Fourier treatment to the diffractive optical element composed of Fresnel zone and pinholes

Currently, the minimum feature size fabricated is about 15-40 nm. The resolution of Fresnel zone plates is limited by the width of the outermost zone. Although the photon sieves make it possible to focus soft X-rays to spot sizes smaller than the diameter of the smallest pinhole they have low diffraction efficiency. In order to foster strengths and circumvent weaknesses of them, we propose a new model which is composed of Fresnel zone and pinholes and give its fast Fourier algorithm. The simulation results demonstrate that the resolution of photon sieves is not better than that of Fresnel zone plates in low order of local rings. In this case, we can substitute pinholes for Fresnel zone in photon sieves. Resolution is nearly a constant, and also the diffraction efficiency improves.     

硬X射线光子筛波导效应研究

基于快速傅里叶变换光束传播法,研究了硬X射线光子筛中高高宽比金属结构的波导效应,确定了硬X射线光子筛的物理边界条件,采用角谱法计算了硬X射线光子筛的点扩展函数,并分析了吸收体厚度对聚焦性能的影响.研究结果表明波导效应一定程度上有利于抑制光子筛高级衍射的产生,提高聚焦性能.在同样的特征尺寸下,硬X射线光子筛的空间分辨率优于菲涅尔波带片,其缺点是衍射效率的下降.吸收体厚度的提高有利于提高光子筛的聚焦性能和衍射效率,但是相应的纳米加工工艺难度会增加. 关键词： 菲涅尔波带片 硬X射线光子筛 光束传播法 角谱法     

Phase zone photon sieve

A novel diffractive optical element, named phase zone photon sieve (PZPS), is presented. There are three kinds of phase plates in PZPSs: PZPS1, PZPS2, and PZPS3. Each of the PZPSs has its own structure and is made on quartz substrate by etching. The three PZPSs have stronger diffraction peak intensity than a photon sieve (PS) when the margin pinhole and zone line width are kept the same. The PZPS3 can produce a smaller central diffractive spot than the ordinary PS with the same number of zones on the Fresnel zone plate. We have given the design method for and the simulation of PZPS and PS. PZPS has potential applications in optical maskless lithography.     

A super-resolution Fresnel zone plate and photon sieve

Realizing a smaller or sharper diffractive center spot is a valuable research aim in soft X-ray focus and other related research applications. Fresnel zone plates (FZP) and photon sieves (PS) are often used to focus the X-rays or other wavelength light at present. Here, we show that combination of a super-resolution phase mask (SPM) and an FZP (or PS) as one diffractive optical element can realize a smaller or sharper diffractive center spot without significantly increasing the fabrication difficulty. All these diffractive phase elements can be applied to beam shaping, mask-less lithography, energy congregation in high power lasers, soft X-rays focus, and any other field that requires a smaller or sharper diffractive center spot.     

大数值孔径光子筛偏振特性研究

根据角谱理论建立不同偏振照明条件下的光子筛矢量衍射模型。在此基础上,对入射光分别为线偏振光、径向偏振光、切向偏振光三种特殊偏振状态下的光子筛聚焦光强分布进行了模拟分析。研究结果表明,对于大数值孔径光子筛,入射光的偏振特性将对光子筛聚焦光强分布产生巨大影响。线偏振光将使聚焦光斑沿偏振方向拉伸,切向偏振光产生的聚焦光斑具有"中空"结构,而径向偏振光所产生的聚焦光斑呈较为规则的圆形,且其焦深优于线偏照明情况。在激光直写及高分辨成像等光子筛典型应用中采用径向偏振照明将进一步提高系统分辨力。     

X射线相衬成像光子筛

基于 Zernike相衬成像原理和光瞳切趾原理,提出一种将相位板和切趾光子筛集成为一个相衬显微物镜的 X射线相衬成像光子筛的设计方法.这种 X射线相衬成像物镜可以实现生物体组织或者其他弱吸收材料的高分辨率和高衬度成像.通过优化光子筛透镜的衍射结构,可以抑制成像系统的点扩展函数的旁瓣和消除高阶衍射焦点,从而提高成像分辨率;另外,将光子筛透镜和变相板合为一体,克服了成像透镜和变相板难以对准的缺陷.以高斯切趾光子筛为例,实验验证了设计方法的可行性. 关键词： X射线显微技术 相衬成像 光瞳切趾 光子筛     

Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors

We have constructed an extremely precise optical system for hard-x-ray nanofocusing in a synchrotron radiation beamline. Precision multilayer mirrors were fabricated, tested, and employed as Kirkpatrick-Baez mirrors with a novel phase error compensator. In the phase compensator, an at-wavelength wavefront error sensing method based on x-ray interferometry and an in situ phase compensator mirror, which adaptively deforms with nanometer precision, were developed to satisfy the Rayleigh criterion to achieve diffraction-limited focusing in a single-nanometer range. The performance of the optics was tested at BL29XUL of SPring-8 and was confirmed to realize a spot size of approximately 7 nm.     

卢卡斯光子筛的聚焦特性研究

介绍了一种基于卢卡斯数编码设计的轴上四焦点光子筛,其各焦距分布与黄金分割比密切相关.实验上利用相移数字全息验证了设计器件具有轴上四焦点聚焦特性,测量结果表明:轴向焦距和横向焦斑光强分布与理论设计值一致.该振幅型光子筛具有体积小、重量轻、易加工等优点,可应用于X波段显微和生物细胞阵列成像等领域.     

Toward two-dimensional nanometer resolution hard X-ray differential-interference-contrast imaging using modified photon sieves

In this Letter, we report a significant step forward in the design of single-optical-element optics for two-dimensional (2D) hard X-ray differential-interference-contrast (DIC) imaging based on modified photon sieves (MPSs). MPSs were obtained by a modified optic, i.e., combining two overlaid binary gratings and a photon sieve through two logical XOR operations. The superior performance of MPSs was demonstrated. Compared to Fresnel zone plates-based DIC diffractive optical elements (DOEs), which help to improve contrast only in one direction, MPSs can provide better resolution and 2D DIC imaging. Compared to normal photon sieves, MPSs are capable of imaging at a significantly higher image contrast. We anticipate that MPSs can provide a complementary and versatile high-resolution nondestructive imaging tool for ultra-large-scale integrated circuits at 45 nm node and below.     

软X射线直线单色仪光场分布实验研究

合肥国家同步辐射光源软X射线直线单色仪配备三种不同参数的波带片和针孔光阑,通过调节波带片和针孔光阑间的距离可输出1.97—5.44nm波段的软X射线.利用高分辨正性光刻胶,记录了CZP₃₂和30μm针孔光阑组合下的准确聚焦和大离焦量时的软X射线衍射图,即直线单色仪输出的光场分布.获得了有关爱里斑及空间相干半径等实验数据,所得结果与理论计算相一致. 关键词：     

Zernike apodized photon sieves for high-resolution phase-contrast x-ray microscopy

We present a type of diffractive lens, Zernike apodized photon sieves (ZAPS), used as the objective for high spatial resolution and high phase-contrast imaging of weakly absorbing materials in x rays. The structure of ZAPS is based on the combination of two concepts: apodized photon sieves and Zernike phase contrast. The ZAPS is a single optic that integrates the appropriate ±π/2 rad phase shift through selective zone placement shifts in an apodized photon sieve. Analysis of the focusing properties of the apodized photon sieve in terms of point-spread function show that the sidelobes have been significantly suppressed at the expense of slightly widening the width of the main lobe. In combination with synchrotron light sources, ZAPS offers new opportunities for high-resolution phase-contrast x-ray microscopy in the physical and life sciences.     

Single order soft X-ray diffraction with quasi-random radius pinhole array spectroscopic photon sieves

A novel single order diffraction grating in the soft X-ray region, called quasi-random radius pinhole array spectro- scopic photon sieves （QRSPS）, is proposed in this paper. This new grating is composed of pinholes on a substrate, whose radii are quasi-random, while their centers are regular. Analysis proves that its transmittance function across the grating bar is similar to that of sinusoidal transmission gratings. Simulation results show that the QRSPS can suppress higher-order diffraction effectively. And the QRSPS would still retain its characteristic of single order diffraction when we take the effect of X-ray penetration into account. These properties indicate that the QRSPS can be used in the soft X-ray spectra measurement.     

Spatiotemporal stability of a femtosecond hard-x-ray undulator source studied by control of coherent optical phonons

We report on the temporal and spatial stability of the first tunable femtosecond undulator hard-x-ray source for ultrafast diffraction and absorption experiments. The 2.5-1 Angstrom output radiation is driven by an initial 50 fs laser pulse employing the laser-electron slicing technique. By using x-ray diffraction to probe laser-induced coherent optical phonons in bulk bismuth, we estimate an x-ray pulse duration of 140+/-30 fs FWHM with timing drifts below 30 fs rms measured over 5 days. Optical control of coherent lattice motion is demonstrated.     

基于角谱法的振幅型光子筛的设计和分析

对光子筛的聚焦成像原理作了分析,并用平面波角谱方法对光子筛聚焦成像进行了数值模拟.模拟结果表明,光子筛聚焦具有提高分辨率和抑制高级衍射的优点.在理论分析和计算机模拟的基础上,设计并制作了Fresnel波带片、未平滑处理和平滑处理后的光子筛.用波长为532 nm激光光源对波带片和光子筛聚焦光斑进行检测.结果表明,光波通过光子筛聚焦后的光斑比波带片的光斑更细,成像对比度更高.     

Design and performance of an X‐ray scanning microscope at the Hard X‐ray Nanoprobe beamline of NSLS‐II

A hard X‐ray scanning microscope installed at the Hard X‐ray Nanoprobe beamline of the National Synchrotron Light Source II has been designed, constructed and commissioned. The microscope relies on a compact, high stiffness, low heat dissipation approach and utilizes two types of nanofocusing optics. It is capable of imaging with ～15 nm × 15 nm spatial resolution using multilayer Laue lenses and 25 nm × 26 nm resolution using zone plates. Fluorescence, diffraction, absorption, differential phase contrast, ptychography and tomography are available as experimental techniques. The microscope is also equipped with a temperature regulation system which allows the temperature of a sample to be varied in the range between 90 K and 1000 K. The constructed instrument is open for general users and offers its capabilities to the material science, battery research and bioscience communities.     

A scanning transmission X‐ray microscope at the Pohang Light Source

A scanning transmission X‐ray microscope is operational at the 10A beamline at the Pohang Light Source. The 10A beamline provides soft X‐rays in the photon energy range 100–2000 eV using an elliptically polarized undulator. The practically usable photon energy range of the scanning transmission X‐ray microscopy (STXM) setup is from ～150 to ～1600 eV. With a zone plate of 25 nm outermost zone width, the diffraction‐limited space resolution, ～30 nm, is achieved in the photon energy range up to ～850 eV. In transmission mode for thin samples, STXM provides the element, chemical state and magnetic moment specific distributions, based on absorption spectroscopy. A soft X‐ray fluorescence measurement setup has been implemented in order to provide the elemental distribution of thicker samples as well as chemical state information with a space resolution of ～50 nm. A ptychography setup has been implemented in order to improve the space resolution down to 10 nm. Hardware setups and application activities of the STXM are presented.     

Lacunar fractal photon sieves

We present a new family of diffractive lenses whose structure is based on the combination of two concepts: photon sieve and fractal zone plates with variable lacunarity. The focusing properties of different members of this family are examined. It is shown that the sieves provide a smoothing effect on the higher order foci of a conventional lacunar fractal zone plate. However, the characteristic self-similar axial response of the fractal zone plates is always preserved.     

Manipulation of Spontaneous Emission Dynamics of Organic Dyes in the Porous Silicon Matrix

The control of the spontaneous emission (SE) rate of dye molecules (4-dicyanomethylene-2-methyl-6-p-dimethylaminostyryl-4H-pyran (DCM) and Coumarin 523 (C523)) embedded in the Porous Silicon (PS) matrix has been studied using picosecond resolved fluorescence decay and polarization studies. We have shown that the SE rates of the two organic dyes embedded in the PS matrix depend on the relative positions of the emission maxima of the dyes with respect to electronic band gap energy of the PS matrix. We have also explored that the electronic band gap of the host PS matrix can easily be tuned by partial oxidation of the PS and the nature of SE of the embedded dyes can be tuned accordingly. The demonstrated retardation or enhancement of the spontaneous photon emission may enable the application of fluorescent organic molecules in PS matrix in several quantum optical devices including the realization of single photon sources.     

Submicrometer hard X‐ray focusing using a single‐bounce ellipsoidal capillary combined with a Fresnel zone plate

A single‐bounce capillary with an ellipsoidal shape has been used for two‐step focusing in combination with a Fresnel zone plate (FZP). The FZP serves as a first microfocusing element and produces a demagnified micrometer image of the source, before the elliptical capillary makes a last final compression of the beam. With 15 keV X‐rays from the European Synchrotron Radiation Facility BM5 bending magnet, the two‐step demagnification system produced a focus of about 250 nm with a gain of more than 1000. The use of an ellipsoidal capillary as a micro‐mirror under off‐axis illumination using micro‐prefocusing optics might open up new opportunities in nanofocusing developments.     

Tapered dielectric structure in metal as a wavelength-selective surface plasmon polariton focuser

Symmetric tapered dielectric structures in metal have demonstrated applications such as the nanofocusing of surface plasmon polaritons, as well as the waveguiding of V-channel polaritons. Yet the fabrication of smooth-surfaced tapered structure remains an obstacle to most researchers. We have successfully developed a handy method to fabricate metal-sandwiched tapered nanostructures simply with electron beam lithography. Though these structures are slightly different from conventional symmetric V-shaped structures, systematic simulations show that similar functionality of surface plasmon polariton nanofocusing can still be achieved. When parameters are properly selected, wavelength-selective nanofocusing of surface plasmon polaritons can be obtained.