Photosensitive polyimides for applications in electrical and optical interconnection technology

The application of photosensitive polyimides in electrical and optical interconnection technology is discussed. Critical properties of two photosensitive polyimide formulations with significantly different structural chemistries have been compared. Polyamic ester based formulations such as Selectilux® HTR3 show significant distortions in the photopatterned features upon high-temperature baking, which can be ascribed to anisotropic shrinkage. A BTDA-alkylated diamine based preimidized formulation (Probimide®), on the other hand, shows a more uniform shrinkage of the photopatterned features. HTR3 films interacts strongly with metals such as copper, which adversely affect the photopatternability of these materials. Planarization behavior in multiple layer structures has also been investigated. We explored the viability of these materials for applications in optical interconnection. Probimide® materials exhibit low scattering losses and appear to be promising candidates for the development of a MCM-compatible optical interconnection technology. We also describe here a novel technique for optical recording of refractive index patterns in Probimide® films.     

Photosensitive fluorinated polyimides with a low dielectric constant based on reaction development patterning

The fluorinated polyimide PI(6FDA/HFBAPP) was prepared by the reaction of 4,4′‐(hexafluoroisopropylidene)diphthalic anhydride (6FDA) with 2,2‐bis[4‐(4‐aminophenoxy)phenyl]hexafluoropropane (HFBAPP) in 1‐methyl‐2‐pyrrolidone/toluene. A multiblock copolyimide with both fluorinated and rigid‐rod segments, PI(6FDA/HFBAPP)(BPDA/2‐DMB), was prepared by the addition of a second dianhydride, 3,3′,4,4′‐biphenyltetracarboxylic dianhydride (BPDA), and a second diamine, 2,2′‐dimethylbenzidine (2‐DMB), to the polyimide main chain. The potential lithographic performance of photosensitive polyimides composed of nonphotosensitive fluorine‐containing polyimides and photosensitive diazonaphthoquinone (DNQ) was studied on the basis of a new imaging principle recently proposed by our laboratory, that is, reaction development patterning. Neat PI(6FDA/HFBAPP) showed a low dielectric constant (?) of 2.41 and a low dissipation factor (tan δ) of 0.0027 at 20 GHz, and a 10‐μm resolution of the fluorinated polyimide/DNQ system was demonstrated with reactive development with a solution including ethanolamine after ultraviolet exposure. Although slight changes in the dielectric properties were observed in the presence of DNQ residues, these values (? = 2.63 and tan δ = 0.0033 at 20 GHz) were low enough for use in microelectronic applications. However, PI(6FDA/HFBAPP)(BPDA/2‐DMB), having a lower coefficient of thermal expansion (CTE; 33 ppm/°C) than PI(6FDA/HFBAPP) (49 ppm/°C), exhibited good positive photosensitivity, whereas the relatively low‐CTE multiblock copolyimide displayed a much higher ? value (3.48 at 1 MHz) than the highly fluorinated polyimide (2.88 at 1 MHz). A film consisting of PI(6FDA/HFBAPP)(BPDA/2‐DMB) and the remaining DNQ derivatives showed a CTE value comparable to that of the neat polyimide film. © 2003 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 41: 861–871, 2003     

Photosensitive polyimides consisting of simple mixtures of 4-substituted diazonaphthoquinones and polyamic acids

Polyimide resists that can be developed with a basic aqueous solution were produced by simple mixtures of conventional polyamic acids and naphthoquinone diazides in which sulfonate groups are substituted at the 4-position. The diazonaphthoquinones bearing electron-withdrawing groups gave negative tone resists. On the other hand, those bearing electron-donating groups gave positive tone resists. The difference in the resist behaviors depending on the photoactive structure was explained by crosslinking caused by photogenerated sulfonic acids. The thermal stability of polyimides prepared from the resists was almost the same as that of conventional polyimides.     

Amine–quinone polyimides

Two dianiline monomers were prepared by the reaction of either 4,4′‐methylenedianiline or 4,4′‐oxydianiline with 1,4‐benzoquinone. These monomers were used to synthesize a series of amine–quinone polyimides by condensation with either 3,3′,4,4′‐benzophenonetetracarboxylic dianhydride or 4,4′‐(hexafluoroisopropylidene) diphthalic anhydride to make the corresponding polyamic acid. The polyamic acids were converted to the polyimides by thermal imidization at 290 °C. The amine–quinone polyimides gave freestanding films with tensile strengths in the range of 90 to 150 MPa and Young's moduli of 0.9 to 1.5 GPa. The thermal decomposition temperature under nitrogen was 440 to 480 °C and the glass‐transition temperature was in the range of 280 to 310 °C. The amine–quinone polyimides had the excellent thermal and mechanical properties that one expects for polyimides. © 2001 John Wiley & Sons, Inc. J Polym Sci Part A: Polym Chem 39: 4044–4049, 2001     

International journal of quantum chemistry—a journal devoted to quantum theory and computations in chemistry,condensed matter physics,and biology. Editorial—program and policies

A procedure based on the polarization propagator technique is used to determine the longitudinal asymptotic electric polarizabilities per unit cell of infinite periodic systems. They are computed ab initio at the random-phase approximation level of accuracy for infinite model hydrogen chains using the STO -3G minimal basis set. This work also focuses on the effect of the number of interacting cells taken into account in the cell index summations as well as the number of k-points needed to perform the integration in the first Brillouin zone. Long-range effects are shown to influence the desired response properties more strongly than do short-range effects. Our direct method is presented as the only way to get the asymptotic longitudinal polarizabilities per unit cell of the systems presenting the largest polarizabilities, the most interesting polymers. © 1993 John Wiley & Sons, Inc.     

International journal of quantum chemistry—A journal devoted to quantum theory and computations in chemistry,condensed matter physics,and biology. Editorial—Program and Policies

A comparison is made between the exact classical dynamic theory and the stochastic theory of reaction rates in dense media. The conditions of their equivalence are derived on the basis of a harmonic oscillator model. It is shown in a direct way that in the general case of a multidimensional system the approximate activated complex (transition-state) theory is not identical to the stochastic theory at any value of the viscosity coefficient. © 1992 John Wiley & Sons, Inc.     

Synthesis and properties of new aromatic polyimides — Polymeric materials for light-emitting and liquid-crystal displays

New aromatic diamines containing π-conjugated heterocyclic rings were synthesized, which emit blue light in the photoluminescence. Using these new monomers, soluble poly(amic acid)s were prepared by the polycondensations with pyromellitamic dianhydride, and thermally converted to the polyimides in films which emit intense blue-light. These polyimides are considered as potential candidate materials for fabricating optoelectronic devices which emit blue light. In addition, new poly(m-phenylene 4,4′-oxydiphthalimide)s containing various side chains were synthesized. For these polyimides, thermal properties were investigated with considering the chain flexibility of polymer backbone as well as the spacer and biphenyl mesogen end group in the side chains. In particular, these polyimides exhibited excellent performance in the rubbing process and the controlling of both the alignment and the pretilt of liquid-crystal (LC) molecules in the LC cell. This might be attributed mainly to a strong interaction between the biphenyl mesogen end group in the side chains and the mesogen unit of LC molecules.     

Photosensitive gelatin

Employing photodestructible surfactants in gelatin-based aqueous gels presents novel possibilities for controlling colloidal and aggregation properties of surfactant gelatin complexes. Light-triggered breakdown of the gelatin-bound photosurfactant aggregates causes dramatic changes in viscosity and aggregation.     

Electroluminescent properties of anthracene‐containing polyimides

Optical and electroluminescent properties of a new soluble anthracene‐containing polyimide (ACPI) was studied. Solubility of ACPI in organic solvents allows direct spin casting of the polymer films exhibiting intense photo‐ and electroluminescence (EL) in the visible range. This non‐conjugated polymer was used as emitting and electron‐hole transporting layers in polymer light‐emitting devices (LEDs). EL properties of the uni‐ and bilayer LEDs are discussed in terms of the band structure, bipolar transport and electron donor‐acceptor interactions. Copyright © 2000 John Wiley & Sons, Ltd.     

Chlorinated polyimides

Photoinitiated reaction of maleic anhydride with chlorobenzene and o-chlorotoluene in the presence of a sensitizer (benzophenone) was studied with the aim to prepare chlorinated tricyclodecenetetracarboxylic dianhydrides. New halogenated polyimides were prepared by the reactions of these products with various diamides in N-methyl-2-pyrrolidone in the presence of catalysts.Translated from Zhurnal Prikladnoi Khimii, Vol. 77, No. 11, 2004, pp. 1853–1857.Original Russian Text Copyright © 2004 by Zhubanov, Kravtsova, Mukhamedova.     

Thermosetting polyimides

Linear polyimides prepared from m-phenylene diamine (MPD) and 3,4,3′,4′-benzophenonetetracarboxylic dianhydride (BTDA) were modified so as to be thermosetting. This was done by replacing a portion of the MPD with either 2,4-diaminoacetanilide or p-(2,4-diaminophenoxy) acetanilide and 3,5-diaminobenzoic acid; it is thought that during final processing of the laminates the carboxyl group and the acetamido group react, forming amide crosslinks. Alternatively, excess anhydride was incorporated into the polymer to react with some of the attached acetamido groups; these would give imide crosslinks. A series of resins and glass-reinforced laminates incorporating these resins was prepared. The laminates were aged and tested at 315°C. Flexural strength at 315°C. versus hours aged at 315°C. is presented. Flexural strength after 100 hr. at 315°C. for two of the better laminates from modified polymers was about 48,000 psi, compared to 24,000 psi for the straight linear polymer. The flexural strength of the modified polymers decreased more rapidly, however, and after 1000 hr. of aging at 315°C. the flexural strength of the best laminates, including the linear polymer, was 12,000 psi.     

Gas‐transport properties of indan‐containing polyimides

A series of indan‐containing polyimides were synthesized, and their gas‐permeation behavior was characterized. The four polyimides used in this study were synthesized from an indan‐containing diamine [5,7‐diamino‐1,1,4,6‐tetramethylindan (DAI)] with four dianhydrides [3,3′4,4′‐benzophenone tetracarboxylic dianhydride (BTDA), 3,3′4,4′‐oxydiphthalic dianhydride (ODPA), (3,3′4,4′‐biphenyl tetracarboxylic dianhydride (BPDA), and 2,2′‐bis(3,4′‐dicarboxyphenyl) hexafluoropropane dianhydride (6FDA)]. The gas‐permeability coefficients of these four polyimides changed in the following order: DAI–BTDA < DAI–ODPA < DAI–BPDA < DAI–6FDA. This was consistent with the increasing order of the fraction of free volume (FFV). Moreover, the gas‐permeability coefficients were almost doubled from DAI–ODPA to DAI–BPDA and from DAI–BPDA to DAI–6FDA, although the FFV differences between the two polyimides were very small. The gas permeability and diffusivity of these indan‐containing polyimides increased with temperature, whereas the permselectivity and diffusion selectivity decreased. The activation energies for the permeation and diffusion of O₂, N₂, CH₄, and CO₂ were estimated. In comparison with the gas‐permeation behavior of other indan‐containing polymers, for these polyimides, very good gas‐permeation performance was found, that is, high gas‐permeability coefficients and reasonably high permselectivity. © 2004 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 42: 2769–2779, 2004