非本征F-P局部放电光纤传感器设计及灵敏度分析

为解决超声波法检测电力设备局部放电灵敏度低问题,提出一种采用石英膜片的全电介质结构的光纤法 珀超声传感器设计方法。为获得适于局放检测频响特性的法 珀传感器,根据弹性力学原理分析法 珀传感器固有频率随膜片尺寸参数变化规律,利用ANSYS有限元仿真方法设计3种不同结构尺寸的法 珀传感器。在绝缘油箱中采用信号发生器驱动压电陶瓷传感器发射50 kHz~250 kHz超声波,获得F P传感器的幅频特性曲线。F P1~F P3对板 板电极局放声信号检测实验表明,设计传感器一阶固有频率在150 kHz处可有效检测局放,且相同固有频率下F P传感器灵敏度随膜片厚度减小而显著提高。相同结构参数下腔长为130 m和100 m的F P传感器检测灵敏度前者是后者的2.47倍,实验结果表明增加F P腔长可提高传感器局放检测灵敏度。     

Thermal effects on mass detection sensitivity of carbon nanotube resonators in nonlinear oscillation regime

A mass sensor using a nano-resonator has high detection sensitivity, and mass sensitivity is higher with smaller resonators. Therefore, carbon nanotubes (CNTs) are the ultimate materials for these applications and have been actively studied. In particular, CNT-based nanomechanical devices may experience high temperatures that lead to thermal expansion and residual stress in devices, which affects the device reliability. In this letter, to demonstrate the influence of the temperature change (i.e., thermal effect) on the mass detection sensitivity of CNT-based mass sensor, dynamic analysis is carried out for a CNT resonator with thermal effects in both linear and nonlinear oscillation regimes. Based on the continuum mechanics model, the analytical solution method with an assumed deflection eigenmode is applied to solve the nonlinear differential equation which involves the von Karman nonlinear strain–displacement relation and the additional axial force associated with thermal effects. A thermal effect on the fundamental resonance behavior and resonance frequency shift due to adsorbed mas, i.e., mass detection sensitivity, is examined in high-temperature environment. Results indicate a valid improvement of fundamental resonance frequency by using nonlinear oscillation in a thermal environment. In both linear and nonlinear oscillation regimes, the mass detection sensitivity becomes worse due to the increasing of temperature in a high-temperature environment. The thermal effect on the detection sensitivity is less effective in the nonlinear oscillation regime. It is concluded that a temperature change of a mass sensor with a CNT-based resonator can be utilized to enhance the detection sensitivity depending on the CNT length, linear/nonlinear oscillation behaviors, and the thermal environment.     

芯轴型光纤水听器声压相移灵敏度响应分析

提出了一种带空气腔芯轴型光纤水听器的结构模型,并对其声压相移灵敏度的响应特性进行了研究.通过对空气腔芯轴型光纤水听器的基本原理和结构进行分析,得出光纤与弹性筒作用的相互关系;建立了动力学等效模型,得出带空气腔芯轴型光纤水听器声压相移灵敏度表达式以及频率特性的理论模型;利用有限元方法,得到芯轴型光纤水听器的响应模型.根据提出的结构和确定的参量制作出相应的探头,经过试验测试,其3 dB带宽约为30 kHz,测试结果验证了提出的理论模型与有限元模型的正确性.     

Application of an electrostatically actuated cantilevered carbon nanotube with an attached mass as a bio-mass sensor

In the present paper, another latent capability of SWCNT as a mass sensor is investigated. The relationship between the resonant frequency, dynamic pull-in voltage at the resonance frequency shift, and the attached mass is established by using the nonlocal Euler–Bernoulli beam theory. Using this relationship, a general closed-form nonlinear sensor-equation has been derived for the detection of the mass attached to the SWCNT. The aim of this study and present model is to show the sensitivity of the Cantilevered SWCNT to the values and positions of attached mass. Moreover, the results indicate that by increasing the value of attached mass and considering a single non-local scaling parameter (e₀), the values of dynamic pull-in voltage at the resonance frequency shift are decreased. Because of the small scaling parameter (e₀), the mass sensitivity of carbon nanotube increases, when the position of the attached mass is in the tip of a Cantilevered SWCNT length. The authority and the accuracy of these formulas are examined with other pull-in sensor equations in literatures. The results demonstrate that the new sensor equation can be applied for CNT-based mass sensors with rational accuracy.     

High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm

We present a fiber-optic extrinsic Fabry-Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0-50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.     

FBG传感器在空腔爆炸压力测量中的应用研究

光纤光栅(FBG)传感器具有灵敏度高，测量量程大，抗电磁干扰能力强，耐高温能力强等诸多优点，在爆炸冲击测试领域具有广泛的应用前景。针对空腔爆炸压力变化历程对压力传感器的性能要求，设计了一种抗冲击FBG压力传感器。传感器采用圆平膜片作为承压面，利用均匀压力作用下的挠度拉伸FBG产生位移。对传感器的力学模型进行了理论计算，并进行了有限元仿真，理论分析与数值模拟计算结果误差小于2%。使用标准压力源对传感器进行了标定，获得最终的压力灵敏度为545.187 kPa/nm，线性度相关度为99.998%。根据空腔爆炸现场防护需求，设计了有效的抗爆防护装置，并将该传感器成功用于空腔爆炸爆后气体压力变化历程测量，取得很好的测试效果。     

High-sensitivity fiber-tip pressure sensor with graphene diaphragm

A miniature fiber-tip pressure sensor was built by using an extremely thin graphene film as the diaphragm. The graphene also acts as a light reflector, which, in conjunction with the reflection at the fiber end-air interface, forms a low finesse Fabry-Perot interferometer. The graphene based sensor demonstrated pressure sensitivity over 39.4 nm/kPa with a diaphragm diameter of 25 μm. The use of graphene as diaphragm material would allow highly sensitive and compact fiber-tip sensors.     

光纤微机电系统压力传感器的理论分析和数值模拟

设计了一种基于微机电系统(MEMS)的光纤压力传感器,证明了光纤MEMS压力传感器在工作状态下可以由法布里_珀罗腔的理论模型解释。推导出了在光纤MEMS压力传感器中硅横膈膜的压力与干涉光强的关系表达式,并对光纤MEMS压力传感器的模型进行了数值模拟,初步确定了在传感器的制作过程中各个物理量的取值。其中腔体半径为300μm、腔体深度为1.42μm、硅横膈膜厚度为23μm,为光纤MEMS压力传感器的加工和制作提供了理论基础。     

光子晶体光纤温度压力传感器

提出了一种在高温环境下同时测量温度和气压的光子晶体光纤温度压力传感器.在普通单模光纤和光子晶体光纤之间熔接一段空心光纤构成干涉结构.空心光纤段构成非本征法布里-珀罗干涉仪,利用光子晶体光纤的微孔与外界相通,通过气体折射率变化来测量环境中的气压变化;光子晶体光纤段构成本征法布里-珀罗干涉仪,利用热膨胀效应和热光效应来测量环境中的温度.传感器的解调通过自制的白光干涉解调仪实现,实验通过测量腔长得到被测环境的温度和气压.在不同温度和气压环境下,对腔长分别为306μm和1535μm的温度压力光纤传感器进行连续测量.实验结果表明,传感器能够在28~800℃的温度下和0~10 MPa的气压下稳定工作,测量范围内温度灵敏度可达17.4 nm/℃,压力灵敏度随温度增加而降低,在28℃时可达1460.5 nm/MPa.     

应变石墨烯纳米带谐振特性的分子动力学研究

从动势能转换与守恒原理出发,在微正则(NVE)系综下,采用COMPASS力场对石墨烯纳米带及其应变传感器的谐振特性进行了分子动力学模拟.研究发现,非线性响应主导了石墨烯纳米带的动态行为,而其超高的基波频率则与长度和边界条件密切相关;单轴拉伸应变对石墨烯纳米带基波频率的影响显著且强烈依赖于边界条件,四边固支型应变石墨烯纳米带具有更高的频移,其灵敏度可高达7800 Hz/nanostrain,远大于相同长度碳纳米管应变传感器的灵敏度;石墨烯纳米带及其应变传感器的谐振特性均与手性无关.本文所得结果表明,由于超低 关键词： 石墨烯纳米带 分子动力学 应变 基波频率     

Dynamic response of sensor diaphragm with residual stress in contact with liquids

The dynamic response of a sensor diaphragm with residual stress in contact with a liquid is theoretically investigated in this paper. The liquid is assumed to be incompressible and inviscid. The acoustic radiation as the main source of energy dissipation in a medium virtually added the mass of the diaphragm and decreased the quality factor of the diaphragm. The effects of the residual stress on the added virtual mass and the quality factor of the diaphragm are presented. Finally, forced oscillations of the sensor diaphragm with residual stress in contact with a liquid are investigated. It is found that the requirements of high sensitivity and large vibration displacement are contradictory. The analysis and results are valuable for conducting the design of circular sensor diaphragms for biological applications.     

Helmholtz腔与弹性振子耦合结构带隙

为提高Helmholtz型声子晶体低频隔声性能,设计了一种Helmholtz腔与弹性振子的耦合结构,通过声压场及固体振型对其带隙产生机理进行了详细分析,建立了相应的弹簧-振子系统等效模型,并采用理论计算和有限元计算两种方法研究了各结构参数对其带隙的影响情况.研究表明,该结构可等效为双自由度系统振动,在低频范围内具有两个带隙;在6 cm的尺寸下,其第一带隙下限可低至24.5 Hz,而同尺寸无弹性振子结构只能达到42.1 Hz,带隙下限降低了40%,较传统Helmholtz结构具有更为优良的低频隔声特性.另外,在框体尺寸一定的情况下,降低结构间距、增大开口空气通道长度及振子质量、增大左侧腔体体积等方式,是增大带隙宽度、提高低频隔声效果的主要手段.     

High-sensitivity, high-frequency extrinsic Fabry-Perot interferometric fiber-tip sensor based on a thin silver diaphragm

We propose and demonstrate a fiber-tip sensor based on an ultra-thin silver diaphragm for highly sensitive and high frequency ultrasonic detection. The diaphragm is prepared by the vacuum thermal deposition method and then transferred to the fiber tip. The sensor demonstrated in this letter has a 300 nm thick diaphragm with an inner diameter of 75 μm, leading to a static pressure sensitivity of 1.6 nm/kPa and a resonant frequency of 1.44 MHz. This sensor has potential applications in many fields such as structural health monitoring and medical ultrasonography.     

A Facile Strategy for Low Young's Modulus PDMS Microbeads Enhanced Flexible Capacitive Pressure Sensors

Flexible pressure sensors are widely demanded in human care systems. A simple and effective strategy for sensor fabrication can markedly promote its application. Herein, a facile strategy is employed to prepare a flexible capacitive pressure sensor with a polydimethylsiloxane microbeads-modified dielectric layer. Owing to the microbeads structure, the proposed sensor achieves a sensitivity of 0.048 kPa⁻¹ in the range of 0–10 kPa with a wide dynamic range (up to 100 kPa). The sensitivity is nine times higher than that of the planar structure. Moreover, the microbeads structured sensor obtains a low limit of detection (0.2 kPa), fast response time (120 ms), and good stability (variation lower than 3.30% after 1000 loading/unloading cycles at 20 kPa). The finite-elemental analysis reveals that the microbeads structure is critical to enhance the performance of sensors. Finally, the pressure sensor is successfully applied to detect touch signal, joints movement, and breathing, exhibiting its promising prospects as smart wearable devices. Furthermore, the strategy may provide a new idea for the microstructural design of capacitive pressure sensors.     

An optical fiber infrasound sensor: a new lower limit on atmospheric pressure noise between 1 and 10 Hz

A new distributed sensor for detecting pressure variations caused by distant sources has been developed. The instrument reduces noise due to air turbulence in the infrasound band by averaging pressure along a line by means of monitoring strain in a long tubular diaphragm with an optical fiber interferometer. Above 1 Hz, the optical fiber infrasound sensor (OFIS) is less noisy than sensors relying on mechanical filters. Records collected from an 89-m-long OFS indicate a new low noise limit in the band from 1 to 10 Hz. Because the OFIS integrates pressure variations at light-speed rather than the speed of sound, phase delays of the acoustical signals caused by the sensor are negligible. Very long fiber-optic sensors are feasible and hold the promise of better wind-noise reduction than can be achieved with acoustical-mechanical systems.     

盘片式光纤传感器灵敏度计算方法

系统地开展了对各类盘片式光纤传感器灵敏度的研究工作。以周边固支、中心镶嵌刚性质量块的盘片式光纤加速度传感器为例,分析了传感器弹性盘片上各点的应力应变状态;结合迈克耳孙干涉仪原理,建立了计算传感器加速度灵敏度的数学模型,并讨论了粘贴光纤盘的最佳尺寸。制作两个相应的传感器进行对比实验,验证了上述计算模型的正确性。采用上述模型系统地推导了不同边界条件情况下盘片式光纤传感器的粘贴区域和灵敏度计算公式。对盘片式光纤传感器如光纤加速度传感器、光纤压力传感器、光纤水听器等的设计制作具有理论指导作用。     

光纤光栅法布里-珀罗传感器频分复用技术

理论分析了光纤光栅法布里-珀罗(F-P)传感器频分复用技术的原理,并给出了信号处理对腔长选取的要求。数值模拟结果表明,不同腔长的传感器具有不同的谐振条纹频率,为保证频域中的信号不发生重叠,要求不同光纤光栅法布里-珀罗传感器间的腔长之差必须大于光纤光栅的长度。进一步的实验及模拟分析结果发现,温度等待测量的变化仅仅使光纤光栅法布里-珀罗传感器的反射光谱整体平移,相应的频域信号只产生相移而形状不发生变化,因而不能采用普通光纤法布里-珀罗(FFP)传感器的腔长傅里叶变换解调法解调频分复用光纤光栅法布里-珀罗传感器的信号。根据这一特点,提出了利用自相关分析实现频分复用传感器系统信号解调的方案。     

声表面横波压力传感器的电极质量负载效应分析方法

针对声表面横波(Surface Transverse Wave,STW)压力传感器,提出了一种考虑叉指电极质量负载的有限元和微扰理论结合分析方法。首先构建包含叉指电极的有限元模型,通过计算电极表面的面电荷得到器件的等效输入导纳,由导纳谐振点处提取STW传播声场,然后根据微扰理论,由STW传播声场以及压力引起的传感器结构的应力应变,得到包含电极质量负载影响的STW传感器的灵敏度。以一种基于ST-90°X石英材料的点压式STW压力传感器为例进行了理论计算,电极厚度为0.17 μm和0.21 μm时,计算灵敏度分别为-54.9 kHz/bar和-21.7 kHz/bar,说明电极质量负载对于传感器有较大影响。制作电极厚度为0.17 μm的传感器进行测试,得到-57 kHz/bar的压力灵敏度,实验结果和理论结果吻合,证明计算方法的有效性。      

基于椭球封闭空气腔的光纤复合法布里-珀罗结构折射率传感特性研究

提出了基于微椭球型空气腔的在线型光纤复合法布里-珀罗干涉结构,并对其折射率传感特性进行了研究.椭球型空气微腔是利用光纤熔接机对实芯光子晶体光纤和单模光纤以特定的熔接参数熔接形成.用高斯光束模型和ABCD法则分析了椭球型空气腔的腔内损耗,建立了电磁场在复合法布里-珀罗干涉结构中传播的物理模型.根据腔长比值的不同,环境折射率对干涉条纹的影响有对比度调制和波长调制,主要研究了一种波长调制型复合法布里-珀罗结构折射率传感器.仿真结果表明该折射率传感器在1—1.6范围内不出现折射率转折点;实验结果表明在1.333—1.466范围内,折射率灵敏度～37.088 nm·RIU-1,分辨率约为2.69×10-5.该光纤复合法布里-珀罗结构干涉条纹对比度高、体积小、成本低,用于折射率测量可靠性高、分辨率高、无折射率拐点、温度串扰小.     

Experimental research on distributed fiber sensor for sliding damage monitoring

A distributed optical fiber sensor (DOFS) with the principle of microbend loss has been developed for concrete or rock-sliding damage measurement. The combination of multiple microbend sensors can form a sensor array for distributed sensing application in monitoring local slippage or deformation along the rock mass of the high slope, and the optical time-domain reflectometry (OTDR) can be conveniently used for interrogation of each sensor point. The sensor sensitivity can be obtained at a specific range according to the requirement of the model test condition. Connected with multiplexed sensing processing schemes, its sliding range of dynamic sensing response reached 0–3.6 mm and semi-empirical formula was fitted according to data from model tests. The DOFS array may find a potential application in real-time monitoring and damage detection of large and critical slope engineering structures.