非球面条纹扫描式剪切干涉检验法

本文论述用横向剪切干涉仪精确测量光学非球面波象差的方法。用计算机控制干涉相位测量技术,可进行高精度的检测和实时数据分析。本系统主要由有平行平板的横向剪切干涉仪、压电式驱动反射镜、象探测器和具有图象显示的微处理机组成。剪切干涉仪产生与波面导数相应的条纹图,用条纹扫描方法进行分析。对所得数据积分,便可求出波象差。对相对孔径为f/4的非球条面反射镜进行测量,测量精度为1/32λ均方根。     

线性相位反演传感器与哈特曼传感器的实验研究对比

为了进一步分析线性相位反演波前传感器的性能,搭建了基于线性相位反演测量方法的波前传感器的实验装置.针对各种波前随机像差,同时用线性相位波前传感器和哈特曼波前传感器进行测量和复原,将复原结果进行对比.分析了不同的探测分辨力和不同泽尼克复原阶数对线性相位反演传感器复原结果的影响.分析了靶面分辨力,合理的靶面大小对复原精度是有利的,肯定了线性相位反演波前传感器可以用较少的探测单元实现相似精度的测量,采样靶面像素为8 pixel×8 pixel时,误差系数仍很小.利用对随机像差片进行不同阶数的复原,线性相位反演波前传感器的复原残差的误差率基本都在0.25以下,能对前35阶像差进行比较精确的复原.     

相位差异法探测波前的误差分析及消除方法

针对附加像差为离焦模式的相位差异波前探测技术在实际工程应用中遇到的各类误差问题,以探测拼接型望远镜的共相误差为例,通过数值仿真对焦面位置误差、离焦量误差、图像对准误差、曝光延时误差及噪声误差对波前探测精度的影响进行了定量分析。并提出了通过改进相位差异算法进行消除相应误差项的方法,使得波前探测的均方根误差分别由校正前的0.06λ、0.0581λ、0.0754λ、0.0796λ、0.0737λ分别下降为5.8834×10-4λ、6.664×10-4λ、3.5853×10-5λ、6.1837×10-5λ、0.0013λ,且对于各误差项在较大误差范围内,仍可以保持上述相同量级的波前探测精度。结果表明:该方法可以有效地消除误差,大幅度提高波前传感精度,对于相位差异波前探测技术在实际工程中的应用具参考意义。     

一种基于瞳面相位差的波前传感器相位恢复

根据瞳面相位差波前传感器的特点,提出把模式分解和随机并行梯度下降算法结合起来实现波前相位的恢复.以32单元变形镜的初始面形和Roddier提出的相位生成方法随机产生的一帧相屏为研究对象,分析所提出的相位恢复算法的性能.结果表明,两种情况下的畸变波前都得到了很好的恢复.当像差仅含有低阶成分时,使用模式分解法就可获得令人满...     

用表面等离子波相位检测法测量液体折射率

表面等离子体波（ＳＰＷ） 检测技术近年来已被应用在生物传感领域。它通过探测介质的折射率变化来探测生物反应。理论分析表明,利用ＳＰＷ 相位检测的方法可以实现高分辨率的液体折射率测量。在优化测量参数的基础上,使用低频差横向塞曼激光器为光源,进行了验证实验,实验结果与理论相符合。     

偏心和倾斜光学系统初级象差理论的研究

在共轴光学系统波象差的基础上,推导出了光学元件的偏心和倾斜分别对主要象差的影响.得出了除了球差外,每一种象差由于偏心和倾斜都引入了它同种类的象差;小量的偏心和倾斜并不改变系统的球差的结论;如果球差并不为零,将会产生与象高无关的彗差,即轴向彗差等等.     

空间引力波望远镜远场相位噪声抑制方法

空间引力波望远镜的波像差与指向抖动耦合产生的远场相位噪声是引力波探测的主要噪声源。基于其产生的理论机制，建立了噪声耦合系数与望远镜像差间的函数关系，提出了控制特定像差的优化策略。结合望远镜设计实例验证了该方法对抑制远场相位噪声的效果，当波前质量水平为λ/20（λ=1064nm）时，优化后的噪声耦合系数优于0.11 pm/nrad，较优化前降低了一个数量级，远优于指标要求，所提方法极大地提升了望远镜的远场相位稳定性。     

用于扩展目标自适应光学校正的相关波前传感器的理论实验

研究了使用非相干、扩展光源的波前差测量技术，分析了使用强度透过率型像面掩模的扩展目标相关波前探测原理，讨论了模拟目标的选择问题，探讨了根据目标图像生成像面掩模图像、进而制作像掩模的方法，给出了所生成的像面掩模图像的典型结果，进行了以强度透过率型掩模为特征的单孔径扩展目标波前传感器的实验，比较了两种不同掩模的波前探测效果，获得了理论分析一致的实验结果。     

基于Ptychography的极紫外光刻投影物镜波像差检测技术

Ptychography是一种基于扫描式相干衍射成像的相位恢复技术,实验装置简单,抗干扰能力强。将Ptychography技术用于投影物镜波像差的检测,并分析了检测不同数值孔径投影物镜波像差所采用的光场传播公式、离散化条件及实验架构。数值仿真与实验结果表明,Ptychography技术用于波像差检测时检测标记的通光率需要在45%~80%范围内;增加标记图案的复杂性并在计算过程中增加配准环节可提高收敛速度与检测精度;波像差检测精度在10~(-3)λ以内。将Ptychography技术应用于极紫外光刻投影物镜波像差检测是可行的。     

相位差波前探测与图像重建

相位差技术可以直接利用两幅或多幅图像的强度信息,重构出波前相位信息和目标清晰图像,具有光路简单、成本较低、适用于扩展目标等优点,在望远镜的系统像差检测和目标图像重建方面得到了大量应用。相位差波前探测的关键在于求解非线性代价函数的最优化问题,需要避免陷入局部极值并降低计算时间,才能满足动态变化波前实时探测的需求。同时在重建目标清晰图像时,通常需要做正则化和去噪处理,来提高重建图像的质量。本文主要介绍相位差技术的基本原理,以及近年来的研究进展,并对该技术未来的发展进行了展望。     

一种朗契检验新方法

为了较快、较高准确度地检验大波差的非球面或球面,将一个液晶显示器作为低频光栅和移相装置被用于朗奇检验,在小液晶显示器上由计算机生成光栅图,代替普通光栅和步进电机.消除了因电机移动引起的移相误差,消除了因转动光栅的角度不能正好达到90°而引起的误差.以一个非球面为例,做了移相测试及波面复原.实验表明液晶显示器可作为一个光栅和移相装置.     

波前功率谱密度函数评价方法探讨

 波前功率谱密度PSD（Power Spectral Density）能定量给出波前畸变的空间频率分布、限定波纹度和粗糙度指标，全面反映ICF驱动器对高功率激光光学元件加工质量的特殊要求。给出了波前功率谱密度PSD的定义及计算方法，并使用大口径相移干涉仪作为波前检测仪器，对光学磷酸盐钕玻璃透射波前进行了测试实验，获得波前一维PSD分布，证实功率谱密度为高功率激光光学元件波前参数的一种有效表征方式。同时，还对PSD与均方根RMS之间的关系进行了初步的讨论。     

基于MATLAB的零Ronchi法检测大抛物面栅条设计

介绍了用于设计栅条的光线追迹和三级像差理论，用MATLAB软件设计Ronchi栅条并给出了计算绘图的流程图。输入参数包括：大抛物面镜顶点曲率半径，点光源到光栅的距离等。得到包括偶数与奇数的不同数量的Ronchi栅条。结果表明：此方法可以准确快速的得到横向像差，为Ronchi光栅的设计提供了一种新方法。所设计的线条的绘制质量高，具有线条边缘清晰，光滑等优点。     

Simulation algorithm for ronchigrams of spherical and aspherical surfaces, with the lateral shear interferometry formalism

With the Ronchi test a technician controls the manufacturing process using the following procedure: first, a Ronchigram is simulated which is scale-printed and placed on the surface as a mask and is usually printed with a low spatial resolution. This simulated Ronchigram is compared visually with the experimental pattern observed. This way of comparison leads to systematic errors in the evaluation of the surface, because it depends largely on the experience of the technician. Therefore, the main objectives of this work are to increase the spatial resolution and eliminate the dependence on the technician’s experience. Therefore, we compare the simulated Ronchigrams obtained by lateral shear interferometry, whose profiles are cosine, with Ronchigrams obtained experimentally. We present the simulation algorithm for the Ronchigrams of spherical and aspherical surfaces based on the expressions of a lateral shear interferometer. We show the results, of the comparison between simulated Ronchigrams (ray tracing and lateral shear interferometry) and experimental Ronchigrams.     

一种新的非球面零朗奇检测法

提出一种新的零朗奇检测法用于测量大口径非球面镜的面形。利用光线追迹和正弦条纹的相位信息设计补偿正弦光栅。使用透射液晶显示屏显示补偿正弦光栅并作为相移装置。一个离轴点光源发出的光被镜面反射后通过补偿正弦光栅,摄像机记录携带镜面偏差信息的相移条纹图。通过对相移条纹图的分析确定被测镜面的实际横向像差以及对应的理想横向像差,然后基于朗奇检测的几何原理得到被测镜面的偏差梯度,对其积分获得被测镜面的偏差,进而重建被测镜面的三维面形。与传统的零朗奇检测法相比,这种方法可以消除补偿光栅上每个条纹带边缘的锯齿形状,而且可以获得镜面上足够多的待测点信息。计算机模拟和初步实验验证了该方法的可行性。     

A modified phase diversity diffraction wavefront sensor with a grating

The phase diversity wavefront sensor is one of the tools used to estimate wavefront aberration, and it is often used as a wavefront sensor in adaptive optics systems. However, the performance of the traditional phase diversity wavefront sensor is limited by the accuracy and dynamic ranges of the intensity distribution at the focus and defocus positions of the CCD camera. In this paper, a modified phase diversity wavefront sensor based on a diffraction grating is proposed to improve the ability to measure the wavefront aberration with larger amplitude and higher spatial frequency. The basic principle and the optics construction of the proposed method are also described in detail. The noise propagation property of the proposed method is also analysed by using the numerical simulation method, and comparison between the diffraction grating phase diversity wavefront sensor and the traditional phase diversity wavefront sensor is also made. The simulation results show that the diffraction grating phase diversity wavefront sensor can obviously improve the ability to measure the wavefront aberration, especially the wavefront aberration with larger amplitude and higher spatial frequency.     

基于远场信息和卷积神经网络的波前重构方法

探测波前相位信息是实现自适应光学波前补偿的关键,使用卷积神经网络（CNN）代替波前传感器进行波前重构,系统简单易于实现,同时重构过程不依赖迭代运算,快速实时。为准确提取远场中的波前特征,CNN需要事先使用大量样本进行训练。研究中根据4～30阶大气湍流泽尼克像差系数与其远场强度的对应关系,仿真制作样本数据集,训练CNN从输入的一帧远场图像中预测出畸变波前的泽尼克像差系数,重构原始波前。验证结果表明,该方法能快速实时地还原出波前相位信息,重构波前较原始波前具有极高的波面吻合度和较小的残差剩余量,有望实现实际自适应光学系统中的闭环校正。     

渐进多焦点镜片波前像差的扩束测量方法

利用波前传感器测量自由曲面镜片时,由于自由曲面镜片的直径通常大于波前传感器的接收孔径,主要采用子孔径拼接技术测量镜片的波前像差。针对子孔径拼接技术测量中存在着操作繁琐、数据处理量大等问题,提出渐进多焦点镜片波前像差的扩束测量方法,得到渐进多焦点镜片中央直径为22 mm圆形区域内的波前像差。为了验证试验的可靠性,将测量得到的波前像差泽尼克表述中的离焦项转换为球镜度,与条纹偏折法测量得到镜片的球镜度进行对比实验,实验结果证明了渐进多焦点镜片波前像差的扩束测量方法可以用于渐进多焦点镜片波前像差的检测。     

A modified phase diversity wavefront sensor with a diffraction grating

Phase diversity wavefront sensor is one of the useful tools to estimate the wavefront aberration, and it is often used as a wavefront sensor in adaptive optics system. However, the performance of the traditional phase diversity wavefront sensor is limited by the accuracy and dynamic ranges of the intensity distribution at focus and defocus positions of the CCD camera. In this paper, a modified phase diversity wavefront sensor based on a diffraction grating is proposed to improve the ability to measure the wavefront aberration with larger amplitude and higher spatial frequency. The basic principle and the optics construction of the proposed method are also described in detail. The noise propagation property of the proposed method is also analysed by using the numerical simulation method, and comparison between the diffraction grating phase diversity wavefront sensor and the traditional phase diversity wavefront sensor is also made. The simulation results show that the diffraction grating phase diversity wavefront sensor can obviously improve the ability to measure the wavefront aberration, especially the wavefront aberration with larger amplitude and higher spatial frequency.     

Analysis and demonstration of multiplexed phase computer-generated hologram for modal wavefront sensing

We propose to implement a modal wavefront sensor (MWS) using a multiplexed phase computer-generated hologram (MPCGH). Based on general orthogonal aberration modes, the theoretical treatments of the MWS employing a MPCGH are presented with scalar diffraction approximations and Fourier analysis. Under the small aberration approximations, we give the analytical formula for characterizing the relationship between the sensor signal and the amplitude of the aberration mode. We design several MPCGHs with an effective method of modified off-axis reference beam holograms superposition, and code some common orthogonal Zernike aberration modes into the MPCGH. The numerical simulation is carried out to investigate the performance of MWS to detect particular aberration mode(s). The results exhibit the expected responses of the corresponding symmetric spot pair, and indicate that the wavefront distorted by a special Zernike aberration mode, after modulated by the MPCGH, can be transformed into beams with an intensity-normalized differential signal, which can reflect the change trend of the aberration coefficients in the test wavefront. The experimental demonstration with designed MPCGHs in conjunction with two phase-only spatial light modulators was carried out to test the performance of the MWS.