Design of a tilted two-mirror system

Formulae have been derived for eliminating main aberrations on the center of field of the tilted two-mirror system (TTS). The spherical aberration may be eliminated by considering the TTS as a co-axial system. The coma on the center of field will be reduced by conserving certain relationships between the tilting angles of the primary mirror and the secondary. In order to cancel the astigmatism on the center of field, one of the two mirrors must have bi-curvature at the vertex of the mirror. Ray tracing shows that the TTS solved by the given equations produces quite good image quality within a small field of view. In order to increase the useful field of view, the bi-curvature mirror with the shape 0L an inverse ellipsoid must have high order terms in its surface equation.     

Non-approximate method for designing annular field of two-mirror concentric system

Annular field aberrations of a three-reflection concentric system,which are composed of two spherical mirrors,are analyzed.An annular field with a high level of aberration correction exists near the position where the principal ray is perpendicular to the object-image plane.Aberrations are determined by the object height and aperture angle.In this letter,the general expression of the system aberration is derived using the geometric method,and the non-approximate design method is proposed to calculate the radii of the annular fields that have minimum aberrations under different aperture angles.The closer to 0.5（the ratio of the radius of convex mirror to the radius of concave mirror）is,the smaller the system aberration is.The examples analyzed by LABVIEW indicate that the annular field designed by the proposed method has the smallest aberration in a given system.     

偏心和倾斜光学系统初级象差理论的研究

在共轴光学系统波象差的基础上,推导出了光学元件的偏心和倾斜分别对主要象差的影响.得出了除了球差外,每一种象差由于偏心和倾斜都引入了它同种类的象差;小量的偏心和倾斜并不改变系统的球差的结论;如果球差并不为零,将会产生与象高无关的彗差,即轴向彗差等等.     

激光光学系统的初级象差

本文从泽尼克一高斯国多项式出发,讨论了三种初级象差(球差、营差、象散)在平衡及未平衡状态下的标准偏差同衍射孔半径与高斯光束半径之比α的关系.最后讨论了在均匀光波的最佳校正状态下,高斯光束初级象差同α的关系,得到高斯光束的初级象差可按照均匀光波象差理论进行校正的结论.     

基于波像差函数建立大口径施密特校正板方程

施密特光学系统由施密特校正板和球面反射镜组成,校正板设置在球面反射镜的球心处,系统的焦点不一定和反射镜的焦点重合。为了得到精确的校正板面形初始结构参数,基于波像差函数建立了带有离焦量的大口径施密特校正板的数学模型,同时校正了系统的三级和五级球差。利用光学设计软件对校正板口径为1000mm、主镜的曲率半径为2000mm、F数为1的系统进行了设计和分析,来验证校正板面形数学模型的正确性。结果显示此校正板的数学模型与优化后结果吻合得较好,校正板面形初始结构参数的精度得到了极大的提高,这为大口径、大相对孔径的施密特光学系统的设计提供了理论基础。     

光学合成孔径成像系统子孔径像差研究

根据波像差理论，推导了光学合成孔径成像系统单个子孔径存在各种像差时波面方差与子孔径数(N)的关系。推导结果表明，piston误差对系统的影响最大，其次是离焦误差、倾斜误差、球差、彗差和像散。运用离焦误差对piston误差、球差和像散进行像差平衡，其效果显著，特别是球差引起的波面方差下降90％。系统各项像差系数随子孔径数的增加而降低;当子孔径数大于6时，各像差系数变化缓慢。根据瑞利判据，计算N(N≤6)个子孔径合成系统的像差允限和相应的3孔径系统的斯特列尔比。     

Exact analytical theory of aberrations of centered optical systems

In the paper we present a new theory designed to overcome the deficiencies of the existing aberration theories. The main advantage is the theory’s capacity to perform analytical, direct, and accurate radius, and thickness calculations of aberration corrections for optical components and systems. Methodologically, we derive exact formulas for bilinear transformations from an object to an image space. Next, we introduce relative parameters in the matrix coefficients and by combining bilinear and matrix transformations we develop exact corrections on-axis aberrations and field aberrations such as distortion, astigmatism, and curvatures (including sagittal and tangential). The theory with an accuracy of 10^?8 mm (except for tangential and sagittal coma) allows precise radius and thickness calculation of components and systems for aberration corrections, sets exact coordinates of free-form surfaces, and enables the study of the surface and component capacities for aberration correction. The theory has supported the design of more than 10 different patented optical systems.     

三反射主动变焦系统设计

空间光学系统在对深空探测、监视、威胁侦测和对地高分辨率侦查等应用中,不仅需要能同时获得高分辨率和宽视场范围的变焦系统,还需要体积小、重量轻、低能耗及快速调焦的系统,传统机械变焦系统因需要复杂精确的机械运动控制而存在诸多问题.因而,基于主动光学理论,将主动光学元件应用到成像系统中,提出了通过某个或某几个光学元件的曲率半径变化实现系统焦距变化的理论.根据初级像差理论和系统的外形尺寸,研究了系统主动变焦原理,确定了初级像差方程组的约束条件,求解共轴主动变焦系统的初始结构参数,借助ZEMAX软件进行优化设计,设计了一个由静止的主镜、曲率半径作为变量的次镜和三镜、无光焦度的平面镜组成的三反射主动变焦系统.由于该共轴三反射主动变焦系统存在两次遮光,会影响系统像面能量的接收,因此,指出对共轴系统进行无遮拦离轴优化设计的必要性,讨论了离轴系统设计理论,并设计了离轴三反射主动变焦系统.     

光刻机投影物镜的像差原位检测新技术

提出了一种新的光刻机投影物镜像差原位检测(AMF)技术。详细分析了该技术利用特殊测试标记检测投影物镜球差、像散、彗差的基本原理,论述了该技术利用对准位置坐标计算像差引起的成像位置偏移量的方法。实验结果表明AMF技术可实现球差、彗差、像散等像差参量的精确测量。AMF技术考虑了光刻胶等工艺因素对像差引起的成像位置偏移量的影响,有效避免了目前基于硅片曝光方式的彗差原位检测技术对离焦量、像面倾斜等像质参量限制的依赖。     

Selection and optimization of mirror structure of off-axis two-mirror afocal system北大核心CSCD

According to the structural characteristics of aspheric off-axis two-mirror optical system, the imaging characteristics of the system were analyzed by using primary aberration theory. Based on the characteristics of different aspheric surfaces, the vector expression of system aberrations was derived. Using the Seidel coefficients, the primary wave aberration of systems were expanded and values of system aberration for different aspheric surface shapes were specifically calculated. After the evaluation index of the off-axis structure was determined, the imaging qualities of different surface shape combinations were compared. Then the optimal surface shape selection method was analyzed by quantitative comparison results. The results show that compared with other reflector combination methods, the spherical aberration, coma and astigmatism of the off-axis double paraboloid system are all 0, the wavefront RMS is much better than λ/14 (λ=0.587 6 μm), and the Strehl ratio is greater than 0.8. According to the calculation results, it not only has a stronger ability to suppress multiple primary aberrations, but also can effectively compress the volume of the system. Copyright ©2022 Journal of Applied Optics. All rights reserved.     

面对称光学系统的初级波像差理论研究

非旋转轴对称光学系统波像差理论的建立有利于理解旋转 轴对称光学系统的装调误差和离轴三反射光学系统等非旋转轴对称光学系统的选型设计. 本文利用旋转轴对称球面光学系统的全口径初级波像差理论推导了子孔径面对称光学系统的初级波像差分布公式, 证明了面对称光学系统中的节点像差理论, 即除球差外的所有初级像差的零值节点偏离视场中心, 而不再是视场的旋转对称函数; 并首次阐述了多零值节点初级非对称像差产生的根源和变化特性. 该理论可以有效指导非对称光学系统初始结构的选择和优化设计过程. 关键词： 面对称 像差 几何光学     

泽尼克多项式曲面投影显示系统

采用调制传递函数和波前像差分析方法,设计了基于三片泽尼克多项式曲面反射镜的反射投影成像系统.其中第一片反射镜表面为凹面,用于减小第二片反射镜的尺寸和获得高对比度,而另外两片反射镜表面为凸面,用于校正主要的像差和获得更短的投影距离.利用ZEMAX软件分析了所设计的基于泽尼克多项式曲面反射镜成像系统的光学性能.结果表明,设...     

折射率失配对双光子三维光存储中像差的影响

双光子吸收三维光信息存储是实现高密度光存储的重要方法。三维数据写入过程中光束需经过两层不同的介质(如空气和存储材料),对像差和存储效果产生很大的影响,因此在理论和实验上分析系统各项光学参量对折射率失配引起的像差和存储效果的影响具有很大的意义。首先建立光学存储系统模型,在平行平板条件下,利用波像差函数推导展开,获得五项初级(赛德耳)像差,即球差、彗差、像散、场曲、畸变,然后对于存储材料在水平和倾斜两种情况下对初级像差进行模拟计算与分析,理论模拟与实验表明:物镜的数值孔径越大,像差随着存储深度增加而增大的速度就越快。     

像差及湍流对90°空间光混频器性能的影响研究

光信号在大气湍流中发生畸变,畸变光信号经过有缺陷的光学天线和空间光混频器后,存在混频效率低及抖动的问题.针对空间输出型和单模输出型的90°空间光混频器,推导了带初级像差的90°空间光混频器模型,并研究了湍流对混频效率的影响.仿真结果表明,对于探测器靶面半径为50μm的空间输出型混频器,像差量为0.2λ的倾斜、球差、离焦...     

Determining parent radius and conic of an off-axis segment interferometrically with a spherical reference wave

A simple interferometric method is presented for determining the parent radius of curvature (ROC) and conic constant (CC) of a conic surface. This method compares the test surface with a spherical reference wavefront having a ROC equal to the local sagittal, medial, or tangential ROC. The measured wavefront aberrations, particularly the astigmatism and coma, and local radii are used to determine the parent ROC and CC. This method does not require null optics or knowledge of the surface coordinate where the measurement is made.     

二次曲面共形整流罩像差影响因素分析

传统整流罩为半球形或半球形的一部分,产生的空气阻力较大,不利于武器飞行速度的提高。基于空气动力学性能的考虑,采用共形整流罩的光学技术被提出。文章描述了二次曲面共形整流罩外表面、内表面的设计方法及面型表达式,通过在CODEV中建立共形整流罩的扫描成像模型,应用Zernike多项式分解法研究了不同长径比、边缘斜率、口径比和回转中心位置对离焦像差(Z4)、像散(Z5)、彗差(Z8)和球差(Z9)的影响规律。研究结果表明:二次曲面共形整流罩引入的离焦像差、像散、彗差和球差均随着长径比、边缘斜率和口径比的增加而增大,但对成像系统回转中心的位置不敏感。因此,在满足武器的空气动力学性能条件下应尽量减小长径比、边缘斜率和口径比,回转中心的位置主要根据结构需要进行设计。     

电子束曝光机大物面强磁透镜的研究

以SDS-3电子束曝光机的聚焦透镜系统为基础,在0.005弧度半张角,3×10－5的高压纹波,50 mm的像距,30×30 mm扫描场的条件下,研究了电磁透镜成像的笛卡尔坐标系中的近轴轨迹方程,给出了相应的计算初值条件和实例.讨论了电子束曝光机聚焦透镜系统中的球差、彗差、像散、场曲和畸变等电子光学特性的确定以及系统像质评定的问题.     

激光靶心冲击波观测镜折反式光学系统设计

设计了一种激光靶心冲击波观测镜的光学系统.用反射式光学系统代替折射式光学系统,解决了普通玻璃在200 nm端透过率较低的问题.反射镜不引入色差,有利于系统在200~800 nm谱段消色差.为消系统轴外像差,反射系统选型为对称式.反射镜全部采用球面镜,为消反射镜以及平板玻璃窗带入的球差,引入校正镜(材料JGS1),在满足要求的条件下,控制折射镜的厚度,使系统色差满足瑞利判据的色差允差,得到了良好的成像质量.     

非均匀激光辐照下硅镜热变形对光束传输特性的影响

 使用有限元法计算了硅镜在DF化学激光器非稳腔输出的中空非均匀激光辐照下镜面温升和反射面面形随时间变化的特性,使用65阶Zernike多项式对镜面面形进行了曲面拟合,使用光线追迹的方法计算了平行光束经不同数量硅镜反射后的光束波前分布PV值、Strehl比和Zernike像差系数随时间变化的特性。计算结果表明：在典型的DF激光器输出的中空方形光束辐照下,硅反射镜的热变形将使反射光束产生波前畸变,波前畸变中,y方向像散项占据主要地位,其次是离焦项;随着激光系统中反射镜面数量的增加,高阶像差系数将逐渐增大,且波前PV值与反射次数成线性关系。