PdMn/Co多层膜的磁性和磁光特性研究

用磁控溅射法制备了不同Mn含量的PdMn/Co磁性多层膜，通过x射线衍射对该多层膜系列进行结构分析；测定了不同Mn含量系列样品的磁滞回线、垂直各向异性及磁力显微镜图，分析了饱和磁化强度、磁畴和垂直各向异性变化的原因；通过测定该多层膜体系的克尔谱，简要分析了一定波长下克尔角随Mn含量增加而变化的物理机制. 关键词： 多层膜 磁性 磁光     

Pt97.4Mn2.6/Co多层膜的磁性与磁光性质研究

用磁控溅射法制备了Mn含量一定、不同PtMn层厚度的Pt97.4Mn2.6/Co磁性多层膜系列,通过x射线衍射对该多层膜系列进行结构分析;测定了不同PtMn层厚度系列样品的磁滞回线、有效垂直各向异性,分析了饱和磁化强度和有效垂直各向异性变化的原因;通过测定该多层膜体系的克尔谱,分析了一定波长下克尔角随PtMn层厚度变化的规律.认为克尔角的变化是由于界面的合金化以及原子的极化减小所致.     

Pt974Mn26/Co多层膜的磁性与磁光性质研究

用磁控溅射法制备了Mn含量一定、不同PtMn层厚度的Pt974Mn26/Co磁性多层膜系列，通过x射线衍射对该多层膜系列进行结构分析；测定了不同PtMn层厚度系列样品的磁滞回线、有效垂直各向异性，分析了饱和磁化强度和有效垂直各向异性变化的原因；通过测定该多层膜体系的克尔谱，分析了一定波长下克尔角随PtMn层厚度变化的规律.认为克尔角的变化是由于界面的合金化以及原子的极化减小所致. 关键词： 多层膜 磁性 磁光     

掺Mn的Pt/Co多层膜磁性和磁光特性的研究

用磁控溅射设备了ＰｔＭｎ／Ｃｏ多层薄膜,介绍了制作该多层膜的方法,并通过测定不同杂质浓度、不同光子能量下克乐角的变化,发现随Ｍｎ含量的增加,其克尔角下降,说明其磁光特性;测定不同掺杂浓度下样品的磁滞回线,发现其饱和磁化强度增加,剩磁化、矫顽力下降,分析其产生的机制。     

PtMn/Co多层膜的磁光特性研究

采用磁控溅射法制备了一系列的Mn掺杂的PtMn/Co多层膜.通过测量得到的磁光常数和光学常 数,计算介电张量的对角元和非对角元,得到在掺杂较大时,克尔角的变化是由于介电张量 的非对角元引起的;在掺杂量较小时,克尔角的变化是由介电张量的对角元和非对角元以及 光学常数的变化引起的.     

软X射线多层膜与衰减膜研究

 本文采用随机数的方法，发展了一种普适的多层膜设计方法，这种方法除可设计一般的周期多层膜，更重要的是它可以根据选定的评价因子，设计不同要求的非周期多层膜。用磁控溅射方法完成软X射线多层膜制备，X射线衍射、卢瑟福背散射、俄歇电子谱和反射率的相对测试用来表征多层膜结构和特性，所得结果说明多层膜的结构完整，周期参数正确。用离子束溅射方法成功地制备了有一定反射率和透过率的软X射线半反半透分束镜；分析了Ag和Zr衰减膜中的杂质含量与分布及其对衰减膜特性的影响，并对衰减系数进行了修正，为实验提供优质的衰减膜。     

等离子体增强化学气相沉积法制备含氢类金刚石膜的紫外Raman光谱和X射线光电子能谱研究

利用脉冲辉光放电的方法,在硅片上采用不同的沉积工艺制备了含氢类金刚石膜层,并采用Raman光谱和X射线光电子能谱(XPS)对膜层进行表征.用Raman光谱仪在波长为325 nm的紫外光源的激励下观察膜层的键结构.紫外Raman光谱对含氢类金刚石膜是非常有用的,它能有效避免可见光Raman光谱测量时的荧光干扰,清晰地得到膜层的D峰和G峰.同时利用XPS分析得到膜层的sp3键含量,并与Raman光谱所得数据进行比较.通过Raman光谱和XPS分析可以发现,在紫外光源的激励下,膜层的G峰峰位向高频移方向移动,G峰峰位、I(D)/I(G),G峰半高宽和sp3键含量之间存在一定的关系.     

基于等效膜层法的极紫外光刻含缺陷掩模多层膜仿真模型

建立了一个基于等效膜层法的极紫外光刻含缺陷掩模多层膜仿真模型。通过等效膜层法求解含缺陷多层膜无缺陷区域和含缺陷区域不同位置的反射系数,准确快速地仿真含缺陷多层膜的衍射谱。与波导法严格仿真相比,200nm尺寸时仿真速度提高9倍左右。与改进单平面近似模型和基于单平面近似的简化模型相比,该模型对衍射谱和空间像的仿真精度有了较大提高,并且仿真精度随缺陷尺寸和入射角的变化很小。以+1级衍射光为例,6°入射时,与改进单平面近似模型和简化模型相比,该模型对衍射谱振幅的仿真误差分别减小了77%和63%。     

极紫外光刻含缺陷多层膜衍射谱仿真简化模型

建立了一个极紫外光刻含缺陷多层膜衍射谱仿真简化模型,采用相位突变和反射系数振幅衰减表示缺陷对多层膜反射光的影响,得到了含缺陷多层膜衍射谱的解析表达式。简化模型中,相位突变量由多层膜表面以下第6层膜的缺陷形态决定,反射系数振幅衰减量由基底的缺陷形态决定。与改进单平面近似(SSA)模型相比,仿真速度基本一致的情况下,简化模型提高了含缺陷多层膜衍射谱仿真的精度,6°入射时,衍射谱的0~+3级衍射光振幅的仿真误差减小50%以上,并且不同入射角情况下,尤其在入射角小于12°时,振幅误差稳定。得到了含缺陷多层膜衍射谱的解析表达式,可进一步理论分析缺陷对多层膜衍射谱的影响,为得到掩模缺陷的补偿公式奠定了基础。     

Mo/Si多层膜小角X射线衍射结构表征

为了实现对Mo/Si多层膜的结构表征,测量了多层膜样品的小角X射线衍射谱。介绍了小角X射线衍射谱的分析方法,包括Bragg峰值拟合法,傅里叶变换法,反射谱拟合法。Bragg峰值拟合法和反射谱拟合法得到多层膜的周期厚度为7.09nm,两种模型的反射谱拟合法得到界面的粗糙度(扩散长度)为0.40～0.41nm(Si在Mo上),0.52～0.70nm(Mo在Si上),前者要比后者小,这与透射电镜法(TEM)得到的结果0.40nm(Si在Mo上),0.6～0.65nm(Mo在Si上)是一致的。通过基于扩散模型的反射谱拟合法得到的折射率剖面也与由高倍率透射电镜(HRTEM)积分得到的灰度值剖面在趋势上是一致的。通过X射线衍射谱和TEM图像对Mo/Si多层膜进行综合表征,得到了多层膜的精细结构信息,这对多层膜制备工艺的优化具有十分重要的意义。     

Magnetization reversal and domains structures in (Co/Ni/Co/Pt) multilayers

Multilayers of [Co/Ni(t_Ni)/Co/Pt]_×4 are investigated for different Ni insertion layer thicknesses. The resulting magnetic properties and magnetic domain structures are compared with [Co/Ni]_×8 multilayers. As determined by magneto-optical Kerr effect microscopy and a vibrating sample magnetometer measurements, all multilayers exhibited a perpendicular magnetic anisotropy. It is found that the nucleation field and magnetic coercivity of [Co/Ni(t)/Co/Pt]_×4 multilayers are lower than (Co/Ni)_×8 and decreased with Ni thickness. Magnetization decay measurements reveal that these multilayers did not show an exponential decay behavior as was observed in rare earth transition metal alloys. Very narrow wires will remain stables for several hours even with an applied magnetic field closer to the coercivity. Insertion of very thin Ni in (Co/Pt) multilayers offers a good way to optimize the magnetic properties of the material and adjust the domain size for nanowire-based devices.     

Co/Cr/Pd多层膜的磁性和磁光特性的研究

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Controlling the Curie temperature of Co/Pt multilayer magneto-optical recording media

The Curie temperature of Co/Pt multilayers could be lowered by reducing the Co layer thickness, i.e., increasing the amount of 2-dimensional character and disorder or by the addition of transition metals such as Os or Re. The second method had the advantage over the first in that the inherent decrease in the Kerr effect was lower.     

Magnetic transition in Co/(Gd–Co) multilayers

[Co/Gd_0.36Co_0.64]₄/Co multilayers with Co termination layer have been prepared by rf sputtering. They form macroscopic ferrimagnets with a compensation temperature (T_comp) determined by the thickness ratio of the layers. In low fields the magnetization of Co and Gd–Co layers are along the axis of the applied field. Increasing field makes the moments of both the Co and Gd–Co layers deviate from the axis of the field giving rise to a transition into a twisted state. These magnetic transitions were studied by vibrating sample magnetometer (VSM), magneto-optic Kerr effect and magnetoresistance measurements at various temperatures. The nucleation and evolution of surface- and bulk-twisted magnetic states were also observed in these multilayers.     

MAGNETO-OPTICAL EFFECT IN Co-BASED METALLIC LAYERED AND MULTILAYER FILMS

A preliminary investigation of the magneto-optical effect in Co-based metallic bilayer, trilayer and multilayer films has been carried out in this paper. Various sublayers of non-magnetic materials with different thicknesses were selected. The Kerr enhancement due to the reduction of effective optical constants in Co/Ag bilayers and multilayers has been achieved.     

Asymmetric domain nucleation and unusual magnetization reversal in ultrathin Co films with perpendicular anisotropy

We report unexpected phenomena during magnetization reversal in ultrathin Co films and Co/Pt multilayers with perpendicular anisotropy. Using magneto-optical Kerr microscopy and magnetic force microscopy we have observed asymmetrical nucleation centers where the reversal begins for one direction of the field only and is characterized by an acute asymmetry of domain-wall mobility. We have also observed magnetic domains with a continuously varying average magnetization, which can be explained in terms of the coexistence of three magnetic phases: up, down, and striped.     

Observation of unequal activation volumes of wall-motion and nucleation processes in Co/Pd multilayers

We report the difference in activation volumes of wall-motion and nucleation processes in Co/Pd multilayers. Each activation volume was estimated from field dependence of wall-motion speed and nucleation rate, obtained by real-time domain imaging using a magneto-optical Kerr effect microscope. Delicate analysis shows that the two activation volumes are generally unequal and the ratio between the volumes varies noticeably from 0.9 to 1.1 with change of the multilayered structure. We found that the inequality in the two activation volumes has a crucial influence on magnetization reversal behavior: a process having a smaller activation volume dominates.