金纳米棒的飞秒激光组装研究

金属纳米粒子对于研究表面等离子体共振具有非常重要的意义,其自组装形成的功能组装体能够展现出更加优异的整体协同性能.本文通过飞秒激光加工对金纳米棒直接进行组装,不引入其它的修饰剂,过程简单、快速(约1 min),不仅保留了金纳米棒表面等离子特性,且可以实现金纳米棒的任意精细图案化.将组装的微纳结构用于微流控芯片表面增强拉曼散射探测,可以得到很好的增强效果,为等离子体器件的制备提供了新的方法.     

飞秒激光加工蓝宝石超衍射纳米结构

蓝宝石具有超强硬度及耐腐蚀、耐高温、在紫外-红外波段具有良好的透光性等优点,在军工业以及医疗器械方面具有广泛的应用前景.然而这些优点又对蓝宝石的机械加工或化学腐蚀加工带来困难.飞秒激光脉冲具有热损伤小、加工分辨率高、材料选择广等特点,被广泛应用于固体材料改性和高精度三维微纳器件加工.本文提出了利用飞秒激光多光子吸收特性在蓝宝石表面实现超越光学衍射极限的精细加工.利用聚焦后的波长为343 nm的飞秒激光,配合高精密三维压电位移台,实现激光焦点和蓝宝石晶体的相对三维移动,在蓝宝石晶体衬底上进行精确扫描,得到了线宽约61 nm的纳米线,纳米线间的最小间距达到142 nm左右.利用等离子体模型解释了加工得到的纳米条纹的产生原因,研究了激光功率、扫描速度对加工分辨率的影响.最终本工作实现了超越光学衍射极限的加工精度,为实现利用飞秒激光对高硬度材料的微纳结构制备提供了参考.     

Micro-channel etching characteristics enhancement by femtosecond laser processing high-temperature lattice in fused silica glass

A fused silica glass micro-channel can be formed by chemical etching after femtosecond laser irradiation, and the successful etching probability is only 48%. In order to improve the micro-channel fabrication success probability,the method of processing a high-temperature lattice by a femtosecond laser pulse train is provided. With the same pulse energy and scanning speed, the success probability can be increased to 98% by optimizing pulse delay.The enhancement is mainly caused by the nanostructure, which changes from a periodic slabs structure to some intensive and loose pore structures. In this Letter, the optimum pulse energy distribution ratio to the etching is also investigated.     

飞秒激光湿法刻蚀微纳制造

飞秒激光微加工作为一种新型微纳制造技术,在复杂三维构型制作方面具有其独特的优势,但激光加工效率问题严重制约了飞秒激光微加工技术走向实际工程应用,提出一种飞秒激光湿法刻蚀微纳制造方法,以提高飞秒激光微加工的效率为突破口,通过调控激光与物质相互作用获得材料的目标靶向改性,进而结合化学湿法刻蚀实现硬质材料上的高效和高精度三维微加工,采用这一方法制作出的微透镜尺寸为80 μm,球冠高67 μm,表面粗糙度小于10 nm。利用这种方法,实现了不同结构与特性的高质量微透镜阵列的超精密制备,在石英内部也实现了螺旋微通道的复杂三维结构,螺旋通道直径为20 μm,长径比超过100。     

飞秒激光湿法刻蚀微纳制造

飞秒激光微加工作为一种新型微纳制造技术,在复杂三维构型制作方面具有其独特的优势,但激光加工效率问题严重制约了飞秒激光微加工技术走向实际工程应用,提出一种飞秒激光湿法刻蚀微纳制造方法,以提高飞秒激光微加工的效率为突破口,通过调控激光与物质相互作用获得材料的目标靶向改性,进而结合化学湿法刻蚀实现硬质材料上的高效和高精度三维微加工,采用这一方法制作出的微透镜尺寸为80 m,球冠高6.7 m,表面粗糙度小于10 nm。利用这种方法,实现了不同结构与特性的高质量微透镜阵列的超精密制备,在石英内部也实现了螺旋微通道的复杂三维结构,螺旋通道直径为20 m,长径比超过100。     

飞秒激光双光子加工的极限分辨力

采用3维压电微移动台高速扫描方式控制曝光时间与高精密转台精确控制圆形渐变衰减片以控制曝光功率两种方法,曝光时间和曝光功率可分别精确控制至0.02 ms和7 pW。通过精确控制聚合阈值附近处的曝光时间和曝光功率,分别在玻璃基板上获得了35 nm和45 nm的聚合物纳米线条,分别为所使用激光波长的1/22和1/17。实验结果表明,当曝光时间或曝光功率在加工阈值附近时,曝光时间和功率的微量减少会使聚合线宽急剧下降。     

飞秒激光双光子加工的极限分辨力

 采用3维压电微移动台高速扫描方式控制曝光时间与高精密转台精确控制圆形渐变衰减片以控制曝光功率两种方法,曝光时间和曝光功率可分别精确控制至0.02 ms和7 pW。通过精确控制聚合阈值附近处的曝光时间和曝光功率,分别在玻璃基板上获得了35 nm和45 nm的聚合物纳米线条,分别为所使用激光波长的1/22和1/17。实验结果表明,当曝光时间或曝光功率在加工阈值附近时,曝光时间和功率的微量减少会使聚合线宽急剧下降。     

Microlens arrays of high-refractive-index glass fabricated by femtosecond laser lithography

Microlens arrays of high-refractive-index glass GeO₂-SiO₂ were fabricated by femtosecond laser lithography assisted micromachining. GeO₂-SiO₂ thin glass films, which were deposited by plasma-enhanced chemical vapor deposition, have a refractive index of 1.4902 and exhibit high transparency at wavelengths longer than 320 nm. Using a femtosecond laser, three-dimensional patterns were written inside resists on GeO₂-SiO₂ films, and then the patterns were transferred to the underlying films by CHF₃ and O₂ plasma treatments. This combined process enabled us to obtain uniform microlens structures with a diameter of 38 μm. The heights of the transferred lenses were approximately one-quarter the height of the resist patterns, due to differences in the plasma etching rates between GeO₂-SiO₂ and the resist. The lens surfaces were smooth. When 632.8-nm-wavelength He-Ne laser light was normally coupled to the lenses, focal spots with a diameter of 3.0 μm were uniformly observed. The combined process was effective in fabricating three-dimensional surfaces of inorganic optical materials.     

Direct fabrication of surface-relief grating by interferometric technique using femtosecond laser

A surface-relief grating is a key element in optical communication and opto-electronic integrated devices. To date, many techniques for fabricating surface-relief gratings have been reported, but the present techniques still have many limitations and disadvantages. In this paper we present a new optical configuration to imprint a surface-relief grating by two-beam interferometry using a femtosecond laser. A relatively simple set-up is proposed in order to generate two parallel laser beams and then focus them by a common focusing lens to obtain an interference pattern. With the use of the common focusing lens, the two parallel beams will interfere exactly at the focal plane. This new optical set-up not only facilitates the alignment but also enhances the tunability to obtain different grating periods. Experimental results on solid copper targets are presented. The grating surface morphologies are studied by a scanning electron microscope and the grating relief profiles are characterized by an atomic force microscope. The prominent experimental results obtained have verified the feasibility of the new technique. In addition, the influence of laser fluence and pulse number on the surface morphology is presented. PACS 42.15.Eq; 42.25.Hz; 42.62.Cf     

Effective strategy to achieve a metal surface with ultralow reflectivity by femtosecond laser fabrication

An effective and simple method is proposed for fabricating the micro/nano hybrid structures on metal surfaces by adjusting femtosecond laser fluence, scanning interval, and polarization. The evolution of surface morphology with the micro/nano structures is discussed in detail. Also, the mechanism of light absorption by the micro/nano hybrid structures is revealed.Compared with the typical periodic light-absorbing structures, this type of micro/nano hybrid structures has an ultralow average reflectivity of 2% in the 250–2300 nm spectral band and the minimum 1.5% reflectivity in UV band. By employing this method, large areas of the micro/nano hybrid structures with high consistency could be achieved.     

6H-SiC的飞秒激光超衍射加工

利用飞秒激光直写微纳加工平台, 对6H-SiC材料进行了突破衍射极限的微纳结构加工研究. 使用中心波长和脉宽分别为800 nm和130 fs的钛蓝宝石激光器和荧光倒置显微镜搭建了飞秒激光直写微纳加工平台, 研究了在不同的实验条件下对6H-SiC的光学加工情况, 采用扫描电子显微镜对加工结构进行表征. 通过分析不同的激光功率和不同的曝光时间等实验条件下加工的分辨率, 发现分辨率随着激光功率的减小而提高, 随扫描速度的增大而提高, 且能突破光学衍射极限. 最终获得125 nm的加工线宽, 并加工了加工线宽240 nm, 周期1.0 μm的线阵列. 研究结果为微机电系统(MEMS)的微器件设计开创了新的思路, 对发展MEMS器件具有重要意义. 关键词： 飞秒激光直写 超衍射加工 6H-SiC 微机电系统     

Enhanced near field mediated nanohole fabrication on silicon substrate by femtosecond laser pulse

Investigation of the process of nanohole formation on silicon surface mediated with near electromagnetic field enhancement in vicinity of gold particles is described. Gold nanospheres with diameters of 40, 80 and 200 nm are used. Irradiation of the samples with laser pulse at fluences below the ablation threshold for native Si surface, results in a nanosized surface modification. The nanostructure formation is investigated for the fundamental (λ = 800 nm, 100 fs) and the second harmonic (λ = 400 nm, 250 fs) of the laser radiation generated by ultrashort Ti:sapphire laser system. The near electric field distribution is analyzed by an Finite Difference Time Domain (FDTD) simulation code. The properties of the produced morphological changes on the Si surface are found to depend strongly on the polarization and the wavelength of the laser irradiation. When the laser pulse is linearly polarized the produced nanohole shape is elongated in the E-direction of the polarization. The shape of the hole becomes symmetrical when the laser radiation is circularly polarized. The size of the ablated holes depends on the size of the gold particles, as the smallest holes are produced with the smallest particles. The variation of the laser fluence and the particle size gives possibility of fabricating structures with lateral dimensions ranging from 200 nm to below 40 nm. Explanation of the obtained results is given on the basis simulations of the near field properties using FDTD model and Mie's theory.     

Direct femtosecond laser fabrication of antireflective layer on GaAs surface

Photoinduced linear electrooptical (EO) effect was studied for Zinc oxide nanofilms doped by Nd. We have chosen Nd rare earth impurity with different contents to explore its influence on photoinduced EO. The kinetics of the photoinduced EO changes was studied. We have chosen the bicolor coherent 10 ns Nd:YAG laser pulses with power densities varying up to about 1 GW/cm² as the photoinducing beam. The enhancement of the photoinduced liner EO and its relaxation was explored. Additionally, the study of the photoinduced trapping levels within the energy gap was performed and the explanation of the obtained results is given.     

Controllable grating fabrication by three interfering replicas of single femtosecond laser pulse

The controllable periodic M-shape gratings are fabricated on the surface of silica glass by three coplanar interfering beams from a single femtosecond pulse. The configuration of the M-shape periodic structure is characterized by optical microscopy and atomic force microscopy. The experimental results and the theoretical simulation show that the period and the modulation depth ratio between the neighboring grooves of the fabricated gratings can be controlled by adjusting the collision angles and pulse energy of the three beams, respectively.     

飞秒激光制作微型光纤干涉传感器的研究进展

飞秒激光脉冲持续时间短、峰值功率高,在对物质进行处理过程中热作用区域小、加工精度高,已成为一种制作高性能、新结构光子器件的重要方法。简单介绍了飞秒脉冲激光微加工的方法和特性,归纳了飞秒激光直写技术在光纤干涉型传感器制作方面的研究进展,包括微型光纤Fabry-Perot干涉传感器和微型光纤Mach-Zehnder干涉传感器,重点介绍了这些光纤传感器的结构、特性和潜在应用。对用该技术制作的微型光纤干涉传感器进行了总结和展望。     

Surface enhanced Raman scattering silica substrate fast fabrication by femtosecond laser pulses

We report the fabrication of surface enhanced Raman spectroscopy (SERS) fused silica glass substrates using fast femtosecond-laser (fs-laser) scan, followed by silver chemical plating. A cross-section enhancement factor (EF) of 2.5×10⁶, evaluated by Rhodamine 6G (10⁻⁷ M solution), was obtained. The Raman mapping indicated a good uniformity over the fs-laser scanned area. The dimension and pattern of the SERS activated region can be conveniently controlled by laser 2D scanning, potentially enabling integration of SERS into a high-order optical–chemical analysis system on a glass chip.     

Ablation enhancement by defocused irradiation assisted femtosecond laser fabrication of stainless alloy

We evaluate the effects of the holes geometry drilled by a femtosecond laser on a stainless alloy with various defocused irradiation time, which ranges from 0 min to 1 h. The laser ablation efficiency is increased by a factor of3 when the irradiation time is elevated from 0 to 30 min. Also, the morphology of the hole is observed by a scanning electron microscope, where the result indicates that the defocused irradiation time has a significant influence on the morphology changes. The reason for such changes is discussed based on the pretreatment effect and the confined plasma plume. As an application example, the microchannel is fabricated by a femtosecond laser combined with the defocused irradiation to demonstrate the advantage of the proposed method in fabricating functional structures.