准分子激光全固态脉冲电源设计与实验研究

 针对脉冲能量5~8 mJ的ArF准分子激光器,设计了基于可控硅开关结合三级磁脉冲压缩开关的全固态脉冲电源,采用国产可控硅和磁开关材料,获得了上升时间约150 ns,电压10~14 kV,传递能量0.35~0.68 J的激励脉冲,并实现了对准分子激光器快放电激励。三级磁开关总效率35%,分析表明磁开关损耗较大主要原因为电容能量转移不充分、导线铜损及磁芯材料铁损较大,并提出了相应改进办法。     

准分子激光全固态脉冲电源设计与实验研究

针对脉冲能量5~8 mJ的ArF准分子激光器,设计了基于可控硅开关结合三级磁脉冲压缩开关的全固态脉冲电源,采用国产可控硅和磁开关材料,获得了上升时间约150 ns,电压10~14 kV,传递能量0.35~0.68 J的激励脉冲,并实现了对准分子激光器快放电激励。三级磁开关总效率35%,分析表明磁开关损耗较大主要原因为电容能量转移不充分、导线铜损及磁芯材料铁损较大,并提出了相应改进办法。     

0.73 J脉冲能量KrF准分子激光器的特性

研制了一台KrF大能量准分子激光器,激光器采用紧凑型Chang电极与紫外火花预电离的结合, 实现了激活区大面积的均匀辉光放电,利用LC反转倍压以及一级磁脉冲压缩技术在放电电容上实现了峰值电压40 kV、脉冲上升时间约为100 ns的高压快脉冲激励。研究了工作气体含量对激光器能量输出的影响,在总气压3.3105 Pa,F2/He, Kr, Ne体积分数比值为1.97∶3.18∶94.85,充电电压27 kV时,得到了738 mJ的单脉冲能量输出,激光近场光斑30 mm14 mm,在充电电压23 kV时,全电效率最高,达到2.0%。     

kHz准分子激光器全固态脉冲激励源

由于寿命制约,准分子激光器使用的传统放电开关闸流管不能满足准分子激光器高重复频率长期稳定工作运行的要求。设计了基于两级磁脉冲压缩技术的全固态脉冲功率模块,使用大功率半导体开关结合脉冲升压变压器产生s级的高压脉冲,利用磁脉冲压缩技术将上升时间为s级高压脉冲压缩至满足准分子激光器使用的上升时间为0.1 s级高压脉冲。在ArF准分子激光头上放电,获得激励脉冲的上升时间约为90 ns,放电电压16.5 kV,重复频率达到1 kHz,两级磁脉冲压缩开关能量传递效率达59.1%。     

400 Hz高光束质量高功率短脉冲激光器

研制了大能量高光束质量短脉冲激光器,系统采用主振荡+预放大器+主放大器2级主振荡功率放大器(MOPA)结构。采用双棒热效应补偿改善光束质量的措施,在重复频率400 Hz时实现单脉冲能量40 mJ、光束质量因子约为1.2的激光输出。激光器放大后实现单路脉冲能量712.5 mJ、脉宽12.4 ns的激光输出,采用球差补偿的方法提高了激光器的光束质量,在最大输出功率下实现了光束质量因子小于2.3,光光效率27.7%。偏振合束后,激光器输出能量大于1.4 J。     

二次升压的重复频率脉冲电源

介绍一种采用脉冲变压器二次升压工作方式实现高电压脉冲输出的设计电路，电路的主要特点是可以对电容负载实现快速充电，通常其充电时间可控制在几百纳秒内。由于在电路中的开关器件为氢闸流管和磁压缩装置，因此系统具有千赫兹的连续重复频率工作能力。目前，以这种方式工作的重复频率脉冲电源系统，脉冲调制过程的能量传输效率大于70％，输出脉冲电压大于600kV，连续重复频率大于100Hz.     

紧凑型重复频率高压纳秒脉冲电源及其仿真模型

纳秒脉冲等离子体在诸多实际的工程应用中依赖于小型化且可靠的纳秒脉冲电源实现。设计了一种紧凑型全固态高压纳秒脉冲电源,该电源主要由直流电源部分、绝缘栅双极晶体管及其驱动控制电路、可饱和脉冲变压器、磁脉冲压缩网络等组成。通过理论计算分析、PSpice电路仿真以及实验研究表明,其最终可以在800 的输出负载阻抗上获得幅值40 kV、脉冲宽度100 ns左右、脉冲上升沿约50 ns的高电压脉冲,重复频率最高可达5 kHz。     

焦耳级放电激励紫外预电离HF激光器

研制了一台采用紫外火花预电离和横向放电结构的非链式电激励脉冲HF激光装置,采用氢闸流管结合一级磁脉冲压缩开关的高功率电激励系统。实验研究了激光工作介质SF6,H2不同压强比和总工作气压对激光输出能量的影响,得出了最佳气体组分,确定了最佳工作气压。总气压在8.8 kPa,气体组分H2与SF6气压比为1:9时,获得最佳的激光输出,输出能量达到1.3 J,激光器的光电转换效率达到2.4%。:     

一种基于增益调制技术的全光纤化脉冲Yb光纤激光器

以波长为975 nm的半导体激光器作为泵浦源,周期性地脉冲泵浦一个包含Yb掺杂光纤和光纤光栅对的Yb光纤激光器,实现了基于增益调制技术的全光纤化高功率Yb光纤激光器的稳定脉冲输出.在50 kHz重频下,采用20 W的泵浦功率和2.4 μs的泵浦脉冲宽度,获得了1 060 nm波长脉冲宽度仅100 ns的稳定脉冲激光输出,单脉冲激光能量约为20 μJ.以此作为脉冲激光种子进行功率放大,获得了性能稳定的全光纤结构高功率脉冲激光输出,放大后单脉冲能量超过200 μJ,激光放大器斜率效率达到60%.     

紧凑重频PFN-Marx脉冲发生器

研制了一台紧凑重频脉冲形成网络(PFN)-Marx脉冲发生器,由PFN-Marx发生器、脉冲充电单元、重频触发单元等组成。PFN-Marx发生器模块采用全电感隔离,直径为480 mm,长度为700 mm。脉冲充电单元采用中储电容加脉冲变压器方法,单次充电可以满足10次输出。重频触发单元采用变压器和磁开关一体化设计的全固态Marx发生器技术,输出电压大于50 kV,前沿小于100 ns。脉冲发生器早期输出电参数为单次10 GW,脉冲宽度100 ns,前沿10 ns,阻抗40 。重频工作时输出功率7 GW,频率5 Hz。后期调整后电参数更改为单次10 GW,脉冲宽度70 ns,前沿10 ns,阻抗50 。重复频率工作时稳定输出功率8 GW,频率10 Hz,单串10个脉冲。初步的应用研究中,利用改进后的平台,在5 GW条件下驱动磁控管获得了S波段约1 GW的微波输出。     

Short-channel drain current model for asymmetric heavily / lightly doped DG MOSFETs

Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression suitable for material processing applications are presented here. The laser incorporates in-built compact gas circulation and gas cooling to ensure fresh gas mixture between the electrodes for repetitive operation. A magnetically coupled tangential blower is used for gas circulation inside the laser chamber for repetitive operation. The exciter consists of C–C energy transfer circuit and thyratron is used as a high-voltage main switch with single-stage magnetic pulse compression (MPC) between thyratron and the laser electrodes. Low inductance of the laser head and uniform and intense pre-ionization are the main features of the electric circuit used in the laser. A 250 ns rise time voltage pulse was compressed to 100 ns duration with a single-stage magnetic pulse compressor using Ni–Zn ferrite cores. The laser can generate about 150 mJ at ～100 Hz rep-rate reliably from a discharge volume of 100 cm ³. 2D spatial laser beam profile generated is presented here. The profile shows that the laser beam is completely filled with flat-top which is suitable for material processing applications. The SEM image of the microhole generated on copper target is presented here.     

X-ray preionized CO2 laser

A short pulse (100 ns) high-energy x-ray source has been used to preionize a transversely excited carbon dioxide gas discharge laser of 600 cm³ active volume. The maximum output power of 60 MW in a 50 ns FWHM pulse was achieved from a CO₂–N₂–He–CO–Xe static gas mixture at 600 Torr pressure. The energy conversion efficiency was 6%.     

Short pulse,x-ray preionization of a high pressure XeCl gas discharge laser

A short pulse (35 ns), high energy X-ray source, driven by a coaxial Blumlein pulser, has been used to preionize a 2.5 × 3 × 30 cm³ active volume XeCl avalanche discharge laser. A maximum output energy of 1 J has been extracted at 0.9% efficiency (including X-ray preionization). Measurements have been performed to investigate the influence of the X-ray pulse timing on laser output and discharge quality.     

Long-pulse KrCl laser with a high discharge quality

The discharge quality and optimum pump parameters of a long-pulse high-pressure gas discharge excited KrCl laser are investigated. A three-electrode prepulse–mainpulse excitation circuit is employed as pump source. The discharge volume contains a gas mixture of HCl/Kr/Ne operated at a total pressure of up to 5 bar. For a plane–plane resonator, the divergence of both output laser beams is measured. A low beam divergence of less than 1 mrad is measured as a result of the very high discharge homogeneity. A maximum laser pulse duration of 150 ns (FWHM) is achieved for a pump duration of 270 ns (FWHM) and a power density of 340 kW cm^-3. Pumping the discharge under optimum conditions employing a stable resonator results in a maximum specific energy of 0.45 J/l with a laser pulse duration of 117 ns and an efficiency of 0.63% based on the deposited energy. PACS 42.55.Lt; 52.25.-b; 52.59.Ye     

Laser on nitrogen-electronegative gas mixtures, pumped by inductive energy storage generator: Experiment and theoretical model

The advantages of inductive energy storage (IES) generators for increasing the pulse energy, power, and duration for nitrogen laser pumped by self-sustained transverse discharge have been experimentally demonstrated. A theoretical model is developed and the operation of IES-pumped laser on nitrogen-electronegative gas mixtures is numerically simulated. It is shown experimentally and theoretically that, adding electronegative gases, one can control the pulse shape of lasing on the C³II _u -B³II _g transition in nitrogen. The increase in the electric field strength in the laser gap in N₂-NF₃ and N₂-SF₆ mixtures produced 337.1-nm laser pulses consisting of two spaced peaks and 40–50-ns pulses close to rectangular. The increase in the laser active volume to 6 l (discharge cross section to 6×10 cm²) in N₂–SF₆ mixtures made it possible to obtain the maximum output energy (Q=110 mJ) and UV power (P _las =6 MW). In N₂-NF₃ mixtures, the laser pulse duration was up to ∼100 ns with an energy up to Q=30 mJ.     

The effect of pulse forming line impedance on the performance of an X-ray preionised XeCl discharge laser

The construction and performance of an X-ray preionised XeCl discharge laser is described. The laser gives an output energy of up to 4.65 J with a pulse duration ?140 ns and a beam cross-section of 4.2 x 3.0 cm². Electrical efficiencies of up to 3.2% have been obtained without the use of an external prepulse circuit. This is 90% of the efficiency which is predicted to be possible using such a circuit in this laser system.     

Rapidly tuning miniature TEA CO2 laser – rotating mirror and grating mechanism

In this research, directed toward using differential absorption lidar (DIAL) for measuring concentrations of pollutant gases, a device for rapidly tuning a transversely excited atmospheric-pressure (TEA) CO₂ laser is presented. It is shown that it is possible to utilize a rotating six-sided scanning mirror and a fixed diffraction grating to rapidly switch wavelength over randomly selected lasing transitions in the 9–11 μm region of the spectrum. The scanning mirror and an optical encoder are driven by a hysteresis synchronous motor at a speed of 1500 rpm. A surface-wire-corona preionization was utilized in a cavity. The laser system is highly automated with microprocessor-controlled laser line selection. Single-branch emission at two wavelengths with time interval ⩽10 ms has been obtained from a single cavity TEA CO₂ laser. An accurate line selection has been demonstrated in over 40 transitions at a pulse repetition frequency of up to 100 Hz. The laser energy at first-order couple output was up to 20 mJ per pulse and the pulse width is about 60 ns in an active volume of 36 cm³.     

Miniature high-repetition-rate TEA CO2 laser with surface-wire-corona preionization

In this article, an experimental study of a miniature, sealed-off, high-repetition-rate transversely excited atmospheric-pressure (TEA) CO₂ laser with a kind of surface-wire-corona preionization (SWCP) is described. We have utilized an SWCP consisting of SiO₂ dielectric tube and a fine wire strained and attached to the dielectric surface. A BN ceramic material, which has an extremely low coefficient of thermal expansion of about 5 × 10⁻⁷/°C was employed as a supporter of the resonator. A measurement on emission spectra of SWCP has been reported. By applying SWCP to the TEA CO₂ laser, efficient laser operation at an overall efficiency of 9.8% with an output energy of 150 mJ has been achieved from a small discharge volume of 25 cm³ with an active length of 230 mm. At the pulse repetition frequency of 60 Hz, the TEM₀₀ mode of laser beam with pulse width of 60 ns was obtained.