A simple model for high fluence ultra-short pulsed laser metal ablation

The ultra-short laser metal ablation is a very complex process, the complete simulation of which requires applications of complicated hydrodynamics or molecular dynamics models, which, however, are often time-consuming and difficult to apply. For many practical applications, where the laser ablation depth is the main concern, a simplified model that is easy to apply but at the same time can also provide reasonably accurate predictions of ablation depth is very desirable. Such a model has been developed and presented in this paper, which has been found to be applicable for laser pulse duration up to 10 ps based on comparisons of model predictions with experimental measurements.     

Ablation mechanism study on metallic materials with a 10 ps laser under high fluence

Single shot ablation of metallic materials of aluminium, titanium alloy (Ti6Al4V) and gold has been studied with 10 picoseconds (ps) laser pulses experimentally and theoretically. The ablation rate variation at high fluence was explained by a simplified predictive model based on critical-point phase separation (CPPS) theory. A comparison between experimental and numerical results inferred that CPPS may well be the dominant ablation mechanism for high fluence laser ablation at 10 ps laser duration.     

Numerical simulation of process dynamics during laser beam drilling with short pulses

In the last years, laser beam drilling became increasingly important for many technical applications as it allows the contactless production of high quality drill holes. So far, mainly short laser pulses are of industrial relevance, as they offer a good compromise between precision and efficiency and combine high ablation efficiency with low thermal damage of the workpiece. Laser beam drilling in this pulse length range is still a highly thermal process. There are two ablation mechanisms: evaporation and melt expulsion. In order to achieve high quality processing results, a basic process understanding is absolutely necessary. Yet, process observations in laser beam drilling suffer from both the short time scales and the restricted accessibility of the interaction zone. Numerical simulations offer the possibility to acquire additional knowledge of the process as they allow a direct look into the drill hole during the ablation process. In this contribution, a numerical finite volume multi-phase simulation model for laser beam drilling with short laser pulses shall be presented. The model is applied for a basic study of the ablation process with μs and ns laser pulses. The obtained results show good qualitative correspondence with experimental data.     

Mathematical modeling of laser ablation in liquids with application to laser ultrasonics

The use of laser ablation as a means of generating ultrasonic waves in liquid metals is studied in this paper. A mathematical model for predicting the onset of ablation is developed, as is a model of the ablation process based on steady state, one-dimensional gas dynamics in which the vapor phase is treated as an ideal gas. The results of this model are then used in a quasi-two-dimensional model of laser ablation that accounts for the spatial distribution of intensity in the laser beam. Model predictions are compared with experiments conducted on liquid mercury and excellent agreement is obtained. Based on these results, a simplified model is developed that shows excellent agreement with both the theory and the experiments.     

Effect of pressure relaxation during the laser heating and electron–ion relaxation stages

The multi-phase equation of state by Bushman et al. (Sov. Tech. Rev. 5:1–44, 2008) is modified to describe states with different electron and ion temperatures and it is applied to the non-equilibrium evolution of an aluminum sample heated by a subpicosecond laser pulse. The sample evolution is described by the two-temperature model for the electron and ion temperatures, while the pressure and density are described by a simplified relaxation equation. The pressure relaxation in the heating stage reduces the binding energy and facilitates the electron-driven ablation. The model is applied to estimate the ablation depth of an Al target irradiated by a subpicosecond laser pulse. It improves the agreement with the experimental data and provides a new explanation of the ablation process.     

Picosecond laser ablation of thin copper films

The ablation process of thin copper films on fused silica by picosecond laser pulses is investigated. The ablation area is characterized using optical and scanning electron microscopy. The single-shot ablation threshold fluence for 40 ps laser pulses at 1053 nm has been determinated toF _thres = 172 mJ/cm². The ablation rate per pulse is measured as a function of intensity in the range of 5 × 10⁹ to 2 × 10¹¹ W/cm² and changes from 80 to 250 nm with increasing intensity. The experimental ablation rate per pulse is compared to heat-flow calculations based on the two-temperature model for ultrafast laser heating. Possible applications of picosecond laser radiation for microstructuring of different materials are discussed.     

Incubation effect and its influence on laser patterning of ITO thin film

Results are presented on the surface damage thresholds of ITO thin films induced by single- and multi-pulse laser irradiation at a pulse duration of 10 ps and a wavelength of 1064 nm. For multi-pulse ablation the incubation effect results in a reduction of the damage threshold, especially apparent at low pulse numbers and very small film thicknesses. The incubation effect attributes to the accumulation of defect sites and/or the storage of thermal stress-strain energy induced by the incident laser pulses. An incubation coefficient of S=0.82 has been obtained which is independent on the film thickness in the range of 10–100 nm. In practical applications, the incubation effect determines the laser patterning structure of ITO films while increasing the pulse overlapping rate. The width of the patterned line can be predicted by the proposed model involving the laser fluence, the overlapping rate and the incubation coefficient.     

Characterization of aerosol plumes in nanosecond laser ablation of molecular solids at atmospheric pressure

Ablation of molecular solids with pulsed ultraviolet lasers at atmospheric pressure is an important process in (bio-)organic mass spectrometry. Of practical importance for analytical sampling and analysis are the plume formation and expansion. Plumes formed by atmospheric-pressure laser ablation of anthracene and 2,5-dihydroxybenzoic acid (2,5-DHB) were studied by light scattering imaging, which showed significant material release in the form of aerosols. The monitored plume expansion dynamics could be fitted to the drag-force model, yielding initial plume velocities of 150 m/s for anthracene and 43 m/s for DHB. While the angle of incidence does not affect the plume direction and propagation, a large dependence of the plume-expansion velocity on the laser pulse energy could be found, which is limited at atmospheric pressure by the onset of plasma shielding. With respect to analytical applications, the efficiency of sampling of the laser ablation products by a capillary could be experimentally visualized.     

Microdrilling of metals with an inexpensive and compact ultra-short-pulse fiber amplified microchip laser

We have investigated the ultra-fast microdrilling of metals using a compact and cheap fiber amplified passively Q-switched microchip laser. This laser system delivers 100-ps pulses with repetition rates higher than 100 kHz and pulse energies up to 80 μJ. The ablation process has been studied on metals with quite different thermal properties (copper, carbon steel and stainless steel). The dependence of the ablation depth per pulse on the pulse energy follows the same logarithmic scaling laws governing laser ablation with sub-picosecond pulses. Structures ablated with 100-ps laser pulses are accompanied only by a thin layer of melted material. Despite this, results with a high level of precision are obtained when using the laser trepanning technique. This simple and affordable laser system could be a valid alternative to nanosecond laser sources for micromachining applications.     

Three-dimensional photofabrication with femtosecond lasers for applications in photonics and biomedicine

A status report on rapidly advancing femtosecond laser technology, three-dimensional (3D) microstructuring by multiphoton illumination technique, is given. Taking its origin from multiphoton microscopy, this technique is now becoming an important microfabrication tool. In our work we apply near-infrared Ti:sapphire femtosecond laser pulses (at 800/780 nm) for 3D material processing. When tightly focused into the volume of a photosensitive material (or photoresist), they initiate 2PP process by, for example, transferring liquid into the solid state. This allows the fabrication of any computer generated 3D structure by direct laser “recording” into the volume of photosensitive material. 2PP of photosensitive materials irradiated by femtosecond laser pulses is now considered as enabling technology for the fabrication of 3D photonic crystals and photonic crystal templates. In particular, 2PP allows one to introduce defects at any desired locations, which is crucial for the practical applications. Recently, we studied possible applications of 2PP technique in biomedicine. 2PP is a very interesting technique for the fabrication of drug delivery systems, scaffolds for tissue engineering, and medical implants. These and other biomedical applications of 2PP will be reviewed.     

Micromachining NiTi tubes for use in medical devices by using a femtosecond laser

Recent growth in medical device technology has been substantially driven by developments in laser micromachining, which is a powerful fabrication technique in which nickel–titanium (Nitinol, NiTi) alloy materials that exhibit superelastic and shape memory properties are formed (e.g., self-expanding stents). In this study a NiTi tube curve surface process is proposed, involving a femtosecond laser process and a galvano-mirror scanner. The diameter of the NiTi tube was 5.116 mm, its thickness was 0.234 mm, and its length was 100 mm. The results indicated that during the machine process the ablation mechanism of the NiTi tubes was changed by altering the machining path. The path alteration enhanced the laser ablation rate from 12.3 to 26.7 μm/J. Thus the path alteration contributed to a wide kerf line, enabling the assisted air to efficiently remove the debris deposited at the bottom of the kerf during the laser ablation process. The results indicated that the NiTi tube curve process enhanced the laser ablation rate by two times and reduced the amount of energy accumulated within the materials by 50% or more. By altering the machining path using the scanning system, this process can decrease the production of heat affected zones (the accumulation of thermal energy) in medical device applications.     

Study of a line width estimation model for laser micro material processing using a photodiode

Estimation of the line width for a laser marking on the silicon wafer is very important to improve the productivity of the final product which use nonpackaged chip. Until now, only theoretical and numerical estimation models have been studied. However, it is not easy for these models to apply to real systems. In this study, a process monitoring system was used to develop an estimation model for the laser marking width. The plasma produced by interaction between the laser and the wafer was measured using an optical sensor. For each laser power setting, the correlation between the signal acquired from the optical sensor and the resulting line width was analyzed. Estimation models were developed for laser marking width through statistical regression analysis and an artificial neural network algorithm.     

Ultrafast emission of ions during laser ablation of metal for 3D atom probe

The 3D atom probe(3DAP) is an imaging instrument based on the controlled field evaporation of single atoms from a sample having a tip shape with an end radius of 50 nm. In the fs laser assisted 3DAP the evaporation is induced by the laser pulses so that the physical process involved in this 3DAP analysis might correspond to the very early stages of the ablation process. In this paper we present the principle of the 3DAP and we discuss the existing models of the fs assisted evaporation. At last, we test the relevance of these models with pump-probe experiments on tungsten tips in the tomographic atom probe.     

基于双相延迟模型的飞秒激光烧蚀金属模型

为了分析飞秒激光烧蚀过程,在双相延迟模型的基础上建立了双曲型热传导模型.模型中考虑了靶材的加热、蒸发和相爆炸,还考虑了等离子体羽流的形成和膨胀及其与入射激光的相互作用,以及光学和热物性参数随温度的变化.研究结果表明:等离子体屏蔽对飞秒激光烧蚀过程有重要的影响,特别是在激光能量密度较高时;两个延迟时间的比值对飞秒激光烧蚀过程中靶材的温度特性和烧蚀深度有较大的影响;飞秒激光烧蚀机制主要以相爆炸为主.飞秒激光烧蚀的热影响区域较小,而且热影响区域的大小受激光能量密度的影响较小.计算结果与文献中实验结果的对比表明基于双相延迟模型的飞秒激光烧蚀模型能有效对飞秒激光烧蚀过程进行模拟.     

Theoretical model of CO2 laser ablation of soft-tissue phantoms

Summary A model of thermal laser ablation of soft tissues is developed taking into consideration two mechanisms: evaporation and liquid moving, due to vapour pressure gradient. Usually a soft tissue is modelled as a single-component material with thermal and optical properties very similar to those of water. We examined the non-stable kinetics of the evaporation process, for short-pulse infrared laser ablation of soft tissues, and we also calculated the average liquid velocity and the ablation rates under vapour pressure gradient. The theoretical results are in good agreement with previous reported experimental data on gelatin and polyacrylamide tissue phantoms The authors of this paper have agreed to not receive the proofs for correction     

A finite element model using multi-layered shell element in laser forming

Due to its enormously high flexibility laser forming has been gaining importance in recent years. This rapidness and flexibility demand very precise controlling strategies especially when simulating the process of large plates and challenging the limited computation power of the current workstation. A simple, robust and accurate modeling method of laser forming has been demonstrated to solve this problem. The simplified model is meshed by multi-layered shell element, simulated with a more real scanning method and fewer parameters. The intelligent meshing strategies have reduced the number of elements dramatically. Thus the simulation efficiency has been improved significantly. By comparing the simulation results under the simplified model with the results under the traditional model for laser forming, the applicability of proposed method has been proven. The method of these simplified models is also suitable to simulate complex finite element models, which take much time to simulate. It would throw some light on the thermal mechanically coupled-field simulation of large sheet.     

Single-pulse drilling study on Au,Al and Ti alloy by using a picosecond laser

Picosecond laser single pulse ablation of Au, Al and Ti alloy (Ti6Al4V) was experimentally investigated with a laser pulse width of 10 ps at a wavelength of 1064 nm for potential industrial micromachining applications. The diameters, depths and morphologies of the drilled craters were studied. Two novel phenomena were found: as hole diameters decreased with fluence, a change of slope of the trend line indicated a change in ablation mechanism for Al and Ti alloy, metallic materials with short electron-phonon coupling times (<10 ps), while Au showed no such transition: an isolated island structure was also observed on Au due to significant melt expulsion. A one-dimensional two-temperature model has been used to discriminate different ablation phenomena. It is shown that metallic materials with different electron–phonon coupling constant have different ablation characteristics in the ps regime. This study could be very helpful for metallic material micromachining with high repetition rate ps lasers pulses which indicates that high throughput may be achieved as well as good machining quality.     

Vaporization and Plasma Shielding during High Power Nanosecond Laser Ablation of Silicon and Nickel

A thermal model to describe the high-power nanosecond pulsed laser ablation is presented. It involves the vaporization and the following plasma shielding effect on the whole ablation process. As an example of Si target, we obtainthe time evolution of the calculated surface temperature, ablation rate and ablation depth. It can be seen that plasma shielding plays a more important role in the ablation process with time. At the same time, the ablation depth with laser fluence based on different models is shown. Moreover, we simulate the pulsed laser irradiation Ni target. The evolution of the transmitted intensity and the variation of ablation depth per pulse with laser fluence are performed. Under the same experimental conditions, the numerical results calculated with our thermal model are more in agreement with the experimental data.     

Influence of thermal diffusion on the laser ablation of thin polymer films

The laser ablation of a photosensitive triazene polymer was investigated with a ns XeCl excimer laser over a broad range of thicknesses (10–400 nm). We found that the ablation threshold fluence increased dramatically with decreasing film thickness for films thinner than 50 nm. Ablation on substrates with different thermal properties (sapphire, fused silica, PMMA) was investigated as well, and a clear influence of the substrate material was obtained. A mathematical model combining thermal diffusion and absorption effects was used to explain the experimental data. The model is in good agreement with the experimental data and shows that heat diffusion into the substrate plays a crucial role for the ablation process of very thin films. PACS 52.38.Mf; 44.05.+e; 81.05.Lg     

“Cold” CO<Subscript>2</Subscript> laser ablation of green-state LTCC—experimental verification of improved model and comparison of various LTCC materials

New experimental results in support of the universal mechanism of “cold” laser ablation for machining of various commercial green ceramic materials (LTCC) are presented in this paper. The “cold” ablation model was mathematically formulated and employed to derive an ablation curve equation. The model was tested by CO₂ laser ablation of a custom-made green-state alumina ceramic featuring varying binder content. An excellent fit of ablation curve to experimental data was obtained, yielding insight into process energetics and an ablative measurement method of absorption coefficient. The analysis was applied to a sample of commercial LTCC materials. The ablation results were practically identical for all materials in agreement with the prediction of the model, with the high rates of >100 micron/shot at repetition >1 kHz and accuracy comparable with the ceramic grain size. This work provides evidence that the CO₂ laser processing has a great potential to become a key low-cost precision processing method for the existing LTCC-based electronic devices (micro-via drilling, general cutting and scribing) and for the new generation of LTCC-based devices comprising micro-fluidics, micro-mechanics, opto-electronics and meta-material structures.