Mechanism of amorphous Ge2Sb2Te5 removal during chemical mechanical planarization in acidic H2O2 slurry

In this paper, chemical mechanical planarization (CMP) of amorphous Ge2Sb2Te5 (a-GST) in acidic H2O2 slurry is investigated. It was found that the removal rate of a-GST is strongly dependent on H2O2 concentration and gradually increases with the increase in H2O2 concentration, but the static etch rate first increases and then slowly decreases with the increase in H2O2 concentration. To understand the chemical reaction behavior of H2O2 on the a-GST surface, the potentiodynamic polarization curve, surface morphology and cross-section of a-GST immersed in acidic slurry are measured and the results reveal that a-GST exhibits a from active to passive behavior for from low to high concentration of H2O2 . Finally, a possible removal mechanism of a-GST in different concentrations of H2O2 in the acidic slurry is described.     

Effect of (H2O)n (n = 1–3) clusters on H2O2 + HO → HO2 + H2O reaction in tropospheric conditions: competition between one-step and stepwise routes

ABSTRACT

Effects of (H₂O)_n (n?=?1–3) on the H₂O₂?+?HO?→?HO₂?+?H₂O reaction have been investigated by the reactions of H₂O₂L(H₂O)_n (n?=?1–3)?+?HO and H₂O₂?+?HOL(H₂O)_n (n?=?1–3) at the CCSD(T)/CBS//M06-2X/aug-cc-pVTZ level of theory, coupled with rate constant calculations by using canonical variational transition state theory. Interestingly, for the former reactions, one-step process and stepwise mechanism are involved, where one-step processes occurring though cage-like hydrogen bonding network complexes and the transition states are favourable. Due to larger effective rate constants, these favourable processes are also favourable than the corresponding latter reactions. Meanwhile, the catalytic effect of (H₂O)_n (n?=?1–3) is mainly taken from water monomer, because the effective rate constant (k'(R_WM2)) of H₂O₂···H₂O?+?HO reaction is, respectively, larger by 3, 6–10 orders of magnitude than that of H₂O₂···(H₂O)₂?+?HO (k'(R_WD1)) and H₂O₂···(H₂O)₃?+?HO (k'(R_WT1)) reactions. Furthermore, the enhancement factor of water molecular (k'(R_WM2)/k_tot) is only 0.28% at 240?K, while at high temperature (such as at 425?K), the positive water vapour effect enhances up to 27.13%. This shows that at high temperatures the positive water effect is obvious under atmospheric conditions.     

Experimental and kinetic modeling study of C2H4 oxidation at high pressure

A detailed chemical kinetic model for oxidation of C₂H₄ in the intermediate temperature range and high pressure has been developed and validated experimentally. New ab initio calculations and RRKM analysis of the important C₂H₃ + O₂ reaction was used to obtain rate coefficients over a wide range of conditions (0.003-100 bar, 200-3000 K). The results indicate that at 60 bar and medium temperatures vinyl peroxide, rather than CH₂O and HCO, is the dominant product. The experiments, involving C₂H₄/O₂ mixtures diluted in N₂, were carried out in a high pressure flow reactor at 600-900 K and 60 bar, varying the reaction stoichiometry from very lean to fuel-rich conditions. Model predictions are generally satisfactory. The governing reaction mechanisms are outlined based on calculations with the kinetic model. Under the investigated conditions the oxidation pathways for C₂H₄ are more complex than those prevailing at higher temperatures and lower pressures. The major differences are the importance of the hydroxyethyl (CH₂CH₂OH) and 2-hydroperoxyethyl (CH₂CH₂OOH) radicals, formed from addition of OH and HO₂ to C₂H₄, and vinyl peroxide, formed from C₂H₃ + O₂. Hydroxyethyl is oxidized through the peroxide HOCH₂CH₂OO (lean conditions) or through ethenol (low O₂ concentration), while 2-hydroperoxyethyl is converted through oxirane.     

Preparation, characterization and dye adsorption properties of γ-Fe2O3/SiO2/chitosan composite

A γ-Fe₂O₃/SiO₂/chitosan composite was prepared by water-in-oil emulsification, and characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM). Effects of various factors, including adsorbent dosage, initial dye concentration, solution pH, and competing anions, on the adsorption of methyl orange from aqueous solutions by the resulting composite were studied by batch adsorption experiments. The adsorption kinetics was found to follow the pseudo-second-order kinetic model, and intraparticle diffusion was related to the adsorption, but not as a sole rate-controlling step. The equilibrium adsorption data were well described by the Freundlich isotherm model. Evaluation of the thermodynamic parameters ΔG°, ΔH°, and ΔS° revealed that the adsorption process was naturally feasible, spontaneous, and exothermic. The composite was proven to be efficient, suitable and promising for the removal of methyl orange from aqueous solutions since it has a relatively higher adsorption capacity than other low-cost adsorbents.     

Catalytic effect of water,water dimer,water trimer,HCOOH, H2SO4, CH3CH2COOH and HN(NO2)2 on the isomerisation of HN(NO2)2 to O2NNN(O)OH: a mechanism study

In this article, the isomerisation mechanisms of HN(NO₂)₂ to O₂NNN(O)OH without and with catalyst X (X = H₂O, (H₂O)₂, (H₂O)₃, HCOOH, H₂SO₄, CH₃CH₂COOH and HN(NO₂)₂) have been investigated theoretically at the CBS-QB3 level of theory. Our results show that the catalyst X (X = H₂O, (H₂O)₂, (H₂O)₃, HCOOH, H₂SO₄ and CH₃CH₂COOH) shows different positive catalytic effects on reducing the apparent activation energy of the isomerisation reaction processes. Such different catalytic effects are mainly related to the number of hydrogen bonds and the size of the ring structure in X (X = H₂O, (H₂O)₂ and (H₂O)₃)-assisted transition states, as well as different values of pK_a for H₂SO₄, HCOOH and CH₃CH₂COOH. Very interesting is also the fact that H₂SO₄-assisted reaction is the most favourable for the hydrogen transfer from HN(NO₂)₂ to O₂NNN(O)OH, due to the smallest pK_a (?3.0) value of H₂SO₄ than H₂O, HCOOH, H₂SO₄ and CH₃CH₂COOH, and also because of the largest ∠X???H???Y (the angle between the hydrogen bond donor and acceptor) involved in H₂SO₄-assisted transition state. Compared to the self-catalysis of the isomerisation mechanisms of HN(NO₂)₂ to O₂NNN(O)OH, the apparent activation energy of H₂SO₄-assisted channel also reduces by 9.6 kcal?mol^?1, indicating that H₂SO₄ can affect the isomerisation of HN(NO₂)₂ to O₂NNN(O)OH, most obvious among all the catalysts H₂O, (H₂O)₂, (H₂O)₃, HCOOH, H₂SO₄, CH₃CH₂COOH and HN(NO₂)₂.     

Oxidation of Activated Carbon in Liquid Phase. Study by FT-IR

Surface chemistry of a commercial activated carbon (AC) and of products oxidized in liquid phase using aqueous solutions of a series of oxidizing agents (H₂SO₄, HNO₃, HClO₄, H₂O₂, O₃, ClO₂, KlO₄ and KMnO₄) has been studied by FT-IR. Oxidation led to surface groups and structures which, and also the extend of formation, depended on the oxidizing agent and the pH and concentration of the solution used. Most oxidizing agents proved to be effective for the formation of surface C[dbnd]O groups. Variations in pH of solutions of H₂O₂, KlO₄ and KMnO₄ unequally affected the oxidation of AC. This was unfavourable with the increase in concentration of the solutions of HNO₃ and KMnO₄. The reverse was noted with KlO₄.     

Evolution of the interfacial phases in Al2O3–Kovar® joints brazed using a Ag–Cu–Ti-based alloy

Abstract

A systematic investigation of the brazing of Al₂O₃ to Kovar^® (Fe–29Ni–17Co wt.%) using the active braze alloy (ABA) Ag–35.25Cu–1.75Ti wt.% has been undertaken to study the chemical reactions at the interfaces of the joints. The extent to which silica-based secondary phases in the Al₂O₃ participate in the reactions at the ABA/Al₂O₃ interface has been clarified. Another aspect of this work has been to determine the influence of various brazing parameters, such as the peak temperature, T_p, and time at T_p, τ, on the resultant microstructure. As a consequence, the microstructural evolution of the joints as a function of T_p and τ is discussed in some detail. The formation of a Fe₂Ti layer on the Kovar^® and its growth, along with adjacent Ni₃Ti particles in the ABA, dominate the microstructural developments at the ABA/Kovar^® interface. The presence of Kovar^® next to the ABA does not change the intrinsic chemical reactions occurring at the ABA/Al₂O₃ interface. However, the extent of these reactions is limited if the purity of the Al₂O₃ is high, and so it is necessary to have some silica-rich secondary phase in the Al₂O₃ to facilitate the formation of a Ti₃Cu₃O layer on the Al₂O₃. Breakdown of the Ti₃Cu₃O layer, together with fracture of the Fe₂Ti layer and separation of this layer from the Kovar^®, has been avoided by brazing at temperatures close to the liquidus temperature of the ABA for short periods of time, e.g., for T_p between 820 and 830 °C and τ between 2 and 8 min.     

First-principle study on the structural and electronic properties of H2S and SO2 adsorption on Pd-doped MoS2 monolayer

The partial discharge in SF₆-insulated equipment produces characteristic decomposition products: SO₂ and H₂S. The characteristic decomposition products vastly speed up the process of discharge faults. Based on density functional theory (DFT) calculation, single layer Pd-doped MoS₂ (Pd-MoS₂) is adopted as the adsorbent to adsorb SO₂ and H₂S to ensure the operational stability of SF₆-insulated equipment. The adsorption energy, charge transfer and structure parameters of SF₆, H₂S, and SO₂ adsorption on the Pd-MoS₂ monolayer are analysed to find the most stable adsorption structure. The molecular orbital theory, total density of states and partial density of states are studied to analyse the adsorption mechanism. The results show that Pd-MoS₂ adsorbent possesses high catalytic activity and excellent adsorption performance to H₂S and SO₂ by strong chemical adsorption. This study is of great significance to ensure the operational stability of SF6-insulated equipment by removing these characteristic decomposition products.     

The study of transition on NiFe2O4 nanoparticles prepared by co-precipitation/calcination

In this study, the NiFe₂O₄ nanoparticles have been prepared by co-precipitation and calcination process. Using a vibrating sample magnetometer (VSM), transmission electron microscopy (TEM), X-ray diffraction (XRD), energy dispersive spectrometer of X-ray (EDX), and X-ray photoelectron spectroscopy (XPS), the samples obtained by co-precipitation and then by further calcination have been analyzed. The experimental results show that the precursor synthesized by co-precipitation is the composite of both amorphous FeOOH and Ni(OH)₂, but has no amorphous NiFe₂O₄. The results of both EDX and XPS revealed that the FeOOH species is wrapped up by Ni(OH)₂ species. In the calcination process, the amorphous composite is dehydrated and transformed gradually into crystalline NiFe₂O₄ nanoparticles, with the metal ions diffusing. The reaction is different from the one used to prepare other ferrite (e.g., CoFe₂O₄, MnFe₂O₄, Fe₃O₄, etc.) nanoparticles directly by co-precipitation. With increasing calcination temperature, the NiFe₂O₄ grains grow and the magnetization is enhanced.     

Flame structure studies of rich ethylene-oxygen-argon mixtures doped with CO2, or with NH3, or with H2O

Structures of several premixed ethylene-oxygen-argon rich flat flames burning at 50 mbar have been established by using molecular beam mass spectrometry in order to investigate the effect of CO₂, or NH₃, or H₂O addition on species concentration profiles. The aim of this study is to examine the eventual changes of profiles of detected hydrocarbon intermediates which could be considered as soot precursors (C₂H₂, C₄H₂, C₅H₄, C₅H₆, C₆H₂, C₆H₄, C₆H₆, C₇H₈, C₆H₆O, C₈H₆, C₈H₈, C₉H₈ and C₁₀H₈). The comparative study has been achieved on four flames with an equivalence ratio (f) of 2.50: one without any additive (F2.50), one with 15% of CO₂ replacing the same quantity of argon (F2.50C), one with 3.3% of NH₃ in partial replacement of argon (F2.50N) and one with 13% of H₂O in replacement of the same quantity of argon (F2.50H). The four flat flames have similar final flame temperatures (1800 K).CO₂, or NH₃, or H₂O addition to the fresh gas inlet causes a shift downstream of the flame front and thus flame inhibition. Endothermic processes CO₂ + H = CO + OH and H₂O + H = H₂ + OH are responsible of the reduction of the hydrocarbon intermediates in the CO₂ and H₂O added flames through the supplementary formation of hydroxyl radicals. It has been demonstrated that such processes begin to play at the end of the flame front and becomes more efficient in the burnt gases region.The replacement of some Ar by NH₃ is responsible only for a slight decrease of the maximum mole fraction of C₂H₂, but NH₃ becomes much more efficient for C₄H₂ and C₅ to C₁₀ species. Moreover, the efficiency of NH₃ as a reducing agent of C₅ to C₁₀ intermediates is larger than that of CO₂ and H₂O for equal quantities added.     

Ab initio study of the chemical states of water on Cr2O3(0 0 0 1): From the isolated molecule to saturation coverage

The reactivity of the (0 0 0 1)-Cr–Cr₂O₃ surface towards water was studied by means of periodic DFT + U. Several water coverages were studied, from 1.2H₂O/nm² to 14.1H₂O/nm², corresponding to ¼, 1, 2 and 3 water/Cr at the (0 0 0 1)-Cr₂O₃ surface, respectively. With increasing coverage, water gradually completes the coordination sphere of the surface Cr atoms from 3 (dry surface) to 4 (1.2 and 4.7H₂O/nm²), 5 (9.4H₂O/nm²) and 6 (14.1H₂O/nm²). For all studied coverages, water replaces an O atom from the missing above plane. At coverages 1.2 and 4.7H₂O/nm², the Cr–O_s (surface oxygen) acid–base character and bond directionality govern the water adsorption. The adsorption is molecular at the lowest coverage. At 4.7H₂O/nm², molecular and dissociative states are isoenergetic. The activation energy barrier between the two states being as low as 12 kJ/mol, allowing protons exchanges between the OH groups, as evidenced by ab inito molecular dynamics at room temperature. At coverages of 9.4 and 14.1H₂O/nm², 1D- (respectively, 2D-) water networks are formed. The resulting surface terminations are –Cr(OH)₂ and –Cr(OH)₃– like, respectively. The increased stability of those terminations as compared to the previous ones are due to the stabilization of the adsorbed phase through a H-bond network and to the increase in the Cr coordination number, stabilizing the Cr (t_2g) orbitals in the valence band. An atomistic thermodynamic approach allows us to specify the temperature and water pressure domains of prevalence for each surface termination. It is found that the –Cr(OH)₃-like, –Cr(OH)₂ and anhydrous surfaces may be stabilized depending on (T, P) conditions. Calculated energies of adsorption and OH frequencies are in good agreement with published experimental data and support the full hydroxylation model, where the Cr achieves a 6-fold coordination, at saturation.     

The nature of antimony-enriched surface layer of Fe-Sb mixed oxides

Antimony segregation is a common feature in Fe-Sb mixed oxides, which have been widely applied as catalysts in selective oxidation and ammoxidation reactions. This paper attempts to shed a light on the cause of such a common feature and on the nature of the antimony-enriched surface layer over FeSbO₄ by means of XPS surface analysis. Single-phase FeSbO₄ samples prepared by different methods were studied, and the antimony in their surface layer is a mixture of both Sb⁵⁺ and Sb³⁺ rather than single Sb⁵⁺. Their surface composition is close to FeSb₂O₆, which could be described as (FeSbO₄)(Sb₂O₄)_δ, δ = 0.5, and it is not “Fe(II)Sb(V)₂O₆” as suggested in literature. Fe-Sb mixed oxides with Sb/Fe > 1 (mol/mol) are mixtures of FeSbO₄ and Sb₂O₄, and the surface of FeSbO₄ grains would be a layer of (FeSbO₄)(Sb₂O₄)_δ, δ ≥ 0.5. Fe-Sb mixed oxides with Sb/Fe < 1 are mixtures of FeSbO₄ and Fe₂O₃, and the surface of FeSbO₄ grains would be a layer of (FeSbO₄)(Sb₂O₄)_δ, δ ≤ 0.5, but the remaining Fe₂O₃ would be encapsulated by a layer of FeSbO₄.     

Defect chemical and statistical thermodynamic studies on oxygen nonstoichiometric Nd2 − xSrxNiO4 + δ

In order to elucidate how oxygen content changes in Nd_2 − xSr_xNiO_4 + δ (x = 0, 0.2, 0.4), defect chemical and statistical thermodynamic analyses were carried out. The relationship among δ, P(O₂), and T were analyzed by a defect equilibrium model. Since Nd_2 − xSr_xNiO_4 + δ shows metal like band conduction at high temperatures, chemical potential of hole is expressed by the integration of the Fermi-Dirac distribution function and the density of state. The nonstoichiometric variation of oxygen content in Nd_2 − xSr_xNiO_4 + δ can be explained by the defect equilibrium model with a regular solution approximation. Partial molar entropy and partial molar enthalpy of oxygen are calculated from the nonstoichiometric data and Gibbs–Helmholtz equation. The relationship among defect structure, defect equilibrium, and thermodynamic quantities is elucidated by the statistical thermodynamic model. Thermodynamic quantities are calculated by the statistical thermodynamic model with the results of defect chemical analysis and compared with those obtained from experimental results. Thermodynamic quantities calculated by the statistical thermodynamic model can explain rough tendency of those obtained from the δ–T–P(O₂) relationship.     

Studies of the electrochemical reduction processes of Bi, HTeO2 and their mixtures

The reduction process of Bi³⁺, HTeO₂⁺ and their mixtures on Au electrode surface was studied by cyclic voltammetry, linear sweep voltammetry, electrochemical impedance spectroscopy and chronoamperometry. XRD and EDS methods were also used to measure the reductive products prepared under different potentials and provide the evidences of the reactions. The results indicate that the reduction of HTeO₂⁺ occurs at more positive potential than that of Bi³⁺, but its reduction rate is slower and adsorption phenomenon exists during its reduction process. Bi₂Te₃ compound can be obtained potentiostatically at a proper potential in all the mixed solutions with concentration ratio CHTe+O₂/CBi3+ in our research range (0.1-10). But pure Bi₂Te₃ compound can only be obtained at 42 mV in the solution with concentration ratio CHTe+O₂/CBi3+ equaling to 1. And the formation of Bi₂Te₃ compound is an inductive co-depositing process: (1) HTeO₂⁺ + 4e⁻ + 3H⁺ → Te⁰ + 2H₂O, (2) 3Te⁰ + 2Bi³⁺ + 6e⁻ → Bi₂Te₃.     

常温常压下BiMnO_3纳米粉末的制备与物性分析

钙钛矿型BiMnO3是同时具有铁磁性和铁电性的多铁性材料,在传感器,信息存储等方面具有潜在的应用前景.但是它的制备条件非常苛刻,需要高温、高压、密封等,这极大地限制了它的应用与发展.本文采用共沉淀法,以MnCl2·4H2O,Bi2O3,NaOH,HNO3和聚乙二醇为材料,在100℃的水溶液中成功地制备出了BiMnO3材料,此方法大大降低了制备的温度和压强,从而节约了能源,降低了成本.同时利用X射线衍射仪(XRD),透射电子显微镜(TEM),振动样品磁强计(VSM)等对其结构、相貌及磁性等进行了检测,并讨论了制备条件及煅烧温度对BiMnO3物性的影响.     

Evidence of GeO volatilization and its effect on the characteristics of HfO2 grown on Ge substrate

HfO₂ films are deposited by atomic layer deposition (ALD) using tetrakis ethylmethylamino hafnium (TEMAH) as the hafnium precursor, while O₃ or H₂O is used as the oxygen precursor. After annealing at 500℃ in nitrogen, the thickness of Ge oxide's interfacial layer decreases, and the presence of GeO is observed at the H₂O-based HfO₂ interface due to GeO volatilization, while it is not observed for the O₃-based HfO₂. The difference is attributed to the residue hydroxyl groups or H₂O molecules in H₂O-based HfO₂ hydrolyzing GeO₂ and forming GeO, whereas GeO is only formed by the typical reaction mechanism between GeO₂ and the Ge substrate for O₃-based HfO₂ after annealing. The volatilization of GeO deteriorates the characteristics of the high-κ films after annealing, which has effects on the variation of valence band offset and the C–V characteristics of HfO₂/Ge after annealing. The results are confirmed by X-ray photoelectron spectroscopy (XPS) and electrical measurements.     

Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization

High roughness and a greater number of defects were created by lithium niobate (LN; LiNbO₃) processes such as traditional grinding and mechanical polishing (MP), should be decreased for manufacturing LN device. Therefore, an alternative process for gaining defect-free and smooth surface is needed. Chemical mechanical planarization (CMP) is suitable method in the LN process because it uses a combination approach consisting of chemical and mechanical effects. First of all, we investigated the LN CMP process using commercial slurry by changing various process conditions such as down pressure and relative velocity. However, the LN CMP process time using commercial slurry was long to gain a smooth surface because of lower material removal rate (MRR). So, to improve the material removal rate (MRR), the effects of additives such as oxidizer (hydrogen peroxide; H₂O₂) and complexing agent (citric acid; C₆H₈O₇) in a potassium hydroxide (KOH) based slurry, were investigated. The manufactured slurry consisting of H₂O₂-citric acid in the KOH based slurry shows that the MRR of the H₂O₂ at 2 wt% and the citric acid at 0.06 M was higher than the MRR for other conditions.     

Fabrication of flower-shaped Bi2O3 superstructure by a facile template-free process

A novel flower-shaped Bi₂O₃ superstructure has been successfully synthesized by calcination of the precursor, which was prepared via a citric acid assisted hydrothermal process. The precursor and Bi₂O₃ were characterized with respect to morphology, crystal structure and elemental chemical state by field-emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). It was shown that both the precursor and Bi₂O₃ flower-shaped superstructure were constructed of numerous nanosheets while the nanosheets consisted of a great deal of nanoparticles. Furthermore, key factors for the formation of the superstructures have been proposed; a mechanism for the growth of the superstructure has been presented based on the FESEM investigation of different growth stages.     

A theoretical study on the kinetics of multichannel Multiwell reaction of H2S(1A1) with HO2(2A′′)

The mechanism and kinetics of the reaction of hydrogen sulphide (H₂S(¹A₁)) with hydroperoxyl radical (HO₂(²A″)) on the lowest doublet potential energy surface have been theoretically studied. The potential energy surface for possible pathways has been investigated by employing Complete Basis Set (CBS), DFT, and CCSD(T) methods. Three possible pathways are suggested for the title reaction. The most probable entrance channel consists of formation of a hydrogen-bonded pre-reaction complex (vdw1) and two energised intermediates. Multichannel RRKM-Steady State Approximation and CVT calculations have been carried out to compute the rate constants over a broad range of temperature from 200?K to 3000?K to cover the atmospheric and combustion conditions and pressure from 0.1 to 2000?Torr. No sign of pressure dependence was observed for the title reaction over the stated range of pressure. We have shown that the major products of the title reaction are H₂O₂ and SH while at higher temperatures, formation of the other products such as H₂O, HOS, HSOH and OH are feasible, too. Our calculated overall rate constant is in agreement with the reported experimental data in the literature.     

H_3BO_3对Y_(1.98)O_3:Eu_(0.01),Dy_(0.01)红色长余辉发光材料结构和余辉性能的影响

采用高温固相法制备了发光样品Y1.98O3:Eu3+0.01,Dy3+0.01.采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、荧光光谱仪、单光子计数器测试了不同含量的H3BO3对Y1.98O3:Eu3+0.01,Dy3+0.01物相结构、颗粒形貌、发光性能、余辉性能的影响.结果表明当H3BO3含量低于8%(mol)时,样品可保持Y2O3晶格结构,且样品颗粒随H3BO3的含量增加逐渐增大.样品光致发光由Eu3+离子电子的5D0→7FJ跃迁所致,主峰位于612 nm,且发光强度随H3BO3含量的增加呈线性增强.随着H3BO3含量的增加,样品余辉衰减时间逐渐增加,热释光谱分析表明H3BO3的加入增加了基质陷阱能级的深度与浓度,故而导致样品长余辉性能的变化.