Laser plasma shockwave cleaning of SiO2 particles on gold film

A Nd:YAG laser (1064 nm) induces optical breakdown of the airborne above the gold-coated K9 glass surface and the created shockwave removes the SiO₂ particles contaminated on the gold films. The laser cleaning efficiency has been characterized by optical microscopy, dark field imaging, ultraviolet-visible-near infrared spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy and the Image-pro software. The relationships between removal ratio and particle position and laser gap distance have been studied in the case of single pulse laser cleaning. The results show that the 1064 nm laser induced plasma shockwave can effectively remove the SiO₂ particles. The removal ratio can reach above 90%. The effects of particle position and laser gap distance on the cleaning efficiency are simulated for the single pulse laser cleaning. The simulated results are consistent with the experimental ones.     

Acoustic emission monitoring during laser shock cleaning of silicon wafers

A laser shock cleaning is a new dry cleaning methodology for the effective removal of submicron sized particles from solid surfaces. This technique uses a plasma shock wave produced by laser-induced air breakdown, which has applied to remove nano-scale silica particles from silicon wafer surfaces in this work. In order to characterize the laser shock cleaning process, acoustic waves generated during the shock process are measured in real time by a wide-band microphone and analyzed in the change of process parameters such as laser power density and gas species. It was found that the acoustic intensity is closely correlated with the shock wave intensity. From acoustic analysis, it is seen that acoustic intensity became stronger as incident laser power density increased. In addition, Ar gas has been found to be more effective to enhance the acoustic intensity, which allows higher cleaning performance compared with air or N₂ gas.     

Laser cleaning of particle and grease contaminations on the surface of optics

In the high power laser facility, surface contaminations on the optics will worsen the laser beam quality and damage the optics. Particle and grease contaminations are two of the usual contaminations on the surface of optics. In this work, the 1064-nm laser induced plasma shockwave cleaning is utilized to remove SiO₂ particle contaminations on the K9 glass surface. The results indicate the removal ratio can reach above 95%. The effects of parameters (particle position, laser gap distance and laser energy) on the cleaning efficiency have been studied in the case of single pulse laser cleaning. In addition, CO₂ laser (10.6 μm) is utilized to remove the dimethylsilicone oil contaminations on the gold-coated K9 glass surface. The results show that CO₂ laser can effectively remove the dimethylsilicone oil by properly controlling the laser parameters. The cleaned area increases with the increased laser power or irradiation time when the other parameters are constant.     

激光等离子体去除微纳颗粒的热力学研究

微杂质污染一直是影响精密器件制造质量和使用寿命的关键因素之一.对于微纳米杂质颗粒用传统的清洗方式(超声清洗等)难以去除,而激光等离子体冲击波具有高压特性,可以实现纳米量级杂质颗粒的去除,具有很大的应用潜力.本文主要研究了激光等离子体去除微纳米颗粒过程中的热力学效应:实验研究了激光等离子体在不同脉冲数下对Si基底上Al颗粒去除后的颗粒形貌变化,发现大颗粒会发生破碎而转变成小颗粒,一些颗粒达到熔点后发生相变形成光滑球体,这源于等离子体的热力学效应共同作用的结果.为了研究微粒物态转化过程,基于冲击波传播理论研究,得到冲击波压强与温度特性的演化规律;同时,利用有限元模拟方式研究激光等离子冲击波压强和温度对微粒作用规律,得到了颗粒内随时间变化的应力分布和温度分布,并在此基础上得到等离子体对颗粒的热力学作用机制.     

强激光与稠密等离子体作用引起的冲击波加速离子的研究

用二维PIC（Particle-in-Cell）程序模拟研究了强激光与稠密等离子体靶作用产生的无碰撞静电冲击波的结构和这种冲击波对离子的加速过程,研究发现由于冲击波前沿附近的双极电场的作用,具有一定初速度的离子能被该双极场俘获并获得加速,最终能够被加速到两倍冲击波速度.冲击波加速可以得到准单能的离子能谱,叠加在通过鞘层加速机理产生的宽度离子能谱上.还对不同激光强度和不同等离子体密度情况下形成的冲击波进行了比较.研究表明,强度相对较低的激光在高密度等离子体中可以产生以一定速度传播的静电孤波结构,后者只能加速 关键词： 强激光 稠密等离子体 无碰撞静电冲击波 离子加速     

Shockwave and spallation in silver and other materials by sub-ns laser pulse at 1016 W/cm2 intensity

The laser spallation effect due to intense shockwaves caused by a brief and intense laser pulse irradiating a target surface, 2 mm thick, has been investigated for silver and other materials. For 300 ps IR laser pulse, at intensities of the order of 10¹⁶ W/cm², the shockwave may produce deformations of the back-face in ductile materials, such as Ag, Cu and Al. In heavy materials with high tensile strength, such as Ta, the shockwave produces cracks in the bottom of the laser crater but not deformation in the back-face, while in brittle materials, such as monocrystalline Ge, it produces only superficial cracks and flaking, but not deformation and spallation of the back-face. In thick polymeric materials, such as high-density polyethylene, the ablated crater shape is well defined and the shockwave is strongly damped, and no deformation has been observed in the back-face. The laser ablation yield and the ion acceleration in the backward direction have been measured by mass lost and time-of-flight measurements. SEM microscopy of the different irradiated targets, showing details of the crater size, edges, flaking and deformation in the back-face, useful for a discussion on the shockwave propagation and shock pressure calculation, is presented.     

Visualization of particle trajectories in the laser shock cleaning process

The laser shock cleaning (LSC) method has recently attracted substantial attention since it can remove micro/nano-scale contaminant particles from a solid surface without direct exposure of the surface to laser irradiation. However, despite the importance of the particle detachment and redeposition mechanisms in the LSC process, the behavior of the particles during the cleaning process has never been analyzed experimentally. In this work, the motion of the micrometer-scale particles detached by a laser-induced plasma/shock wave is visualized by a photoluminescence imaging technique. The technique yields time-resolved particle trajectories under typical conditions of the LSC process, with and without a gas jet blowing. Discussions are made on the behavior of the detached particles and redeposition mechanisms.     

Two-stage acceleration of interstellar ions driven by high-energy lepton plasma flows

We present the particle-in-cell(PIC) simulation results of the interaction of a high-energy lepton plasma flow with background electron-proton plasma and focus on the acceleration processes of the protons. It is found that the acceleration follows a two-stage process. In the first stage, protons are significantly accelerated transversely(perpendicular to the lepton flow) by the turbulent magnetic field "islands" generated via the strong Weibel-type instabilities. The accelerated protons shows a perfect inverse-power energy spectrum. As the interaction continues, a shockwave structure forms and the protons in front of the shockwave are reflected at twice of the shock speed, resulting in a quasi-monoenergetic peak located near 200 Me V under the simulation parameters. The presented scenario of ion acceleration may be relevant to cosmic-ray generation in some astrophysical environments.     

Surface cleaning of metals by pulsed-laser irradiation in air

The surface-cleaning effect of metals was investigated using KrF-excimer-laser irradiation of metal surfaces in air. The laser-induced cleaning of copper, stainless steel and aluminum surfaces was studied. It is found that laser cleaning is an effective cleaning process for metals even if the metal surfaces are heavily contaminated. It is also found that short wavelength and pulse duration are necessary for laser surface-cleaning. The energy density of the laser pulse is an important parameter in the cleaning process. Low energy density results in a cleaner surface but a larger pulse number is required, whereas high energy density can achieve higher cleaning efficiency but the temperature rise can cause surface oxidation and secondary contamination. In contrast to the KrF-excimer-laser, the pulsed CO₂ laser is not effective in surface-cleaning. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of the laser pulse. Laser cleaning provides a new dry process to clean different substrate surfaces and can replace the conventional wet cleaning processes such as ultrasonic cleaning with CFC and other organic solvents.     

Comparison of mechanisms and effects of Nd:YAG and CO2 laser cleaning of titanium alloys

The paper compares laser cleaning trials performed using a Q-switched Nd:YAG laser, λ = 1.064 μm and a continuous wave (CW) CO₂ laser, λ = 10.6 μm, applied to aerospace-grade, contaminated titanium alloys. The mechanisms for cleaning using each laser system are modelled to determine the mode and extent of contaminant removal. The model results are then compared with the surface chemistry and micro-structural results from the cleaning trials performed. The results show the dominant cleaning process for Nd:YAG cleaning to be by evaporation of the contaminant via conduction through surface heating, while for CO₂ laser cleaning the small fraction of the beam coupling directly with the contaminant is sufficient for direct heating and selective evaporation. The results for experimental cleaning, electron beam (EB) welding and diffusion bonding align well with the model, particularly when secondary reactions are taken into account.     

激光诱导AZ31B镁合金薄板动态响应实验研究

为分析在激光冲击波作用下AZ31B镁合金薄板背面的动态响应,采用聚偏氟乙烯贴片传感器与数字示波器对强激光诱导的冲击波进行测量,得到压电波形,结合冲击波的传播特性,对弹塑性双波的传播规律进行了研究。结果表明:激光诱导的材料动态响应是快速的;压电波形图反映出的弹性前驱波与塑性加载波传播到靶材背面的时间与理论时间相符;弹性前驱波能量小引发的波形振幅较小,紧随着的塑性加载波能量大并引起较大振幅波动,弹塑性双波卸载过程与紧接着的加载过程导致了压电信号的波动振幅提高。     

激光等离子体淀积硅膜

本工作研究了低温、低压下硅薄膜的激光淀积过程,获得均匀性好,平方厘米量级的多晶和非晶态薄膜。仔细测量了淀积过程的最佳条件,在380℃基片温度做得多晶膜。利用有共振吸收的光学击穿以及气体被击穿后产生爆炸波导致高能Si原子产生的模型,讨论了激光等离子体CVD动力学过程。发现TEACO₂激光击穿SiH₄,以及诱发的爆炸波对硅膜生长有重要作用。理论算得的硅膜生长面积和晶态结构与实验定性符合。 关键词：     

激光驱动冲击波在铝-金阻抗匹配靶中的传播稳定性

 针对神光Ⅱ第九路激光条件，利用1维JB程序和多台阶靶技术对冲击波在铝 金阻抗匹配靶中的传播稳定性进行了理论和实验研究，实验结果与理论结果基本吻合。结果表明，激光驱动冲击波在铝 金阻抗匹配靶中传播时，高阻抗待测材料金中的冲击波稳定传播最大距离急剧减小。因此，在进行铝-金阻抗匹配靶物理参数设计时，应保证高阻抗材料金台阶厚度满足冲击波传播稳定性，然后再按照阻抗匹配实验中两种材料的冲击波速度比来确定低阻抗标准材料铝的台阶厚度。根据神光Ⅱ第九路激光条件，铝-金阻抗匹配靶中铝基底厚度选取为30 μm左右较好，金台阶和铝台阶厚度应分别小于10 μm和17 μm。     

Particle saltation removal in laser-induced plasma shockwave cleaning

A new particle saltation removal model in laser-induced plasma shockwave cleaning is presented due to the drawbacks in other particle removal models. Considering the elastic energy stored in the adhered particle during shockwave-particle interaction, the threshold of the particle elastic deformation height, leading to the particle removal, is obtained. With taking the collision between gas molecules in plasma shockwave rear and adhered particle into account, the threshold of the plasma shockwave Mach number is also obtained which is a requirement to the shockwave strength. It is found that the smaller particle needs stronger shockwave than the larger particle. The gas pressure distribution characteristics in the plasma shockwave rear offer a saltation surrounding to the particle, and it is another requirement to the shockwave strength for a successful particle saltation. Finally, particle-cleaning experiment using laser-induced plasma shockwave proves the correctness of the particle saltation model.     

Removal of graffiti from the mortar by using Q-switched Nd:YAG laser

This paper presents part of the larger study on microstructural features of mortars and it's effects on laser cleaning process. It focuses on the influence of surface roughness, porosity and moisture content of mortars on the removal of graffiti by Nd:YAG laser. The properties of this laser are as follows: wavelength (λ) 1.06 μm, energy: 500 mJ per pulse, pulse duration: 10 ns. The investigation shows that the variation of laser fluence with the number of pulses required for the laser cleaning can be divided into two zones, namely effective zone and ineffective zone. There is a linear relationship observed between number of pulses required for laser cleaning and the laser fluence in the effective zone, while the number of pulses required for the laser cleaning is almost constant even though the laser fluence increases in the ineffective zone. Moreover, surface roughness, porosity and moisture content of mortar samples have influence on the laser cleaning process. The effect of these parameters become however negligible at the high level of laser fluence. The number of pulses required for the laser cleaning is low for smooth surface or less porous mortar. Furthermore, the wetness of the samples facilitates the cleaning process.     

Early stage of the material removal during ArF laser ablation of graphite

Material removal during ArF excimer laser ablation of graphite at atmospheric pressure was investigated by two independent methods; 1) by observation of the propagating properties of the shock wave generated by the carbonaceous ejecta and 2) by in situ measurement of the size distribution of carbon nanoparticles condensing in the ablation plume. This latter was carried out by a scanning mobility particle sizer system based on a differential mobility analyser. The performed measurements indicate that the material removal during ArF laser ablation consists of two steps at fluences above the threshold fluence. First, a thin layer of carbon (of the order of 1 nm) is removed by a quick desorption process, leading to shockwave formation. This process takes place in a ns time scale, and desorption rate estimations reveal that this can not be explained by thermal surface evaporation. Since to our knowledge there is no thermal process that could account for the estimated desorption rate, it is argued that this is a fast photochemical (i.e. non-thermal) process. The size distribution of the condensed nanoparticles related to this step shows a rising edge at diameters below 10 nm. At fluences above the ablation threshold, the majority of the material is ejected in the second phase, resulting in condensation of carbon nanoparticles, peaking at 50 nm diameters in the size spectrum. Both shockwave formation and material removal are also detected well below the ablation threshold fluence, which is attributed to the photochemical process. PACS 61.46.+w; 81.16.Mk     

Surface modification of the Cr-based coatings by the pulsed TEA CO2 laser

The interaction of a transversely excited atmospheric (TEA) CO₂ laser with chromium oxynitride (CrON) coating deposited on a AISI 304 steel substrate was considered. The results have shown that CrON was surface-modified by the laser beam of 45 J/cm² energy density. The energy absorbed from the TEA CO₂ laser beam was partially converted into thermal energy, which has generated a series of effects such as melting, vaporization of the molten material, and shock waves in the vapor and in the solid. Morphological manifestations on the CrON coating surface can be summarized as follows: non-uniform features with ablation and appearance of crater-like form (central zone of interaction); appearance of three damaged areas and presence of hydrodynamic effects with resolidified droplets (periphery zone of interaction). In case of applied energy density the interaction of laser radiation with CrON has been always followed by plasma creation in front of the coating. PACS 79.20.Ds; 61.80.Ba     

时间序列差分干涉术研究激波流场

本文用一种新的时间序列差分干涉术研究模型在超音速风洞中产生的激波流场.实.验中用调Q序列脉冲红宝石激光器作光源,用转镜扫描高速摄影机作为记录设备,结合单Wollaston棱镜差分干涉的方法获得了激波流场的序列差分干涉图.利用图象处理技术对干涉图进行图象处理,人机交互的方式采集数据,用条纹位移转换法将差分干涉图的条纹位移量转换为绝对干涉图的条纹位移量,然后用拉普拉斯变换法计算出了密度的相对分布值.     

飞秒激光烧蚀金属靶的冲击温度

在明确飞秒激光与物质相互作用过程冲击温度概念的基础上, 讨论了飞秒激光烧蚀铝靶和铜靶过程中的冲击温度与其他物理量的关系, 利用飞秒激光烧蚀金属的双温模型提取了冲击温度的绝对值, 基于非傅里叶热传导模型计算了冲击温度的分布. 此项研究结果对飞秒激光安全加工含能材料有借鉴意义. 关键词： 飞秒激光 含能材料 烧蚀 冲击温度     

用激光清洗金膜表面硅油污染物

采用CO2激光对镀金K9玻璃表面的二甲基硅油污染物进行清洗,在激光器单点作用模式下,分别研究了激光功率和作用时间对清洗效果的影响;并研究了连续扫描工作模式下的激光清洗效果。采用光学显微镜和傅里叶变换红外光谱仪表征激光清洗效果,研究结果表明:通过良好的控制激光参数,采用CO2激光清洗二甲基硅油具有明显的效果;此种非接触式清洗方式可确保K9玻璃表面的金膜完好无损。采用有限元分析软件模拟计算了激光功率和作用时间对清洗过程中温度的影响,计算结果与实验结果规律一致。