高精度干涉检验移相算法对振动误差的免疫能力

对移相干涉测量中影响移相稳定性,从而产生测量误差的小幅度机械振动进行了研究,建立了振动误差模型,仿真分析了Wyant84b三步算法、Hariharan87五步算法、七步算法和十三步算法4种不同移相算法对振动的免疫能力。模拟结果显示,十三步算法对振动的免疫能力最好,与已发表文献成果吻合,说明本文的模拟具有较高的可信度,在一定程度上能够对影响干涉仪精度的振动误差进行合理预测,并能够起到评价和筛选移相算法的作用。     

Measurement of wedge angle of a transparent parallel plate using quasi-monochromatic light source and phase shifting interferometry

A new technique (to our knowledge), for the measurement of residual wedge angle (RWA) of high optical quality transparent nearly parallel plate (PP), using a quasi-monochromatic light source, is presented. Advantages and drawbacks of the technique and the results obtained for a PP, using a filtered white light source, is discussed. A slightly modified optical setup for accurate determination of RWA, using phase shifting interferometry (PSI), has been described. Results obtained, applying PSI, for a validation experiment and for the determination of RWA of a quasi-PP is presented. The PSI based technique does not suffer from any measurement ambiguities due to limitation in effective beam aperture. Hence the technique is suitable for high accuracy measurement of RWA of PP. In both the optical setups, presented in this paper, the respective interfering beams travel the same optical circuit and are thus subject to same perturbation in optical path, due to external mechanical vibration, which finally cancels out. Thus the measurements are much less affected by external vibrations. Since the respective interfering beams undergo identical reflections and transmissions, the visibility or contrast of the interference fringes is very good.     

New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor

White-light phase shifting interferometry (WLPSI) is frequently used for the precision measurement of 3D patterns in various fields. Phase error is one of the most dominant errors in WLPSI, and it is mainly generated by the scanner positioning error and mechanical vibrations. In this paper, phase error detection method by image analysis is proposed, and the numerical correction method for minimizing the phase error is also proposed. The image reconstruction method (IRM), iterative IRM (IIRM) as pre-processors, partial IRM (PIRM), least squares method (LSM) as a main processor, and surface compensation method (SCM) as a post-processor were developed for correcting phase errors. The five methods are implemented and simulated, and the pros and cons of each method are explained.Mirau type interferometry and the phase error generator using a PZT stage were used, and the measurements by WLPSI were done under various vibration conditions. The captured images were analyzed by the five correction methods, and the results were compared. Phase error was effectively minimized by the correction methods, and repeatability of 0.2 nm was obtained in the case of the specimen of 500 nm in height. Repeatability of 10 nm was obtained by conventional WLPSI algorithms for the same specimen.     

Matched data storage in ESPI by combination of spatial phase shifting with temporal phase unwrapping

We combine the spatial phase-shifting technique with the real-time fringe counting capability of temporal phase unwrapping to provide simple solutions for some practical tasks in ESPI. First, we develop a method for automatically matched data storage intervals and apply this technique to a long-term observation of a biological object with strongly varying deformation rate. Second, we easily obtain on-line displacement and deformation data during the observation of a complexly structured discontinuous object.     

An effective method in calibrating nonlinear errors for phase-shifting interferometry

In phase measurement or digital holography for phase-shifting interferometry, the key role is the variation of reference light wave and recover algorithm based on interferograms and reference phase, so the calculation result is directly affected by phase-shift accuracy. However, because of the errors of nonlinear and other random factors, it is difficult to control the actual phase-shifting amount accurately. In this paper, we aim to propose an efficient method for phase-shifting interferometry which does not require accurate initial estimation of phase-shift amounts, only a few pixels with several randomly shifted interferograms are sufficient for accurate extraction of phase information. This method has reduced the dependence of reference phase, and can obtain phase-shifting amount directly without using complex revised algorithm for correcting phase-shifting nonlinear errors.     

Whole-field determination of isoclinic parameter by five-step color phase shifting and its error analysis

Combining color imaging with phase shifting, a technique named five-step color phase shifting is presented to determine the whole-field isoclinic parameter. Relevant theory is derived and explicit conditions for directly determining the isoclinic parameter in the range of [0,π/2] are given. The unloaded light intensity of the model is systematically studied. A color camera recorded five isoclinic images coupled with isochromatics from a plane polariscope with five different settings, respectively. Experiments have been carried out with a circular disk under diametral compression and errors have been analyzed and estimated. This technique utilizes white light, which avoids undefined isoclinics near the locations where the isochromatics exist and will have active effect on experimental stress analysis and structural strength design.     

相移技术中五步等步长Stoilov算法的性能分析

Stoilov算法是近几年提出的一种五步等步长相移算法。有关文献中的误差分析表明 ,该算法的性能优于四步等步长Carr啨算法闹懈隽耍樱簦铮椋欤铮鏊惴ǖ恼繁泶锸?,采用线性误差理论详细分析了算法的性能 ,尤其是算法性能对相移步长的依赖关系。分析表明 ,可以选择一个最佳的相移步长以有效减少位相测量误差 :相移步长为 5 2°时可有效抑制二次相移量误差的影响 ;相移步长为 90°时可极大地减少光强误差的影响。最后给出了Stoilov算法与Carr啨算法和Hariharan算法的比较。     

A comparative study of phase-shifting algorithms in digital speckle pattern interferometry

Digital speckle pattern interferometry (DSPI) is a tool for making qualitative as well as quantitative measurements of deformation of objects. Phase-shifting algorithms in DSPI are useful for extracting quantitative deformation data from the system. Comparative studies of the different phase-shifting algorithms in DSPI for object deformation measurement are presented. Static and quasi-dynamic deformation of the object can be measured using these algorithms. Error compensating five-step phase-shifting method is used for the algorithms.     

Digital speckle pattern interferometry (DSPI) with increased sensitivity: Use of spatial phase shifting

This paper presents a real-time digital speckle pattern interferometry system with twofold increase in sensitivity for the measurement of in-plane displacement and first order derivative of out-of-plane displacement (slope). Spatial phase shifting technique has been used for quantitative fringe analysis. The system employs a double aperture arrangement in front of the imaging system that introduces spatial carrier fringes within the speckle for spatial phase shifting. For in-plane displacement measurement, the scattered fields from the object are collected independently along the direction of illumination beams, and combined at the image plane. For slope measurement, a shear is introduced between the two scattered fields. Experimental results on an edge clamped circular plate subjected to in-plane rotation for in-plane displacement measurement and central loading for slope measurement are presented.     

Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces

Phase shifting interferometry is a well-established technique for non-contact surface profile measurement. Though phase shifting technique has many advantages, it is marred by a few inaccuracies due to the vibration and mechanical movement of the phase shifter itself. Significant amount of work is reported to theoretically compensate these error sources. But for a few works, prominent achievements have not been reported in eliminating these error sources in phase shifting interferometry. In this paper, a novel optical layout, in combination with instantaneous phase shifting interferometry is described. Experiments were carried out with this setup on a super mirror with a λ/20 surface roughness, to demonstrate the validity of the principle.     

Generalized phase shifting interferometry based on Lissajous calibration technology

The feasibility and limitation of directly using the Lissajous figure and ellipse fitting technology to correct the phase extraction error in generalized data reduction algorithm (GDRA) for phase extraction of randomly phase-shifted interferograms are analyzed and discussed. By combining Lissajous calibration technology, which represents the transformative process of Lissajous ellipse to circle (ETC), with advanced iterative algorithm (AIA) we propose a novel generalized phase shifting algorithm (GPSA), and here it is abbreviated as ETCI method. The phase distribution and phase shifts that extracted from randomly phase shifted interferograms by use of ETCI are more accurate and the whole process is far faster than AIA. Additionally, proposed method is less sensitive to non-uniform background intensity and modulation amplitude. Numerical simulations are conducted to evaluate the performance of ETCI, and some influential factors are elaborated. The experimental results further indicate proposed method is suitable for truly random phase shifted interferograms.     

A derivative based simplified phase tracker for a single fringe pattern demodulation

In this paper, a novel fringe demodulation method for the estimation of phase and its first-order derivative from a closed-fringe interferogram is proposed. The proposed method determines the phase derivatives in both x&y directions from fringe orientation and density. The phase derivatives are subsequently used to determine phase values using a novel simplified phase tracker. In the phase tracking model, the complexity of the cost function is reduced using predetermined derivatives so computation time required for phase tracking is reduced considerably. The proposed model is more robust while dealing with saddle points in fringes than the conventional phase tracker model. Hence it does not require any specialized scanning strategy. The proposed method is validated with simulated and experimental fringe patterns (obtained using electronic speckle pattern interferometry and optical holographic interferometry) and a comparison study is carried out with conventional regularized phase tracker. The simulation results show that the proposed method has good accuracy and requires less computation time than existing phase-tracking algorithms. The experimental results demonstrate the robustness of the proposed method against speckle noise and its practical applicability for static and dynamic applications.     

Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry

In-process measurement has been the requirement of the precision industries, but due to vibrations while manufacturing, in-process measurement has been difficult to achieve. There is little work on in-process measurement using phase shifting interferometry, as phase shifting is extremely sensitive to vibrations. In this work, the advantage of the developed non-mechanical and instantaneous phase shifting interferometry is felt while measuring surface profile of large flat surfaces under vibrating conditions which can be extended for in-process measurement of surface profile. A near common path optical configuration is achieved and the effect of the environment is reduced. Moreover, the measurement of phase is instantaneous which increases the versatility of this technique for measuring vibrating objects. Profile measurements were carried out on a smooth mirror surface excited with vibrations of different frequencies and the technique was found to be immune to vibrations of up to 1000 Hz.     

光强和方位角误差对光弹性五步彩色相移法的影响

为了了解相移法中的各种参数所产生的误差对最终结果的影响 ,对一些主要参数做深入的误差分析是十分必要的。针对五步彩色相移法所用的白光入射平面偏振场的特点 ,只考虑光强、起偏镜和分析镜方位角所引起的误差影响就可以了。提出一个分析和评估这些误差源对五步彩色相移法确定等倾角参数所产生影响的方法 ,这对合理设计实验装置和执行正确的实验条件将起到积极的作用     

Continual deformation analysis with scanning phase method and time sequence phase method in temporal speckle pattern interferometry

If a laser beam illuminates a continual deformation object surface, it will lead to a temporal speckle pattern on the observation plane. Recording this time-dependent speckle pattern the deformation of the surface of an object can be obtained. Two methods, scanning phase method (SPM) and time sequence phase method (TSPM), have been introduced for measuring the displacement caused by the deformation in temporal speckle pattern interferometry (TSPI). Their principle is that by capturing a series of speckle interference patterns related to the object deformations, the fluctuations in the intensity of the interference patterns can be obtained. Through scanning these fluctuations and estimating both the average intensity and modulation of the temporal speckle interference patterns, the phase maps for whole-field displacements are calculated. In this way one is capable of quantitatively measuring continual displacements simply using a conventional electronic speckle pattern interferometry (ESPI) system without phase shifting or a carrier. The elaboration on the new methods is given in this paper and experiments are performed to demonstrate their performance with a conventional ESPI system.     

Comparative analysis of phase extraction methods based on phase-stepping and shifting curve in grating interferometry

Two phase extraction methods which are based separately on phase-stepping and shifting curve are mainly used in phase-sensitive imaging in gating interferometry to determine the x-ray phase shift induced by an object in the beam. In this paper, the authors perform a full comparative analysis and present the main virtues and limitations of these two methods according to the theoretical analysis of the grating interferometry.     

A state space approach in phase shifting interferometry

The paper proposes a state space approach for the determination of phase distribution in an interferogram in the presence of a non-sinusoidal waveform, random noise, and the miscalibration of the piezoelectric device. In this approach we first estimate the phase step imparted to the piezoelectric transducer (PZT) before determining the phase distribution. A denoising procedure is applied with the knowledge of the state-feedback matrix prior to the extraction of the phase step. This step ensures a good estimation of the phase distribution even at low signal-to-noise ratios. The other salient features of the proposed concept lie in its ability to compensate the detector non-linearity and in the use of non-collimated beams. The comparison of the proposed method with other bench-marking algorithms shows that our approach is efficient and robust. The experimental results show the feasibility of the proposed approach.     

A five-point stencil based algorithm used for phase shifting low-coherence interference microscopy

The phase shifting technique is the most widely used approach for detecting the envelope in low coherence interferometry. However, if the phase shifts calibration contains errors, some parasitic fringe structure will propagate into the calculated envelopes and cause imprecision in the envelope peak detection. To tackle these problems, a five-point stencil algorithm is introduced into the phase shifting interference microscopy. Considering the amount of parasitic fringes, envelope peak detection and computational efficiency, the presented approach leads to satisfactory results in performance. In combination with a simple polynomial curve fitting method the proposed algorithm exhibits good performance on envelope peak detection in surface profiling. Both of the simulated results and the experimental results indicated that the presented approach can be taken as an alternative to the currently existing methods used for phase shifting low-coherence interference microscopy.     

Measurement of non-monotonous phase changes in temporal speckle pattern interferometry using a correlation method without a temporal carrier

Recently, a phase evaluation method was proposed to measure nanometric displacements by means of digital speckle pattern interferometry when the phase change introduced by the deformation is in the range [0,π) rad. This method is based on the evaluation of a correlation coefficient between two speckle interferograms generated by both deformation states of the object. In this paper, we present a novel technique to measure non-monotonous displacements in temporal speckle pattern interferometry using a correlation method without a temporal carrier. In this approach, the sign ambiguity is resolved automatically due to the introduction of a function that determines the correct sign of the displacement between two consecutive speckle interferograms. The rms phase errors introduced by the proposed method are determined using computer-simulated speckle interferograms. An application of the phase retrieval method to process experimental data is also presented.