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1.
介绍了实验室研制的微波电子回旋共振(ECR)等离子体阴极电子束系统及初步研究结果,该系统包括微波ECR 等离子体源、电子束引出极、聚焦线圈等。通过测量水冷靶电流和靶上的束斑尺寸,实验研究了微波ECR 等离子体阴极电子束的流强、聚束性能等随电子束系统工作条件的变化。结果表明:微波输入功率越高、引出电压越高,引出电子束流强越大;工作气压对电子束流强的影响较复杂,随气压增加呈现出先降低后升高的特点;在7×10−4Pa 的极低气压下电子束流强可达75mA,引出电压9kV;能量利用率可达0.6;调整聚焦线圈的驱动电流,电子束的束斑直径从20mm 减小到13mm,电子束流强未有明显变化。 相似文献
2.
利用磁过滤阴极电弧与磁控溅射相结合的薄膜沉积技术在高速钢基底上 制备了氮化铬/四面体非晶碳(CrN/ta-C)复合涂层, 通过改变过渡层氮化铬(CrN)的制备工艺, 研究了四面体非晶碳(ta-C)薄膜在钢基底材料上的附着特性的变化. 结果表明, 随着氮气流量的增大, CrN/ta-C复合涂层中的氮化铬经过了Cr-Cr2N-CrN的相变过程. 同时涂层的附着力也随着氮气流量的增大而增加, 但是当氮气流量超过30 sccm时, 涂层附着力会有所下降; 通过改变基片偏压, 复合涂层中氮化铬的择优取向与晶粒结构发生改变, 随着偏压的增大, 涂层附着力也会大大改善, 但是当偏压超过200 V, 涂层附着特性会略微降低. 通过涂层耐磨性的测试也表明, 在高速钢基底上, CrN涂层能显著提高ta-C薄膜在高速钢基底上的附着力, 同时显著提高耐磨特性.
关键词:
附着力
四面体非晶碳薄膜
X射线衍射
拉曼光谱 相似文献
3.
Peng Wang Xia Wang Youming Chen Guangan Zhang Junyan Zhang 《Applied Surface Science》2007,253(7):3722-3726
Ti-doped hydrogenated diamond-like carbon (DLC) films were deposited on Si(1 0 0) substrates by a filtered cathodic vacuum arc (FCVA) method using Ar and CH4 as the feedstock. The composition and microstructure of the films were investigated by Raman spectroscopy, X-ray photoelectron spectroscopy and IR spectroscopy. The internal stress was determined by the radius of curvature technique. The influence of the bias voltage on the microstructure of the as-deposited films was investigated. It was found that the graphite-like bonds was dominated in the Ti-doped DLC film deposited at 0 V bias voltage. When bias voltage was increased to −150 V, more diamond-like bond were produced and the sp3 content in film reached the maximum value, after which it decreased and more graphite-like bonds feature produced with further increase of the negative bias voltage. The compressive internal in the Ti-doped DLC films also exhibited a maximum value at −150 V bias voltage. IR results indicated that CH bonded intensity reduced, and H atoms bonded with C atoms were substituted for the Ti atoms as the negative bias voltage increasing. All the composition and microstructure change can be explained by considering the plasma conditions and the effect of negative bias voltage applied to the substrate. 相似文献
4.
Lanthanum silicate coatings were deposited onto stainless steel substrates by atmospheric plasma spraying (APS) using mechanically mixed (type A) and calcined feedstock (type B) powders. The phase composition, microstructure, density and porosity of coatings prepared from the two types of powder were compared. 相似文献
5.
研究了过滤阴极真空电弧技术中,不同的磁过滤器电流下(5—13 A),制备的四面体非晶碳(ta-C)薄膜对摩擦学特性的影响.通过对薄膜厚度,薄膜结构以及薄膜表面粗糙度随磁过滤电流的变化结果进行了测试,结果表明,随着磁过滤器电流的增大,薄膜的sp3键含量逐渐减少,表面粗糙度从0.13增大到0.38.磁过滤器电流在5 A时,薄膜的摩擦系数最小约为0.08,当电流增大到7 A时,摩擦系数显著增大,磁过滤器电流从7 A增大到13 A时,薄膜的摩擦系数再次减小约为0.1.
关键词:
四面体非晶碳
过滤阴极真空电弧
磁过滤器电流
摩擦系数 相似文献
6.
Xiongtu Zhou 《Applied Surface Science》2006,253(4):2108-2112
Amorphous Ce1Y2Fe5O12 (Ce:YIG) thin films deposited on single crystal Si(1 0 0) and thermally oxidized Si(1 0 0) substrates by pulsed laser deposition were annealed in the temperature range of 700-1000 °C in air. The annealing temperature dependence of microstructure and magnetic properties of Ce:YIG films was studied using X-ray diffraction combined with vibrating sample magnetometer. The results show that single phase of polycrystalline Ce:YIG thin films can be obtained by the post-annealing of as-deposited films at the temperature of 700 °C. However, two steps of phase segregation of Ce:YIG occur as the post-annealing temperature increases: at first, Ce:YIG is decomposed into YIG and non-magnetic CeO2 when annealed at 800 °C; then YIG continues to be decomposed forming Fe2O3 when the temperature is increased up to 900 °C. Consequently, the saturation magnetization of Ce:YIG films decreases first and then increases with the post-annealing temperature going up, which indicates that the saturation magnetization of Ce:YIG films is mainly related to the phase composition of the films. Meanwhile, the presence of SiO2 buffer layer can significantly enhance the saturation magnetization of Ce:YIG films. 相似文献
7.
This report presents the microstructural, optoelectrical and surface morphological properties of e-beam evaporated thin CdTe films with the activation of post-chloride treatment. The thin films having thickness 800 nm were deposited onto glass and ITO substrates subsequently processed with CdCl2 treatment at various temperatures and then subjected to different characterization tools to investigate the physical properties. The films were found to be polycrystalline in nature having a cubic phase with preferred orientation (111) up to 320 °C and completely oxidized at 470 °C while the ohmic nature of films is confirmed by I–V characteristics. The absorbance is found to be higher in the visible range and lowest transmittance is observed for film processed at 170 °C. The surface morphology reveals that films have uniform surface with improved grain growth and elemental analysis confirms the deposition and treatment. The optimized results attract attention to use the processed films at 170 °C as an effective absorber-layer in CdTe based solar cells. 相似文献
8.
近年来,表面等离激元光子学发展迅速,并取得了众多新成果.重掺杂半导体材料的表面等离激元共振性质的研究,也得到了人们越来越多的关注.本文通过纳米球刻印技术制备准三维二氧化硅纳米球阵列,在阵列上沉积铟锡氧化物薄膜,通过不同条件下的后退火处理改变铟锡氧化物薄膜的载流子浓度和载流子迁移率,并研究随着材料性质的改变其相应表面等离激元共振特性的变化规律.结果表明:退火处理均使铟锡氧化物薄膜的晶粒长大,光学透过率增加;在空气中退火会导致铟锡氧化物薄膜的载流子浓度减少,其表面等离激元共振峰红移;而真空退火则使铟锡氧化物薄膜的载流子浓度增加,共振峰蓝移.这些研究结果可为后续铟锡氧化物表面等离激元材料及器件的研究提供科学依据和实际指导. 相似文献
9.
Alexander Hramov Alexey Koronovskii Mikhail Morozov Alexander Mushtakov 《Physics letters. A》2008,372(6):876-883
In this Letter we research the space charge limiting current value at which the oscillating virtual cathode is formed in the relativistic electron beam as a function of the external magnetic field guiding the beam electrons. It is shown that the space charge limiting (critical) current decreases with growth of the external magnetic field, and that there is an optimal induction value of the magnetic field at which the critical current for the onset of virtual cathode oscillations in the electron beam is minimum. For the strong external magnetic field the space charge limiting current corresponds to the analytical relation derived under the assumption that the motion of the electron beam is one-dimensional [D.J. Sullivan, J.E. Walsh, E. Coutsias, in: V.L. Granatstein, I. Alexeff (Eds.), Virtual Cathode Oscillator (Vircator) Theory, in: High Power Microwave Sources, vol. 13, Artech House Microwave Library, 1987, Chapter 13]. Such behavior is explained by the characteristic features of the dynamics of electron space charge in the longitudinal and radial directions in the drift space at the different external magnetic fields. 相似文献
10.
I. I. Azarko V. K. Goncharov G. A. Gusakov D. R. Ismailov M. V. Puzyrev 《Journal of Applied Spectroscopy》2008,75(4):560-566
We have used Raman light scattering and electron paramagnetic resonance methods to study carbon films obtained by laser plasma
deposition, using different types of graphite targets. We have established that the films deposited in this way have a diamond-like
structure and are a nanostructured composite containing clusters of both sp2 and sp3-hybridized carbon. We have shown that an increase in structural perfection of the graphite target causes an improvement in
the structure of the carbon films obtained from it and an increase in the content of sp3-hybridized carbon in it. Thermal stimulation of the substrate during application of a coating leads to the same effect.
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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 75, No. 4, pp. 539–546, July–August, 2008. 相似文献