Energy transfer to a copper surface by low energy noble gas ion bombardment

The energy transferred to a copper surface by bombardment with Xe⁺, Ar⁺, and He⁺ ions with kinetic energies in the range 100–4000 eV has been studied by our group in previous experiments. There were significant experimental uncertainties for that data at energies below about 200 eV. The present investigation overlaps the previous work, extends the energy range to 10 eV, and includes data for Ne⁺. Particular emphasis is placed on the energy range below 200eV. A specially designed ion source was employed in these experiments. A polycrystalline copper film deposited onto a highly sensitive calorimeter was used as the target material. The results show that the Xe⁺ ion deposits more than 97% of its energy over the entire range investigated whereas the lighter ions deposit a decreasing fraction of their energy below about 1 keV. The decrease is largest for the lightest ion (He⁺). In all cases the deposited energy is about or more than 70% of the incident energy. It will be shown that the present results are in agreement with previous measurements for copper and are qualitatively in good agreement with computer calculations using the TRIM.SP code.On leave from: Institut für Schicht- und Ionentechnik, Forschungszentrum Jülich GmbH, W-5170 Jülich, Fed. Rep. Germany     

Theory of Isotope Effects on He+ Trapping in Solid Hydrogen

We are currently investigating the influence of vibrational effects on the strength of trapping of He⁺ in solid hydrogen. Such effects can lead to an isotope dependence of the trapping energy associated with the hydrogen molecules and He⁺ ion. At the present time, our focus is on the isotope effect for ³He⁺ and ⁴He⁺, which we are studying through the vibrational motions of the trapped He⁺ ions in the potential they experience as they move about their equilibrium positions. The potential governing the vibrations has been obtained from Hartree–Fock cluster calculations of the total energy of the cluster composed of the He⁺ ion and up to the third nearest neighbor hydrogen molecules as a function of the displacement of the He⁺ ion from its trapped position. The energy eigenvalues for the ground vibrational states of ³He⁺ and ⁴He⁺ in this potential come out as 1.29 and 0.96 meV, respectively, leading to corresponding reductions by these amounts in the binding energy of 8.6 eV for both ions without vibrational effects. The difference of these reductions can be considered as an isotope shift, its value for this case being 0.33 meV. From the analysis for these results, it is suggested that isotope shift effects for deuteron and triton in solid D–T would have the same order of magnitude. A procedure for more accurate investigations of the isotope shifts is discussed. This revised version was published online in August 2006 with corrections to the Cover Date.     

Theory of ion scattering from single crystals

The scattering of He⁺, Ne⁺ and Ar⁺ ions at 600 eV from Ni(110) in the [11̄0] direction is modeled using classical dynamics. The distributions of final scattering angles of the primary ions are displayed as contour plots over the surface impact zone. From the contour plots the regions of the surface that give rise to scattering at specific angles can be isolated. The majority of the inplane scattering arises from collisions of the primary ion with second layer or “valley” atoms. However, to correctly reproduce the experimental energy distribution curves of Heiland and Taglauer (J. Vacuum Sci. Technol. 9 (1971) 620), we must include a simple collision time correction to account for neutralization of the ion beam. This analysis predicts that the ions which collide with second layer atoms of the solid are preferentially neutralized. The energy distributions due to first layer collisions agree well with experiment. We find that a full molecular three dimensional model is needed to describe all of the ion scattering events since for most of the collisions, the ion is simultaneously interacting with at least two atoms of the solid. However, in agreement with other workers we find only a single collision is responsible for the “binary” peak in the energy distribution. In addition the relative scattering intensity at different angles is dependent on having a three-dimensional solid.     

Electron-spin-dependent 4He+ ion scattering on Bi surfaces

We studied low-energy (～ 1.55 keV) electron-spin-polarized ⁴He⁺ ion scattering on a Bi(111) ultrathin film epitaxially grown on a Si(111) substrate. We observed that the scattered ion intensity differed between the incident He⁺ ions with up and down spins even though Bi is a non-magnetic element. To analyze the origin of this spin-dependent ion scattering (the spin asymmetry), we investigated the detailed relationship between the spin asymmetry and the incident angle, the azimuthal angle, the scattering angle, and the incident energy. All the data indicate that the spin asymmetry originates from the scattering cross section owing to the non-central force in the He⁺–Bi atom binary collision. The non-central force is most likely attributed to the spin–orbit coupling that acts transiently on the He⁺ 1s electron spin in the binary collision.     

Total cross section measurements for charge exchange of He++ ions with He and Ar atoms

Total charge exchange cross sections were measured for He⁺⁺ in He and Ar gas in the energy range from 50 to 540 eV using a single beam apparatus. For He⁺⁺ in He the measured cross section is in agreement with calculations for symmetric resonant charge exchange. For He⁺⁺ in Ar the cross section for charge exchange decreases with decreasing energy below 300 eV. The measured cross section suggests the formation of Ar⁺ ions to be more important at lower energies and the production of Ar⁺⁺ to be dominant at higher energies.     

Inelastic effect in low energy ion-surface collisions: He+Au,Ag

Energy distributions of He⁺ ions scattered by Au and Ag surfaces are measured by an ISS system with high energy resolution, at a scattering angle of 90° and at incident ion energies ranging from 277 to 977 eV. It is found that the observed peak energies deviate toward the low energy side by several electron-volts with respect to the calculated elastic single collision energies. Both the deviation Q' and the inelastic loss energy Q are plotted as a function of incident ion energy for the Au surface.     

A contribution to the investigation of ion impact desorption by ion scattering

Sputtering or ion impact desorption of adsorbed layers can be directly investigated by low-energy ion scattering. Because of its specific sensitivity to surface atoms, this method provides the possibility of monitoring the decrease of the signal from the adsorbate or the increase of the signal from the substrate. Both signals were studied with He⁺ backscattering from the system O on Ni (110). The measured desorption cross-sections and the principal implications for both ways of observation are discussed. The use of the substrate signal for the desorption study can be of major advantage, particularly in the case of light adsorbates.     

Molecular adsorbate detection using hyperthermal Cs+ surface scattering: chemisorbed water on Si(111)

Cs⁺ ion beams are scattered from an Si(111) surface chemisorbed with water. Scattering of Cs⁺ ions from the surface at the incidence energies of 10–;15 eV gives rise to reaction products CsOH⁺, CsOH⁺₂ and CsSiO⁺. We interpret that these cluster ions are formed by desorption of X (X = OH, H₂O and SiO), followed by Cs⁺X association and energy quenching near the surface. The Cs⁺ scattering method has potential advantages for adsorbate detection over desorption techniques, in particular for identification of molecular and thermally unstable species.     

Ar+, He+，S+离子轰击n-InP单晶表面的机理研究

通过X射线光电子能谱和低能电子衍射实验研究了10～180 eV的Ar⁺、 He⁺、S⁺离子轰击n-InP(100)表面, 发现S⁺离子轰击可以产生In-S组分,减轻离子轰击对表面的物理损伤.对于Ar⁺离子轰击后的表面,经过S⁺离子处理和加热过程以后,表面损伤得到了修复,最终得到了2×2的InP表面,进一步验证了S⁺离子对InP表面的修复作用.     

Preferential sputtering of TIC under keV Ar+ ion bombardment: Simultaneous sputtering-ISS measurement with He+ and Ar+ ions

The composition change of the outermost atom layer of TiC(110) under ion bombardment with 1.5–3 keV He⁺ and He⁺ + Ar⁺ ions has been measured by ion scattering spectroscopy with He⁺ ions at different sample temperatures. It has been found that the preferential sputtering of C atoms takes place for both the He⁺ and Ar⁺ ion bombardment, however the preferred sputtering is more pronounced for Ar⁺ ions than for He⁺ ions. The ion bombardment with He⁺ ions at elevated sample temperatures hardly results in any change in surface composition below ～800°C, while Ar⁺ ion bombardment results in C enrichment for elevated temperatures as reported so far.     

Resonances in an <Emphasis Type="Italic">S</Emphasis>-wave model of electron scattering off hydrogen-like ions

Irregularities in the cross section of electron scattering off hydrogen and hydrogen-like He⁺, Li⁺⁺, and Be⁺⁺⁺ ions are studied using an s-wave model. The resonance structure and irregularities in the scattering data are compared. A unified approach based on an exterior complex scaling method is used in performing calculations. The potential splitting approach is used for calculations of scattering in systems with asymptotic Coulomb interactions.     

Mechanism of electron exchange between low energy He+ and solid surfaces

A general picture on the mechanism of electron exchange between low energy He⁺ ions and solid surfaces is proposed on the basis of experiments on three-dimensional angle resolving ion scattering spectroscopy in which not only He⁺ but neutral He is used as a projectile.     

Investigation of interaction between lithium and tantalum under a silicon film coating by electron-stimulated desorption technique

The electron-stimulated desorption of Li⁺ ions from lithium layers adsorbed on the tantalum surface coated with a silicon film has been investigated. The measurements are performed using a static magnetic mass spectrometer equipped with an electric field-retarding energy analyzer. The threshold of the electron-stimulated desorption of lithium ions is close to the ionization energy of the Li 1s level. The secondary thresholds are observed at energies of about 130 and 150 eV. The threshold at an energy of 130 eV is approximately 30 eV higher than the ionization energy of the Si 2p level and can be associated with the double ionization. The threshold at 150 eV can be caused by the ionization of the Si 2s level. It is demonstrated that the yield of Li⁺ ions does not correlate with the silicon amount in near-the-surface region of the tantalum ribbon and drastically increases at high annealing temperatures. The dependence of the current of Li⁺ desorption on the lithium concentration upon annealing of the tantalum ribbon at T>1800 K exhibits two maxima. The ions desorbed by electrons with energies higher than 130 and 150 eV make the largest contribution to the current of lithium ions after the annealing. The yield of lithium ions upon ionization of the Li 1s level at an energy of 55 eV is considerably lesser, but it is observed at higher concentrations of deposited lithium. The results obtained can be interpreted in the framework of the Auger-stimulated desorption model with allowance made for relaxation of the local surface field.     

Multiple scattering of low-energy rare-gas ions at solid surfaces

We have studied the multiple scattering of He⁺, Ne⁺, and Ar⁺ from a TaC(001) surface in the energy region of the order of 1 keV. The experimental data revealed large differences between the energy spectra of these ions. The spectral peak corresponding to quasi-double scattering is clearly observed for Ar⁺ but not observed for Ne⁺. The multiple scattering effect appearing in the energy spectra of rare-gas ions is discussed on the basis of electron exchange between these ions and solid surfaces.     

Electron-induced desorption of O+ ions from W,Mo and Cr

We have studied the electron-induced desorption (EID) of O⁺ ions from oxygen-covered polycrystalline W, Mo and Cr surfaces. As the incident electron energy is increased, desorption begins at about 25 eV, and increases dramatically at the binding energy major low-lying substrate core levels. In the range of electron energy studied, below about 200 eV, there are also other variations in ion yield not associated with known core levels. The peak ion kinetic energy is 7.8, 5.3 and 3.4 eV for W, Mo and Cr respectively, and is independent of incident electron energy. These measurements imply that the desorption is initiated by a core level ionization event, although the subsequent electronic transitions leading to desorption apparently differ from those occurring on metallic oxide surfaces.     

Quantitative aspects of Ion Scattering Spectroscopy (ISS)

The application of ion scattering spectroscopy (ISS) as a tool for the analysis of the surface composition of solids has been hampered to date by the need of special equipment and the lack of understanding of the interaction processes between ions and surfaces. The purpose of this paper is to examine what information can be extracted from the experimental data and to show that ISS can be easily combined with AES and LEED in the same UHV system. The commercial cylindrical Mirror Analyzer (CMA) for the AES measurements was simply switched in situ to ISS by reversing the polarity of the deflection voltage. The surface studied was a W (110) surface either clean or covered with an electronegative (oxygen) or an electropositive (beryllium) adsorbate in the coverage range from 0 to 1 monolayer. He⁺ scattering in the energy range from 300 to 1000 eV shows that ISS at present is better suited as a tool for surface structure analysis than for the determination of the species and quantity of adsorbed atoms.     

Studies of the desorption mechanism of O− by electron impact from oxygen covered metal surfaces

Electron-stimulated desorption of negative ions from oxygen covered tungsten and molybdenum has been investigated. The O^? desorption current as a function of incident electron energy was measured. The following results were observed: (1) the threshold of negative ion desorption is much lower than that of positive ions (20–25 eV for O⁺; 4–5 eV for O^?); (2) some resonant-like structures appear in the curves of desorption current as a function of electron energy in the low energy regions; these structures do not appear in the high energy regions; (3) these resonant-like structures are basically the same for O₂-W and O₂-Mo systems. Experimental results seem to indicate that the desorption of negative ions are essentially a feature of the absorbate and can be most readily explained based on potential energy curves for some electronic states of oxygen molecules and ions, and within the framework of the Franck-Condon principle.     

The dynamics of He ion neutralization at a xenon film: Energy- and spin-resolved studies

The neutralization of He⁺ ions with energies in the range 10-500 eV at an adsorbed xenon layer is examined both by analyzing the energy distribution of electrons ejected from the surface and by use of spin-labeling techniques, specifically the use of electron-spin-polarized He⁺ ions coupled with measurement of the ejected electron polarization. The data indicate that neutralization proceeds via an Auger process similar to that which occurs at a clean high-work-function metal surface. At the higher ion energies, however, kinetic ejection becomes important and provides an increasing contribution to the total electron yield.     

Primary ion beam energy effects on secondary ion emission from Ni(001)c(2 × 2)-CO: Classical dynamics calculations and sims

The variation of the SIMS spectra of Ni(001)c(2 × 2)-CO induced by bombardment of Ar⁺ primary ions with kinetic energy between 300 and 1200 eV has been examined in detail. The purpose of the study is to examine the influence of primary ion energy on a number of experimental observables and to test the accuracy of classical dynamics calculations for neutral particles in predicting the experimental results for ejected ions. The calculations were performed using two extreme forms of the Ar⁺ -substrate interaction potential to examine the sensitivity of the results to the parameters that need to be included in the model. We find excellent agreement between the NiCO⁺/Ni⁺ ion yield ratio measured between 300–1200 eV Ar⁺ ion energy and the computational results if the Molière form of the ion-substrate potential is used and if the calculated results are corrected by including an image force. The calculated angular distributions of the ejected particles also agree well with those observed experimentally. From the calculations we see that the extent of CO fragmentation relative to the amount of molecular CO ejection is roughly constant in the 300–1200 eV beam energy range with a slight increase seen at lower (~ 300 eV) energies. The implications of these results are discussed in terms of our ability to study the chemistry and structure of surfaces with SIMS.     

Classical trajectories studies of DIET from calcium fluoride

We investigate desorption of positive ions resulting from the repulsive environment created by core-hole Auger decay from relaxed CaF₂ surfaces. The molecular dynamics simulations in the lamina geometry (with two-dimensional ion-lattice summation) is used. For both (011) and (111) surfaces the simulation with changed charge without providing additional kinetic energy does not lead to the ejection of F⁺ ion due to the lattice rearrangement and trapping of the ion. We also assume that the positive ion gains a substantial amount of kinetic energy at the onset of simulations, crudely mimicking ion-stimulated desorption. For the (011) surface the results are extremely sensitive to the size of the considered system, in sharp contrast to the ejection of positive ions from alkali halides. For a 384 ion system, ejection occurs if the kinetic energy, equal to 0.25 eV or more, is delivered to the F⁺ ion at the start of the simulation. For a 768 ion system ejection occurs only for the initial kinetic energy of 4 eV. This result is probably caused by inadequate classical potential and lack of full convergence of the two-dimensional Ewald summation scheme for a highly disordered system. For the (111) surface with 1536 ions in the cell, ejection occurs for an initial kinetic energy of 0.4 eV.