versatile and precise patterning technique for the fabrication of interdigitated micropatterns of nanocomposite multilayer coatings on a single substrate is demonstrated through a combination of lithography and layer-by-layer (LbL) assembly processes, termed polymer surface micromachining (PSM). The first nanofilm pattern is constructed using lithography, followed by LbL multilayer assembly and lift-off, and the process is repeated with optical alignment to obtain interdigitated patterns on the same substrate. Thus, the method is analogous to surface micromachining, except that the deposition materials are polymers and biological materials that are used to produce multilayer nanocomposite structures. A key feature of the multilayers is the capability to tune properties such as stiffness by appropriate selection of materials, deposition conditions, and postdeposition treatments. Two- and four-component systems on glass coverslips are presented to demonstrate the versatility of the approach to construct precisely defined, homogeneous nanofilm patterns. In addition, an example of a complex system used as a testbed for in vitro cell adhesion and growth is provided: micropatterns of poly(sodium 4-styrenesulfonate)/poly-L-lysine hydrobromide (PSS/PLL) and secreted phospholipase A(2)/poly(ethyleneimine) (sPLA(2)/PEI) multilayers. The interdigitated square nanofilm array patterns were obtained on a single coverslip with poly(diallyldimethylammonium chloride) (PDDA) as a cell-repellent background. Cell culture experiments show that cortical neurons respond and bind specifically to the sPLA(2) micropatterns in competition with PLL micropatterns. The fabrication and the initial biological results on the nanofilm micropatterns support the usefulness of this technique for use in studies aimed at elucidating important biological structure-function relationships, but the applicability of the fabrication method is much broader and may impact electronics, photonics, and chemical microsystems.     

Facile fabrication of 2-dimensional arrays of sub-10 nm single crystalline Si nanopillars using nanoparticle masks

A simple procedure for the fabrication of sub-10 nm scale Si nanopillars in a 2-D array using reactive ion etching with 8 nm Co nanoparticles as etch masks is demonstrated. The obtained Si nanopillars are single crystalline tapered pillar structures of 5 nm (top) x 8 nm (bottom) with a density of approximately 4 x 10(10) pillars cm(-2) on the substrate, similar to the density of Co nanoparticles distributed before the ion etching process. The uniform spatial distribution of the Si nanopillars can also be patterned into desired positions. Our fabrication method is straightforward and requires mild process conditions, which can be extended to patterned 2-D arrays of various Si nanostructures.     

Fabrication of superhydrophobic surfaces by dislocation-selective chemical etching on aluminum, copper, and zinc substrates

A surface roughening method by simple chemical etching was developed for the fabrication of superhydrophobic surfaces on three polycrystalline metals, namely aluminum, copper, and zinc. The key to the etching technique was the use of a dislocation etchant that preferentially dissolves the dislocation sites in the grains. The etched metallic surfaces, when hydrophobized with fluoroalkylsilane, exhibited superhydrophobic properties with water contact angles of larger than 150 degrees, as well as roll-off angles of less than 10 degrees for 8-microL drops. Also, the dislocation etching concept introduced here may be helpful in the fabrication of superhydrophobic surfaces on other polycrystalline substrates.     

偶氮苯聚合物的光控图案化

将自组装得到的聚苯乙烯胶体晶体,利用反应离子刻蚀和软刻蚀法复形到偶氮苯聚合物膜表面,获得六方非紧密排列的偶氮苯聚合物半球状阵列微图案膜。采用场发射扫描电子显微镜(FESEM)、原子力显微镜(AFM)和接触角测量仪等对膜的微阵列结构和表面润湿性能进行了表征。研究了光照对膜微图案结构和润湿性能的影响。结果表明:基于偶氮苯基团的光致取向特性,偶氮苯聚合物膜的微图案在偏振光照射下,可由初始的半球状阵列微结构形变成纺锤状和椭球状等结构,这种微结构的改变可以改变膜表面润湿性,实现偶氮苯聚合物膜表面不同微图案和润湿性能的光照调控。     

Molding plateable micropatterns of electrically insulating and electrically conducting poly(methyl methacrylate)s by the LIGA technique

A new process of molding directly plateable molded plastic pieces has been developed for the mass fabrication of metal micropatterns of any shape by the LIGA-technique. In this process, electrically insulating micropatterns of poly(methyl methacrylate) are molded on the surface of an electrically conducting poly(methyl methacrylate) composite. The composite is made of a methyl methacrylate casting resin. In the development process, the polymerization of casting resins was studied for various fillers and initiators. In addition, poly(methyl methacrylate)s filled with silver were subjected to studies of the electrical, thermal, and mechanical behavior of the composites as a function of the filler content.     

Fabrication and characterization of stable ultrathin film micropatterns containing DNA and photosensitive polymer diazoresin

Stable, ultrathin DNA micropatterns were fabricated from photosensitive polymer diazoresin (DR) through a self-assembly technique. The micropatterns were achieved on LBL ultrathin film after UV exposure through a photomask. The patterns were characterized systematically with scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and fluorescence microscopy. All of the results indicate that the combined LBL self-assembly and photolithography technique is a promising method for constructing stable, well-defined micropatterns with a nanoscale thickness.     

Modulation of Foreign Body Reaction against PDMS Implant by Grafting Topographically Different Poly(acrylic acid) Micropatterns

The surface of poly(dimethylsiloxane) (PDMS) is grafted with poly(acrylic acid) (PAA) layers via surface‐initiated photopolymerization to suppress the capsular contracture resulting from a foreign body reaction. Owing to the nature of photo‐induced polymerization, various PAA micropatterns can be fabricated using photolithography. Hole and stripe micropatterns ≈100‐µm wide and 3‐µm thick are grafted onto the PDMS surface without delamination. The incorporation of PAA micropatterns provides not only chemical cues by hydrophilic PAA microdomains but also topographical cues by hole or stripe micropatterns. In vitro studies reveal that a PAA‐grafted PDMS surface has a lower proliferation of both macrophages (Raw 264.7) and fibroblasts (NIH 3T3) regardless of the pattern presence. However, PDMS with PAA micropatterns, especially stripe micropatterns, minimizes the aggregation of fibroblasts and their subsequent differentiation into myofibroblasts. An in vivo study also shows that PDMS samples with stripe micropatterns polarized macrophages into anti‐inflammatory M2 macrophages and most effectively inhibits capsular contracture, which is demonstrated by investigation of inflammation score, transforming‐growth‐factor‐β expression, number of macrophages, and myofibroblasts as well as the collagen density and capsule thickness.     

Protein micropatterning on bifunctional organic-inorganic sol-gel hybrid materials

Active protein micropatterns and microarrays made by selective localization are popular candidates for medical diagnostics, such as biosensors, bioMEMS, and basic protein studies. In this paper, we present a simple fabrication process of thick (approximately 20 microm) protein micropatterning using capillary force lithography with bifunctional sol-gel hybrid materials. Because bifunctional sol-gel hybrid material can have both an amine function for linking with protein and a methacryl function for photocuring, proteins such as streptavidin can be immobilized directly on thick bifunctional sol-gel hybrid micropatterns. Another advantage of the bifunctional sol-gel hybrid materials is the high selective stability of the amine group on bifunctional sol-gel hybrid patterns. Because amine function is regularly contained in each siloxane oligomers, immobilizing sites for streptavidin are widely distributed on the surface of thick hybrid micropatterns. The micropatterning processes of active proteins using efficient bifunctional sol-gel hybrid materials will be useful for the development of future bioengineered systems because they can save several processing steps and reduce costs.     

Eccentricity effect of micropatterned surface on contact angle

This article experimentally shows that the wetting property of a micropatterned surface is a function of the center-to-center offset distance between successive pillars in a column, referred to here as eccentricity. Studies were conducted on square micropatterns which were fabricated on a silicon wafer with pillar eccentricity ranging from 0 to 6 μm for two different pillar diameters and spacing. Measurement results of the static as well as the dynamic contact angles on these surfaces revealed that the contact angle decreases with increasing eccentricity and increasing relative spacing between the pillars. Furthermore, quantification of the contact angle hysteresis (CAH) shows that, for the case of lower pillar spacing, CAH could increase up to 41%, whereas for the case of higher pillar spacing, this increment was up to 35%, both corresponding to the maximum eccentricity of 6 μm. In general, the maximum obtainable hydrophobicity corresponds to micropillars with zero eccentricity. As the pillar relative spacing decreases, the effect of eccentricity on hydrophobicity becomes more pronounced. The dependence of the wettability conditions of the micropatterned surface on the pillar eccentricity is attributed to the contact line deformation resulting from the changed orientation of the pillars. This finding provides additional insights in design and fabrication of efficient micropatterned surfaces with controlled wetting properties.     

Extremely superhydrophobic surfaces with micro- and nanostructures fabricated by copper catalytic etching

We demonstrate a simple method for the fabrication of rough silicon surfaces with micro- and nanostructures, which exhibited superhydrophobic behaviors. Hierarchically rough silicon surfaces were prepared by copper (Cu)-assisted chemical etching process where Cu nanoparticles having particle size of 10-30 nm were deposited on silicon surface, depending on the period of time of electroless Cu plating. Surface roughness was controlled by both the size of Cu nanoparticles and etching conditions. As-synthesized rough silicon surfaces showed water contact angles ranging from 93° to 149°. Moreover, the hierarchically rough silicon surfaces were chemically modified by spin-coating of a thin layer of Teflon precursor with low surface energy. And thus it exhibited nonsticky and enhanced hydrophobic properties with extremely high contact angle of nearly 180°.     

玻璃微流控芯片廉价快速制作方法的研究

研究了一种玻璃微流控芯片的快速、低成本制作工艺和方法. 该方法采用商品化的显微载玻片(soda-lime玻璃)作为芯片基质材料, 利用AZ 4620光刻胶代替传统工艺中的溅射金属层或多晶硅/氮化硅层作为玻璃刻蚀的掩膜层, 同时利用一种紫外光学胶键合方法代替传统熔融键合方法实现芯片的键合, 整个工艺对玻璃基质材料要求低, 普通微流控芯片(深度小于50 μm)制作流程仅需约3.5 h, 可降低制作成本, 缩短制作周期. 还系统地研究了光刻胶厚度、光刻胶硬烘时间和玻璃腐蚀液配比对玻璃微流控芯片制作的影响, 获得了优化的工艺参数.     

羧基负离子型聚电解质与重氮树脂的自组装及自组装膜的光和热反应

带相反电荷的聚电解质的自组装,由于方法简单,对环境无污染,近年来备受重视［１～８］。以重氮树脂为聚正离子的聚电解质复合物,由于光照时重氮基分解,致使复合物的离子键转为共价键,溶解性发生重大改变,从而以重氮树脂为聚正离子的聚电解质复合物是一种新的光成像体系［９,１０］。张希等用重氮树脂与聚苯乙烯磺酸钠成功地制备了对极性溶剂稳定的自组装超薄膜［１１］。本文用羧基负离子聚电解质与重氮树脂进行自组装,并研究该自组装膜的光,热反应。羧基负离子聚电解质与重氮树脂的自组装超薄膜,文献上报道较少。１　聚丙烯酸钠…     

Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding

We have characterized glass-glass and glass-Si bonding processes for the fabrication of wide, shallow nanofluidic channels with depths down to the nanometer scale. Nanochannels on glass or Si substrate are formed by reactive ion etching or a wet etching process, and are sealed with another flat substrate either by glass-glass fusion bonding (550 degrees C) or an anodic bonding process. We demonstrate that glass-glass nanofluidic channels as shallow as 25 nm with low aspect ratio of 0.0005 (depth to width) can be achieved with the developed glass-glass bonding technique. We also find that silicon-glass nanofluidic channels, as shallow as 20 nm with aspect ratio of 0.004, can be reliably obtained with the anodic bonding technique. The thickness uniformity of sealed nanofluidic channels is confirmed by cross-sectional SEM analysis after bonding. It is shown that there is no significant change in the depth of the nanofluidic channels due to anodic bonding and glass-glass fusion bonding processes.     

Fabrication of highly porous and micropatterned SnO2 films by oxygen bubbles generated on the anode electrode

The fabrication process of highly porous SnO(2) thick film by reaction between tin ions and oxygen gas generated by an anodic applied potential on substrates in SnCl(2) aqueous solution is reported; moreover, we succeeded in forming porous SnO(2) micropatterns through site-selective deposition on a Pt-patterned F-doped SnO(2)(FTO) coated substrate .     

微模塑法制备PMMA/SiO2二氧化硅杂化材料微结构

PMMA/ SiO2 organic-inorganic hybrid sol was synthesized by monomer methyl methacrylate,3-（triethoxysilyl）propylmethacrylate（mol ration is 1: 1）,0.2%（total weight of monomers）initiator azodiisobutyronitrile,solvent tetrahydrofuran and 20%（total weight of the system）tetraethylorthosilicate. PDMS stamp with micropatterns was placed on the hybrid sol film prepared by spin-coating on the clean glass slides. Heat treatment under 120℃ for 2 h with a weak pressure of 1 N makes the sol convert to gel. PMMA/SiO2 hybrid material micropatterns remain on the substrate after being peeled off the stamp. Optical microscope images show stringent pattern fidelity using the micromolding method which also indicates the further application in the micropatterns fabrication.     

Simple and rapid methods for the fabrication of polymeric and glass chips for using in analytical chemistry

This paper describes simple and rapid methods for the fabrication of glass and polymeric chips for routine analytical applications. The methods are easily interfaced to the general laboratory environment and do not require special clean room facilities or expensive instruments. Glass microchips were fabricated by etching with HF solution. Microfluidic channels were designed with CAD program and transferred onto a sheet of commercial polymeric self-adhesive (PSA) film by a cutter plotter. The PSA film was used as a mask for etching process. The etching rate was about 7 μm min⁻¹. A cover glass plate was sealed on the top of etched substrate by using polycellulose (cellophane). Polymeric microchips were fabricated by sawing with a jigsaw. Commercial polycarbonate (PC) was used as a substrate and two iron sheets were used as leader masks. While this restricts us to the fabrication of straight channels, it is however, much faster and less complicated than the other methods. The chip comprised three polymeric plates and the channels were created in the middle plate. Thermal bonding was used to bond three layers of the microfluidic chip. With this method, we could achieve simple channels with the width of about 200 μm. The channel depth depends on the polymeric plate thickness. Fabricated channels were accurate without any sinuosity or sideshow.