电感耦合等离子体质谱法测定高纯氧化钽中28种痕量杂质元素

建立了用电感耦合等离子体质谱仪(ICP-MS)测定高纯氧化钽中28种痕量杂质元素的方法。讨论了质谱干扰及接口效应,采用标准加入法消除基体效应。各元素的方法检出限为0.001~0.1μg/g,回收率为90%~115%,方法适用于纯度为99.999%的高纯氧化钽中痕量杂质元素的测定。     

Development of an on-line isotope dilution laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) method for determination of boron in silicon wafers

A method has been developed based on an on-line isotope dilution technique couple with laser ablation/inductively coupled plasma mass spectrometry (LA-ICP-MS), for the determination of boron in p-type silicon wafers. The laser-ablated sample aerosol was mixed on-line with an enriched boron aerosol supplied continuously using a conventional nebulization system. Upon mixing the two aerosol streams, the isotope ratio of boron changed rapidly and was then recorded by the ICP-MS system for subsequent quantification based on the isotope dilution principle. As an on-line solid analysis method, this system accurately quantifies boron concentrations in silicon wafers without the need for an internal or external solid reference standard material. Using this on-line isotope dilution technique, the limit of detection for boron in silicon wafers is 2.8 × 10¹⁵ atoms cm⁻³. The analytical results obtained using this on-line methodology agree well with those obtained using wet chemical digestion methods for the analysis of p-type silicon wafers containing boron concentrations ranging from 1.0 × 10¹⁶ to 9.6 × 10¹⁸ atoms cm⁻³.     

Determination of trace iron in indium phosphide wafer by on-line matrix separation and inductively coupled plasma mass spectrometry

A method for the determination of iron in indium phosphide (InP) wafer is proposed. In the present experiment, an on-line matrix separation system using an ion exchange column was combined with inductively coupled plasma mass spectrometry (ICP-MS) for the determination of ng g⁻¹ level of iron. In the on-line matrix separation, indium and iron in the sample solution was passed through a strongly-basic anion exchange resin column with the 9 M HCl carrier solution, where indium was eluted from the column and iron was adsorbed on it. Then, iron was eluted with the carrier solution of 0.3 M HCl containing 1 ng ml⁻¹ cobalt, and it was directly introduced into the ICP-MS nebulizer. In ICP-MS measurement, cobalt in the carrier solution was used as an internal standard to correct the change in sensitivity due to matrix effect, and the peak area integration was performed to quantify iron and cobalt in the integration time range of 20-60 s from the start of the cobalt solution flow. The detection limit (3σ) for iron was 3 ng g⁻¹, and the recoveries for iron in the 0.8, 2.4, and 8.0% indium solutions were almost 100%. The method was applied to the determination of iron in commercially available iron-doped InP wafers. The obtained results for InP wafer samples with the high iron concentration were in good agreement with those obtained by graphite furnace atomic absorption spectrometry (GFAAS).     

Evaluation of closed-vessel microwave digestion method for the determination of trace impurities in polymer-based photoresist by inductively coupled plasma mass spectrometry

A closed microwave digestion method followed by inductively coupled plasma spectrometric (ICP-MS) analysis was evaluated for the determination of trace impurities in photoresist. To optimize the digestion procedure, several digestion parameters such as acid, heating temperature and heating time were evaluated. Besides, the digestion efficiency of used photoresist material and the recovery of analyte elements obtained by the use of gravimetric method and ICP-MS measurement, individually, were also compared to clarify the completeness of digestion. According to our experiments, the gravimetric method was found to be not so relevant to the completeness of digestion, because the remaining sample matrix could cause suppression effect in the subsequent ICP-MS measurement. In view of minimizing blank value and working time, a simple single-step heating program was proposed to mineralize 0.25 ml of photoresist material with 5 ml of nitric acid at 180 °C for 10 min. Based on the comparative study of the analytical results obtained by instrumental neutron activation analysis (INAA) and proposed method, the reliability of proposed method for the determination of trace metallic impurities in photoresist material has been confirmed.     

膜去溶-ICP-MS法测定高纯Eu_2O_3中14种痕量稀土杂质

研究了不需基体分离,膜去溶-ICP-MS法直接测定高纯Eu2O3中的14种痕量稀土杂质的分析方法。讨论了Eu基体产生的多原子离子对被测元素的质谱干扰。使用膜去溶后,待测元素灵敏度提高3倍左右,EuO/Eu产率从去溶前的0.016%降低为0.0007%。建立了Tm的数学校正方程,通过膜去溶结合数学校正可将Eu基体对Tm干扰完全消除。14种稀土杂质的检出限和(∑RE)为70 ng/L,测定下限和(∑RE)为0.54μg/g。对6N高纯Eu2O3样品进行了分析,样品回收率为96%~109%,RSD小于10%。所建立的方法对Eu2O3标准样品的测定结果与国家标准方法测定结果相一致。     

萃取分离-ICP-MS测定高纯铝中痕量元素

利用吡咯烷二硫代氨基甲酸铵(APDC)-CHCl_3萃取分离体系结合ICP-MS对高纯铝中的Co、As、Mo、In、Sn、Sb、Cd、Ag、Pd、Au进行测定,建立了测定高纯铝中痕量元素的方法.实验分别考察了仪器工作参数,萃取酸度,络合剂用量对于杂质元素测定结果的影响,选择了最佳实验条件.各元素的回收率在77.6%～112.2%之间,检出限0.02～0.6 ng/mL,RSD为1.6%～7.2%.     

蒸气发生-电感耦合等离子体质谱法测定碘

建立了一种在线化学蒸气发生-电感耦合等离子体质谱测定碘的方法。利用碘负离子的还原性,采用氧化还原手段,将碘负离子氧化为碘单质;然后通过碘单质的易挥发特点,将碘蒸气直接导入等离子体。该方法可以提高传输效率,改善样品利用率,使检测灵敏度得到极大的提高。方法的检出限为0.22μg/L,样品加标回收率在87.4%~97.75%之间,RSD(n=11)在3%以内。实验中预先将正5价碘还原成碘负离子,然后加入氧化剂将碘负离子氧化成碘单质进行检测;对碘的形态化学蒸气发生法进行了尝试。     

电感耦合等离子体质谱法测定高纯钼中12种杂质元素

采用反应池技术消除了复合离子对Ca、Fe和Si等元素的干扰,以内标校正法直接测定了其它9种元素。优化选择了测定同位素和内标元素,考察了基体效应对测定结果的影响,建立了电感耦合等离子体质谱测定了高纯钼中12种杂质元素含量的方法。方法测定下限介于0.10～0.37μg/g之间,加标回收率为93％～105％,RSD＜10％。...     

Determination of trace elements in biological samples treated with formic acid by inductively coupled plasma mass spectrometry using a microconcentric nebulizer

A simple and fast method for the determination of As, Ba, Cd, Co, Cu, Fe, Ga, Mn, Mo, Ni, Pb, Rb, Se, Sr, Tl, U, V and Zn in biological samples by inductively coupled plasma mass spectrometry (ICP-MS), after sample solubilization with formic acid and introduction by a microconcentric nebulizer, is proposed. The sample is mixed with formic acid, kept at 90 °C for one hour and then diluted with nitric acid aqueous solution to a 50% v/v formic acid and 1% v/v nitric acid final concentrations. The final sample solution flow rate for introduction into the plasma was 30 μL min⁻¹. The optimized and adopted nebulizer gas flow rate was 0.7 L min⁻¹ and RF power was 800 W. These conditions are very different than those normally used when a conventional nebulizer is employed. Rodhium was used as internal standard. External calibration against aqueous standard solutions, without formic acid, could be used for quantification, except for As, Se and Zn. However, external calibration with 50% formic acid allows the determination of all analytes with high accuracy and it is recommended. The detection limits were between 0.0005 (Tl) and 0.22 mg kg⁻¹ (Fe) and the precision expressed by the relative standard deviations (RSD) were between 0.2% (Sr) and 3.5% (Ga). Accuracy was validated by the analysis of four certified reference biological materials of animal tissues, comparing the results by linear regressions and by the t-test at a 95% confidence level. The recommended procedure avoids plasma instability and carbon deposit on the cones.     

On the possibilities of inductively coupled plasma mass spectrometry for analysis of archaeological bones for reconstruction of paleodiet

The possibilities of inductively coupled plasma atomic mass spectrometry for determination of elemental composition of archaeological bones for reconstruction of paleodiet are discussed. The interferences of different polyatomic ions on the determination of Fe, Cu, Mg, Mn, Zn, and Zr are investigated and evaluated. Thus, a method for the determination of Al, As, Ba, Mg, Pb, Sr, V, Zn, and Zr is proposed and is validated by analysis of IAEA-SRM-H-5 (animal bone). The applicability of the proposed procedure is demonstrated analyzing real archaeological bone samples dated to 4th century b.c. and the results are compared with the data obtained by inductively coupled plasma atomic emission spectrometry.     

微波消解-电感耦合等离子体质谱(ICP-MS)法测定拟黑多刺蚁中11种微量元素

为准确定量拟黑多刺蚁体内的微量元素,采用微波消解法,以HNO_(3)-H_(2)O_(2)混合酸为消解体系对样品进行前处理,选择合适的同位素,以^(103)Rh为内标测定^(52)Cr、^(55)Mn、^(60)Ni、^(63)Cu、^(66)Zn、^(75)As、^(78)Se、^(88)Sr和^(114)Cd,以^(185)Re为内标测定^(202)Hg和^(208)Pb,建立了电感耦合等离子体质谱法测定拟黑多刺蚁中11种微量元素的方法。实验发现,以HNO_(3)-H_(2)O_(2)为消解体系,样品消解完全;采用KED模式消除质谱干扰,以内标法校正基体效应;通过绘制校准曲线及测定流程空白,各元素校准曲线的相关系数均大于0.999,方法检出限为0.0005~0.011 mg/kg,方法定量限为0.0016~0.033 mg/kg。对拟黑多刺蚁实际样品进行测定,各元素的相对标准偏差(RSD,n=9)在1.2%~5.5%,加标回收率为91.2%~107%;经过实验室间比对实验,相对偏差为-3.15%~2.74%;测定六个不同产地的拟黑多刺蚁样品,结果显示不同产地样品除Cd外,其他10种微量元素的含量均存在较大差异。测定结果稳定可靠,能满足拟黑多刺蚁中11种微量金属元素含量的分析检测要求。     

电感耦合等离子体-质谱法测定高纯ZnS粉末中痕量金属杂质

建立了用电感耦合等离子体-质谱(ICP-MS)法测定高纯ZnS粉末中Mg、Al、Mn、Ni等11种痕量金属杂质含量的方法。样品溶解后可直接进样分析。加标回收率为89%~120%。各金属杂质均为10 ng/mL的混合标准溶液平行7次进样的相对标准偏差均小于5%。方法能够满足纯度在99.99%~99.999%范围的ZnS样品中杂质测定的需要。     

电感耦合等离子体质谱技术最新进展

对1998年以来电感耦合等离子体质谱技术（ICP－MS）的最新进展作一简要回顾。内容包括同位素比值分析、双聚焦扇形磁场高分辨ICP－MS、多接收器磁扇形等离子体质谱仪（MC－ICP－MS）、飞行时间等离子体质谱仪（ICP－TOF－MS）、“冷”等离子体及屏蔽炬技术以及动态碰撞／反应池技术等进展。     

Silicon determination by inductively coupled plasma atomic emission spectrometry after generation of volatile silicon tetrafluoride

A method for the determination of silicon by inductively coupled plasma atomic emission spectrometry (ICP-AES) is described. The procedure is based on a discontinuous generation of volatile silicon tetrafluoride in concentrated sulphuric acid medium after injecting 125 μl of 0.1%, w/v sodium fluoride solution into 100 μl of the sample. The gaseous silicon tetrafluoride is fed directly into the ICP torch by a flow of 250 ml min⁻¹ Ar carrier gas. The calibration curve was linear up to at least 100 μg ml⁻¹ of Si(IV) and the absolute detection limit was 9.8 ng working with a solution volume of 100 μl. The relative standard deviation for six measurements of 10 μg ml⁻¹ of Si(IV) was 2.32%. The method was applied to the determination of silicon in water and iron ores.     

Determination of trace impurities in electronic grade quartz: Comparison of inductively coupled plasma mass spectroscopy with other analytical techniques

An analytical procedure for the determination of uranium and thorium in the sub-ng/g range as well as of other trace elements in the ng/g to g/g range in high purity quartz samples is described. The results obtained by inductively coupled plasma mass spectroscopy (ICP-MS) are compared to those obtained by other analytical techniques (instrumental neutron activation analysis, INAA; flame atomic absorption spectrometry, AAS; Zeeman graphite furnace atomic absorption spectrometry, ZGFAAS; total reflection X-ray fluorescence analysis, TRFA; direct current arc optical emission spectrometry, DC-arc OES; and X-ray fluorescence analysis, XRFA). For the ICP-MS measurements, the decomposition of the samples is carried out with HF/HNO₃/H₂SO₄-mixtures. The results obtained by the different methods show reasonable agreement. For uranium and thorium, ICP-MS proves to be the most sensitive method: detection limits of about 50 pg/g can be achieved for both elements.Presented in part at the 1989 European Winter Conference on Plasma Spectrochemistry, Reutte, Austria     

5-溴粉防己碱合成产物中微量杂质的ESI-MSn快速鉴定

采用电喷雾串联质谱分析了5-溴粉防己碱合成产物中的微量杂质成分。通过多级质谱的解析推测出2个微量杂质可能的分子结构,并从中总结出该类化合物的ESI—MS^n裂解规律。     

Applications of inductively coupled plasma mass spectrometry and laser ablation inductively coupled plasma mass spectrometry in materials science

Inductively coupled plasma mass spectrometry (ICP-MS) and laser ablation ICP-MS (LA-ICP-MS) have been applied as the most important inorganic mass spectrometric techniques having multielemental capability for the characterization of solid samples in materials science. ICP-MS is used for the sensitive determination of trace and ultratrace elements in digested solutions of solid samples or of process chemicals (ultrapure water, acids and organic solutions) for the semiconductor industry with detection limits down to sub-picogram per liter levels. Whereas ICP-MS on solid samples (e.g. high-purity ceramics) sometimes requires time-consuming sample preparation for its application in materials science, and the risk of contamination is a serious drawback, a fast, direct determination of trace elements in solid materials without any sample preparation by LA-ICP-MS is possible. The detection limits for the direct analysis of solid samples by LA-ICP-MS have been determined for many elements down to the nanogram per gram range. A deterioration of detection limits was observed for elements where interferences with polyatomic ions occur. The inherent interference problem can often be solved by applying a double-focusing sector field mass spectrometer at higher mass resolution or by collision-induced reactions of polyatomic ions with a collision gas using an ICP-MS fitted with collision cell. The main problem of LA-ICP-MS is quantification if no suitable standard reference materials with a similar matrix composition are available. The calibration problem in LA-ICP-MS can be solved using on-line solution-based calibration, and different procedures, such as external calibration and standard addition, have been discussed with respect to their application in materials science. The application of isotope dilution in solution-based calibration for trace metal determination in small amounts of noble metals has been developed as a new calibration strategy. This review discusses new analytical developments and possible applications of ICP-MS and LA-ICP-MS for the quantitative determination of trace elements and in surface analysis for materials science.     

电感耦合等离子体质谱法测定高纯金中铝、砷、铋、铬、铁、铅、锑、硒、碲、铱痕量元素

建立了微波消解-内标法-标准加入-ICP-MS法测定高纯黄金中铝、砷、铋、铬、铁、铅、锑、硒、碲、铱等痕量元素的分析方法.从试样溶解方式、内标元素及同位素的选择、仪器检测模式的优化及降低基体抑制效应等方面进行优化.实验加标回收率为99.5％ ～110％,相对标准偏差(RSD)为0.050％ ～6.5％.实验的准确度和精...     

Profiling of trace elemental impurities in caustic soda matrix by inductively coupled plasma mass spectrometric technique

An inductively coupled plasma mass spectrometric (ICP-MS) technique method is developed for simultaneous determination of Li, Cr, Mn, Fe, Ni, Co, Cu, Sr, Ag, Cd, Ba, and Pb at trace level in caustic soda. Operational parameters of the instrument were optimized and suitable accessory (argon gas dilution) was used in the method. Direct aspiration of high total dissolved solids (TDS) samples (beyond 0.2% TDS) and highly alkaline NaOH is not suitable for the instrument; therefore, strategy of neutralization of NaOH by HNO₃ was adopted to handle its high alkalinity. Suitable internal standards of low, mid, and high atomic masses were used with external calibration. Features such as matrix matching, calibration verification, interference correction, etc. were undertaken in this work. Neutralized caustic soda samples were spiked with the analytes with lower, middle, and higher concentration. The results of spiking with 30, 70, 140, and 200 ppb were examined. The method exhibited excellent accuracy and precision.     

Determination of trace elements in residual oil by high-resolution inductively coupled plasma mass spectrometry

An analytical method using high-resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 20 elements, including Na, Mg, Al, Ca, Ti, V, Mn, Fe, Co, Ni, Cu, Zn, Ga, As, Mo, Cd, Sn, Sb, Ba, and Pb elements, in residual oil was described. The sample was dissolved in HNO₃ by microwave digestion, and then the above 20 elements in the solution were analyzed directly by HR-ICP-MS. Most of the spectral interferences could be avoided by measuring in the high-resolution mode. The matrix effect caused by the sample-digesting solution and corrected by Sc, Rh, and Bi as the internal standard elements was studied in detail. The optimum condition of the determination was also tested and discussed. The result showed that the detection limits of the method were in the range of 0.014 to 11.6 μg L⁻¹; the relative standard deviation was less than 3.8% and recoveries in the samples were in the range of 88.4% to 108.0%. This method can be used to determine the trace elements in residual oil with the features of accurate, rapid, and convenient determination.