A Calculation of the Electron Temperature of Complex Plasma of Noble Gases Mixture in CCRF Discharge

In this paper the results of studying of the electron temperature of buffer and complex plasmas in mixtures of noble gases (helium + argon) in capacitively coupled radiofrequency (CCRF) discharge are presented. The optical properties of dusty plasma in argon, helium and their mixtures have been studied using optical diagnostic methods. Based on spectral lines of plasma forming gases, the dependence of the electron temperature on gas pressure and discharge power has been determined. The axial distribution of electron temperature in the interelectrode gap has been measured. Measurements have been made using an RF compensated electric probe. The comparison of the experimental results shows that admixture of a small amount of argon to helium leads to a decrease in the electron temperature of buffer plasma. The presence of dust particles in the plasma causes an increase in the electron temperature. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Measurement of temperature of a dusty plasma from its configuration

A new concept called “configurational temperature” is introduced in the context of dusty plasma, where the temperature of the dust particles submerged in the plasma can be measured directly from the positional information of the individual dust particles and the interaction potential between the dust grains. This method does not require the velocity information of individual particles, which is a key parameter to measure the dust temperature in the conventional method. The technique is initially tested using two-dimensional (2D) OpenMP parallel molecular dynamics and Monte Carlo simulation and then compared with the temperature evaluated from experimental data. The experiment have been carried out in the Dusty Plasma Experimental (DPEx) device, where a 2D stationary plasma crystal of melamine formaldehyde particles is formed in the cathode sheath of a DC glow discharge argon plasma. The kinetic temperature of the dust is calculated using the standard particle image velocimetry technique at different pressures. An extended simulation result for the three-dimensional case is also presented, which can be employed for the temperature measurement of a three-dimensional dust crystal in laboratory devices.     

Controlled Levitation of Dust Particles in RF+DC Discharges

Experiments and particle‐based kinetic simulations were performed to obtain the equilibrium levitation height of dust particles in plane parallel electrode discharges in low pressure argon gas, established by combined RF and DC excitation. The computed values were compared to experimental data. The good overall agreement of the simulation results and the experimental data verifies our gas discharge, dust charging, as well as dust force balance models. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Characteristics of an atmospheric‐pressure radio frequency‐driven Ar/H2 plasma discharge with copper wire in tube

This paper investigates a plasma discharge driven by a 13.56 MHz radio frequency (RF) power supply at atmospheric pressure, in which a copper wire is inserted in the discharge tube for the deposition of Cu films. The results show that the jet plasma formation originates from the discharge between the copper wire and induction coil because of its electrostatic field. The axial distribution of the plasma parameters in the RF plasma jet, namely the gas temperature, excitation temperature, and electron number density, is determined by diatomic molecule OH fitting, Boltzmann slope, and H_β Stark broadening, respectively. The discharge current significantly declines when a small amount of hydrogen is added to the argon as the plasma‐forming gas, and the gas temperature of discharge plasma increases considerably.     

Non-self-sustained discharge in nitrogen with a condensed dispersed phase

A non-self-sustained discharge in nitrogen with a condensed dispersed phase is studied experimentally for the first time under atmospheric pressure at room temperature. It is shown that macroparticles strongly affect the current-voltage characteristics as well as the stability of the discharge process. A numerical simulation of dust particle charging in nitrogen is carried out at room temperature and cryogenic temperatures under continuous medium conditions. It is shown that a considerable charge is accumulated at macroparticles in the nitrogen beam plasma. As the gas temperature decreases, the charge of macroparticles in nitrogen increases, while in argon their charge decreases. For this reason, the Coulomb interaction parameter for dust particles in nitrogen increases strongly upon a transition from room to cryogenic temperature, while in argon this parameter decreases. It is also shown that the characteristic time of dust particle charging is shorter than 1 μs for a beam current density of 90 μA/cm², while the neutralization of the charge takes milliseconds. Possible mechanisms of the influence of the dust component on the characteristics of non-self-sustained discharge are considered.     

Experimental study on parameters of dust plasma in SiH4/C2H4/Ar discharges

Measurements of dust plasma parameters were carried out in the discharges of （SiH4/C2H4/Ar） mixtures. Dust particles were formed in the capacitively coupled radio-frequency discharge of these reactive mixtures in a cylindrical chamber. Langmuir probe was employed for diagnosing and measuring the important plasma parameters such as electron density and electron temperature. The results showed that the electron density dropped, and in contrast the electron temperature rose when the dust particles formed. The curves of the electron density and temperature versus the RF power and pressure were presented and analysed. Further, it was found that the wriations of electron temperature and the size of dust void with the RF power followed the similar trends. These trends might be useful for understanding more about the characteristics of dusty voids.     

Optical characterization of atmospheric‐pressure plasma needle

The atmospheric‐pressure plasma needle is a promising source that can be used efficiently for different industrial applications. A radio frequency (RF) (13.56 MHz) generator was used to generate a He–O₂/Ar mixture plasma. The ground‐state oxygen atomic density [O] was calculated as a function of discharge parameters by “actinometry”. The Ar‐I (2p₁ → 1s₂) line at 750 nm and the O‐I (³P → ³S) line at 844 nm were used to estimate the [O] atomic density. The rotational temperature T _R of He–O₂/Ar mixture was measured from the rotational levels of the “first negative system” (FNS) by using the “Boltzmann plot”. The effect of discharge parameters on the atomic oxygen density [O] and the gas temperature was monitored. These results show that [O] density increases with RF power and O₂ concentration, but decreases with the gas flow rate. Whereas the gas temperature increases with increase in the input RF power, it decreases with increase in the gas flow rate and O₂ concentration in the mixture. Since the [O] atomic density contributes to plasma‐based biomedical applications, the proposed optimum conditions for plasma‐based decontamination of heat‐sensitive materials in the present study are 0.6% oxygen, 500 sccm flow rate, and 26 W RF power.     

Measurement of neutral gas temperature in inductively coupled plasmas

Dependence of the neutral gas temperature on the gas pressure and discharge power in an inductively coupled plasma source has been investigated using optical emission spectroscopy. Both nitrogen and argon plasmas have been studied separately. In the case of argon plasma, about 5% nitrogen was added to the total gas flow as an actinometer. The maximum temperature was found to be as high as 1850 K at 1 Torr working pressure and 600 W radiofrequency power. The temperature increases almost linearly with the logarithm of the gas pressure, but changes only slightly with the discharge power in the range of 100–600 W. In a nitrogen plasma, a sudden increase in the neutral gas temperature occurs when the gas pressure is increased at a given discharge power. This suggests a discharge-mode transition from the H-mode (high plasma density) to the E-mode (low plasma density). In the H-mode, the gas temperature is proportional to the logarithm of the gas pressure, as in the argon plasma. However, the gas temperature increases almost linearly with the discharge power, which is in contrast to the case of argon plasma. The electron density in the nitrogen plasma is about 10% of that in the argon plasma. This may explain the observation that the nitrogen neutral temperature is always lower than the argon neutral temperature under the same discharge power and gas pressure.     

Numerical study on the characteristics of nitrogen discharge at high pressure with induced plasma

Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, species such as electrons, N2+, N4+, Ar+, and two metastable states (N 2(A3∑u+), N2 (a1 ∑u-)) are taken into account. The model includes the particle continuity equation, the electron energy balance equation, and Poisson抯equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decreases.     

Investigations of Droplet‐Plasma Interaction using Multi‐Dimensional Coupled Model

Recently developed multi‐dimensional coupled fluid‐droplet model is used to investigate the behavior of complex interaction between the liquid precursor droplets and atmospheric pressure plasma (APP). The significance of this droplet‐plasma interaction is not well understood under diverse realm of working conditions in two‐phase flow. In this study, we explain the implication of vaporization of liquid droplets in APP which are subsequently responsible to control major characteristics of surface coating depositions. Coalescence of water droplets is more dominant than Hexamethyldisiloxane (HMDSO) droplets because of its sluggish rate of evaporation. A disparity in the performance of evaporation is identified in two independent mediums, such as gas mixture and discharge plasma using HMDSO precursor. The length of evaporation of droplets is amplified by an increment of gas flow rate indicating with a reduction in the gas temperature and electron mean energy. In particular, the spatio‐temporal density distributions of charged particles show a clear pattern in which the typical nitrogen impurity ions are primarily effective as compared to other helium ionic species along the pulse of droplets in APP. Finally, we contrast the behavior of discharge species in the pure helium and He‐N2 gas mixtures revealing the importance of stepwise and Penning ionization processes. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Numerical study on characteristics of nitrogen discharge at high pressure with induced plasma

Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, the spices such as electron, N₂⁺, N₄⁺, Ar⁺, and two metastable states (N₂ (A³∑_u⁺), N₂ (a¹∑_u^-)) are taken into account. The model includes particle's continuity equations, electron's energy balance equation, and Poisson equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decrease.     

Kinetic simulations of argon dusty plasma afterglow including metastable atom kinetics

The afterglow of a dusty plasma of rf discharge in argon is simulated by the particle-in-cell-Monte Carlo collision (PIC-MCC) method. The experimental observation that heavy dust contamination of plasma leads to an anomalous increase in the electron density at the beginning of afterglow is explained by release of electrons from the dust surface. Under the assumption that the floating potential of particles is in equilibrium with plasma conditions, the fast cooling of electrons in afterglow plasma due to a rapid escape of hot electrons from the volume leads to a decrease in the magnitude of the floating potential and hence to a loss of charge by dust. The intensive desorption of electrons from nanoparticles is the origin of anomalous behavior of the electron density. At the next stage of afterglow, when the electrons become cool, the plasma decay is defined by ambipolar diffusion. The effect of metastable argon atoms is also considered. Additional ionization due to metastable atom collisions affects the electron temperature but does not change the behavior of the electron density qualitatively.     

Pattern phenomena in an rf discharge dusty plasma system

Various dust patterns are observed in an rf discharge dusty plasma system. According to the dust growth process from small to large in size, the formation of different dust patterns can be divided into two stages: the small-particle stage (or dust cloud stage), and the large-particle stage (or dust crystal stage). The evolution relations between different dust patterns with gas pressure changing are investigated. Dust voids, dust acoustic waves and strong turbulence modes are presented at the small-particle stage. The self-organized dust lattices and dust clusters are investigated at the large-particle stage. The static structure of a dust lattice is characterized by means of the pair correlation function. Dust clusters formed by particles with different numbers and the regular evolution of the clusters with gas pressure are also investigated. The packing sequences of dust clusters are verified through two-dimensional confined molecular dynamics simulations.     

Modes of particle combustion in iron dust flames

The so-called argon/helium test is proposed to identify the combustion mode of particles in iron dust flames. Iron powders of different particle sizes varying from 3 to 34 μm were dispersed in simulated air compositions where nitrogen was replaced by argon and helium. Due to the independence of the particle burning rate on the oxygen diffusivity in the kinetic mode, the ratio between the flame speeds in helium and argon mixtures is expected to be smaller if the particle burning rate is controlled by reaction kinetics rather than oxygen diffusion. Experiments were performed in a reduced-gravity environment on a parabolic flight aircraft to prevent particle settling and buoyancy-driven disruption of the flame. Uniform suspensions of the iron powders were produced inside glass tubes and a flame was initiated at the open end of the tube. Quenching plate assemblies of various channel widths were installed inside the tube and pass or quench events were used to measure the quenching distance. Flame propagation was recorded by a high-speed digital camera and spectral measurements were used to determine the temperature of the condensed emitters in the flame. The measured flame speeds and quenching distances were in good agreement with previously developed one-dimensional, dust flame model where the particles are assumed to burn in a diffusive mode and heat losses are described on a volumetric basis. However, a significant drop of the ratio of flame speeds in helium and argon mixtures was observed for finer 3 μm particles and was attributed to a transition from the combustion controlled by diffusion for larger particles to kinetically controlled burning of micron-size particles. In helium mixtures, the lower flame temperatures measured in suspensions of fine particles in comparison to larger particles reinforces this assumption.     

直流场畸变开关中混合气体击穿特性

氩气中一般含有大量亚稳态原子,在强外电场作用下容易产生自由电子,能够促进放电通道快速形成。采用场畸变型气体开关,在直流电压下设计了实验平台来探究气体开关中采用SF6-Ar或N2-Ar混合气体后放电时延及抖动的变化情况。改变多种气体状态进行一系列实验,并得出场畸变气体火花开关中SF6-Ar及N2-Ar的击穿特性,根据工程需要对气体种类及混合比例进行最优化设计。实验表明SF6-Ar中Ar质量分数达到20%及以上时,开关放电时延及抖动明显减小。     

Charge and structures of dust particles in a gas discharge at cryogenic temperatures

A dusty plasma in a dc gas discharge is considered at low (cryogenic) temperatures of the gas. The formation of dusty plasma structures consisting of monodisperse poly(styrene) particles (d = 5.44 μm) in a dc glow discharge is experimentally investigated at cryogenic temperatures in the range from 4.2 to 77 K, and the results obtained are presented. The ion velocity distribution function and the charging of dust particles at cryogenic temperatures are calculated using the molecular dynamics method. The primary attention is focused on the correct inclusion of ion-atom collisions in the analysis. This is essential to the understanding of the main mechanisms of the experimentally observed increase in the density of dust particles with decreasing temperature of the gas in the discharge.     

13.56 MHz/2 MHz柱状感性耦合等离子体参数的对比研究

通过Langmuir双探针和发射光谱诊断方法,对比研究了驱动频率为13.56 MHz和2 MHz柱状感性耦合等离子体中电子密度和电子温度的径向分布规律.结果表明:在高频和低频放电中,输入功率的增加对等离子体参数产生了不同的影响,高频放电中主要提升了电子密度,低频放电中则主要提升了电子温度.固定气压为10 Pa,分别由高频和低频驱动时,电子密度的径向分布均为"凸型".而电子温度的分布差异比较明显,高频驱动时,电子温度在腔室中心较为平坦,在边缘略有上升;低频驱动时,电子温度随径向距离的增加而逐渐下降.为了进一步分析造成这种差异的原因,在相同放电条件下采集了氩等离子体的发射光谱图,利用分支比法计算了亚稳态粒子的数密度,发现电子温度的径向分布始终与亚稳态粒子的径向分布相反.继续升高气压到100 Pa,发现不论高频还是低频放电,电子密度的径向分布均从"凸型"转变为"马鞍形",较低气压时电子密度的均匀性有了一定的提升,但低频的均匀性更好.     

Effects of Harmonic Modulation of Current in Glow Discharge Dusty Plasma with Ordered Structures

New method of disturbance by imposing harmonic signals on discharge current in DC glow discharge with ordered structures is studied at low values of disturbing amplitudes in molecular nitrogen. Influence of disturbing signals with frequencies from 10 Hz to 100 kHz is observed. New effects of changing vertical size and position of dusty structures in discharge space observed. Forced oscillations of dust particles and self‐oscillating crystals stabilizing effect under different conditions registered. Studied dusty structure's vertical size change dependencies on frequency and amplitude of disturbing signal (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Excitation of Doubly‐Charged Ion Emission Lines from a Grimm‐Style Glow Discharge Plasma—Comparison Between Yttrium and Zirconium

Spectra of yttrium and zirconium emitted from a Grimm‐style glow discharge plasma were investigated to elucidate the excitation mechanism of doubly‐charged ionic lines when using argon–helium mixed gas as well as argon gas alone. The energy sum for exciting doubly‐charged ion species of yttrium is slightly smaller compared to the case of zirconium, which yields an interesting correlation in the excitation energy between their ionic species and excited species of helium or argon. The Y III emission lines which were assigned to the 4p⁶5p–4p⁶5s(4p⁶4d) transitions could be observed in the argon–helium mixed gas plasma, but those were hardly excited with argon gas only. The Zr III emission lines did not appear in the spectra emitted by the argon gas plasma nor by the mixed gas plasma. A possible explanation for these phenomena is that the excitation of these ionic species is caused principally by collisional energy transfer from helium species to the analyte atoms.