Linearity Improvement for Photomask Critical Dimension Metrology with Deep-Ultraviolet Microscope

Linearity improvement by the simulation assist (SA) method for photomask critical dimension (CD) measurement with a deep-ultraviolet (UV) microscope is proposed. With the conventional method, if a measurement pattern on a photomask is insufficiently resolved by the microscope, the CD cannot maintain linearity to the actual pattern size. With the SA method, the lack of the resolution is canceled by an actual image and a simulated image, so that the CD can maintain linearity to the actual pattern size. The results of experiments demonstrate that the SA method improves CD linearity of the conventional method with a deep-UV microscope.     

Design and experimental validation of novel optics-based autofocusing microscope

This study designs and characterizes a novel precise optics-based autofocusing microscope with both the large linear autofocusing range and the rapid response. In contrast to conventional optics-based autofocusing microscopes with centroid method, the proposed microscope comprises two optical paths, namely one optical path which provides a short linear autofocusing range but an extremely high focusing accuracy and a second optical path which achieves a long linear autofocusing range but a reduced focusing accuracy. The two optical paths are combined using a self-written autofocus-processing algorithm to realize an autofocusing microscope with a large linear autofocusing range, a rapid response, and a high focusing accuracy. The microscope is characterized numerically using commercial software ZEMAX and is then verified experimentally using a laboratory-built prototype. The experimental results show that compared to conventional optics-based autofocusing microscopes with centroid method and a single optical path, the proposed microscope achieves both a longer autofocusing range and a more rapid response with no reduction in the focusing accuracy. Overall, the results presented in this study show that the proposed microscope provides an ideal solution for automatic optical inspection and industrial applications.     

X射线用Kirkpatrick-Baez显微镜成像质量的研究

 对惯性约束聚变的一种重要诊断方法-Kirkpatrick-Baez型结构显微镜成像方法进行了研究。计算了Kirkpatrick-Baez型结构显微镜的主要像差,并分析得出：造成轴上点像差的主要因素是球差,占像差的94%。基于光线追迹方法模拟出这种结构的成像过程,比较了不同反射镜长随视场变化对物面分辨率的影响,发现为了保证物面的空间分辨率能达到ICF研究要求视场应尽量控制在200 μm以内。最终得出能量在8 keV、视场为200 μm,分辨率小于10 μm的Kirkpatrick-Baez型结构的模型。提出在装调过程中重要公差计算方法,得到数值孔径为0.003 7时,角度装调公差应在-0.087°~0.067°范围内。     

移测显微镜在测量金属杨氏模量中的应用

本分析了移测显微镜的测量精密度,根据拉伸法测量金属杨氏模量的原理,设计了一套应用移测显微镜测量金属杨氏模量的方法。     

激光原型装置KBAX射线显微镜网格测试

利用光线追迹的方法模拟了KBA显微镜成像,确定了光轴的方向并计算了KBA显微镜的几何调制传递函数。根据KBA模拟光路,提出了利用可见光作为模拟KBAX射线显微镜的光轴在激光原型装置上的瞄准和安装的方法,该方法掠入射角的调节精度为0.25°。利用周期为20μm的Ni网格在激光原型装置上对KBA显微镜进行了X射线成像实验,用X射线CCD记录图像,获得了较清晰的网格图像。     

用透射反射扫描法检测光学薄膜的激光损伤

 用波长1.06μm的激光透射反射自动扫描装置扫描了激光辐照前后薄膜的反射比和透射比。薄膜样品的工作波长为1.06μm。将扫描结果与相衬显微镜观察到的形貌相对照。实验结果表明，用透射反射扫描法不仅能反映出相衬显微镜所能观察到的损伤，而且也能发现某些显微镜所不能发现的损伤。由于透射比和反射比可以反映出薄膜对激光的传输性能，因此也能反映出薄膜能否继续工作，以此来判定损伤与否。因此用透射反射扫描法可以作为检测损伤的手段，由于简单易行，可以在线检测。避免目前损伤测试工作中繁重的人工操作。     

共焦扫描显镜微成像特性分析和扫描系统的优化设计

本文用傅里叶光学理论,从成像系统脉冲响应函数的角度分析普通显微镜的成像特性,揭示共焦系统具有超分辨成像能力的原因,最后提出一种使扫描渐晕减小的有效方法。     

光子扫描隧道显微镜球形样品二维近场强度分析

采用时域有限差分方法计算全内反射和光子扫描隧道显微镜系统。光子扫描隧道显微镜的基本工作原理是隐失波的产生和探测，当入射光在两种介质的分界面上发生全内反射，并在界面处产生非辐射的电磁波——隐失波时，采取对两界面入射光进行分别设置的方法即“三波法”设置入射激励元。分别计算一个球和两个球形样品的近场分布，并计算散射小球为探针，一个球为样品的扫描图像。结果表明：采用二维时域有限差分方法计算能较直观地显示样品表面的近场分布。表明时域有限差分方法在光子扫描隧道显微镜理论研究中具有很大潜力。     

非探针近场光学显微镜的成像实现

介绍一种非探针近场光学显微镜，并对它的图像实现过程及处理方法进行了讨论。该装置以阿达玛变换成像理论为基础，用纳米多孔编码板代替光纤探针获得了较高的光学信噪比。成像研究表明，该装置可对近场衰逝波分量进行有效探测并能实现超衍射极限成像，为近场光学探测研究提供了一种新的思路。     

Precise autofocusing microscope with rapid response

The rapid on-line or off-line automated vision inspection is a critical operation in the manufacturing fields. Accordingly, this present study designs and characterizes a novel precise optics-based autofocusing microscope with a rapid response and no reduction in the focusing accuracy. In contrast to conventional optics-based autofocusing microscopes with centroid method, the proposed microscope comprises a high-speed rotating optical diffuser in which the variation of the image centroid position is reduced and consequently the focusing response is improved. The proposed microscope is characterized and verified experimentally using a laboratory-built prototype. The experimental results show that compared to conventional optics-based autofocusing microscopes, the proposed microscope achieves a more rapid response with no reduction in the focusing accuracy. Consequently, the proposed microscope represents another solution for both existing and emerging industrial applications of automated vision inspection.     

Optical sectioning in differential interference contrast microscopy

While developing a three-dimensional (3-D) measurement technique for the retardation-modulated differential interference contrast (RM-DIC) microscope, we encountered a problem. The problem was that the measurement range was restricted in λ because it applies weak phase approximation.To overcome this drawback, we propose a 3-D reconstruction method with z-axis scanning. This technique needs high optical sectioning, like confocal microscopy.We investigated the characteristic of optical sectioning in a DIC microscope, then we confirmed experimentally that a DIC microscope has high optical sectioning. We also confirmed that a RM-DIC microscope has higher optical sectioning.By combining the optical sectioning of a RM-DIC microscope and z-scanning, we developed a new 3-D reconstruction method. This novel technique overcomes the observed problem as the measurement range is increased to micron order.     

光场显微镜实现裸眼三维实时显示

提出了一种将光场显微镜与裸眼三维显示技术相结合的方法,实现了利用光场显微镜对微观样品进行三维裸眼实时观察的技术。该技术将光场显微镜得到的子图像阵列直接投影在微透镜阵列的焦平面上,在空间一定区域内双眼可分别观看到两幅不同视角图像,使观察者产生立体视觉。该系统具有结构简单,无需相干光源,无需佩戴特殊眼镜,可多人同时观看等优点,应用前景广泛。     

A new method of three-dimensional measurement by differential interference contrast microscope

Based on weak phase approximation and the partial coherence theory, we analyze the image characteristics of a phase object using a microscope. We show that the image of the phase object is formed by the interplay between the phase distribution and the defocus.Using this theory, we also show the image characteristics of a differential interference contrast (DIC) microscope.We develop a method for extracting the phase component from the DIC image using two images with different retardation to reconstruct the phase distribution of the object. We call our new microscope a “retardation-modulated DIC (RM-DIC) microscope”. We describe the RM-DIC microscope and confirm our method using grating samples with depths of 20 and 50 nm.To measure the three-dimensional (3D) figures of the microstructures on the object using a DIC microscope we need to extract the phase component from the DIC image and to deconvolute the phase component by means of the modulation transfer function (MTF) of the DIC microscope.We conclude that our RM-DIC microscope can take quantitative measurements of the phase distribution, making it a very useful tool for 3D measurement of an object’s microstructures.     

A new analysis for extending the measurement range of the retardation-modulated differential interference contrast (RM-DIC) microscope

While considering measurements of grating-type samples with the retardation-modulated differential interference contrast (RM-DIC) microscope, we found a problem of phase objects. The problem is that smaller measured values than the actual phase distribution are obtained when phase objects are beyond the weak phase approximation range. We analyze the image characteristics of phase objects and show that the problem is caused by the effect of an image component which is proportional to the square of the phase distribution.To overcome this disadvantage, we propose a new analysis method named self phase-correction (SPC). The SPC method corrects the phase distribution of the first order approximation under the weak phase condition and obtains the actual phase distribution of an object’s phase beyond the weak phase approximation range. We propose a two-image SPC method and a three-image SPC method for the RM-DIC microscope, and examine the suitability of these methods.We confirm that the three-image SPC method effectively overcomes the problem, and that the measurement range of the RM-DIC microscope can thus be extended to a half-wavelength phase difference.     

Laser-tweezer-controlled solid immersion microscopy in microfluidic systems

We describe the creation and implementation of a near-field scanning solid immersion microscope that is specifically tailored for use in microfluidic systems. The microscope comprises a newly fabricated Weierstrass solid immersion lens (SIL), which is detached from its substrate and is free floating in the fluid, and a laser optical tweezer, which serves both as a trapping beam for alignment and positioning of the SIL and as a near-field scanning beam that images the sample through the SIL. A discussion of the SIL's fabrication method is presented along with experimental results that demonstrate the effectiveness of our microscope design.     

一种在显微镜照明光路上实现假彩色编码的方法

提出一种在显微镜照明光路上实现假彩色编码的方法，即在照明光路上对光源进行分区彩色编码，以得到彩色化的显微图像。     

Measurement of electron density distribution in the probe of a low voltage SEM

A method for measuring the electron density distribution in the probe of a low voltage scanning electron microscope is described. It is shown that the focused electron probe of an S 4800 scanning electron microscope at the electron energy of 200 eV has a Gaussian shape of the electron density with the effective diameter of the probe of 20 nm.     

基于神经网络的三维宽场显微图像复原研究

提出一种利用BP神经网络进行三维宽场显微图像复原的非线性映射方法,将三维图像转化为二维图像进行处理,利用神经网络的学习能力,通过训练,建立含有散焦信息的二维模糊图像与二维清晰图像之间的映射关系,然后对切片堆叠进行逐幅复原,从而实现显微图像的三维复原.得到的复原图像在视觉上和定量分析上都获得了很好的效果.由于采用小规模神经网络,训练时间短,计算量小,使实时复原成为可能.     

原子力显微镜用于软X射线接触成像的研究

论述了在接触显微成像技术中，后续放大设备对分辨率的影响，并用实验方法比较了采用光学显微镜和原子力显微镜阅读并放大显微图的结果，表明采用原子力显微镜放大显微图是一种较为理想的方法。     

Fresnel diffraction model for the point spread of a laser light profile microscope (LPM)

Light profile microscopy is a new method of thin film imaging in which a microscope forms an image of a laser beam intersecting a thin layer along its depth axis. Emission (luminescence or scatter) from the beam volume is transmitted through a cross sectional view surface and used by a microscope to form an image of the beam propagating through the sample. Fresnel diffraction theory is used in this work to derive a point spread model for a microscope operating in this configuration, assuming that the emission from the source beam is completely incoherent. This theory illustrates the dependence of the image resolution on the laser beam radius, which determines the effective thickness of the system object seen by the microscope. The effect of relative displacement of the source beam center from the object plane of the microscope is evaluated. The present theory shows that radial resolution may be evaluated by means of an object focus envelope and a focal energy distribution computed for the objective lens. PACS 42.25Fx; 07.60Pb