基于FTO/VO2/FTO结构的VO2薄膜电压诱导相变光调制特性

采用直流磁控溅射和后退火工艺在掺氟的SnO₂(FTO)导电玻璃衬底上制备VO₂薄膜, 研究了不同退火时间和不同比例的氮氧气氛对VO₂薄膜性能的影响, 对VO₂薄膜的结晶取向、表面形貌、表面元素的相对含量和透过率随波长变化进行了测试分析, 结果表明在最佳工艺条件下制备得到了组分相对单一的VO₂薄膜. 基于FTO/VO₂/FTO结构在VO₂薄膜两侧的透明导电膜上施加电压并达到阈值电压时, 观察到了明显的电流突变. 当接触面积为3 mm×3 mm时, 阈值电压为1.7 V, 阈值电压随接触面积的增大而增大. 与不加电压的情况相比, FTO/VO₂/FTO结构在电压作用下高低温的红外透过率差值可达28%, 经反复施加电压, 该结构仍保持性能稳定, 具有较强的电致调控能力.     

Structural and optical properties of pulsed laser deposited SrBi2Nb2O9 thin films

SrBi₂Nb₂O₉ (SBN) thin films were prepared on fused quartz substrates at room temperature by pulsed laser deposition. The influence of deposition parameters such as target-to-substrate distance, oxygen pressure and annealing temperature on film crystallization behavior was investigated by X-ray diffraction. Results indicated that the films grown at the optimum processing conditions have polycrystalline structure with a single layered perovskite phase. The optical transmittance of the films prepared at various oxygen pressures was measured in the wavelength range 200–900 nm using UV–vis spectrophotometer. The results showed that there is a red shift in the optical absorption edge with a rise in the oxygen pressure. Refractive index as a function of wavelength and optical band gap of the films were determined from the optical transmittance spectra. The results indicated that the refractive index increases with increasing oxygen pressure at the same incident light wavelength, while the band gap reduces from 4.13 to 3.88 eV. It may be attributed to an increase in packing density and grain size, and decrease in oxygen defects.     

Growth and structural characterization of semiconducting Ru2Si3

Recent band structure calculations indicate that ruthenium silicide (Ru₂Si₃) is semiconducting with a direct band gap. Electrical measurements lead to a band gap around 0.8 eV which is technologically important for fiber communications. This makes Ru₂Si₃ a promising candidate for silicon based optical devices, namely LEDs. We present first results on the epitaxial growth of ruthenium silicide films on Si(1 0 0) and Si(1 1 1) fabricated by the template method, a special molecular beam epitaxy technique. Orientational relationships on Si(1 1 1) have been determined. We characterized the films by Rutherford Backscattering and Channeling, X-ray diffraction and transmission electron microscopy.     

SiO2薄膜内部短程有序微结构研究

SiO₂薄膜是重要的低折射率材料之一, 针对离子束溅射(IBS)和电子束蒸发(EB)的SiO₂薄膜, 采用红外光谱反演技术获得在400–1500 cm^-1波数内的介电常数, 通过对介电能损函数的分析获得了两种薄膜在横向和纵向光学 振动模式下的振动频率和Si–O–Si键角.研究结果表明, 在EB SiO₂薄膜短程有序范围内, SiO₄的连接方式主要是类柯石英结构、3-平面折叠环和热液石英结构的SiO₄连接方式; 在IBS SiO₂薄膜短程有序范围内, SiO₄的连接方式复杂主要是类柯石英结构、3-平面折叠环、 4-平面折叠环结构和类热液石英结构. 关键词： 2薄膜')" href="#">SiO₂薄膜 离子束溅射 电子束蒸发 短程有序     

光学碱度对Tb3+掺杂Bi2O3-B2O3玻璃发光性能的影响

采用熔融法制备了Tb³⁺掺杂的Bi₂O₃-B₂O₃系统玻璃,使用激发、发射及拉曼光谱分析了光学碱度与玻璃结构及发光性能的关系,同时绘制了Tb³⁺、Bi³⁺和Bi²⁺的能级图。研究结果表明：Tb³⁺掺杂的Bi₂O₃-B₂O₃玻璃由[BO₃]、[BiO₃]、[BO₄]及[BiO₆]共同组成,且随着光学碱度由0.63增加到0.93,玻璃的结构逐渐疏松。高的光学碱度使部分Bi³⁺变为Bi²⁺,发出571 nm（²P_3/2（2）→²P_1/2）的光,Bi³⁺→Tb³⁺的能量降低。在光学碱度及Tb³⁺、Bi³⁺和Bi²⁺离子的共同作用下,随着光学碱度的提高,玻璃的发光颜色由黄绿色变为白色。     

Structural, optical and electrical studies on pulse electrodeposited CdIn2S4 thin films

CdIn₂S₄ thin films were prepared by pulse electrodeposition technique over F:SnO₂ glass and stainless steel substrates in galvanostatic mode from an aqueous acidic bath containing CdSO₄, InCl₃ and Na₂S₂O₃. The growth kinetics of the film has been studied and the deposition parameters such as electrolyte bath concentration, bath temperature, time of deposition, deposition current and pH of the bath are optimized. X-ray diffraction (XRD) analysis of the as deposited and annealed films shows polycrystalline nature. Energy dispersive analysis by X-ray (EDAX) confirms nearly stoichiometric CdIn₂S₄ nature of the film. Scanning electron microscope (SEM) studies show that, the deposited films are well adherent and grains are uniformly distributed over the surface of the substrate. The optical transmission spectra show a direct band gap of 2.16 eV. Conductivity measurements have been carried out at different temperatures and electrical parameters such as activation energy, trapped energy state and barrier heights etc. have been determined.     

电镀法在氧化铟锡上制备铜锌锡硫薄膜的光谱特征

低成本、环境友好的铜锌锡硫替代含贵金属和有毒金属的铜铟镓硒,是薄膜太阳能电池的最佳选择。电镀法是一种无需真空设备和靶材的低成本方法。一种更简单的制膜方法是在水溶液中共电镀沉积Cu-Zn-Sn（CZT)合金于FTO衬底上。采用氩气保护气氛下在550 ℃硫化电镀法制得的CZT合金前驱体,成功制备了CZTS薄膜。采用三电极体系将CZT合金前驱体电镀在FTO上,其中FTO作为工作电极,铂（Pt）网和Ag/AgCl分别作为对电极和参比电极。电解质由CuSO₄,ZnSO₄,SnSO₄,络合剂-三乙醇胺（TEA）和柠檬酸钠组成。前驱体在氩气保护气氛下550℃硫化得到CZTS薄膜。采用X射线衍射（XRD）、拉曼光谱、扫描电子显微镜（SEM）、紫外可见光光谱仪和光电化学测量（PEC）等方法,表征了CZTS薄膜的结构、形貌、成分和光谱学性质。XRD和拉曼光谱证明了550 ℃硫化后的CZTS薄膜具有锌黄锡矿结构。一个Raman主峰位于342 cm-1,两个Raman次强峰分别位于289和370 cm-1,这些峰位与锌黄锡矿CZTS的峰位相吻合。SEM结果证明优化后CZTS薄膜成分接近CZTS的理想化学计量比,CZTS薄膜中Cu/(Zn+Sn）和 S/(Zn+Sn+Cu)分别为0.52和1.01,这表明CZTS薄膜中S的含量非常合适。PEC结果证实,采用前照射或后照射FTO/CZTS均产生光电流,并且两种照射下产生的光电流方向一致。通过紫外可见光光谱测量并由此计算出的CZTS能隙为1.45 eV。通过上述分析证明制备的CZTS薄膜具有高品质,可用于制备CZTS薄膜太阳能电池。     

Influence of FeCl3 filler on the structure and physical properties of polyethyl-methacrylate films

Pure and FeCl₃ doped polyethyl-methacrylate (PEMA) films were prepared and studied. XRD, FTIR, TGA, UV, DSC and ESR techniques were used to investigate the structural properties of PEMA. X-ray scans (XRD) reveals the presence of some crystalline phase, in PEMA matrix. This concentration of these phases was found to depend upon FeCl₃ concentration. The IR results manifested the conclusion about the specific interaction in polymer matrices and hence the complexation. TGA data clarified that addition of FeCl₃ to PEMA films enhances the thermal stability of PEMA. UV results reveal that FeCl₃ filler significantly influences the optical energy gap E_g. DSC results reflect also the formation of some ordered crystalline phases with concentration depending on FeCl₃ contents. Distribution of ferric ions in the PEMA matrix was interpreted in terms of ESR spectra.     

Synthesis and physical behaviour of In2S3 films

In₂S₃ layers have been grown by close-spaced evaporation of pre-synthesized In₂S₃ powder from its constituent elements. The layers were deposited on glass substrates at temperatures in the range, 200–350 °C. The effect of substrate temperature on composition, structure, morphology, electrical and optical properties of the as-grown indium sulfide films has been studied. The synthesized powder exhibited cubic structure with a grain size of 63.92 nm and S/In ratio of 1.01. The films grown at 200 °C were amorphous in nature while its crystallinity increased with the increase of substrate temperature to 300 °C. The films exhibited pure tetragonal β-In₂S₃ phase at the substrate temperature of 350 °C. The surface morphological analysis revealed that the films grown at 300 °C had an average roughness of 1.43 nm. These films showed a S/In ratio of 0.98 and a lower electrical resistivity of 1.28 × 10³ Ω cm. The optical band gap was found to be direct and the layers grown at 300 °C showed a higher optical transmittance of 78% and an energy band gap of 2.49 eV.     

Raman scattering and optical absorption in S2N2 and partially polymerized S2N2 films

Raman scattering and optical absorption measurements between 0.5 and 5.0 eV on crystalline films of S₂N₂ and partly polymerized S₂N₂ have been made for the first time. The Raman active molecular and librational phonons have been observed and assigned. The Raman spectra of partly polymerized S₂N₂ show the appearance of weak scattering at 635 cm⁻¹ and appreciable broadening of the librational phonon peaks. Optical absorption maxima occur at 4.0 and 4.7 eV in pure S₂N₂ at 14 K, while absorptions at 0.86, 1.1 and 4 eV evolve with increasing polymerization.     

Ge20Sb15Se65薄膜的热致光学特性变化研究

采用磁控溅射法制备了Ge₂₀Sb₁₅Se₆₅薄膜, 研究热处理温度(150—400 ℃)对薄膜光学特性的影响. 通过分光光度计、X射线衍射仪、显微拉曼光谱仪对热处理前后薄膜样品 的光学特性和微观结构进行了表征, 并根据Swanepoel方法以及Tauc公式分别计算了薄膜折射率色散曲线和光学带隙等参数. 结果表明当退火温度(T_a)小于薄膜的玻璃转化温度(T_g)时,薄膜的光学带隙(E_g^opt)随着退火温度的增加由1.845 eV上升至1.932 eV, 而折射率由2.61降至2.54; 当退火温度大于薄膜的玻璃转化温度时,薄膜的光学带隙随退火温度的增加由1.932 eV降至1.822 eV, 折射率则由2.54增至2.71. 最后利用Mott和Davis提出的非晶材料由非晶到晶态的结构转变模型对结果进行了解释, 并通过薄膜XRD和Raman光谱进一步验证了结构变化是薄膜热致变化的重要原因. 关键词： 20Sb₁₅Se₆₅薄膜')" href="#">Ge₂₀Sb₁₅Se₆₅薄膜 热处理 光学带隙 折射率     

Structural and optical properties of thermally evaporated Bi2Te3 films

Bi₂Te₃ films were prepared by thermal evaporation technique. X-ray diffraction analysis for as-deposited and annealed films in vacuum at 150 °C were polycrystalline with rhombohedral structure. The crystallite size is found to increase as the film thickness increases and has values in the range 67–162 nm. The optical constants (the refractive index, n, and absorption index, k) were determined using transmittance and reflectance data in the spectral range 2.5–10 μm for Bi₂Te₃ films with different thicknesses (25–99.5 nm). Both n and k are independent on the film thickness in the investigated range. It was also found that Bi₂Te₃ is a high refractive index material (n has values of 4.7–8.8 in the wavelength range 2.5–10 μm). The allowed optical transitions were found to be direct optical transitions with energy gap  eV. The optical conductivities σ₁ = ƒ(hν) and σ₂ = f(hν) show distinct peaks at about 0.13 and 0.3 eV, respectively. These two peaks can be attributed to optical interband transitions.     

Deposition and characterization of carbon nitride films from hexamethylenetetramine/N2 by microwave plasma-enhanced chemical vapor deposition

Carbon nitride thin films were deposited on Si(1 0 0) substrate by microwave plasma-enhanced chemical vapor deposition (PECVD). Hexamethylenetetramine (HMTA) was used as carbon and nitrogen source while N₂ gas was used as both nitrogen source and carrier gas. The sp³-bonded C---N structure in HMTA was considered significantly in the precursor selection. X-ray diffraction analysis indicated that the film was a mixture of crystalline - and β-C₃N₄ as well as graphitic-C₃N₄ and β-Si₃N₄ which were not easily distinguished. Raman spectroscopy also suggested the existence of - and β-C₃N₄ in the films. X-ray photoelectron spectroscopy study indicated the presence of sp²- and sp³-bonded C---N structures in the films while sp³C---N bonding structure predominated to the sp² C---N bonding structure in the bulk composition of the films. N was also found to be bound to Si atoms in the films. The product was, therefore, described as CN_x:Si, where x depends on the film depth, with some evidences of crystalline C₃N₄ formation.     

Magnetic anisotropic properties in Fe3O4 and CoFe2O4 ferrite epitaxy thin films

Epitaxial thin films of Fe₃O₄ and CoFe₂O₄ on MgO (0 0 1) substrates were grown by molecular beam epitaxy at low temperature growth process. Magnetization and hysteresis loop of both films were measured to investigate magnetic anisotropic properties at various temperatures. Anomalous magnetic properties are found to be correlated with crystalline, shape, and stress anisotropies. The Fe₃O₄ film below Verwey structural transition has a change in crystal structure, thus causing many anomalous magnetic properties. Crystalline anisotropy and anomalous magnetic properties are affected substantially by Co ions. The saturation magnetization of Co–ferrite film becomes much lower than that of Fe₃O₄ film, being very different from the bulks. It indicates that the low temperature growth process could not provide enough energy to have the lowest energy state.     

MBE法制备VO2薄膜及其中红外调制深度测量

为了给VO₂薄膜在定向红外对抗系统防护方面的应用提供理论依据,我们用透过率调制深度表征VO₂薄膜在中红外波段的相变特性。本实验利用分子束外延法（MBE）制备VO₂外延单晶薄膜,经XRD、AFM表征,发现其具有（020）择优取向、纯度较高,薄膜表面平整、均匀且致密。经VU-Vis-IR测量发现其近红外透过率相变特性显著,但在紫外和可见光范围内透过率相变特性较不明显。然后我们对制备时间为30 min、40 min的两组薄膜分别进行25~70℃的升温和降温实验,观察其对波长为3 459 nm、脉宽50 ns、重频50 kHz、功率密度0.14 W/cm²的中红外激光的透过率变化,并比较两组薄膜的温滞曲线特性。实验发现它们对中红外透过率的调制深度均可达60%以上,前者比后者对中红外的调制深度高出约4%。这说明利用分子束外延法制备的VO₂单晶薄膜具有良好的中红外调制特性,且调制深度和膜厚有关。进一步表明了利用VO₂薄膜实现中红外激光防护具有一定的可行性。     

Si基AAO模板法制备尖晶石型ZnAl2O4纳米结构

以Si基AAO为模板,以Zn和C粉作蒸发源,通过化学气相沉积法,在不同的温度下反应得到了不同的ZnAl2O4纳米结构.对样品的形貌和成分结构进行了分析.扫描电镜结果显示,在800℃获得的ZnAl2O4样品表面仍保留着AAO模板的孔洞结构.而XRD结果表明,在700,800,900℃下获得的样品都出现了ZnAl2O4衍射...     

ZnSb掺杂的Ge2Sb2Te5薄膜的相变性能研究

本文采用双靶(ZnSb靶和Ge₂Sb₂Te₅靶)共溅射制备了系列ZnSb掺杂的Ge₂Sb₂Te₅(GST)薄膜. 利用X射线衍射、透射电子显微镜、原位等温/变温电阻测量、X射线光电子能谱等测试研究了薄膜样品的非晶形态、电学及原子成键特性. 利用等温原位电阻测试表明ZnSb掺杂的Ge₂Sb₂Te₅薄膜具有更高的结晶温度. 采用Arrhenius 公式计算发现ZnSb掺杂的Ge₂Sb₂Te₅薄膜的十年数据保持温度均高于传统的Ge₂Sb₂Te₅薄膜的88.9℃. 薄膜在200, 250, 300和350℃ 下退火后的X射线衍射图谱表明ZnSb的掺杂抑制了Ge₂Sb₂Te₅薄膜从fcc态到hex态的转变. 通过对薄膜的光电子能谱和透射电镜分析可知Zn, Sb, Te原子之间键进行重组, 形成Zn–Sb 和Zn–Te 键, 且构成非晶物质存在于晶体周围. 采用相变静态检测仪测试样品的相变行为发现ZnSb掺杂的Ge₂Sb₂Te₅薄膜具有更快的结晶速度. 特别是(ZnSb)_24.3(Ge₂Sb₂Te₅)_75.7薄膜, 其结晶温度达到250℃, 十年数据保持温度达到130.1℃, 并且在70 mW激光脉冲功率下晶化时间仅～64 ns, 远快于传统Ge₂Sb₂Te₅薄膜的晶化时间～280 ns. 以上结果表明(ZnSb)_24.3(Ge₂Sb₂Te₅)_75.7薄膜是一种热稳定性好且结晶速度快的相变存储材料.     

Thin films of As2Se3 synthesized by spin-coating

Thin films of amorphous As₂Se₃ were synthesized by spin-coating a solution of an amine salt in thioacetamide on a thoroughly cleaned flat soda glass substrate. Films up to 0.68 μm thick were obtained. Electrical properties and optical absorption coefficient data were measured. The conductivity is of the same order of magnitude as those of evaporated and melt-quenched films. An exponential inverse-temperature law is observed for the variations in electrical conductivity. The optical absorption results indicate that the absorption edge of the synthesized a-As₂Se₃ films is due to an allowed direct transition of energy about 1.77 eV.     

高温氢退火还原V2O5制备二氧化钒薄膜及其性能的研究

过渡金属氧化物二氧化钒(VO₂)在温度340 K附近会发生金属绝缘体的转变(metal-insulator transition, MIT). 基于金属绝缘体的转变性质, VO₂薄膜材料具有很好的应用前景. 本文首先采用脉冲激光沉积制备了高质量的V₂O₅薄膜, 再通过高温氢退火还原V₂O₅薄膜制备出VO₂多晶薄膜. 研究了不同的退火温度、退火时间、退火气氛对VO₂薄膜制备的影响, 采用X射线衍射、X射线光电子能谱、变温电阻特性测量等手段对样品进行分析, 发现在H₂(5%)/Ar退火气氛下, 在一定的退火温度范围内(500–525 ℃), 退火 3 h, 得到了B相和M相共存的VO₂薄膜, 具有M相的VO₂的MIT特性, 而相同退火温度下退火时间达到4.5 h, 薄膜完全变成B相的VO₂. 通过纯Ar气氛下对B相VO₂再退火, 得到了转变温度为350 K, 电阻突变接近4个数量级的M相的VO₂薄膜. 实现了VO₂的B相和M相的相互转变. 关键词： 2薄膜')" href="#">VO₂薄膜 金属绝缘体转变 氢退火