Depth profiling using C60 SIMS—Deposition and topography development during bombardment of silicon

A C₆₀⁺ primary ion source has been coupled to an ion microscope secondary ion mass spectrometry (SIMS) instrument to examine sputtering of silicon with an emphasis on possible application of C₆₀⁺ depth profiling for high depth resolution SIMS analysis of silicon semiconductor materials. Unexpectedly, C₆₀⁺ SIMS depth profiling of silicon was found to be complicated by the deposition of an amorphous carbon layer which buries the silicon substrate. Sputtering of the silicon was observed only at the highest accessible beam energies (14.5 keV impact) or by using oxygen backfilling. C₆₀⁺ SIMS depth profiling of As delta-doped test samples at 14.5 keV demonstrated a substantial (factor of 5) degradation in depth resolution compared to Cs⁺ SIMS depth profiling. This degradation is thought to result from the formation of an unusual platelet-like grain structure on the SIMS crater bottoms. Other unusual topographical features were also observed on silicon substrates after high primary ion dose C₆₀⁺ bombardment.     

电子回旋共振离子源等离子体的密度测量

 诊断电子回旋共振离子源等离子体的传统方法是采用传统的单探针无发射时测量伏安曲线,并根据曲线的拐点由理论公式计算出的等离子体密度。本文设计并研制了等离子体密度的测量装置。采用单根朗缪尔探针（该探针可以用来发射电子）测量等离子体的伏安特性。在探针有发射和无发射两种状态下测量得到两条伏安曲线,根据这两条曲线的"分叉点"得到等离子体电位,然后根据该电位直接由计算机计算出电子温度、电子密度。采用该新方法,测量得到的等离子体参量空间电位约为17 V,悬浮电位约为-5 V,电子温度约为4.4 eV,离子密度为1.10×10¹¹cm^-3,与传统方法计算出的等离子体1.12×10¹¹cm^-3相比,两者相差仅1.8％,但新方法效率和精度更高。     

Experimental study of the dependence of beam current on injection magnetic field in 6.4 GHz ECR ion source

The ion current from an electron cyclotron resonance (ECR) heavy ion source depends on the confining axial and radial magnetic fields. Some efforts were made by earlier workers to investigate magnetic field scaling on the performance of the ECR source. In order to study the dependence of the ion current on the injection magnetic field in the 6.4 GHz ECR source, we have measured the current by varying the peak injection field and have inferred that the variation of the current is exponential up to our maximum design injection field of 7.5 kG. An attempt has been made to understand this exponential nature on the basis of ion confinement time.     

ECR ion source based low energy ion beam facility

Mass analyzed highly charged ion beams of energy ranging from a few keV to a few MeV plays an important role in various aspects of research in modern physics. In this paper a unique low energy ion beam facility (LEIBF) set up at Nuclear Science Centre (NSC) for providing low and medium energy multiply charged ion beams ranging from a few keV to a few MeV for research in materials sciences, atomic and molecular physics is described. One of the important features of this facility is the availability of relatively large currents of multiply charged positive ions from an electron cyclotron resonance (ECR) source placed entirely on a high voltage platform. All the electronic and vacuum systems related to the ECR source including 10 GHz ultra high frequency (UHF) transmitter, high voltage power supplies for extractor and Einzel lens are placed on a high voltage platform. All the equipments are controlled using a personal computer at ground potential through optical fibers for high voltage isolation. Some of the experimental facilities available are also described.     

Simulation of electron behavior in PIG ion source for 9 MeV cyclotron

In this paper, we focus on a PIG source for producing intense H-ions inside a 9 MeV cyclotron. The properties of the PIG ion source were simulated for a variety of electric field distributions and magnetic field strengths using a CST particle studio. After analyzing the secondary electron emission (SEE) as a function of both magnetic and electric field strengths, we found that for the modeled PIG geometry, a magnetic field strength of 0.2 T provided the best results in terms of the number of secondary electrons. Furthermore, at 0.2 T, the number of secondary electrons proved to be greatest regardless of the cathode potential. Also, the modified PIG ion source with quartz insulation tubes was tested in a KIRAMS-13 cyclotron by varying the gas flow rate and arc current, respectively. The capacity of the designed ion source was also demonstrated by producing plasma inside the constructed 9 MeV cyclotron. As a result, the ion source is verified as being capable of producing an intense H^- beam and high ion beam current for the desired 9 MeV cyclotron. The simulation results provide experimental constraints for optimizing the strength of the plasma and final ion beam current at a target inside a cyclotron.     

进气量对强流正离子源反向电子流的影响研究

分析了EAST-NBI离子源束引出过程中反向电子的产生及物理特性,对典型情况下的进气量对离子源的影响进行了计算和实验研究.实验结果发现,质子比受进气量影响较小,进气量与反向电子流呈明显正相关.     

CSNS H^- ion source test stand

The Penning surface plasma source is adopted as the China Spallation Neutron Source (CSNS) H^- ion source. The designed energy and beam current of the source are 50 keV and 20 mA, respectively, with a normalized root mean square (norm. rms.) emittance of 0.2 πmm·mrad. The construction of a H^- ion source test stand has been completed, and the commissioning of the source is in progress. Stable H^- ion beams with energy of 50 keV and current up to 50 mA are attained. Emittance measurement for the H^- beam is being prepared.     

Molecular secondary ion formation under cluster bombardment: A fundamental review

A brief review is given regarding the application of cluster ion beams as desorption probes in molecular SIMS. The general observation is that the efficiency of secondary ion formation, particularly that of complex molecular species, is significantly enhanced if polyatomic projectiles are employed instead of atomic species. Apart from the sensitivity increase, cluster bombardment also appears to allow for molecular depth profiling studies without the accompanying damage accumulation normally associated with atomic projectiles. A few fundamental aspects are addressed in an attempt to highlight the physics behind these observations. It appears that much of the benefit associated with cluster bombardment is connected to the fact that these projectiles give access to very high sputter yields which are not accessible with atomic primary ions.     

微型电子回旋共振离子推力器离子源结构优化实验研究

微型电子回旋共振(ECR)离子推力器可满足微小航天器空间探测的推进需求. 为此, 本文开展直径20 mm的微型ECR离子源结构优化实验研究. 根据放电室内静磁场和ECR谐振区的分布特点, 研究不同微波耦合输入位置对离子源性能的影响, 结果表明环形天线处在高于ECR谐振强度的强磁场区域时, 微波与等离子体实现无损耦合, 电子共振加热效果显著, 引出离子束流较大. 根据放电室电磁截止特性, 结合微波电场计算, 研究放电容积对离子源性能的影响, 实验表明过长或过短的腔体长度会导致引出离子束流下降甚至等离子体熄灭. 经优化后离子源性能测试表明, 在入射微波功率2.1 W、氩气流量14.9 μg/s下, 可引出离子束流5.4 mA, 气体放电损耗和利用率分别为389 W/A和15%.     

不同磁路电子回旋共振离子源引出实验

空间推进所用的电子回旋共振离子源(ECRIS)应具有体积小、效率高的特点. 本文研究的ECRIS使用永磁体环产生磁场, 有效减小了体积, 该离子源利用微波在磁场中加热电子, 电子与中性气体发生电离碰撞产生等离子体. 磁场在微波加热电子的过程中起关键作用, 同时影响离子源内等离子体的约束和输运. 通过比较四种磁路结构离子源的离子电流引出特性来研究磁场对10 cm ECRIS性能的影响. 实验发现: 在使用氩气的条件下, 特定结构的离子源可引出160 mA的离子电流, 最高推进剂利用率达60%, 最小放电损耗为120 W·A^-1; 所有离子源均存在多个工作状态, 工作状态在微波功率、气体流量、引出电压变化时会发生突变. 离子源发生状态突变时的微波功率、气体流量的大小与离子源内磁体的位置有关. 通过比较不同离子源的引出离子束流、放电损耗、气体利用率、工作稳定性的差异, 归纳了磁场结构对此种ECRIS引出特性的影响规律, 分析了其中的机理. 实验结果表明: 保持输入微波功率、气体流量、引出电压不变时, 增大共振区的范围、减小共振区到栅极的距离, 离子源能引出更大的离子电流; 减小共振区到微波功率入口、气体入口的距离能降低维持离子源高状态所需的最小微波功率和最小气体流量, 提高气体利用率, 但会导致放电损耗增大. 研究结果有助于深化对此类离子源工作过程的认识, 为其设计和性能优化提供参考.     

Quantitative study of oxygen enhancement of sputtered ion yields. I. Argon ion bombardment of a silicon surface with O2 flood

A novel quantification approach is applied to determine in situ the amount of surface oxygen within the sputtered particle escape depth during steady-state sputter depth profiling of silicon under simultaneous oxygenation with an oxygen flood gas or with an oxygen primary ion beam. Quantification is achieved by comparing the secondary ion intensities of ¹⁶O that is adsorbed or implanted at the Si surface with the measured peak intensities of a calibrated ¹⁸O ion implant used as a reference standard. Sputtered ion yields can thereby be related to surface oxygen levels. In the present work the dependences of the partial silicon sputter yield Y and of the positive and negative secondary ion useful yields UY(X^±) (X = B, O, Al, Si, P) on the oxygen/silicon ratio, O/Si, in the sputtered flux are studied for ⁴⁰Ar⁺ bombardment of Si with simultaneous O₂ flooding. The silicon sputter yield is found to decrease with increasing flood pressure and O/Si ratio by up to a factor of 3. Both positive and negative secondary ion yields are enhanced by the presence of oxygen at the silicon surface. The useful ion yield of Si⁺ scales non-linearly with the atom fraction of surface oxygen; this behavior is shown to invalidate models that suggest that Si⁺ ion yield enhancement is dominated either by isolated oxygen atoms or by formation of SiO₂ precipitates. In contrast a microscopic statistical model that assumes that local Si⁺ ion formation depends only on the number of oxygen atoms coordinated to the Si atom to be ejected fits the ion yield data quantitatively.     

ECR离子源中的微波功率在线测量

在中子发生器中采用ECR离子源是一种新技术。由于受结构的限制,ECR离子源不能像高频源离子源那样通过观察气体放电的颜色判断其工作状态,所以在运行中调节状态非常困难。解决这个问题的方法是：用定向耦合器加微波小功率计的方法在线测量ECR离子源的微波入射功率,通过微波入射功率可以直接得到ECR离子源引出离子束流的大小,从而推断微波信号源的放电过程是否正常,然后调整ECR离子源,最终使中子发生器工作在最佳状态。从ECR离子源后面的引出电极测得的最大束流为20 mA,且工作长时间稳定,当微波功率在160 W~500 W之间时,放电效果较好,离子束流随微波功率的增加而增加。     

用于静电加速器的高频离子源及其引出特性

根据离子束生物工程的需要,设计和研制了一台用于静电加速器的小型高频离子源。针对使用环境从理论上确定了离子源的结构和尺寸。通过实验调试取得了引出束流与引出电压、聚焦电压以及放电气压之间的变化特性曲线,测定了引出束流的束径包络,对束流的不稳定性进行了分析,在设计中采取了有效的措施抑制束流不稳定性。结果表明,离子源的最佳工作条件为引出电压1 600V~1 800V,放电气压在（4~8）×10-4Pa范围,此时离子源可引出最大束流30μA。束流大小及其稳定性均达到预期要求。     

Investigation about the modes in the cylindrical cavity of an ECR ion source

Both theoretical and numerical electromagnetic analyses about the modes inside the cylindrical cavity of superconducting electron cyclotron resonance ion source (SERSE) have been performed. Modes close to 14, 18 and 28 GHz frequencies, usually employed in SERSE operating conditions, have been calculated in vacuum and when the chamber is filled with a uniform non-collisional plasma at different electron densities. To consider the holes present in the chamber flanges, a numerical approach has been used, by means of the HFSS^TM electromagnetic simulator, for the first mode in the cavity. Modes in a plasma-filled cylindrical cavity with holed bases have full width half maximum bandwidths larger with regard to the closed cavity in vacuum, and it leads to an increased mode frequency overlap. A monochromatic electromagnetic wave feeding this cavity can, in principle, excite different modes. Further investigations about the coupling between the SERSE cavity and its feeding waveguides have to be performed.     

三代微光管防离子反馈Ａｌ２Ｏ３ 膜电子轰击放气成分分析

为了解决防离子反馈Ａｌ２Ｏ３膜污染对三代微光管ＧａＡｓ光电阴极灵敏度的影响,用四级质谱计对制管超高真空室残气、无膜微通道板（ＭＣＰ）和带Ａｌ２Ｏ３膜ＭＣＰ在电子轰击时的放气成份进行分析。结果表明,带Ａｌ２Ｏ３膜ＭＣＰ放出有对阴极光电发射有害的Ｃ、ＣＯ、ＣＯ２、ＮＯ、Ｈ２Ｏ２和ＣXＨY化合物,它们来源于Ａｌ２Ｏ３膜制备过程的质量污染。经过对制膜工艺质量进行改进,制备出了放气量小于２１０－９ Ｐａ且无ＣＸＨＹ化合物气体的Ａｌ２Ｏ３膜。     

用于静电加速器的高频离子源及其引出特性

 根据离子束生物工程的需要,设计和研制了一台用于静电加速器的小型高频离子源。针对使用环境从理论上确定了离子源的结构和尺寸。通过实验调试取得了引出束流与引出电压、聚焦电压以及放电气压之间的变化特性曲线,测定了引出束流的束径包络,对束流的不稳定性进行了分析,在设计中采取了有效的措施抑制束流不稳定性。结果表明,离子源的最佳工作条件为引出电压1 600V~1 800V,放电气压在（4~8）×10^-4Pa范围,此时离子源可引出最大束流30μA。束流大小及其稳定性均达到预期要求。     

Design of magnet and control of the beam emittance for Penning H^- ion source

The design requirement and principle of the deflection magnet for Magnetron and Penning H- ion source are discussed. It is proved that there exists a maximum emittance for the beam that may be transformed by the magnet into a state with equal Twiss parameters of αr =αy and βr =βy, which is the requisite condition to get a minimum emittance at the entrance of RFQ after transporting by a LEBT with solenoids. For this maximum emittance, the corresponding magnetic field gradient index is 1.     

Design of magnet and control of the beam emittance for Penning H- ion source

The design requirement and principle of the deflection magnet for Magnetron and Penning H- ion source are discussed.It is proved that there exists a maximum emittance for the beam that may be transformed by the magnet into a state with equal Twiss parameters of αr=αy and βr =βy,which is the requisite condition to get a minimum emittance at the entrance of RFQ after transporting by a LEBT with solenoids.For this maximum emittance,the corresponding magnetic field gradient index is 1.     

A multi-beam ion/electron spectra-microscope design

This paper presents the design of a multi-beam charged particle instrument that simultaneously focuses electrons, gallium, oxygen and cesium ions onto the same sample. In addition, the instrument has provision to capture the spectra of both secondary electrons and ions in parallel. The mass spectrometer part of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low-energy secondary electrons through to the elastic backscattered electrons.     

太赫兹源场致发射电子源

通过粒子模拟(PIC)软件模拟计算了在ps级别下二极与三极结构碳纳米管场致发射的电流密度与电子注聚焦性能。阳极电压在2 kV时,二极结构下电流密度达到1.85 A/cm2;三极结构下,栅压700 V时发射电流密度达到2.3 A/cm2,且在一定的三极结构参数与电极电压下,可以获得较好的电子注聚束效果。通过碳纳米管二极管发射实验,获得了6.6 A/cm2的发射电流密度,总发射电流达到52.1 mA,可以为太赫兹器件提供连续发射的电子注。