微量低电离电位的添加物对XeCl准分子激光输出的影响

本文报道在XeCl准分子激光器中添加微量的氯苯(C_6H_5Cl)或四氯化碳(CCl_4),使激光输出能量提高约16％。     

Laser dye stability,part 12. The pyridinium salts

Improved laser output is demonstrated in KrF and XeCl lasers with x-ray preionization. The influence of gas composition, preionization geometry, x-ray dose,E/p value and temporal delay between x-ray pulse and laser discharge is discussed. In XeCl lasing has been achieved with an x-ray dose of 0.2 mR whereas approx. 3 mR are required for KrF. For both systems, the highest output energy and the lowest possibleE/p ratio were observed with Ne buffered gas mixtures. Dissociative attachment to halogen molecules on a ns time scale supported by a relatively slow laser voltage rise is recognized as the main electron loss channel preventing a long lifetime of the preionization electrons. High preionization intensity is thus desirable at the moment of voltage breakdown.     

Preionization kinetics of an X-ray preionized XeCl gas discharge laser

The influence of preionization conditions on the performance of a XeCl gas discharge laser preionized by a short, high intensity x-ray pulse, has been studied. The laser output energy and optical pulse temporal characteristics have been used to determine the roles of initial electron density and of electron attachment to HCl and to impurities. Although the short pulse preionization technique functions well for XeCl when the laser voltage pulse has a short risetime (?20 ns), it is less well suited to XeCl lasers using slowly rising voltage pulses (>50 ns), or to F₂ containing gas mixtures (KrF and XeF lasers).     

Discharge instability induced by external laser preionization of a XeF discharge laser

External-laser-induced preionization of excimer lasers was investigated. A discharge XeF laser was preionized by two different UV lasers [a KrF laser (λ=249 nm) and an ArF laser (λ=193 nm)], and the improvements in performance of the XeF laser were compared. The XeF laser beam profiles were measured by an intensified CCD (ICCD) camera with temporal resolution of 10 ns. Striated XeF laser profiles were obtained with 249 nm laser preionization, whereas there was no striation in the profiles for 193 nm laser preionization. These striations originated from discharge in the XeF laser induced by laser preionization. The influence of excited rare-gas atoms on the discharge instability was examined.     

Excimer lasers and laser systems

The results of the experimental study of UV lasers and laser systems pumped by different methods are presented. Two lasers were pumped by electron beams from Marx generators. Three lasers were pumped by transverse discharge with UV preionization. An XeCl laser pumped by electric discharge using a generator with inductive energy storage and semiconducting opening switch is investigated. The highest laser radiation energies of 2000, 90, and 0.7 J have been obtained at 5=308, 249, and 222 nm, respectively. The amplification of the laser beam from the master oscillator under conditions of strong amplified spontaneous emission is considered. In particular, formation of the output from an amplifier in the wings of the XeCl laser band and in the case of a large-aperture XeCl amplifier are investigated. The output beam divergence in these experiments was measured to be ~10^-4 rad.     

Fourier-transform sensitivity analysis

Fourier-transform sensitivity analysis has been applied to a simplified model of a XeCl self-sustained discharge laser. Sensitivity coefficients have been calculated for chemical, electron and photon densities and for the discharge current and voltage. The role of preionization instability on model sensitivity has also been investigated. The sensitivity analysis has been coupled to a statistical analysis of the output data (mean, maximum and minimum values), which can help to better understand the behaviour of the tested model.     

Experimental studies of a XeCl laser having UV preionization perpendicular and parallel to the electrode surfaces

This paper reports on the results of an experimental study of a XeCl laser having two independent preionizators which generated UV radiation into the active medium in the perpendicular and parallel directions to the electrode surfaces. Output energy and other parameters were measured using a single preionizator and two preionizators, changing the power supply polarity and varying the delay time between the preionization and the main discharge. When the preionization system generated photons only in the direction perpendicular to the electrode surfaces, a high discharge current and a high output laser energy were obtained. Besides, the diffusion coefficient of the photo-preionized electrons, played an important role in the laser behaviour, particularly when a consistent delay time between the onset time of the preionization and the main discharge was present.     

Short pulse,x-ray preionization of a high pressure XeCl gas discharge laser

A short pulse (35 ns), high energy X-ray source, driven by a coaxial Blumlein pulser, has been used to preionize a 2.5 × 3 × 30 cm³ active volume XeCl avalanche discharge laser. A maximum output energy of 1 J has been extracted at 0.9% efficiency (including X-ray preionization). Measurements have been performed to investigate the influence of the X-ray pulse timing on laser output and discharge quality.     

高重复率XeCl准分子激光器的放电特性

本文报道紫外预电离放电泵浦的高重复率XeCl准分子激光器的放电特性,分析了放电参数的改变对放电过程的影响.最佳转换效率达2.2%.     

Output and picosecond amplification characteristics of an efficient and high-power discharge excimer laser

Improvements in output pulse energy and efficiency of a conventional capacitor-transfer-type discharge excimer laser with automatic preionization have been achieved by extending the discharge volume and resulting moderate pumping of the active medium. The discharge laser produces a pulse energy of more than 1 J for XeCl, KrF, and ArF lasers in square beams of about 2×2 cm², and the maximum overall efficiency observed is 2.9% for XeCl, 3.2% for KrF and 1.8% for ArF. The laser device has been involved in a picosecond ( 32 ps) XeCl laser amplification system, and was operated as an amplifier at a repetitive frequency of 10 Hz. Saturation fluence for XeCl laser was measured to be 1.4 mJ/cm², and the picosecond pulse energy of 40 mJ was extracted from the amplifier.On leave from Ebara Corp., 6-6-7, Ginza, Chuo-ku, Tokyo 104, JapanOn leave from Mitsubishi Heavy Industries, LTD., 4-6-22, Kan-on shinmachi, Nishi-ku, Hiroshima 733, Japan     

高重复频率XeCl准分子激光器

本文报道一台高重复频率XeC准分子激光器的结构及其特性。采用接地栅金属陶瓷闸流管开关和气体横向流动系统及自动紫外火花预电离的放电结构。该激光器最高单脉冲能量为200mJ,最高重复脉冲频率为107Hz,最大平均功率18W。     

Space and time resolved discharge evolution of a large volume X-ray triggered XeCl laser system

The spatial distribution and the temporal development of the net gain have been measured in a ten liter active volume switchless discharge XeCl laser. The experimental results are compared with both zero-dimensional and two-dimensional kinetic code predictions. The comparison between the results of the kinetic codes and of some measurements relevant to the time-dependent discharge homogeneity allows a deeper insight into the influence of the streamer evolution on the discharge characteristics.ENEA StudentENEA Guest     

Performance improvement of an x-ray preionized XeCl laser of very small discharge volume

Increasing the preionization electron density is found to be an effective method for improving the output performance of discharge-pumped excimer lasers at high gas pressures when the power-supply voltage becomes a limiting factor. In a small volume (2 cm³), x-ray preionized discharge, orders of magnitude improvement in XeCl laser power output (up to 400 kW) and pulse energy (up to 26 mJ) over previously reported results have been found possible using this method. Modifications to the low energy x-ray source and discharge system leading to these improvements are described. Various laser output characteristics are also presented and discussed.     

Interferometric measurement of two-dimensional Xe and electron density distributions in XeCl laser discharges

A near-infrared, interferometric measurement of the density distribution of the electrons and excited xenon atoms has been performed at two discharge pumped, X-ray preionized XeCl lasers. The experimental results of one of these lasers are in good agreement with model calculations for the homogeneous phase. The electrons and excited states of xenon show a different behaviour in their spatial distributions at both lasers. In addition a region of inhomogeneities, which is identified as the hot-spot region, is been found near the cathode. Filamentation of the discharge can occur after a short time. The dimension of the hot-spot region depends on the preionization delay time. The same holds for the filamentation process, which in addition depends on the HCl partial pressure.     

Dynamics and correlated performance of a photo-triggered discharge-pumped HF laser using SF6 with hydrogen or ethane

3 , has been performed in Ne/SF₆/H₂ and Ne/SF₆/C₂H₆ mixtures. Parameters involved have been the storage line capacitance and the circuit inductance, the capacitors charging voltage, the RH-molecule type and partial pressure, and the X-ray dose for the preionization. High laser performance has been achieved with C₂H₆: an output energy up to 3 J corresponding to a specific energy of 9.6 J/l at an efficiency of 4.7%, which strengthens the advantage of the photo-triggering technique to energize high-power HF lasers. However the optimum performance achieved with H₂, 5.75 J/l and 3.5%, are lower. It is shown, through a time-resolved study of the electrical discharge and spatial dynamics correlated to laser power and energy measurements, that discharge instabilities are responsible for the poor laser performance of the mixture with H₂. These instabilities, which lead to arc development, are characteristics of the discharge in Ne/SF₆. It is demonstrated for the first time that addition of a heavy hydrocarbon, such as C₂H₆, to that mixture induces the discharge stabilization so that the laser emission arises in a homogeneous active medium. This effect allows us to achieve better laser performance than with H₂. Received: 17 March 1998/Revised version: 13 July 1998     

Comparison of characteristics of an x-ray preionized XeCl laser, pumped by water transmission line and low inductance capacitor bank

With a high uniformity of x-ray preionization, a long pulse duration and a high specific energy (9 J l^-1), an XeCl excimer laser output has been obtained by using a compact low inductance capacitor bank as the laser excitation circuit. The superior features of the low inductance capacitor bank (LICB) compared to the water transmission line (WTL) are attractive for repetitively pulsed XeCl excimer lasers.     

TEA CO2激光器不同放电电路放电过程的比较

 利用像增强CCD相机对脉冲CO₂激光器的放电区进行观测,获得了放电辉光的发展过程,由此研究了长脉冲放电电路和短脉冲放电电路对放电过程的影响。发现普通电容放电电路（长脉冲放电电路）存在与自持放电阶段相对应的二次辉光;采用磁压缩开关的短脉冲放电电路,预电离出现较晚,但预电离辉光峰值和主放电辉光峰值之间间距较短,不存在自持放电阶段,只观测到一次强辉光。长脉冲放电电路与短脉冲放电电路在放电的后期均存在一个阴极位降区形成的过程。短脉冲放电电路有利于产生更窄的脉宽和更高的峰值功率。     

用于薄膜沉积的XeCl激基激光器研制

以镀制半导体薄膜、巨磁薄膜、金刚石及其它薄膜,外延生长及后续的光刻,激光与物质的相互作用、等离子体研究为目的,设计、研制了脉冲放电激励的XeCl激基激光器.试验结果表明:激光脉宽18ns,单脉冲能量150mJ,矩形光斑大小2cm×1cm,束散角3mrad,最高重复频率5HZ.与同类激光器相比,具有结构简单、造价低廉、性能稳定等特点.     

Performance of a ten-liter electron avalanche-discharge XeCl laser device

This paper describes the laser performance of an X-ray preionized ten-liter volume, electron-avalanche discharge XeCl system, operated at dc charging voltages of up to 70 kV both with and without X-ray preionization. An output energy of more than 11J uniformly distributed over a (7×10) cm² spot size was achieved using a multichannel spark-gap as the main discharge switch. The discharge was also successfully operated in the switchless mode, yielding a 4.8 J output energy and a 0.9% efficiency. The time-resolved gain measurements provided information on the laser discharge evolution.ENEA GuestENEA Guest on leave from the Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, Shanghai, China     

Spatial distribution and temporal development of the gain in a wide aperture X-ray preionized excimer amplifier

The spatial distribution and temporal development of the gain in XeCl and KrF were studied in a wide aperture X-ray preionized excimer amplifier. In XeCl, the gain assumed a minimum in the centre of the discharge and the effective discharge width markedly increased with time. The gain in KrF showed less prominent spatial and temporal variation.