Effects of interface between SnO2 thin film and Si substrate on growth time

SnO₂ thin film was grown on Si substrate using the low pressure chemical vapor deposition (LPCVD) method. The SnO₂ thin film was grown in the direction of (110) as deposition time increased. The atomic ratio of O decreased by 62.4, 57.6, and 45.6%, and the thickness of the thin film increased to 0.2, 0.3, and 0.7 ? as the deposition time increased to 10, 20, and 30 min, respectively. The interface of the thin film was examined using high-resolution transmission electron microscope (HRTEM) and energy dispersive spectroscopy (EDS) analysis. The SiO₂ layer was observed at between the SnO₂ thin film and the Si substrate. This layer decreased in thickness as the deposition time increased, which indicates that the deposition time affected the interface of the thin film.     

Electron beam-physical vapor deposition of SiC/SiO2 high emissivity thin film

When heated by high-energy electron beam (EB), SiC can decompose into C and Si vapor. Subsequently, Si vapor reacts with metal oxide thin film on substrate surface and formats dense SiO₂ thin film at high substrate temperature. By means of the two reactions, SiC/SiO₂ composite thin film was prepared on the pre-oxidized 316 stainless steel (SS) substrate by electron beam-physical vapor deposition (EB-PVD) only using β-SiC target at 1000 °C. The thin film was examined by energy dispersive spectroscopy (EDS), grazing incidence X-ray asymmetry diffraction (GIAXD), scanning electron microscopy (SEM), atomic force microscopy (AFM), backscattered electron image (BSE), electron probe microanalysis (EPMA), X-ray photoelectron spectroscopy (XPS) and Fourier transformed infra-red (FT-IR) spectroscopy. The analysis results show that the thin film is mainly composed of imperfect nano-crystalline phases of 3C-SiC and SiO₂, especially, SiO₂ phase is nearly amorphous. Moreover, the smooth and dense thin film surface consists of nano-sized particles, and the interface between SiC/SiO₂ composite thin film and SS substrate is perfect. At last, the emissivity of SS substrate is improved by the SiC/SiO₂ composite thin film.     

Photophysical properties of fluorescent PMMA/SiO2 nanohybrids for solar energy applications

This work concerning the photophysical properties of fluorescent nanohybrid films based on poly(methylmethacrylate) (PMMA) doped with coumarin dyestuff and entrapped with different concentrations of hydrophilic nanosilica. Spectroscopic tools were applied in order to determine the optimum concentration of nanosilica for the best optical properties for a matrix used as fluorescent solar concentrator. The optical constants and photoluminescence spectra of fluorescent nanohybrid films showed an enhancement of the photon trapping efficiency and matrix stability by increasing the concentration of SiO₂ nanoparticles.     

Deposition of SiOx barrier films by O2/TMDSO RF-PECVD

This paper reports that the SiOx barrier films are deposited on polyethylene terephthalate substrate by plasmaenhanced chemical vapour deposition （PECVD） for the application of transparent barrier packaging. The variations of 02/Tetramethyldisiloxane （TMDSO） ratio and input power in radio frequency （RF） plasma are carried out to optimize barrier properties of the SiOx coated film. The properties of the coatings are characterized by Fourier transform infrared, water vapour transmission rate （WVTR）, oxygen transmission rate （OTR）, and atomic force microscopy analysers. It is found that the 02/TMDSO ratio exceeding 2：1 and the input power over 200 W yield SiOx films with low carbon contents which can be good to the barrier （WVTR and OTR） properties of the SiOx coatings. Also, the film properties not only depend on oxygen concentration of the inlet gas mixtures and input power, but also relate to the surface morphology of the coating.     

N掺杂SiO2纳米薄膜的制备及其磁性

利用射频磁控反应溅射技术,制备了氮掺杂的SiO₂纳米薄膜.发现N掺杂SiO₂体系纳米薄膜具有铁磁性.较小的氮化硅颗粒均匀分布在氧化硅基质中有利于磁有序的形成.基底温度为400℃时,样品薄膜具有最大的饱和磁化强度和矫顽力,分别为35 emu/cm³和75 Oe.薄膜的磁性可能产生于氮化硅和氧化硅的界面.理论计算表明,N掺杂SiO₂体系具有净自旋.同时,由氮化硅和氧化硅界面之间的电荷转移导致的轨道磁矩也会对样品的磁性有贡献 关键词： 2薄膜')" href="#">N掺杂SiO₂薄膜 射频磁控反应溅射 界面磁性 基底温度     

Ion tracks in ultrathin polymer films: The role of the substrate

Surface damage produced by single MeV-GeV heavy ions impacting ultrathin polymer films has been shown to be weaker than those observed under bulk (thick film) conditions. The decrease in damage efficiency has been attributed to the suppression of long-range effects arising from excited atoms lying deeply in the solid. This raises the possibility that the substrate of the films itself is relevant to the radiation effects seen at the top surface. Here, the role of the substrate on cratering induced by individual 1.1 GeV Au ions in ultrathin poly(methyl methacrylate) (PMMA) layers is investigated. Materials of different thermal and electrical properties (Si, SiO₂, and Au) are used as substrates to deposit PMMA thin films of various thicknesses from ∼1 to ∼300 nm. We show that in films thinner than ∼40 nm craters are modulated by the underlying substrate to a degree that depends on the transport properties of the medium. Crater size in ultrathin films deposited on the insulating SiO₂ is larger than in similar films deposited on the conducting Au layer. This is consistent with an inefficient coupling of the electronic excitation energy to the atomic cores in metals. On the other hand, the damage on films deposited on SiO₂ is not very different from the Si substrate with a native oxide layer, suggesting, in addition, poor energy transmission across the film/substrate interface. The experimental observations are also compared to calculations from an analytical model based on energy addition and transport from the excited ion track, which describe only partially the results.     

Responsivity of infrared antenna-coupled microbolometers for air-side and substrate-side illumination

The response of an antenna-coupled microbolometer fabricated on a Si wafer coated on both sides with thin films of SiO₂ was measured for two types of illumination: through the substrate and from the air side. The measurement was performed in the spectral range from 9.22 to 10.84 μm. Both cases are modeled by using the transmission, reflection, and absorption properties of the three-layer wafer. The spectral characteristics of the SiO₂ thin film play a major role in the response of the detector. The responses of the sensor to the parallel and perpendicular polarizations are modeled by using two main contributions: the heating by absorption in the SiO₂ layer and the coupling of incident flux on the bolometer. Fitting this model to the experimental data allows us to conclude that the antenna response is the result of the incident flux coming from the substrate side. When the device is illuminated from the air side, the antenna signal results from the flux reflected at the film/substrate interface. The efficiencies of the contributions to the antenna signal coming from the substrate or from the air side have been obtained from the data fitted with the model. The substrate-side contribution is 50 times larger than the air-side contribution, confirming the theory of lithographic antenna on a dielectric substrate.     

Low temperature deposited Zr-B film applicable to extremely thin barrier for copper interconnect

We have prepared thin Zr-B films at low temperatures as a new material applicable to an extremely thin barrier against Cu diffusion in Si-ULSI metallization. The obtained Zr-B films mainly consist of the ZrB₂ phase with a nanocrystalline texture on SiO₂ and a fiber texture on Cu. The resistivity of the Zr-B films depends on the substrate of SiO₂ or Cu. The constituent ratio of B/Zr is almost 2, though the contaminants of oxygen, nitrogen, and carbon are incorporated in the film. The nanocrystalline structure of the Zr-B film on SiO₂ is stable due to annealing at temperatures up to 500 °C for 30 min. We applied the 3-nm thick Zr-B film to a diffusion barrier between Cu and SiO₂, and the stable barrier properties were confirmed. We can demonstrate that the thin Zr-B film is a promising candidate for thin film application to a metallization material in Si-ULSIs.     

同步辐射光激励的二氧化硅薄膜刻蚀研究

利用热氧化法在硅晶片上生长SiO₂薄膜，结合光刻和磁控溅射技术在SiO₂薄膜表面制备接触型钴掩模，通过掩模方法在硅表面开展了同步辐射光激励的表面刻蚀研究，在室温下制备了SiO₂薄膜的刻蚀图样.实验结果表明：在同步辐射光照射下，通入SF₆气体可以有效地对SiO₂薄膜进行各向异性刻蚀，并在一定的气压范围内，刻蚀率随SF₆气体浓度的增加而增加，随样品温度的下降而升高；如果在同步辐射光照射下，用SF₆和O₂的混合气体作为反应气体，刻蚀过程将停止在SiO₂/Si界面，即不对硅刻蚀，实现了同步辐射对硅和二氧化硅两种材料的选择性刻蚀；另外，钴表现出强的抗刻蚀能力，是一种理想的同步辐射光掩模材料. 关键词： 同步辐射刻蚀 接触型钴掩模 二氧化硅薄膜     

On the temperature dependence of Na migration in thin SiO2 films during ToF-SIMS O2 depth profiling

The detection of Na in insulating samples by means of time of flight-secondary ion mass spectrometry (ToF-SIMS) depth profiling has always been a challenge. In particular the use of O₂⁺ as sputter species causes a severe artifact in the Na depth distribution due to Na migration under the influence of an internal electrical filed. In this paper we address the influence of the sample temperature on this artifact. It is shown that the transport of Na is a dynamic process in concordance with the proceeding sputter front. Low temperatures mitigated the migration process by reducing the Na mobility in the target. In the course of this work two sample types have been investigated: (i) A Na doped PMMA layer, deposited on a thin SiO₂ film. Here, the incorporation behavior of Na into SiO₂ during depth profiling is demonstrated. (ii) Na implanted into a thin SiO₂ film. By this sample type the migration behavior could be examined when defects, originating from the implantation process, are present in the SiO₂ target. In addition, we propose an approach for the evaluation of an implanted Na profile, which is unaffected by the migration process.     

多孔TiO2/Al/SiO2纳米复合结构的紫外光吸收特性研究

在SiO₂玻璃衬底上用脉冲激光沉积(PLD)技术,分别沉积Ti和Ti/Al膜,经电化学阳极氧化成功制备了多孔TiO₂/SiO₂和TiO₂/Al/SiO₂纳米复合结构. 其中TiO₂薄膜上的微孔阵列高度有序,分布均匀. 实验研究了Al过渡层对多孔TiO₂薄膜光吸收特性的影响. 结果表明：无Al过渡层的多孔TiO₂薄膜其紫外吸收峰在27 关键词： 2薄膜')" href="#">多孔TiO₂薄膜 阳极氧化 紫外光吸收     

The structure of monolayer SiO2 on Mo(1 1 2): A 2-D [Si-O-Si] network or isolated [SiO4] units?

In this letter, atomically resolved scanning tunneling microscopic (STM) images obtained from monolayer SiO₂/Mo(1 1 2) are presented. The results are consistent with a previously proposed structural model of isolated [SiO₄] units based on vibrational features observed by high-resolution electron energy loss spectroscopy (HREELS) and infrared reflection-absorption spectroscopy (IRAS), and oxygen species identified by ultra-violet photoemission spectroscopy (UPS). These results are inconsistent with a structural model that assumes a two-dimensional (2-D) [Si-O-Si] network. These data illustrate that a metal substrate, although coated with an oxide thin layer, can be directly imaged at the atomic-scale with STM.     

多孔TiO2/Al/SiO2纳米复合结构的紫外光吸收特性研究

在SiO₂玻璃衬底上用脉冲激光沉积(PLD)技术，分别沉积Ti和Ti/Al膜，经电化学阳极氧化成功制备了多孔TiO₂/SiO₂和TiO₂/Al/SiO₂纳米复合结构. 其中TiO₂薄膜上的微孔阵列高度有序，分布均匀. 实验研究了Al过渡层对多孔TiO₂薄膜光吸收特性的影响. 结果表明：无Al过渡层的多孔TiO₂薄膜其紫外吸收峰在27     

New approach for fabrication of folded-structure SiO2 using oyster shell

Inspired by the phenomenological differences of layers in oyster shell and the morphological mimicry of SiO₂ thin film, a folded-structure SiO₂ was created by simple spray deposition system. The folded-structure SiO₂ was analyzed by scanning electron microscopy, energy dispersive spectrometer and microindentation. At the molecular level, the chalky and the folia were assembled and determined through biomineralization based on the differences of soluble protein in layers. At the macro-scale, the granular SiO₂ particles deposited at the surface of shell layers or Ca(OH)₂ and grew into thin film, thus leading to mimic the morphology of substrate.     

Microstructure and electrical properties of Ba0.5Sr0.5TiO3 thin films prepared on copper foils with La2O3 buffer layers

Ba_0.5Sr_0.5TiO₃ (BST) thin films were deposited on copper foils via sol-gel method with La₂O₃ as a buffer layer. The films were processed in almost inert atmosphere so that the substrate oxidation was avoided while allowing the perovskite film phase to crystallize. The existence of a La₂O₃ buffer layer between the BST thin film and Cu foil improved the dielectric constant and reduced the leakage current density of the BST thin film. Meanwhile, the BST thin film exhibited ferroelectric character at room temperature, which was contrast to the para-electric behavior of the film without the buffer layer. Effects of La₂O₃ buffer layer on the crystallizability and microstructure of BST thin films were also investigated.     

The hybrid photocatalyst of TiO2–SiO2 thin film prepared from rice husk silica

The TiO₂–SiO₂ thin film was prepared by self-assembly method by mixing SiO₂ precursor with titanium precursor solution and aged to obtain a co-precipitation of silica and titanium crystals. Dip coating method was applied for thin film preparation on glass slide. The X-ray diffraction (XRD) of the self-assembly thin film had no characteristic property of SiO₂ and even anatase TiO₂ but indicated new crystal structure which was determined from the Fourier Transform Infrared Spectrophotometer (FTIR) as a hybridized Ti–O–Si bonding. The surface area and surface volume of the self-assembly sample were increased when SiO₂ was incorporated into the film. The self-assembly TiO₂–SiO₂ thin film exhibited the enhanced photocatalytic decolorization of methylene blue (MB) dye. The advantages of SiO₂ are; (1) to increase the adsorbability of the film and (2) to provide the hydroxyl radical to promote the photocatalytic reaction. The self-assembly thin film with the optimum molar ratio (SiO₂:TiO₂) as 20:80 gave the best performance for photocatalytic decolorization of MB dye with the overall efficiency of 81%.     

Cooling dynamics of self‐assembled monolayer coating for integrated gold nanocrystals on a glass substrate

Picosecond time‐resolved X‐ray diffraction has been used to study the nanoscale thermal transportation dynamics of bare gold nanocrystals and thiol‐based self‐assembled monolayer (SAM)‐coated integrated gold nanocrystals on a SiO₂ glass substrate. A temporal lattice expansion of 0.30–0.33% was observed in the bare and SAM‐coated nanocrystals on the glass substrate; the thermal energy inside the gold nanocrystals was transported to the contacted substrate through the gold–SiO₂ interface. The interfacial thermal conductivity between the single‐layered gold nanocrystal film and the SiO₂ substrate is estimated to be 45 MW m^?2 K^?1 from the decay of the Au 111 peak shift, which was linearly dependent on the transient temperature. For the SAM‐coated gold nanocrystals, the thermal dissipation was faster than that of the bare gold nanocrystal film. The thermal flow from the nanocrystals to the SAM‐coated molecules promotes heat dissipation from the laser‐heated SAM‐coated gold nanocrystals. The thermal transportation of the laser‐heated SAM‐coated gold nanocrystal film was analyzed using the bidirectional thermal dissipation model.     

Novel catalysts: Indium implanted SiO2 thin films

Interactions of Indium (In) and silicon (Si) atoms are known to catalyze certain organic chemical reactions with high efficiency. In an attempt of creating a material that manifests the interactions, In implanted SiO₂ thin films were prepared by ion beam injection and their catalytic abilities for organic chemical reactions were examined. It has been found that, with an injection energy of approximately 0.5 keV, a thin In film is formed on a SiO₂ substrate surface and the In implanted SiO₂ thin film can catalyze an organic chemical reaction. It has been also shown that there is an optimal ion dose for the highest catalytic ability in the film preparation process. Thin-film-type catalyzing materials such as the one proposed here may open a new way to enhance surface chemical reaction rates.     

Structure, morphology and optical properties of SiO2−x thin films prepared by plasma-assisted pulsed laser deposition

The amorphous silicon oxide SiO_2−x thin films were prepared by the plasma-assisted pulsed laser deposition (PLD) method. X-ray diffraction spectrometry (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), UV-VIS-NIR scanning spectrophotometry and ellipsometry were used to characterize the crystallinity, microscopic morphology and optical properties of obtained thin films. The influences of substrate temperatures, oxygen partial pressures and oxygen plasma assistance on the compositions of silicon oxide (SiO_2−x) thin films were investigated. Results show that the deposited thin films are amorphous and have high surface quality. Stoichiometric silicon dioxide (SiO₂) thin film can be obtained at elevated temperature of 200 °C in an oxygen plasma-assisted atmosphere. Using normal incidence transmittance, a novel and simple method has been proposed to evaluate the value of x in transparent SiO_2−x thin films on a non-absorbing flat substrate.     

First nucleation steps during deposition of SiO2 thin films by plasma enhanced chemical vapour deposition

The initial nucleation stages during deposition of SiO₂ by remote plasma enhanced chemical vapour deposition (PECVD) have been monitored by XPS inelastic peak shape analysis. Experiments have been carried out on two substrates, a flat ZrO₂ thin film and a silicon wafer with a native silicon oxide layer on its surface. For the two substrates it is found that PECVD SiO₂ grows in the form of islands. When the SiO₂ particles reach heights close to 10 nm they coalesce and cover completely the substrate surface. The particle formation mechanism has been confirmed by TEM observation of the particles grown on silicon substrates. The kinetic Monte Carlo simulation of the nucleation and growth of the SiO₂ particles has shown that formation of islands is favoured under PECVD conditions because the plasma species may reach the substrate surface according to off-perpendicular directions. The average energy of these species is the main parameter used to describe their angular distribution function, while the reactivity of the surface is another key parameter used in the simulations.