应力作用下EuTiO3铁电薄膜电热效应的唯象理论研究

基于Laudau-Devonshire的热动力学模型, 计算了EuTiO₃铁电薄膜材料的电热效应. 结果显示在外加应力的调控下, 电极化、电热系数以及绝热温差都会随之变化. 外加垂直于表面的张应力加大, 薄膜的相变温度升高, 绝热温差增加, 最大绝热温差所对应的工作温度向高温区移动. 对于二维平面失配应变u_m =-0.005的薄膜, 当外加张应力σ₃ = 5 GPa时, 其最大电热系数为1.75×10^-3 C/m²·K, 电场变化200 MV/m 时室温下绝热温差ΔT 的最大值可达到14 K 以上, 绝热温差ΔT ≥13 K 的工作温区超过120 K, 表明可以通过调控外部应力来获取室温时较大的绝热温差. 此结果预示着铁电EuTiO₃ 薄膜在室温固态制冷方面可能具有较好的应用前景.     

聚(偏氟乙烯-三氟乙烯)纳米薄膜极化反转与疲劳特性

采用旋涂法制备了厚度为140 nm的聚(偏氟乙烯-三氟乙烯)[P(VDF-TrFE)]纳米薄膜, 研究了不同退火温度以及环境相对湿度对薄膜的极化反转和疲劳性能的影响. 运用X射线衍射仪、扫描电子显微镜和傅里叶变换红外光谱仪等测试技术对薄膜的微结构进行了表征. 实验结果表明, 通过不同温度的退火处理, P(VDF-TrFE)铁电薄膜的结晶度随着退火温度的升高而不断提高, 并且一定的温度范围内的退火处理可以提高薄膜的极化性能; 此外, P(VDF-TrFE) 铁电薄膜性能还表现出一定的环境湿度的敏感特性, 这与薄膜的物理性能和结构特点密切相关; P(VDF-TrFE)铁电薄膜在不同的环境湿度条件下 表现出较好的电学特性, 其漏电流均保持在10 ^-7A/cm² 的较低水平. 本工作揭示了再退火过程对薄膜的极化反转速度和疲劳恢复特性的影响, 并结合薄膜二次疲劳结果, 探讨了薄膜可逆的内部疲劳恢复特性机理.     

多能场复合电沉积对Al2O3-Co复合薄膜物性影响研究

采用多能场复合微细电沉积加工技术,制备了微观结构渐变的多彩结构色磁性Al₂O₃-Co复合薄膜.在沉积电场和与之垂直的偏转电场作用下,复合薄膜的微观结构、光学特性和磁性沿偏转电场方向呈现渐变特征.通过建立微观结构等效模型,理论分析了复合薄膜微观结构变化机理.通过软件仿真定量分析了沿偏转电场方向Co离子沉积电流密度分布规律,仿真结果与理论研究和实验结果相吻合.研究发现,采用多能场复合的微细电沉积加工技术可以从微观角度调控复合薄膜微区结构,实现对薄膜微区磁学和光学特性的精细调控.     

硅基锗薄膜的异质外延生长及其在光电子器件中的应用

准直接带隙的锗,其禁带宽度小,吸收系数大,迁移率高,更重要的是,它能与硅微电子工艺兼容,在硅基光电集成中得到了广泛的研究和应用．文章综述了硅基锗薄膜的异质外延生长及其在光电子器件（特别是长波长光电探测器和激光器）应用上的进展;介绍了在硅衬底上异质外延生长锗薄膜的缓冲层技术,如组分变化的SiGe缓冲层技术、选区外延技术和低温技术;讨论了硅基锗薄膜光电探测器的性能与结构的关系以及发展趋势;分析了张应变和n型掺杂对锗光电性质的影响;展望了硅基锗薄膜单片集成和电抽运激光器的前景．     

ZnO薄膜的激光辐照效应研究

研究了KrF准分子激光辐照对ZnO薄膜的本征缺陷.紫外（UV）发光以及表面形貌的影响,并对室温下ZnO的UV发射机理进行了详细探讨.结果表明激光辐照打断了薄膜内Zn—O键,氧空位（锌填隙）增多,导致表面电阻率下降,载流子浓度升高,调节激光辐照能量密度,可在较大范围内调控ZnO薄膜中的施主缺陷浓度;同时在激光热效应作用下,薄膜晶粒熔融长大,表面粗糙度大大降低;室温下ZnO薄膜的UV发光包括自由激子复合发光（FX）及其声子伴线（FX-LO）,缺陷浓度决定了FX与FX-LO的相对强度比,进而影响UV发射峰的强度以及位置.因此,激光辐照可以快速、有效地对ZnO薄膜内的缺陷浓度进行调控,从而控制其室温下的UV发射强度,这对于提高ZnO基光电器件的性能具有重要意义.     

ZnO薄膜的激光辐照效应研究

研究了KrF准分子激光辐照对ZnO薄膜的本征缺陷.紫外（UV）发光以及表面形貌的影响,并对室温下ZnO的UV发射机理进行了详细探讨.结果表明激光辐照打断了薄膜内Zn—O键,氧空位（锌填隙）增多,导致表面电阻率下降,载流子浓度升高,调节激光辐照能量密度,可在较大范围内调控ZnO薄膜中的施主缺陷浓度;同时在激光热效应作用下,薄膜晶粒熔融长大,表面粗糙度大大降低;室温下ZnO薄膜的UV发光包括自由激子复合发光（FX）及其声子伴线（FX-LO）,缺陷浓度决定了FX与FX-LO的相对强度比,进而影响UV发射峰的强度以及位置.因此,激光辐照可以快速、有效地对ZnO薄膜内的缺陷浓度进行调控,从而控制其室温下的UV发射强度,这对于提高ZnO基光电器件的性能具有重要意义. 关键词： ZnO薄膜 激光辐照 紫外发光 缺陷浓度     

n型有序多孔硅基氧化钨室温气敏性能研究

利用电化学腐蚀方法制备了n型有序多孔硅, 并以此为基底用直流磁控溅射法在其表面溅射不同厚度的氧化钨薄膜. 利用X射线和扫描电子显微镜表征了材料的成分和结构, 结果表明, 多孔硅的孔呈柱形有序分布, 溅射10 min的WO₃薄膜是多晶结构, 比较松散地覆盖在整个多孔硅的表面. 分别测试了多孔硅和多孔硅基氧化钨在室温条件下对二氧化氮的气敏性能, 结果表明, 相对于多孔硅, 多孔硅基氧化钨薄膜对二氧化氮的气敏性能显著提高. 对多孔硅基氧化钨复合结构的气敏机理分析认为, 多孔硅和氧化钨薄膜复合形成的异质结对良好的气敏性能起到主要作用, 氧化钨薄膜表面出现了反型层引起了气敏响应时电阻的异常变化. 关键词： 有序多孔硅 氧化钨薄膜 二氧化氮 室温气敏性能     

基于PbMg_(1/3)Nb_(2/3)O_3-PbTiO_3压电单晶的磁电复合薄膜材料研究进展

电子信息技术的迅速发展对磁电功能器件的微型化、智能化、多功能化以及灵敏度、可靠性、低功耗等都提出了更高的需求,传统的块体磁电功能材料已日渐不能满足上述需求,而层状磁电复合薄膜材料同时具有铁电性、铁磁性和磁电耦合等多种特性,因此能满足上述需求且有望应用于新一代磁电功能器件.层状磁电复合材料不仅具有非常丰富的物理现象和效应,而且在弱磁探测器、多态存储器、电写磁读存储器、电场可调低功耗滤波器、移相器、天线等微波器件中也具有广阔的应用前景,因而受到材料科学家和物理学家广泛的关注和研究.在层状磁电复合材料中,功能薄膜/铁电单晶异质结因其制备简单、结构设计和材料选择灵活以及电场调控方便和有效,最近十余年引起了越来越多的研究人员的兴趣.目前,以具有优异铁电和压电性能的(1-x)PbMg_(1/3)Nb_(2/3)O_3-PbTiO_3(PMN-PT)单晶作为衬底,构建功能薄膜/PMN-PT异质结已成为国内外多铁性复合薄膜材料研究领域的重要方向之一.相比于其他国家,我国科学家无论在发表的文章数量还是在文章被引用次数方面都处于领先地位,表明我国在功能薄膜/PMN-PT单晶异质结方面的研究卓有成效.迄今为止,研究人员已构建了锰氧化合物/PMN-PT、铁氧体/PMN-PT、铁磁金属/PMN-PT、稀磁半导体/PMN-PT、发光材料/PMN-PT、二维材料/PMN-PT、多层薄膜/PMN-PT、超导薄膜/PMN-PT等多种类型的异质结,在理论研究和实验方面都取得了丰富的研究成果.本文对基于PMN-PT压电单晶的磁电复合薄膜材料的研究进展进行了总结:简要介绍了与功能薄膜/PMN-PT异质结相关的研究论文发表现状;介绍了PMN-PT单晶在准同型相界附近的相图和应变特性;按照功能薄膜材料所属的体系对异质结进行了分类,并选取部分代表性的研究成果,介绍了材料的磁电性能和内涵的物理机制;最后就目前有待解决的问题和未来可能的应用方向进行了总结和展望.     

N掺杂对a-SiC:H基介质扩散阻挡层结构及性能的影响

用射频等离子增强化学气相沉积技术（RF-PECVD）制备非晶碳化硅（a-SiC:H）和不同掺氮量的碳化硅基（a-SiCN_x:H）介质薄膜.采用傅里叶红外光谱（FIRT）,X射线光电子谱仪（XPS）,纳米压入仪（Nano Indenter^A○R-XP）,Agilent 4294A高精度阻抗分析仪,俄歇能谱仪（AES）和场发射高分辨透射电镜（HRTEM）表征氮掺杂对碳化硅基薄膜化学键组成、微观结构、机械性能、介电常数和阻挡铜扩散性能的影响.实验结果表明：通过控制薄膜的氮含量可实现其介电常数在38—52范围内可调.随着反应源中氨气（NH₃）流量的增加,碳化硅基薄膜中Si—N和C—N化学键比例增加以及由此导致的薄膜微观结构致密化是氮掺杂显著提高碳化硅基薄膜机械性能、热稳定性和阻挡铜扩散性能的机理.     

PT/PZT/PT铁电薄膜的铁电畴和畴壁

用sol-gel法制备出了具有良好铁电性、纯钙钛矿结构的PbTiO₃/Pb(Zr_0.3Ti_0.7)O₃/PbTiO₃(PT/PZT/PT)新型夹心结构铁电薄膜.用扫描力显微镜(SFM)的压电响应模式获得了薄膜铁电畴的垂直于膜平面方向(OPP)、膜平面内(IPP)及OPP的相位和幅度图像，结合理论分析指出薄膜的电畴主要由c畴和偏离垂直于膜平面方向上的c畴构成，薄膜取向的复杂性导致了复杂的畴结构.对于［111］取向的薄膜，当偏离垂直于膜平面方向上的c畴在垂直膜平面方向和面内方向都相反时构成180°的畴壁，在垂直膜平面方向上相同、面内方向相反或由垂直膜平面方向上相反、面内方向相同时构成90°畴壁. 关键词： 铁电薄膜 PT/PZT/PT 电畴和畴壁 扫描力显微镜(SFM)     

Effect of misfit strain on the electrocaloric effect of P(VDF-TrFE) copolymer thin films

Based on the phenomenological Landau-Devonshire theory, we investigate the effect of misfit strain on the electrocaloric effect of P(VDF-TrFE) copolymer thin films. Theoretical analysis indicates that the compressive misfit strain reduces the working temperature to a great extent where the electrocaloric effect is maximized, which is different from the result of the conventional ferroelectric thin films, such as BaTiO₃. Although the compressive or tensile misfit strain does not change the maximum of the electrocaloric coefficient, the compressive misfit strain decreases the maximum of the adiabatic temperature change and the tensile misfit strain results in the opposite effect. Consequently, control of the misfit strain provides potential means to vary the working temperature for use in cooling systems.     

Effect of misfit strain on the electrocaloric effect in epitaxial SrTiO3 thin films

Based on a phenomenological Landau-Devonshire theory, the effect of misfit strain on the electrocaloric effect in epitaxial SrTiO₃ thin films is investigated. Theoretical analysis indicates that both the electrocaloric coefficient and the adiabatic temperature change strongly depend on the misfit strain. Moreover, the maximum of electrocaloric coefficient almost does not change with increasing the compressive or tensile misfit strain. However, the enhancement of misfit strain enlarges both the adiabatic temperature change and the temperature at which it is maximized. Most importantly, the largest room-temperature electrocaloric effect can be attained at a critical misfit strain. Therefore, it may open more opportunities for practical application in refrigeration devices.     

Electrocaloric Effect of P(VDF-TrFE)/SrTiO_3 Bilayer Thin Films

A phenomenological thermodynamic theory is applied to investigate the effect of misfit strain and electric field on the electrocaloric effect of P(VDF-TrFE)/SrTiO 3 bilayer thin films.Theoretical results indicate that the low electric field results in the decrease of the average polarization with the increase of the relative thickness of SrTiO 3 layer,and the high electric field has an opposite effect on it.Moreover,the electrocaloric effect strongly depends on the electric field.The low electric field and the small field change can lead to a maximum of the electrocaloric effect,meanwhile the high electric field or the large field change results in the opposite trend.     

Effect of electric field on electrocaloric effect in Pb(Zr1 − xTix)O3 solid solution

A thermodynamic analysis is employed to investigate the intrinsic electrocaloric effect of Pb(Zr_1 − xTi_x)O₃ solid solution system under the different electric field. Theoretical analysis indicates that Pb(Zr_1 − xTi_x)O₃ system has the giant electrocaloric coefficient and the large adiabatic temperature change near its ferroelectric Curie temperature. The applied electric field decreases not only the electrocaloric coefficient but also its temperature dependence. Furthermore, it increases the adiabatic temperature change as well as its dependence of temperature. The temperature corresponding to the maximum of electrocaloric coefficient and adiabatic temperature change increases with the enhancement of electric field because of its first-order phase transition between ferroelectric phase and paraelectric phase.     

Electrocaloric response in a relaxor ferroelectric polymer at temperatures far below the dielectric maximum

ABSTRACT

Relaxor ferroelectric polymer poly(vinylidene fluoride–trifluoroethylene–chlorofluoroethylene) (P(VDF-TrFE-CFE)) and its blends have been shown to exhibit a giant electrocaloric effect (ECE) over a broad temperature range, e.g. from 0 to 50 °C. Here, a special calorimeter was designed to directly characterize the heat absorbed Q_ECE due to ECE cooling of the blend of P(VDF-TrFE-CFE) with P(VDF-TrFE) 65/35 mol% copolymer down to ?15 °C, which covers the temperature range for many refrigeration applications. From Q_ECE, the isothermal entropy change ΔS and adiabatic temperature change ΔT are deduced. The data reveal that at ?15 °C the relaxor terpolymer/copolymer blend generates ΔS = 23.0J kg^?1 K^?1 and ΔT = 5.1K under 100 MV/m, which are still more than 65% of the ECE at room temperature. This temperature is far below the dielectric peak temperature of the relaxor blend and the results reveal the promise of the relaxor polymers for a broad range of EC cooling applications.     

Low-voltage pulse exciting electron emission from ferroelectric copolymer film cathode: Role of film thickness and emission stability

Ferroelectric copolymer thin films P(VDF-TrFE) are used as a ferroelectric cathode for investigation of their electron emission properties. This ferroelectric copolymer films with different thicknesses are deposited by spin-coating method, and then the annealing process is carried out to improve the crystallinities of as-deposited copolymer films. The measurement results of ferroelectric electron emission showed that the copolymer P(VDF-TrFE) films had a desired ferroelectric electron emission ability excited at low-voltage pulse, and its peak emission current can reach to be ∼1.3 μA when the pulse voltage is 280 V. In addition, the effect of film thickness on electron emission property and emission stability of copolymer thin film P(VDF-TrFE) are discussed.     

Electrocaloric effect in ferroelectric polymers

The electrocaloric effect (ECE) of poly (vinyledene fluoride?Ctrifluoroethylene) (P(VDF?CTrFE)) 55/45?mol% copolymers was directly measured, which confirms the results deduced from Maxwell relation. The adiabatic temperature change ??T under a given electric field peaks at the ferroelectric?Cparaelectric (FE?CPE) transition. Away from it, ECE becomes small. ??T versus applied electric field can be described well by a modified Belov?CGoryaga equation. The ECE in ferroelectric polymers, especially near FE?CPE transition where larger ECE is observed, are analyzed under different boundary conditions employing phenomenological theory and constitutive equations. The secondary pyroelectricity is found to play a significant role which enhances ECE in ferroelectric polymers.     

Dielectric responses of composite films based on P(VDF-TrFE) copolymer with TGS inclusions

The dielectric characteristics of film samples of P(VDF-TrFE) + TGS composite in the frequency range of 10³–10⁷ Hz are studied. The values of the real and imaginary parts of the complex dielectric constant in the temperature range of–40 to 140°C, including the points of the polymer matrix’s transition to the glassy state when T_g ≈–25°C and the ferroelectric phase transition. An analysis of the ferroelectric crystal inclusion effect on the dielectric response of P(VDF-TrFE) copolymer matrix is carried out.     

Effect of out-of-plane misfit strain on phase diagrams and ferroelectric properties of ferroelectric films in vertical nanocomposite structures

A phenomenological thermodynamic Landau–Devonshire theory is developed to investigate phase diagrams of epitaxial ferroelectric films with out-of-plane misfit strain induced by vertical nanocomposites. The thermodynamic potential of ferroelectric films is obtained based on the boundary conditions of three-dimensional clamping induced by the vertical nanocomposites. Our calculated results indicate that the out-of-plane misfit strain modulates the transition temperature and spontaneous polarization of ferroelectric films in a wide range even the substrate does not provide an effective in-plane misfit strain control. An enhanced critical transition temperature up to 803 °C in BaTiO₃ films under a tensile out-of-plane misfit strain is predicted, which is consistent with the experimental result very well. The polarization properties of BaTiO₃ films can also be effectively modulated by the out-of-plane misfit strain which is controlled by the volume fraction of nanopillars in the vertical nanocomposites. Our method provides a theoretical guide for the out-of-plane strain engineering of ferroelectric films.