共查询到20条相似文献,搜索用时 15 毫秒
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This study shows that the principle of a recently proposed common-path laser interferometer containing a planar grating is nonexistent and apparently caused by a mathematical derivation error. Both p-and s-polarized beams in the proposed setup experience once the +1st-order diffraction and once the-1st-order diffraction by the grating. As a result, the phase of each beam remains unchanged and the interference fringes formed by the two beams are not expected to move when the grating is translated in the grating vector direction. We perform an experiment to confirm this prediction. Both our analysis and experimental observation cast doubt on the experimental results of the authors who proposed the interferometer. 相似文献
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In modern semiconductor and optics industries, there is a strong demand for a highly sensitive and non-contact surface profilometer. This paper describes a practical heterodyne surface profiling interferometer for on-line non-contact measurement which has been developed recently. The essential feature of the profilometer is a newly designed common-path configuration to minimize the effects caused by vibration, air turbulence and other environmental variations. A single-mode frequency-stabilized laser diode (780 nm) serves as the light source to make the whole system compact (total volume 250L×200W×100H mm). A powerful signal processing scheme is also developed, which includes three parts: automatic voltage control, phase measurement with wide range and automatic focusing control. All these make the repeatability and stability of the profiling interferometer greatly improved. The system has vertical resolution of 0.39 nm and lateral resolution of 0.73 μm. During approximately an hour, the stability is within 1.95 nm(3σ). 相似文献
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报道了光学外差法测量表面起伏精度及横向分辨精度达到0.11nm及4μm。本文采用的是完全共光路外差干涉系统,阐述了它的原理、构造及噪声的影响,并将测量结果与其它商品仪器测量结果作了比较。 相似文献
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We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface. 相似文献
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Phase measurements of a twisted nematic liquid crystal spatial light modulator with a common-path interferometer 总被引:1,自引:0,他引:1
Andrs Mrquez Makoto Yamauchi Jeffrey A. Davis David J. Franich 《Optics Communications》2001,190(1-6):129-133
We present a novel and high accuracy (±1°) technique for measuring the difference in phase delay between the positive and negative eigenvectors of a twisted nematic liquid crystal spatial light modulator (LCSLM) as a function of applied voltage. We show a new architecture for a common-path interferometer where we simultaneously generate both the positive and negative eigenvectors of the LCSLM. We use an electro-optic light modulator to provide a time varying phase shift between the two eigenvectors and measure the phase delay difference between the two eigenvectors. We compare the phase delay values with those obtained using a Mach–Zehnder interferometer and find good agreement. 相似文献
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R.A. Martínez-Celorio R. González-Pe?a R. Cibrián R. Salvador M.F. Mínguez L. Martí-López 《Optics and Lasers in Engineering》2010,48(7-8):727-731
A technique for measuring Young's modulus of the radius bone by using electronic speckle-shearing pattern interferometry is proposed. The technique is based on the introduction of carrier fringes and the use of a phase unwrapping algorithm to obtain a phase map corresponding to the out-of-plane displacements of a radius bone without sign ambiguities. The carrier fringes are obtained by the correlation algorithm of two consecutive speckle fields with a translation of the illuminating beam between each recording, then the spatial synchronous detection (SSD), an unwrapping phase algorithm and integration process along shear direction are successfully applied for obtaining a displacement phase map. Next, analysis of the radius bone as a cantilever allows us to obtain Young's modulus. The study was performed with speckle interferometry and with the finite element method for comparing the results. Advantages and disadvantages of the proposed method are discussed. 相似文献
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C. Aime 《Optics Communications》1978,26(2):139-143
The influence of sequential analysis rate on measurements of Michelson fringes is examined on a theoretical basis, sh whilst considering the special case where the elementary telescope pupils are small in comparison with Fried's parameter (r0). As a result of this investigation it seems that the principal effect due to an insufficient scanning rate is a degradation of the spectral analysis window employed in the calculation of spatial energy spectra. This effect is related to Fried's parameter and to the wind speed. Taylor's hypothesis is employed in the calculation.The results obtained appear to be consistent with experimental observations. 相似文献
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This paper describes the calculation, fabrication, and experimental investigation of a reflection two-mirror interferometer whose front mirror is asymmetric in reflection and made as a thin-layer diffraction metal structure (Al, Ag) in combination with a dielectric coating (MgF2, ZnS). In reflection, this interferometer creates in the zero diffraction order a transmission-like pattern similar to that produced by an ordinary Fabry-Perot interferometer operating in transmitted light. 相似文献
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We report the evaluation of the topography of an object with projected fringes generated with a lateral cyclic shear interferometer (CSI) and we then compare the topography recovery obtained with the proposed method with the one obtained from a coordinate measuring machine (CMM). We also study how the fringes visibility along the z axis affects the retrieval. Finally, we discuss the advantages and drawbacks of this profilometry system. 相似文献
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This paper describes the application of reference fringes in double exposure holography of transient phase objects. This includes selection of fringe patterns and fringe number densities suitable for the quantitative analysis of the hologram. Methods of realizing different reference fringe patterns are presented. As the focus of the interference fringes depends on the optical arrangement, different systems are discussed. 相似文献
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G. T. Reid 《Optics and Lasers in Engineering》1984,5(2):63-93
Moiré fringe phenomena have been exploited in a wide range of transducers, particularly in the field of engineering metrology. Paying particular attention to developments which have taken place during the last 15 years, the paper presents a cross-section of moiré techniques for the measurement of displacement, surface topography, deformation, vibration and refractive index gradient. 相似文献