共查询到19条相似文献,搜索用时 234 毫秒
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圆柱形和椭球形谐振腔式MPCVD装置中微波等离子体分布特征的数值模拟与比较 总被引:4,自引:1,他引:3
在使用简化的等离子体放电模型的基础上,模拟了圆柱形和椭球形谐振腔式微波等离子体金刚石膜沉积设备中,不同金刚石膜生长条件下微波等离子体的分布状态.对不同的微波输入功率、不同气体压力条件下,两种谐振腔式设备中形成的等离子体分布的变化规律进行了模拟.模拟结果表明,椭球形谐振腔的质量因子要高于圆柱形谐振腔;并且,椭球形谐振腔更适合用于高功率、高压力的金刚石膜沉积环境.这意味着,使用椭球形谐振腔,可获得更高的金刚石膜生长速率. 相似文献
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微波等离子体化学气相沉积金刚石薄膜研究 总被引:2,自引:1,他引:1
本文系统研究了石英钟罩式微波等离子体辅助化学气相沉积装置对沉积金刚石薄膜的影响。与石英管式微波等离子体沉积装置相比,该装置能使用较高的沉积气压、较大的气体流量和较微波功率。本文着重研究了沉积气压、气体流量和甲烷浓度对金刚石薄膜形貌和生长速度的影响。发生生长速度随着沉积气压和甲烷浓度的增大而增大,晶体形态随着甲烷浓度的增大而差。并使用该装置成功地在400℃低温沉积了Φ60mm的金刚石薄膜。 相似文献
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微波等离子体化学气相沉积(MPCVD)法制备的高质量金刚石在很多领域均有广泛应用前景。本研究采用9 kW微波功率,分别在13 kPa、14 kPa、15.5 kPa、17 kPa的腔室压力下进行薄膜沉积实验,发现在15.5 kPa、17 kPa的腔室压力下沉积的薄膜在中心区域出现异常生长情况,具体表现为中心存在明显的阶梯式凸起。为揭示薄膜中心出现异常沉积的原因,使用SEM和Raman分析薄膜表面形貌和质量,通过数值模拟进行沉积过程建模计算和分析功率密度和流场分布。结果表明在相同功率下,提高腔室压力,压缩等离子体,因平均自由程较短,扩散能力不足,将导致衬底中心区域比边缘区域更易密集生长,金刚石薄膜中心区域出现明显的阶梯。同时,薄膜整体的生长速率、均匀性、质量均会在超过压力极值后降低。 相似文献
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对自行设计的RF喷射等离子体增强化学气相沉积系统(RF plasma jet CVD)进行了电子温度和电子密度的模拟计算分析.在优化的参数下进行了金刚石膜体的制备,并应用光发射谱技术(OES)在线分析了等离子体的成分.通过Raman、XRD和SEM分析了沉积样品的成分、晶体结构和形貌.通过在反应气体中加入NH3,并利用载气技术将含有Ni元素的金属有机物引入到沉积区,进行了Ni、N共掺杂沉积.利用XPS以及PL谱分析了掺杂样品的化学价键和光致发光特性,结果发现Ni-N价键的存在以及在800 nm附近的光发射峰. 相似文献
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The conditions of low pressure autoepitaxy of diamond are analysed and theoretical concepts concerning the plasmochemical method of diamond synthesis put forward. The experimental method used is described. The obtained results have demonstrated the utility of the plasmochemical method for obtainment of diamond and confirmed the validity of the presented theoretical concepts. 相似文献
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CF4-plasma etching of niobium and SiOx layers has been investigated in a r.f. diode reactor. Etch rates increase linearly with increasing power density and also increase with pressure. The etch rate ratio can be changed using different etch gases or operating in different plasma modes (PE or IEPE). Changing from the ion enhanced plasma etching mode (IEPE) to plasma etching mode (PE) the etch rate ratio is changing by an factor of ten. On the basis of etch rate dependences on process parameters and thermodynamic data it has been suggested the generation of flourine radicals as the rate limiting step. A general etching model has been proposed, which explains qualitavelty and quantitatively (on account of data from literature) the measured results. 相似文献
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This paper describes a setup to grow bulk crystals using a heating system based on the "hollow cathode" effect. The growth develops by vertical gradient freeze and the assembly has the possibility to adjust the position of the melt‐solid interface. 相似文献
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Yastremsky E. V. Patsaev T. D. Mikhutkin A. A. Sharikov R. V. Kamyshinsky R. A. Lukanina K. I. Sharikova N. A. Grigoriev T. E. Vasiliev A. L. 《Crystallography Reports》2022,67(3):421-427
Crystallography Reports - The effects of plasma treatment on the surface roughness and hydrophility of polymer materials used as biodegradable scaffolds (polylactide films, sponges, and nonwoven... 相似文献
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S. Hamideh Mortazavi S. Pilehvar M. Ghoranneviss M. T. Hosseinnejad L. Dejam 《Molecular Crystals and Liquid Crystals》2014,592(1):115-122
The effect of plasma and chemical methods on the stabilization of Polyacrylonitrile (PAN) nanofiber prepared by electrospinning technique, has been investigated at various oxygen contents (10%, 20%, and 30%) and KMnO4 solutions (3% and 5%). Fourier transform infrared (FT-IR) analysis of plasma and chemical oxidized samples indicated that the treated nanofibers were oxidized under different contents of oxygen plasma and KMnO4 contents by increasing the peak intensities of C&dbnd;O stretching band and OH– stretching vibration mode, respectively. Additionally conversion of C≡N bands into C&dbnd;N ones in the copolymer chain was observed in both plasma and chemical methods, but changes in chemical stabilized samples were not very sensible. Field emission scanning electron microscopy (FE-SEM) images revealed that the surfaces of the plasma treated nanofibers were extremely etched. Furthermore a higher reduction in the average oxidized nanofiber diameters was observed using plasma method. 相似文献