Systematic considerations for the patterning of photonic crystal devices by electron beam lithography

Photonic crystal devices with feature sizes of a few hundred nanometers are often fabricated by electron beam lithography. The proximity effect, stitching error and resist profiles have significant influence on the pattern quality, and therefore determine the optical properties of the devices. In this paper, detailed analyses and simple solutions to these problems are presented. The proximity effect is corrected by the introduction of a compensating dose. The influence of the stitching error is alleviated by replacing the original access waveguides with taper-added waveguides, and the taper parameters are also discussed to get the optimal choice. It is demonstrated experimentally that patterns exposed with different doses have almost the same edge-profiles in the resist for the same development time, and that optimized etching conditions can improve the wall angle of the holes in the substrate remarkably.     

Structuring of aluminum films by laser-induced local oxidation in water

A simple method for patterning of thin (15–650 nm) aluminum films on glass substrates by direct, low-power, laser-thermal oxidation in water under common laboratory conditions is demonstrated. Local heating of the metal film enhances the formation of aluminum oxide (hydrargillite, Al₂O₃–3H₂O) and provokes breakdown of the passivation layer followed by local corrosion at temperatures close to the boiling point of water. Moving the focus of an Ar-ion laser (λ=488 nm) over the aluminum film with a speed of several μm/s yields grooves flanked by hydrargillite. Upon through oxidation of the metal these structures act as electrically insulating domains. Depending on the film thickness, the minimum width of the line structures measures between 266 nm and 600 nm. The required laser irradiation power ranges from 1.7 mW to 30 mW. It is found that the photo-thermal oxidation process allows for writing of two-dimensional electrode patterns. Received: 16 July 2001 / Accepted: 23 July 2001 / Published online: 2 October 2001     

Positioning of cationic silver nanoparticle by using AFM lithography and electrostatic interaction

One-dimensional metal lines of silver nanoparticles with a nano-sized width were generated onto silicon surface by using a nano-level lithography technique, field induced oxidation (FIO) by AFM, on self-assembled monolayer-modified Si wafers. This FIO technique provided SiO₂ lines a width of less than 100 nm. Short-time immersion of partially anodized silicon surface which is covered by a cationic silanol surfactant ((CH₃O)₃SiCH₂CH₂CH₂N(CH₃)₃⁺Cl⁻)-monolayer into quaternary ammonium (HSCH₂CH₂N(CH₃)₃⁺Br⁻)-covered silver nanoparticles readily and reproducibly gave nano-metal lines of silver onto silicon wafers. Hydrophilicity of the whole wafer surface was indispensable for homogeneously wetting the anodized SiO₂ area with a nanodimensional width.     

Large-area metallic photonic crystal fabrication with interference lithography and dry etching

Large-area one-dimensional periodic metallic structures were fabricated on a waveguide layer with interference lithography and dry etching. As narrow as 115-nm gold nanowires were obtained with a period of 395 nm, covering a homogeneous area as large as 5 × 5 mm². Extinction measurements demonstrate the strong coupling between waveguide mode and gold-particle plasmon resonance. We demonstrate good agreement with a scattering-matrix theory. The dispersion of the metallic photonic crystals was obtained by angle-resolved measurements. This method represents a simple and low-cost way to fabricate large-area metallic photonic crystals.     

F2 laser induced oxidation of inorganic material

Transparent SiO₂ thin films were selectively fabricated on Si wafer by 157 nm F₂ laser in N₂/O₂ gas atmosphere. The F₂ laser photochemically produced active O(¹D) atoms from O₂ molecules in the gas atmosphere; strong oxidation reaction could be induced to fabricate SiO₂ thin films only on the irradiated areas of Si wafer. The oxidation reaction was sensitive to the single pulse fluence of F₂ laser. The irradiated areas were swelled and the height was approximately 500-1000 nm at the 205-mJ/cm² single pulse fluence for 60 min laser irradiation. The fabricated thin films were analytically identified to be SiO₂ by the Fourier-transform IR spectroscopy. The SiO₂ thin films could be also removed by subsequent chemical etching to fabricate micro-holes 50 nm in depth on Si wafer for microfabrication.     

Superhydrophobicity of LaMnO3 Coatings with Hierarchical Microstructures

As proposed by Herminghaus, a hierarchical structure could render any surface nonwettable as long as the roughness amplitude at small scales is sufficient to suspend a free liquid surface. Recently we reported that the wettability of La0.7Sr0.3MnO3, an intrinsic hydrophilic oxide, can be tuned from superhydrophilicity to superhydrophobicity by hierarchical microstructures generated by annealing the coatings of La0.7Sr0.3MnO3 powder in nanometric scale at different temperatures. Here we further demonstrate the similar phenomenon observed on LaMaO3 coatings, which conforms THAT the surface geometrical structure is a key factor to determine the wettability.     

Kinetic Monte Carlo simulation of spatially ordered growth of quantum dots on patterned substrate

We report the growth of well-ordered InAs QD chains by molecular beam epitaxy system. In order to analyze and extend the results of our experiment, a detailed kinetic Monte Carlo simulation is developed to investigate the effects of different growth conditions to the selective growth of InAs quantum dots (QDs). We find that growth temperature plays a more important role than growth rate in the spatial ordering of the QDs. We also investigate the effect of periodic stress on the shape of QDs in simulation. The simulation results are in good qualitative agreement with our experiment.     

Probing the diffusion of vacuum ultraviolet (λ = 172 nm) induced oxidants by nanoparticles immobilization

Vacuum ultraviolet (VUV, λ = 172 nm) patterning of alkyl monolayer on silicon surface has been demonstrated with emphasis on the diffusion of VUV induced oxygen-derived active species, which are accountable for the pattern broadening. The VUV photons photo-dissociates the atmospheric oxygen and water molecules into the oxygen-derived active species (oxidants). These oxidants photo-oxidize the hexadecyl (HD) monolayer in VUV irradiated regions (Khatri et al., Langmuir. 24 (2008) 12077), as well as the little concentration of oxidants diffuses towards the masked areas. In this study, we performed VUV patterning at a vacuum pressure of 10 Pa to track the diffusion pathways for the oxidants with help of gold nanoparticles (AuNPs; ? = 10 nm) immobilization. At VUV irradiated sites AuNPs are found as uniformly distributed, but adjacent to the pattern boundary we observed quasi-linear arrays of AuNPs, which are determined by diffusion pathways of the oxidants. The diffusion of oxidants plays vital role in pattern broadening. The site selective anchoring of AuNPs demonstrates the utility of VUV photons for the construction of functional materials with microstructural architecture.     

Fragmentation of dodecanethiol molecules: application to self-assembled monolayer damage in atom lithography

Atom lithography commonly employs self-assem- bled monolayers (SAMs) of alkanethiols which act as resists to protect prepared surfaces. Metastable atomic species such as helium are used to damage the resist, enabling pattern transfer via mask lithography, followed by wet chemical etching. The damage mechanism is, however, not well understood. Here we report studies of fragmentation of dodecanethiol (DDT) molecules embedded in helium nano-droplets that have been irradiated by an electron beam. The results of the charge-transfer fragmentation process provide the first experimental data on the damage mechanisms that occur in the metastable helium/SAM interaction. Received: 20 September 1999 / Revised version: 6 December 1999 / Published online: 8 March 2000     

Electrochemical behaviour of gold modified with contaminated TMP amine adlayers studied by STM, CV, EPR

Scanning tunnelling microscopy (STM), cyclic voltammetry (CV) and electron paramagnetic resonance spectroscopy (EPR) were used to investigate the influence of the TMP amine derivative on Au (1 1 1). The STM results show that the gold surface covered by the adlayer of the TMP derivative is easily modified (holes formation) after increasing the bias voltage to 0.5 V. The CV and EPR results show the electrochemical origin of observed STM topography changes. It is suggested that TMP could be oxidized to the nitroxyl TEMPO radical which adsorbs on Au in the form of an oxoammonium cation. Such an oxoammonium cation at the potential of 0.5 V forms a permanent complex of gold and the nitroxyl radical which could be easily desorbed during STM imaging.     

Enhanced Photoluminescence of InGaN/GaN Green Light-Emitting Diodes Grown on Patterned Sapphire Substrate

Green InGaN/GaN based light-emitting diodes （LEDs） are fabricated both on planar and wet-etched patterned sapphire substrates by metalorganic vapour phase epitaxy （MOVPE）. Their photoluminescence （PL） properties of the two samples are studied. The results indicate that the PL integral intensity of the green LED on the patterned substrate is nearly two times of that on the planar one within the whole measured temperature range. The enhanced PL intensity in the green LED on the patterned substrate is shown completely contributed from the extraction efficiency, but not from the internal quantum efficiency. The conclusion is supported by temperature-dependent PL analysis on the two samples, and the mechanisms axe discussed.     

Microscale steps and micro-nano combined structures by anodizing aluminum

In this paper, we firstly present a novel microscale-step structure fabricated by anodizing aluminum in a mixture of 0.05-0.5 wt% NaCl (HCl), 2 wt% H₃PO₄ and 20 wt% ethanol under potentials of 1-40 V at room temperature. Then, we present two micro-nano combined structures by integrating the microsteps with nanopores through multi-step anodizations. The microstep-nanopore hierarchical structure was obtained by re-anodizing the sample in oxalic acid, and the regular nanopores can be realized on the microscale patterned aluminum surface. The two-layer porous structure was one layer of nanoporous anodic alumina and another layer of micropores by two-step anodization on sample's both sides. These two novel structures can be useful for surface engineering and high flux filtration, respectively. The current fabrication approach broadens the applications of aluminum anodization, and brings a new method for assembling micro-nano structures.     

Superhydrophobic surfaces prepared from water glass and non-fluorinated alkylsilane on cotton substrates

Superhydrophobic surfaces have been successfully prepared by sol-gel method using water glass as starting material. Such surfaces were obtained first by dip-coating the silica hydrosols prepared via hydrolysis and condensation of water glass onto cotton substrates, then the surface of the silica coating was modified with a non-fluoro compound, hexadecyltrimethoxysilane (HDTMS), to gain a thin film through self-assembly, superhydrophobicity with a water contact angle higher than 151° can be achieved. The morphology and surface roughness were characterized by SEM and AFM.     

Nanowire manipulation on surfaces through electrostatic self‐assembly and magnetic interactions

A method for fabricating aligned nanowire arrays on surfaces is shown. Gold and segmented Au/Ni/Au nanowires of high aspect ratio have been prepared by template electrosynthesis, and functionalized with charged short alkanethiols that can be ionized in aqueous solutions. Different distributions of funtionalized nanowires could be obtained on large surfaces from nanowire aqueous suspensions, avoiding aggregation due to electrical repulsion. Due to the high magnetic anisotropy of segmented Au/Ni/Au nanowires chaining of aligned nanowires could be obtained by applying a low magnetic field. While electrostatics favours side wire interactions due to the high aspect ratio, concurrent electrostatics and applied magnetic field yields end‐to‐end interaction and linear alignment without bifunctionalization. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Laser-induced local dehydroxylation on surface-oxidized silicon substrates: mechanistic aspects and prospects in nanofabrication

Processing of silicon oxide surfaces with a focused laser beam at a wavelength of 514 nm has been investigated. Laser processing of native silicon samples (d _ox=1–2 nm) allows the fabrication of reactive templates with laterally varying hydroxyl group density. Very similar results were also obtained on thermally oxidized silicon samples (d _ox≈100 nm), whereas respective experiments on quartz plates have failed. These results support a photothermal mechanism where laser irradiation causes a local temperature rise and initiates dehydroxylation. In agreement with a photothermally induced dehydroxylation reaction, a thermokinetic analysis of the experimental data points to a highly activated process. In conjunction with site-selective functionalization routines this opens up an avenue towards functional surface structures with lateral dimensions significantly below the optical diffraction limit.     

Nanostructures fabricated on metal surfaces assisted by laser with optical near-field effects

Nanostructures on metal film surfaces have been written directly using a pulsed ultraviolet laser. The optical near-field effects of the laser were investigated. Spherical silica particles (500–1000 nm in diameter) were placed on metal films. After laser illumination with a single laser shot, nanoholes were obtained at the original position of the particles. The mechanism for the formation of the nanostructure patterns was investigated and found to be the near-field optical resonance effect induced by the particles on the surface. The size of the nanohole was studied as a function of laser fluence and silica particle size. The experimental results show a good agreement with those of the relevant theoretical calculations of the near-field light intensity distribution. The method of particle-enhanced laser irradiation allows the study of field enhancement effects as well as its potentialapplications for nanolithography. Received: 10 December 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +65-777/1349, E-mail: HUANG_Sumei@dsi.a-star.edu.sg     

The role of sample rotation and oblique ion incidence on quantum-dot formation by ion sputtering

Starting from a theory recently proposed by Kahng et al. that explains the formation of ordered dots by ion sputtering under normal ion incidence, it was demonstrated that extending this theory to ion sputtering under oblique ion incidence with simultaneous sample rotation offers the self-organized formation of dots by ion sputtering for a large variety of different ion/material combinations. While for sputtering under normal incidence the shape of the collision cascade must be anisotropic, where the lateral straggling exceeds the longitudinal straggling, this constraint is not necessary under oblique incidence. Received: 16 May 2001 / Accepted: 10 September 2001 / Published online: 17 October 2001     

Fabrication of a superhydrophobic ZnO nanorod array film on cotton fabrics via a wet chemical route and hydrophobic modification

A superhydrophobic ZnO nanorod array film on cotton substrate was fabricated via a wet chemical route and subsequent modification with a layer of n-dodecyltrimethoxysilane (DTMS). The as-obtained cotton sample was characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive spectroscopy (EDS), scanning probe microscope (SPM) and X-ray photoelectron spectroscopy (XPS), respectively. The wettability of the cotton fabric sample was also studied by contact angle measurements. The modified cotton fabrics exhibited superhydrophobicity with a contact angle of 161° for 8 μL water droplet and a roll-off angle of 9° for 40 μL water droplet. It was shown that the proper surface roughness and the lower surface energy both played important roles in creating the superhydrophobic surface, in which the Cassie state dominated.     

A Mössbauer study of the chemical stability of iron oxide nanoparticles in PMMA and PVB beads

We have prepared magnetic beads consisting of iron oxide nanoparticles in a polymethyl methacrylate (PMMA) and a polyvinyl butyral (PVB) matrix. High-field Mössbauer studies show that the particles have an almost perfect collinear spin structure and magnetization measurements show that they are superparamagnetic at room temperature at a time scale of seconds. We have followed the oxidation of the particles, which initially have a stoichiometry close to magnetite. The oxidation is fast during the first 2–3 weeks and then continues slowly such that even after 30 weeks the particles have not completely transformed to maghemite. The PVB beads are hydrophilic and biocompatible and are therefore well suited for applications in medicine and biology.