基于小孔光学系统与面阵ＣＣＤ 的激光位移传感器系统设计

为了降低激光位移传感器的生产成本,提出一套新型激光位移传感器系统的设计方法。该设计基于三角测距原理,使用ＣＣＤ 单板机作为光电探测器,换用小孔光学系统替代透镜,并针对小孔光学系统的特点对传感器系统重要参数的确定方法进行了研究,编写图像处理算法提取目标图像中的位移信息,从而达到非接触式位移测量目的。搭建了一套该新型激光位移传感器系统进行位移测量实验,结果表明此系统可以达到量程为５０ ｍｍ、精度为１ ｍｍ 的测量需求。     

大量程激光位移传感器的成像系统设计

为了解决目前国内自主研发的激光位移传感器基准工作距离短和测量范围小的问题,设计了一种适用于远距离测量的大量程激光位移传感器成像光学系统。基于激光三角测量原理,结合具体使用要求计算了大量程激光位移传感器的性能指标和成像光学系统的设计参数。选择5片式透镜结构作为系统的初始结构,利用光学设计软件对大量程激光位移传感器成像光学系统进行了仿真,完成了系统优化和性能分析,实现了基准工作距离为1 000 mm、量程为±500 mm、分辨率为0.4 mm的大量程激光位移传感器成像系统设计。结果表明,在测量范围±500 mm内,系统均可以满足成像质量要求。该激光位移传感器成像系统具有工作距离远、测量量程大、结构简单的特点,可满足1 000 mm远距离处大量程范围的测量使用要求。     

Folded resonator-dual polarization competition laser displacement sensor

The existing so-called “dual polarization competition laser displacement sensor” applies a cat’s eye resonator. The resonator could be disarranged when the cat’s eye reflector (CER) swings slightly with the rod of the slide rail in measuring the procedure and droops due to its deadweight in long-time operation. This influences the stability of the sensor significantly. In this paper, a novel cat’s eye folded resonator was built, based on which our system named “folded resonator-dual polarization competition laser displacement sensor” was set up. It has a high resolution of λ/16 (39.6 nm) and large measurement range of up to 17 mm. The misalignment sensitivities of traditional cat’s eye resonator and the folded one are both analyzed; and comprehensive experiments are carried out, through which a conclusion can be drawn out that the maximal adjusting angle and the maximal cross displacement of the CER in folded resonator are both about 5 times of those in cat’s eye cavity. Furthermore, the measurement results from this new sensor prove its high stability.     

Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage

In this study, a novel and simple measurement system for simultaneously measuring the geometric errors in six-degree-of-freedom (6-DOF) for a moving linear stage of a machine tool is designed and validated. Compared to laser interferometer and laser Doppler systems, this new measurement system is less expensive and capable of multiple functions. The proposed measurement system comprises an optics module, composed of two reflectors and two cubic beam splitters; a sensing module, composed of three two-dimensional position sensitive detectors (PSDs); and a helium-neon (He-Ne) laser. Using skew-ray tracing and a first-order Taylor series expansion, the 6-DOF geometric errors of the moving linear stage, which include translation and rotation errors, are analyzed. A laboratory prototype system is built to verify the effectiveness and accuracy of the proposed measurement system. The experimental results show that the displacement uncertainty and the angular uncertainty of the proposed measurement system are less than 1.2 µm and 0.4″, respectively. Compared with the Renishaw laser interferometer XL-80 laser system, the translational accuracy and the rotational accuracy of the proposed measurement system are less than ±1 µm and ±0.2″, respectively, when the linear stage travels 6 mm.     

激光位移传感器传感探头微小型光学系统设计

光斑质量直接影响激光位移传感器测量的精度。为了提高激光位移传感器传感探头光学系统的成像质量,设计了传感探头四片式微小型光学系统。本文在理想成像基础上,分析光束在光学系统中能量传递的变化规律,对比光电探测器的感光能力,利用光学设计软件(ZEMAX)实现了激光位移传感器传感探头微小型光学系统的设计。通过理论计算分析,严格控制传感探头孔径光阑的大小,对光学系统进行优化处理,成像最大弥散斑半径低于3. 3μm,空间分辨率120lp/mm以下的传递函数MTF(Modulation Transfer Function)值大于0. 5,光线扇形图的最大像差小于5μm,畸变量低于0. 1859%。该光学系统具有良好的成像效果,可以满足激光位移传感器探测系统对成像系统成像光斑质量的要求,以保证传感器的测量精确度优于5μm。     

Non-incremental interferometric displacement measurement using a laser Doppler sensor with phase coding

The inspection of fast rotating objects with rough surfaces is an important task in the emerging field of process control. However, this is challenging since fast and non-contact inspection techniques with a measurement uncertainty in the nanometer range are often required. We present a novel optical sensor allowing non-incremental interferometric displacement measurement of moving solid state objects with rough surfaces. It features three wavelength coded interference fringe systems which are superposed slightly tilted. The displacement is determined by evaluating the phase shift between the resulting scattered light signals. Experimentally, a measurement uncertainty of 660 nm was obtained. This displacement uncertainty is independent of the lateral object velocity in principle. Due to this unique feature, the sensor can be utilized advantageously for precise displacement and vibration measurements of high speed objects as demonstrated by vibration measurements at a turbo pump shaft rotating with 48 000 rpm.     

具有温度补偿的光纤位移传感器

位移测量是结构健康检测的重要参量之一.本文提出了一种双悬臂梁粘贴光纤光栅的位移传感器,它将位移变化转换成两只光纤光栅的波长移动,实现对位移量的绝对测量.通过引入对称补偿光纤光栅的方法解决了温度与位移交叉敏感的问题.推导了位移传感器的工作原理,完成了相关实验,并分析了传感器所产生误差的来源.实验结果表明,在量程为20 mm的时候,位移灵敏度为123 pm/mm,温度补偿前,温度对位移的影响是234.9 μm/℃;温度补偿后,温度对位移的影响为17 μm/℃.本位移传感器量程大、线性好、准确度高,不易受恶劣环境影响.     

激光非接触曲面面形传感器

提出一种用于空间自由曲面测量的激光非接触曲面面形传感器。该传感器结构简单，在光学原理上传感器的输出量与被测量成线性关系，接收物镜绕系统光轴３６０°接收目标面的漫射光，目标面的倾斜产生的影响很小，解决了困扰空间自由曲面测量中阴影效应、倾斜等问题。该传感器的测量范围为４ｍｍ，分辨率为２μｍ，当目标面（漫反射面和金属等镜面反射面）倾斜角为±８５°时，仍能保证２０μｍ的测量精度。     

Single image rectification of thermal images for geometric studies in façade inspections

This work presents a photogrammetric technique that provides geometric and thermal information about building façades. It uses low cost and portable scale bars, specially designed for thermal imaging, and processing software based on single image rectification. Image rectification corrects the original photo displacement due to the projection and perspective, and radial distortions introduced by the lens of the camera.The technique is tested by comparing laser scanning and thermal data. Seven segments of different orientation and length are selected for the measurement. Accuracy tests show errors between 44 mm and 151 mm. Precision values range between 22 mm and 61 mm for a maximum length of 7259 mm. The accuracy and precision results obtained for the technique open the possibility of extending its use to building inspection tasks.     

Quadrature demodulation technique for self-mixing interferometry displacement sensor

A new, to the best of our knowledge, signal processing method based on quadrature demodulation technique is presented for laser diode self-mixing interferometry(LDSMI) displacement sensor. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Detection of the target's displacement can be easily achieved by sampling the interference signal at those times which satisfied certain conditions. The major advantage of the technique is that it does not involve any complicated calculation and insensitive to the sampling error. Experimental results show that the proposed method can effectively improve the displacement measurement resolution of the laser diode self-mixing displacement sensor to a few nanometers.     

A new subdivision method for grating-based displacement sensor using imaging array

A new subdivision method for grating-based displacement sensor was proposed in the present study, which takes advantages of imaging array's high resolution and pixels’ good uniformity in the space. In this method, the magnified grating image is received by imaging array and grating pitch is directly subdivided by pixels, which is quite different from that moiré fringe is subdivided by complex subsequent circuits in moiré-type displacement sensor. The displacement is statistically calculated by using the whole grating image, which greatly eliminates the errors arising from illumination, electrical signals’ fluctuation, grating defect, and so on. Therefore, the subdivision method is easy to obtain signal with high signal-to-noise ratio, insensitive to some external factors, and able to attain high measurement precision with low cost. In this paper, the principle of subdivision method was illuminated, the systemic resolution was theoretically discussed, the measurement precision was experimentally checked, and the uncertainty of measurement was analyzed. The subdivision system consisted of the grating with 20-μm pitch and the CMOS image sensor with the pixels of 1280×1024 had the resolution of 0.04 μm, and the maximum displacement error was less than 0.4 μm, which has been tested in the Abbe comparator platform.     

Design and experiments on a wide range fiber Bragg grating sensor for health monitoring of coal mines

The tunnel collapse problem of coal mine is very common and its damage is very serious. It also seriously endangers people's lives and property safety. At present, a variety of instruments are used for tunnel roof structure health monitoring in most of the coal mines at home and abroad. In this paper, a displacement sensor using optical fiber grating technology was designed, which could be used to prevent the problem of coal mine tunnel collapse by monitoring the coal mine tunnel roof displacement. Firstly, finite element analysis was demonstrated to simulate the stress and displacement of coal mine tunnel roof to determine where to install the sensor. Then the characteristics of the fiber Bragg grating sensor were analyzed in detail and the sensor structure was designed according to the actual requirements in the coal mine. At last, the feasibility of the whole system was experimentally verified. The cross-sensitivity of the temperature and displacement issue with FBG sensors could be eliminated by using matched pairs of FBG. The measuring range of 50 mm and the measurement resolution up to 0.06 mm could be obtained with the proposed sensor.     

A novel active optical approach for acceleration measurement based on a Y-shaped cavity dual-frequency laser

A novel active optical approach for acceleration measurement based on a Y-shaped cavity dual-frequency laser is presented and demonstrated. Applied acceleration causes a change in the refractivity of sensing gas in one of the two cavities, resulting in a beat frequency variation between two orthogonal polarized lights. As a result, this approach produces a modulation of beat frequency strictly proportional to the input acceleration. Preliminary experiments with a 632.8 nm Y-shaped cavity He–Ne dual-frequency laser confirm the validity of the laser sensor. The experimental results show that the laser sensor in this approach characterizes a nearly linear response to the input acceleration, which is a projection of gravitational acceleration. The experimental values of the scale factors are mostly in good agreement with theoretical ones. By optimizing the optical and geometrical parameters of the laser sensor, an acceleration measurement resolution of 10^?5–10^?6 gravitational acceleration (within ±5 g measurement range) could be expected. Furthermore, we investigate the principle about the sign of the scale factor in detail, and propose a simple but efficient method to distinguish the direction of the acceleration acted on the laser sensor.     

一种用于辉光放电光谱深度分析的激光实时测量新方法

辉光放电原子发射光谱仪可用于物质表面化学成分随深度分布的分析,在镀层分析、金属材料检验等领域有着广泛的应用。文章介绍了辉光深度分析的传统方法和局限性以及实时深度测量技术的近期研究,提出了一种用于辉光放电光谱深度分析的激光实时测量新方法。文章采用激光位移传感器和根据激光测量方法设计的辉光放电光源构成实时深度测量系统,详细阐述了系统的设计方案和技术原理。系统的设计结构能够实现在辉光光谱分析的同时进行激光实时溅射深度的测量。通过实验验证和分析了激光实时测量样品溅射深度过程中产生的光源位移现象。采用双激光器实时深度测量系统对锌合金标准样品进行了溅射深度的实时测量,给出了实时深度测量曲线。通过将溅射面测量曲线与参考面曲线进行叠加,得到了样品溅射坑深度的实际值,与Dektak8型表面形貌仪测量结果一致。     

Improvement of measurement range of optical fiber displacement sensor based on neutral network

By studying the output characteristics of random type optical fiber displacement sensor and semicircular type optical fiber displacement sensor, a sensor of new structure was designed. Using the ratio of the two output signals as the output of the whole system, the measurement range was enlarged, the linearity was improved, and the errors of reflective and absorbent changing in target surface are automatically compensated. Meantime, an optical fiber sensor model of correcting static error and linearizing the output curve based on BP artificial neural network was set up. The intrinsic errors such as fluctuations in the light, circuit excursion, the intensity losses in the fiber lines and the additional losses in the receiving fiber caused by bends were eliminated. By discussing in theory and experiment, the error of nonlinear is 2.9%, the measurement range reaches to 3.0 mm and the relative accuracy is 2%. This kind of sensor offers such advantages as no electromagnetic interference, simple construction, high sensitivity, good accuracy and stability.     

Spatially variant regularization of lateral displacement measurement using variance

The purpose of this work is to confirm the effectiveness of our proposed spatially variant displacement component-dependent regularization for our previously developed ultrasonic two-dimensional (2D) displacement vector measurement methods, i.e., 2D cross-spectrum phase gradient method (CSPGM), 2D autocorrelation method (AM), and 2D Doppler method (DM). Generally, the measurement accuracy of lateral displacement spatially varies and the accuracy is lower than that of axial displacement that is accurate enough. This inaccurate measurement causes an instability in a 2D shear modulus reconstruction. Thus, the spatially variant lateral displacement regularization using the lateral displacement variance will be effective in obtaining an accurate lateral strain measurement and a stable shear modulus reconstruction than a conventional spatially uniform regularization. The effectiveness is verified through agar phantom experiments. The agar phantom [60 mm (height) × 100 mm (lateral width) × 40 mm (elevational width)] that has, at a depth of 10 mm, a circular cylindrical inclusion (dia. = 10 mm) of a higher shear modulus (2.95 and 1.43 × 10⁶ N/m², i.e., relative shear modulus, 2.06) is compressed in the axial direction from the upper surface of the phantom using a commercial linear array type transducer that has a nominal frequency of 7.5-MHz. Because a contrast-to-noise ratio (CNR) expresses the detectability of the inhomogeneous region in the lateral strain image and further has almost the same sense as that of signal-to-noise ratio (SNR) for strain measurement, the obtained results show that the proposed spatially variant lateral displacement regularization yields a more accurate lateral strain measurement as well as a higher detectability in the lateral strain image (e.g., CNRs and SNRs for 2D CSPGM, 2.36 vs 2.27 and 1.74 vs 1.71, respectively). Furthermore, the spatially variant lateral displacement regularization yields a more stable and more accurate 2D shear modulus reconstruction than the uniform regularization (however, for the regularized relative shear modulus reconstructions, slightly accurate, e.g., for 2D CSPGM, 1.51 vs 1.50). These results indicate that the spatially variant displacement component-dependent regularization will enable the 2D shear modulus reconstruction to be used as practical diagnostic and monitoring tools for the effectiveness of various noninvasive therapy techniques of soft tissue diseases (e.g., breast, liver cancers). Application of the regularization to the elevational displacement will also increase the stability of a three-dimensional (3D) reconstruction.     

Determination of the thickness of a transparent plate using a reflective fiber optic displacement sensor

A fiber optic sensor for determining the thickness of a transparent plate (1–2.5 mm) is described based on a fiber optic displacement sensor. The sensor characteristics are found to vary with the change in the thickness of a plate. A theoretical model is proposed and validated with experimental results. The behavior of the sensor is evaluated and analyzed in terms of the numerical aperture and diameter of the fiber.     

Displacement sensor based on polarization mixture of orthogonal polarized He-Ne laser at 1.15μm

Displacement sensor based on the polarization mixture and the cavity tuning of the orthogonal polarized He-Ne laser 1.15μm is presented.The power tuning curves of He-Ne laser are irregular,and it is difficult to measure the change in cavity length.The distortion of the curves is caused by the higher relative excitation compared with the He-Ne laser at 633 nm.In view of its potential for the wider displacement measuring range,a new method of displacement sensing is developed.Experiments show that displacement measuring stability based on the method of the polarization mixture is better than that of the power tuning curves. The displacement sensor achieves the measuring range of 100 mm,resolution of 144 nm,and linearity of 7×10-6 .     

激光位移传感器的光学系统设计

针对目前国内自主研制的激光位移传感器精度低,测量范围小等问题,提出了一种采用光学设计软件预先仿真整个激光位移传感器光学系统的方法。在分析系统各部分的光学特性的基础上,结合具体要求设计了一个激光位移传感器的光学系统,其工作范围为（50±10）mm。采用系统分割的方法,将整个光学系统分为两部分进行设计,第一部分是激光束的整形透镜,要求在有效的工作范围内得到小而均匀的出射光斑,设计结果表明,在测量范围内,光斑大小能够控制在10-1mm量级;另一部分是被测面散射光接收的成像物镜,该系统的特点是物面和像面相对于光轴都有一定的角度,实验结果表明其成像满足Scbeimpflug条件。