微流控技术制备ZnO纳米线阵列及其气敏特性

利用微流控技术在微通道中制备了Zn O纳米线阵列,通过X射线衍射和扫描电子显微镜分别对纳米线的物相和表面形貌进行了表征.结果发现,合成的Zn O纳米线具有良好的c轴择优取向性和结晶度.同时,对Zn O纳米线阵列在丙酮、甲醇和乙醇气体中的气敏特性进行了研究,测试结果表明:在最佳工作温度(475?C)下,纳米线阵列对200 ppm(1 ppm=10-6)丙酮气体的最大灵敏度可达8.26,响应恢复时间分别为9和5 s;通过与传统水热法制备的Zn O纳米线的气敏性能相比较发现,基于微流控技术制备的纳米线阵列具有更高的灵敏度和更快的响应恢复速度.最后,从材料表面氧气分子得失电子的角度对Zn O纳米线气敏机理进行了讨论.     

ZnO纳米/微米结构传感器对乙醇气敏性研究

采用化学气相法分别在石英舟内表面和单晶硅衬底上制备了ZnO微米片、纳米线、微米四足体以及微米球4种结构,并制作了相应的气敏传感器。扫描电子显微镜、气敏测试仪等结果显示：合成的ZnO纳米/微米结构尺寸在200 nm~100 μm之间,传感器最佳工作电流区间为120~130 mA,其中微米四足体制备的传感器灵敏度高达127,展现出优异的气敏特性。在4种结构中,微米四足体材料内部的V_O缺陷含量最高,结合气敏测试与荧光光谱结果,我们认为材料内部的V_O缺陷含量是影响材料气敏特性的最重要因素。     

基于声表面波的氢气传感器*

将钯基材料对氢气分子的特异选择性吸附能力与声表面波的快速响应特点相结合,可实现一种快速、高灵敏和低功耗的氢气检测与报警技术。传感器由双通道差分式振荡器与沉积在传感器件表面的声表面波传播路径上的钯基气敏薄膜组成。为提升传感器响应速度,该文探讨了采用钯镍合金薄膜与钯铜纳米线作为气敏材料的氢气传感器响应特性,通过对气敏材料制备方法及参数的优化,研制了两种沉积不同钯基气敏材料的氢气传感器件,并对其性能进行了评测。实验测试结果表明:钯铜纳米线气敏材料由于具有大体积表面积比和多孔结构,大幅提高了SAW氢气传感器响应速度,针对浓度为10%、4%以及0.5%的氢气响应时间可达～2s。     

氧化钨纳米线气敏传感器的制备及其室温NO_2敏感特性

纳米结构的氧化钨有高比表面积和气体吸附能力,在气体传感器领域得到了广泛研究.本文采用磁控溅射金属钨薄膜和两步热氧化工艺在二氧化硅衬底上生长出氧化钨纳米线.通过改变第二步氧化温度,研究退火温度对氧化钨纳米线气敏特性的影响.采用扫描电子显微镜、X射线衍射仪、X射线光电子能谱分析仪和透射射电子显微镜表征材料的微观特性和晶体结构,利用静态配气法测试气敏性能.研究结果表明,经过退火处理后氧化钨纳米线密度略微降低,300℃比400℃退火后的氧化钨结晶性差,对应的表面态含量多,有利于室温气体敏感性.测试NO_2的气敏性能,经过对比得出300℃退火温度下制备的氧化钨纳米线在室温下表现出较很好的气敏响应,对6 ppm(1 ppm=10~(-6))NO_2达到2.5,对检测极限0.5 ppm NO_2响应达1.37.氧化钨纳米线在室温下表现出反常的P型响应,是因为氧化钨纳米线表面被氧气吸附形成反型层,空穴取代电子成为主要载流子所致.     

超长氧化锌纳米线的制备及其气敏性能和紫外传感应用研究

采用一种无需催化剂和载气的简便碳热还原法制得长度约为100 μm、直径约为500 nm、长径比达到200的超长ZnO纳米线,讨论了Si基底位置、沉积时间以及反应物原料的量对ZnO纳米线形貌的影响。对ZnO纳米线的气敏性能进行研究,结果表明：在工作温度为350 ℃时,ZnO纳米线传感器能够很好地检测酒精气体,具有选择性好、响应恢复快的优点,且最低检测体积分数为5×10^-6。另外,通过一种简单、实用的介电泳法制得基于ZnO纳米线的紫外传感器。在365 nm紫外灯照射下,光电流增加了13%;而在254 nm紫外灯照射时,光电流则没发生变化,说明该传感器对不同波长的紫外光有一定的选择性。     

电化学电镀ZnO对石墨烯基NO_2气敏传感器的气敏性影响

通过低压化学气相沉积的方法制备了单层石墨烯,用电化学电镀的方法在石墨烯表面沉积了氧化锌纳米层,制作出一种新的、简单、高效的掺杂氧化锌纳米层的石墨烯基气敏传感器,并研究了本征的和电镀氧化锌的石墨烯基气敏传感器对不同体积分数的NO_2气体的响应特性和恢复特性。实验表明:在工作电压-0.5V,时间300s的条件下电镀ZnO的石墨烯基传感器的气敏性最好,其对10ppm NO_2的灵敏度为-22.126%(本文中定义灵敏度为测量电阻R与本征电阻R_0的差值与本征电阻的比值,故为负值),是本征石墨烯传感器的3.85倍,且响应的最低浓度达到0.5ppm(其灵敏度为-0.786%)。     

碱液修饰对硅纳米线阵列电池光谱响应的影响

采用金属催化化学腐蚀法在p型(100)硅基底上制备了硅纳米阵列,然后用碱溶液对纳米线阵列进行修饰。分别研究了碱液修饰对硅纳米线阵列形貌、光电性质的影响。研究表明: 与绒面及纳米线阵列相比,碱修饰30 s硅纳米线阵列的表面分散均匀,反射率降低;光谱响应度显著提高,并且出现最大量子效率对应波长红移现象。最后,详细讨论了碱液修饰硅纳米线阵列电池对光谱响应的影响机制。     

低温CVD法在玻璃衬底上制备ZnO纳米线阵列

采用化学气相沉积(CVD)法在镀Cr(20nm)的玻璃衬底上,低温制备了ZnO纳米线阵列。利用扫描电子显微镜(SEM)和X射线衍射(XRD)对样品的表面形貌和微结构进行了分析表征。结果表明:源分解温度1350℃,衬底温度450～500℃,氩气流量为35sccm时,ZnO纳米线在玻璃衬底上呈现有序生长;XRD谱图中只观测到ZnO(002)衍射峰。表明制备的纳米线阵列具有高度c轴择优取向生长特性和较高的结晶质量。     

退火温度对TiO_2纳米薄膜酒精气敏特性影响的研究(英文)

采用直流磁控溅射的方法在Al2O3陶瓷管、硅基片上溅射制备了二氧化钛(TiO2)纳米薄膜材料.将薄膜样品放入管式退火炉中分别在500℃, 700℃和1100℃温度下退火.由于退火温度的不同,薄膜的晶体结构、晶粒尺寸、晶向以及气敏特性都有所不同.利用X射线衍射(XRD)技术和薄膜气敏特性测试,分析了退火温度对薄膜气敏特性的影响.分析结果表明退火温度在500℃时,呈现锐钛矿结构,薄膜具有很好的选择性、很短的反应(恢复)时间.对TiO2薄膜表面进行修饰,发现此TiO2薄膜的最佳工作温度为370℃左右.薄膜的气敏机理也得到了讨论.     

单根Sb掺杂ZnO微米线非平衡电桥式气敏传感器的制作与性能

通过使用化学气相沉积法,成功制备出超长、大尺寸的Sb掺杂ZnO微米线.基于非平衡电桥原理,利用单根Sb掺杂ZnO微米线作为非平衡电桥的一个桥臂,制作出了可以在室温环境下工作的气敏传感器原型器件.结果表明:室温下测得该传感器对20,50,100和200 ppm(1 ppm=10^-6)不同浓度的丙酮及乙醇气体的响应-恢复曲线均呈现为矩形形状,在空气及被测气体中均有稳定的电流值,并随着探测气体浓度的增大,器件的响应值也在逐渐增加.此外,还发现器件对丙酮气体具有更好的选择性,当丙酮气体浓度为200 ppm时,该传感器的响应时间为0.2 s,恢复时间为0.3 s,响应度高达243%.通过与普通电导式气敏传感器对比发现,采用这种非平衡电桥结构传感器可以明显地提高响应度,使响应和恢复时间更快.此外,还研究了器件的气体探测机理.     

Functionalized Pd/ZnO Nanowires for Nanosensors

A method for surface doping and functionalization of ZnO nanowires (NWs) with Pd (Pd/ZnO) in a one‐step process is presented. The main advantage of this method is to combine the simultaneous growth, surface doping, and functionalization of NWs by using electrochemical deposition (ECD) at relatively low temperatures (90 °C). Our approach essentially reduces the number of technological steps of nanomaterial synthesis and final nanodevices fabrication with enhanced performances. A series of nanosensor devices is fabricated based on single Pd/ZnO NWs with a radius of about 80 nm using a FIB/SEM system. The influence of Pd nominal composition in Pd/ZnO NW on the H₂ sensing response is studied in detail and a corresponding mechanism is proposed. The results demonstrate an ultra‐high response and selectivity of the synthesized nanosensors to hydrogen gas at room temperature. The optimal concentration of PdCl₂ in the electrolyte to achieve extremely sensitive nanodevices with a gas response (S_H2) ≈ 1.3 × 10⁴ (at 100 ppm H₂ concentration) and relatively high rapidity is 0.75 µM. Theoretical calculations on Pd/ZnO bulk and functionalized surface further validated the experimental hypothesis. Our results demonstrate the importance of noble metal presence on the surface due to doping and functionalization of nanostructures in the fabrication of highly‐sensitive and selective gas nanosensors operating at room temperature with reduced power consumption.     

Synthesis of nano-structured materials by laser-ablation and their application to sensors

We describe the synthesis of nano-structured materials of ZnO and Pd by laser ablation and their applications to sensors. The synthesis of ZnO nano-wires was performed by nano-particle assisted deposition (NPAD) where nano-crystals were grown with nano-particles generated by laser-ablating a ZnO sintered target in an Ar background gas. The synthesized ZnO nano-wires were characterized with a scanning electron microscopy and the photoluminescent characteristics were examined under an excitation with the third harmonics of a Nd:YAG laser. The nano-wires with a diameter in the range from 50 to 150 nm and a length of up to 5 μm were taken out of the substrate by laser blow-off technique and/or sonication. It was confirmed that the nano-wires showed the stimulated emission under optical pumping, indicating a high quality of the crystalinity. Pd nano-particles were generated by laser-ablating a Pd plate in pure water. The transmission electron microscope observation revealed that Pd nano-particles with a diameter in the range from 3 nm to several tens of nanometers were produced. Using these nano-structured materials, we successfully fabricated sensors by the dielectrophoresis techniques. In the case of the ultraviolet photosensor, a detection sensitivity of 10 nW/cm² was achieved and in the case of hydrogen sensing, the response time of less than 10 s has been demonstrated with Pd nano-particles.     

多孔ZnO微米球的制备及其优异的丙酮敏感特性

以六水合硝酸锌、尿素为原料,以六亚甲基四胺为表面活性剂,利用水热法合成了多孔氧化锌微米球.通过X射线衍射仪、扫描电子显微镜和吸附仪对样品的结构、形貌、比表面积和孔径进行了表征.利用所得多孔微米球氧化锌制备了气敏元件,并对其气敏特性进行了测试.结果表明:在280℃的工作温度下,表面多孔氧化锌微米球气敏元件对50 ppm的丙酮气体的灵敏度为26.8,响应时间和恢复时间分别约为4 s和10 s,并具有良好的选择性.     

Studies of structural evolution and sensing properties of ZnO nanocrystalline films

ZnO nanocrystalline films have been prepared on Si(1 0 0) substrate using direct current (D.C) magnetron sputtering technique at room temperature. The thickness of nanocrystalline films almost linearly increased with deposition duration and the sizes of crystalline grains almost kept unchanged. After deposition, thermal annealing was performed at 800 °C in atmosphere for 2 h in order to improve the qualities of ZnO thin films. Scanning electron microscope (SEM) images showed the surface roughness of the films less than 45 nm. X-ray diffraction (XRD) patterns revealed the slight evolution of the crystal structures. Raman scattering spectra confirmed the data obtained from X-ray diffraction measurements.With these ZnO nanocrystalline films, prototypic gas sensors were fabricated. Both sensitivity and response of the sensors to different gases (H₂ and CH₄) were investigated. A quick response of time, less than 1 second to CH₄ gas sensor has been achieved.     

Ni/Au与N掺杂p型ZnO的欧姆接触

研究了Au,In,Ni/Au三种不同金属膜与N掺杂p型ZnO的接触特性,发现Ni/Au双层膜更适合作为其欧姆电极材料,并比较了不同气氛和不同温度退火对Ni/Au电极的影响.发现在O₂中退火电极性能发生蜕变,而在N₂中退火性能得到改善.指出即使在N₂中退火,退火温度的选择也是至关重要的,本实验在400℃,氮气气氛下退火150s,得到了较好的欧姆接触特性.     

Sensitivity enhancement of AZO-based ethanol sensor decorated by Au nano-islands

Detecting the hazardous gases for monitoring air pollution and medical diagnosis make highly sensitive gas sensors appeal to many researches. In this paper, benefiting from unique properties of noble metals, Al-doped ZnO based Ethanol sensors were fabricated and characterized in three structures including Al: ZnO thin film, Silver and Gold nano-islands on Al: ZnO thin film. The Silver and Gold thin films turn to nano-islands after a simple annealing process. The XRD analysis of the sputtered Al: ZnO layer indicates the wurtzite crystal structure of the layer with a peak at (002) plane. Moreover, the sensitivity study reveals that Nano-islands of noble metals substantially affects the sensitivity of the sensors. The decorated Gold nano-island Al: ZnO Ethanol sensor has the highest response showing an amount of 45. The response of Al: ZnO and Silver decorated Al: ZnO sensors are virtually identical to all concentrations of Ethanol, whereas the Al: ZnO gas sensor with Gold nano-islands has the substantial sensitivity for different concentrations. In addition, the response times of the sensors are 85, 70 and 90 s for Al: ZnO, Al: ZnO with Ag islands and Al: ZnO decorated by Au islands, respectively. The recovery time of Al: ZnO sensor decorated by Au islands is about 23s, while the recovery time of the Al: ZnO and Al: ZnO decorated by Silver islands are 360 and 370s, respectively. Hence, the simple annealing process on the sputtered gas sensor with a thin layer of Gold makes nano-islands on the sensor which elevates the performance of Ethanol sensing due to the high sensitivity and sensitivity of the sensor.     

Optimization of Gas Sensing Performance of Nanocrystalline SnO_2 Thin Films Synthesized by Magnetron Sputtering

Tin oxide(SnO_2) is one of the most promising transparent conducting oxide materials,which is widely used in thin film gas sensors.We investigate the dependence of the deposition time on structural,morphological and hydrogen gas sensing properties of SnO_2 thin films synthesized by dc magnetron sputtering.The deposited samples are characterized by XRD,SEM,AFM,surface area measurements and surface profiler.Also the H_2 gas sensing properties of SnO_2 deposited samples are performed against a wide range of operating temperature.The XRD analysis demonstrates that the degree of crystallinity of the deposited SnO_2 films strongly depends on the deposition time.SEM and AFM analyses reveal that the size of nanoparticles or agglomerates,and both average and rms surface roughness is enhanced with the increasing deposition time.Also gas sensors based on these SnO_2 nanolayers show an acceptable response to hydrogen at various operating temperatures.     

Facile synthesis of SnO2–ZnO core–shell nanowires for enhanced ethanol-sensing performance

The design of core–shell heteronanostructures is powerful tool to control both the gas selectivity and the sensitivity due to their hybrid properties. In this work, the SnO₂–ZnO core–shell nanowires (NWs) were fabricated via two-step process comprising the thermal evaporation of the single crystalline SnO₂ NWs core and the spray-coating of the grainy polycrystalline ZnO shell for enhanced ethanol sensing performance. The as-obtained products were investigated by X-ray diffraction, scanning electron microscopy, and photoluminescence. The ethanol gas-sensing properties of pristine SnO₂ and ZnO–SnO₂ core–shell NW sensors were studied and compared. The gas response to 500 ppm ethanol of the core–shell NW sensor increased to 33.84, which was 12.5-fold higher than that of the pristine SnO₂ NW sensor. The selectivity of the core–shell NW sensor also improved. The response to 100 ppm ethanol was about 14.1, whereas the response to 100 ppm liquefied petroleum gas, NH₃, H₂, and CO was smaller, and ranged from 2.5 to 5.3. This indicates that the core–shell heterostructures have great potential for use as gas sensing materials.     

衬底温度对ZnO薄膜的结构和光学特性的影响

利用等离子体辅助分子束外延(P-MBE)设备在蓝宝石衬底上通过改变生长温度,制备了不同的ZnO样品.研究了衬底温度对ZnO的结构、光学和电学性质的影响.样品的晶体结构利用X射线衍射谱进行表征.X射线衍射谱表明,所有的ZnO样品都是(002)取向的六角纤锌矿结构.随着生长温度的升高,X射线的(002)衍射峰的半峰全宽逐渐...