Single-mode low threshold current multi-hole vertical-cavity surface-emitting lasers

A multi-hole vertical-cavity surface-emitting laser(VCSEL) operating in stable single mode with a low threshold current was produced by introducing multi-leaf scallop holes on the top distributed Bragg-reflector of an oxidationconfined 850 nm VCSEL.The single-mode output power of 2.6 mW,threshold current of 0.6 mA,full width of half maximum lasing spectrum of less than 0.1 nm,side mode suppression ratio of 28.4 dB,and far-field divergence angle of about 10 are obtained.The effects of different hole depths on the optical characteristics are simulated and analysed,including far-field divergence,spectrum and lateral cavity mode.The single-mode performance of this multi-hole device is attributed to the large radiation loss from the inter-hole spacing and the scattering loss at the bottom of the holes,particularly for higher order modes.     

电流孔的尺寸对双氧化限制垂直腔面发射激光器阈值的影响

通过双氧化限制垂直腔面发射激光器中电场、载流子密度、光场和热场空间耦合方程自洽数值求解,研究了垂直腔面发射激光器中阈值特性.得到了氧化层及有源区附近的电势,模拟电流孔的边缘效应,给出了不同双氧化限制电流孔半径下阈值电流密度、载流子密度、基模光场和热场的空间分布.发现了实现最小阈值电流的最佳限制电流孔半径,进而设计了双氧化限制垂直腔面发射激光器的结构. 关键词： 双氧化限制垂直腔面发射激光器 自洽 阈值     

光子晶体垂直腔面发射850nm波长激光器研究

文章报道了国内首次研制成功的光子晶体垂直腔面发射850nm波长激光器，实现了连续电注入激射．发现器件能否激射直接依赖于光子晶体结构参数，而激光器的阈值、输出功率、输出模式等与光子晶体的晶格常数、占空比、腔的大小等因素有关．     

Research of the use of silver nanowires as a current spreading layer on vertical-cavity surface-emitting lasers

Silver nanowire(AgNW) film was proposed to apply on the surface of the vertical-cavity surface-emitting lasers(VCSELs) with large aperture in order to obtain a uniform current distribution in the active region and a better optical beam quality.Optimization of the AgNW film was carried out with the sheet resistance of 28.4 Ω/sq and the optical transmission of 94.8% at 850 nm.The performance of VCSELs with and without AgNW film was studied.When the AgNW film was applied to the surface of VCSELs,due to its better current spreading effect,the maximum output optical power increased from 23.4 mW to 24.4 mW,the lasing wavelength redshift decreased from 0.085 nm/mA to 0.077 nm/mA,the differential resistance decreased from 23.95 Ω to 21.13 Ω,and the far field pattern at 50 mA decreased from 21.6° to 19.2°.At the same time,the near field test results showed that the light in the aperture was more uniform,and the far field exhibited a better single peak characteristic.Various results showed that VCSELs with AgNW on the surface showed better beam quality.     

增益导波垂直腔激光器注入电流空间分布及其对激光近场模式影响的理论分析和表征

依据导电介质的稳态电场理论建立了一种对增益导波型垂直腔半导体激光器注入电流矢量分析的三维解析模型. 计算研究了电流密度空间分布及其与顶面电注入环参量之间的相互关联性. 结果显示在两极之间存在一个载流子径向分布中心极大的区域. 由于激光功率与注入电流之间存在线性关系,因此,要使器件能够获得基模或中心均匀的光强输出以及尽可能低的阈值,应使激光有源层与载流子均匀分布的临界层重合. 计算结果对顶发射与底发射结构以及不同环参数下的载流子分布情况及对近场模式形成的影响进行了分析和讨论. 关键词： 垂直谐振腔激光器 注入电流 激光模式     

Graded index profiles and loss-induced single-mode characteristics in vertical-cavity surface-emitting lasers with petal-shape holey structure

The 850-nm oxide-confined vertical-cavity surface-emitting lasers with petal-shape holey structures are presented.An area-weighted average refractive index model is given to analyse their effective index profiles,and the graded index distribution in the holey region is demonstrated.The index step between the optical aperture and the holey region is obtained which is related merely to the etching depth.Four types of holey vertical-cavity surface-emitting lasers with different parameters are fabricated as well as the conventional oxide-confined vertical-cavity surface-emitting laser.Compared with the conventional oxide-confined vertical-cavity surface-emitting laser without etched holes,the holey vertical-cavity surface-emitting laser possesses an improved beam quality due to its graded index distribution,but has a lower output power,higher threshold current and lower slope efficiency.With the hole number increased,the holey vertical-cavity surface-emitting laser can realize the single-mode operation throughout the entire current range,and reduces the beam divergence further.The loss mechanism is used to explain the single-mode characteristic,and the reduced beam divergence is attributed to the shallow etching.High coupling efficiency of 86% to a multi-mode fibre is achieved for the single-mode device in the experiment.     

Micromechanical tunable vertical-cavity surface-emitting lasers

We report the study on a short wavelength-tunable vertical-cavity surface-emitting laser utilizing a monolithically integrated bridge tuning microelectromechanical system. A deformable-bridge top mirror suspended above an active region is utilized. Applied bridge-substrate bias produces an electrostatic force which reduces the spacing of air-gap and tunes the resonant wavelength toward a shorter wavelength (blue-shift). Good laser characteristics are obtained: such as continuous tuning ranges over 11 nm near 940 nm for 0--9 V tuning bias, the peak output power near 1 mW and the full-width-half-maximum limited to approximately 3.2--6.8 nm. A detailed simulation of the micromechanical and optical characteristics of these devices is performed, and the ratio of bridge displacement to wavelength shift has been found to be 3:1.     

1.3μm GaAs基量子点垂直腔面发射激光器结构设计与分析

结合垂直腔面发射激光器（VCSEL）原理以及量子点增益特点，计算了不同结构VCSEL的腔内损耗和量子点的模式增益.分析了激光器阈值特性以及氧化限制层对光损耗的影响.设计了含 氧化限制层的13μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 增益     

长波长垂直腔面发射激光器研究

垂直腔面发射激光器（简称VCSEL）近年来受到了国内外科技界和企业界的高度关注，它在光通信领域具有潜在的应用．文章主要介绍了长波长垂直腔面发射激光器的发展历史、基本应用、器件结构、材料和制备工艺，最后分析了研制长波长VCSEL所遇到的问题及相应解决方法，并进行了展望．     

长波长垂直腔面发射激光器研究

垂直腔面发射激光器（简称VCSEL）近年来受到了国内外科技界和企业界的高度关注,它在光通信领域具有潜在的应用.文章主要介绍了长波长垂直腔面发射激光器的发展历史、基本应用、器件结构、材料和制备工艺,最后分析了研制长波长VCSEL所遇到的问题及相应解决方法,并进行了展望.     

Polarization switching and synchronization of mutually coupled vertical-cavity surface-emitting semiconductor lasers

Polarization switching (PS) dynamics and synchronization performances of two mutually coupled vertical-cavity surface-emitting lasers (VCSELs) are studied theoretically in this paper. A group of dimensionless rate equations is derived to describe our model. While analysing the PS characteristics, we focus on the effects of coupling rate and frequency detuning regarding different mutual injection types. The results indicate that the x-mode injection defers the occurrence of PS, while the y-mode injection leads the PS to occur at a lower current. Strong enough polarization-selective injection can suppress the PS. Moreover, if frequency detuning is considered, the effects of polarization-selective mutual injection will be weakened. To evaluate the synchronization performance, the correlation coefficients and output dynamics of VCSELs with both pure mode and mixed mode polarizations are given. It is found that performance of complete synchronization is sensitive to the frequency mismatch but it is little affected by mixed mode polarizations, which is opposite to the case of injection-locking synchronization.     

采用BCB平整技术的高速850 nm垂直面发射激光器

垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯（BCB）平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7 μm氧化孔径下3 dB小信号调制带宽可达15.2 GHz。     

Power dissipation in oxide-confined 980-nm vertical-cavity surface-emitting lasers

We presented 980-nm oxide-confined vertical-cavity surface-emitting lasers (VCSELs) with a 16-μm oxide aperture. Optical power, voltage, and emission wavelength are measured in an ambient temperature range of 5℃ C-80℃. Measurements combined with an empirical model are used to analyse the power dissipation in the device and the physical mechanism contributing to the thermal rollover phenomenon in VCSEL. It is found that the carrier leakage induced selfheating in the active region and the Joule heating caused by the series resistance are the main sources of power dissipation. In addition, carrier leakage induced selfheating increases as the injection current increases, resulting in a rapid decrease of the internal quantum efficiency, which is a dominant contribution to the thermal rollover of the VCSEL at a larger current. Our study provides useful guidelines to design a 980-nm oxide-confined VCSEL for thermal performance enhancement.     

n型DBR中电势对垂直腔面发射激光器阈值的影响

编制了增益波导垂直腔面发射激光器直接耦合准三维仿真软件，给出了电势、 载流子浓度、光场和热场分布.计算结果表明，只有同时考虑p型和n型分布布拉格反射镜中的电势，才能准确地反映垂直腔面发射激光器的阈值特性. 关键词： 垂直腔面发射激光器 p型DBR层 n型DBR层 有限差分法     

时变电流注入下光电负反馈垂直腔表面发射激光器的偏振双稳特性

基于光电负反馈垂直腔表面发射激光器(VCSELs)的理论模型,数值研究了时变电流注入下反馈率大小和注入电流扫描周期对VCSELs偏振双稳特性的影响.研究结果表明:增大反馈率将使双稳区域向更大电流方向移动,同时双稳区宽度增加;增大注入电流扫描周期将使双稳区宽度减小.因此,通过调整光电负反馈的大小以及注入电流的扫描周期,可实现对VCSELs偏振双稳特性的控制.     

1.3μm量子点垂直腔面发射激光器高频响应的优化设计

结合垂直腔面发射激光器(VCSEL)原理以及量子点增益特点，计算了有源层p掺杂结构的量子点VCSEL的材料增益和3 dB带宽，发现p掺杂结构可以大大提高频率特性.结合VCSEL激射条件和阈值特性，分析了对VCSEL结构的要求；分析了分布参数对频率特性的影响，对其外部封装提出了要求.设计了高频率响应的含氧化限制层的1.3 μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 微分增益 3 dB带宽     

光反馈诱发长波长垂直腔面发射激光器低功耗偏振开关

基于扩展的自旋反转模型,对光反馈诱发下长波长垂直腔面发射激光器中的低功耗偏振开关进行了理论研究.研究表明:长波长垂直腔面发射激光器在自由运行下未能获得的偏振开关现象,可以通过引入中等强度的偏振旋转光反馈来实现.对比强弱两种不同的线性色散效应,发现了一些有趣的现象:弱线性色散条件下更易于在低注入电流下获得偏振开关,并且产生偏振开关所需的反馈强度具有更大的调控范围;强色散效应中未能始终获得偏振开关,会出现两模共存区,并且偏振开关出现的注入电流值较高.同时,观察到的偏振模跳变和多偏振开关现象类似于短波长垂直腔面发射激光器,因而证实这两类激光器在偏振开关的本质规律上是相似的.此外,还对长波长垂直腔面发射激光器不易在低注入电流下获得偏振开关的原因进行了分析,并给出了合理的解释.     

Light polarization fingerprints on nonlinear dynamics of vertical-cavity surface-emitting lasers

In this paper we summarize the recent results on nonlinear dynamics of vertical-cavity surface-emitting lasers (VCSELs) which are bearing the fingerprints of the particular polarization properties of VCSELs. Due to the surface emission and cylindrical symmetry, VCSELs lack strong polarization anisotropy and may undergo polarization switching and polarization mode-hopping. This provides new specificities to the rich nonlinear dynamics induced in VCSELs by an external perturbation. We unveil both experimentally and theoretically these new specificities for the case of optical feedback, optical injection, and unidirectional synchronization between VCSELs.     

808nm大孔径垂直腔面发射激光器研究

垂直腔面发射激光器(VCSEL)中的载流子聚集效应使注入到有源区的工作电流只是通过边缘环形区域很窄的通道,激光功率密度分布不均匀;尤其当器件尺寸较大时,激射光斑呈现环状,环中间光强很弱.这是研制电抽运高功率大尺寸VCSEL尤为突出的技术难题.采用新型结构成功研制出808 nm波段高功率大孔径VCSEL,在注入电流为1A时,室温下连续输出功率达0.3 W. 关键词： 半导体激光器 垂直腔面发射激光器 高功率 大孔径     

各向异性光反馈注入的垂直表面发射激光器的矢量偏振模转换机理

数值研究了各向异性光反馈注入的垂直表面发射激光器(VCSEL)的矢量偏振模转换机理,研究结果表明,首先,当注入电流接近阈值电流时,由VCSEL的外部参数和偏振器控制的光反馈注入量中各偏振模的能量决定VCSEL 输出的偏振态.其次,由偏振器控制的各向异性光反馈注入引起的VCSEL输出偏振态呈周期性变化.另外,当由偏振器控制的反馈注入量中的x^偏振和y^偏振模能量相当时, x^偏振模和y^偏振模之间竞争激烈,而激光器外部微小的扰动都会打破这两种偏振模竞争 关键词： 各向异性光反馈 垂直表面发射激光器 矢量偏振模