Use of langmuir probes for monitoring of precursor concentrations during plasma activated chemical vapor deposition of hard coatings

Langmuir-probe characteristics were measured during the deposition of hard zirconium nitride films in H₂ plasmas with tetrakis(diethylamido)-zirconium-Zr[N(C₂H₅)₂]₄- as a precursor. A combination of fast repeatable probe sweeps and hysteresis measurements indicated undisturbed characteristics for approximately 1 h. Since the electron concentration is highly dependent on the partial pressure of the precursor it is possible to use probes as sensors to monitor precursor concentration in a discharge.     

Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices

Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4 μm wide) separated from the large electrode (20 μm wide) by 20 μm and 6 μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (∼100 °C) due to low T_g of polymeric material. The fluidic velocity measurement shows a maximum of about 450 μm/s in a 150 μm channel width of organic micro-fluidic devices after plasma surface modification.     

The langmuir probe influence on the measurement of the electron energy distribution function in O2 plasma

The influence of the probe thickness and contamination on the measurement of the electron energy distribution function is studied in a homogeneous oxygen positive column. The curve f(U) obtained by a thin cleaned probe is compared with f(U) calculated by other authors. The agreement is very good.     

Langmuir probe and spectroscopic studies of RF generated helium-nitrogen mixture plasma

This paper reports the effect of helium percentage variation in a capacitive RF helium-nitrogen mixture plasma on various plasma parameters and concentration of nitrogen active species (N₂(C³Π _u) and N₂ ⁺(B²Σ _u ⁺)). Langmuir probe is used for determination of electron energy distribution functions, effective electron temperature, plasma potential and electron density. Optical emission spectroscopy is used for determination of electron temperature from Boltzmann's plot of He–I lines and the relative changes in the concentration of active species by measuring the emission intensities of nitrogen (0-0) bands of the second positive and the first negative systems. The results demonstrate that electron temperature, electron density and concentration of active species increase significantly with increase in helium percentage in the mixture and RF power.     

微波共振探针及其在等离子体诊断中的应用

介绍了能够测量稳定和时变等离子体电子密度的微波共振探针,给出了其工作原理和在测量稳定、时变和瞬态等离子体电子密度中的应用。分析了传输模式和反射模式的工作过程及对测量范围、测量精度和空间分辨率等影响因素。结果表明,选用较长的探针有利于提高电子密度的测量范围和精度;选用的微波扫频源高端频率越高,频率分辨率越高,则电子密度的测量范围越大,测量精度越高。理论分析得出系统可测量的电子密度约为1.37×10⁸~4.1×10¹¹cm^-3。     

Acoustic emission technique for monitoring the pyrolysis of composites for process control

Carbonization is the first step in the heat and pressure treatment (pyrolysis) of composites in preparing carbon-carbon parts. These find many uses, including aircraft brakes, rocket nozzles and medical implants. This paper describes the acoustic emissions (AE) from various stages of the manufacturing process of carbon-carbon composites. This process involves carbonization at a high temperature and this results in both thermal expansion and volume change (due to pyrolysis in which a sacrificial polymer matrix is converted to carbon). Importantly the resultant matrix is porous and has a network of small intra-lamina cracks. The formation of these microcracks produces AE and this paper describes how this observation can be used to monitor (and eventually control) the manufacturing process. The aim is to speed up manufacture, which is currently time-consuming. The first section of the paper describes the design of unimodal waveguides to enable the AE to propagate to a cool environment where a transducer can be located. The second part of the paper describes various experimental observations of AE under a range of process conditions. In particular, this paper presents a technique based on detecting acoustic emissions and (1) uses wire waveguides to monitor parts within the autoclave to 800 degrees C, (2) monitors microcracking during pyrolysis, (3) uses a four-level threshold to distinguish between low- and high-amplitude cracking events, (4) recognizes the occurrence of harmful delaminations, and (5) guides the control of the heating rate for optimum efficiency of the pyrolysis process. In addition, supporting data are presented of in situ measurements of porosity, weight loss, cross-ply shrinkage, and mass spectroscopy of gases emitted. The process evolution is illustrated by the use of interrupted manufacturing cycle micrographs obtained by optical, scanning acoustic (SAM) and scanning electron (SEM) microscopy. The technique promotes in-process monitoring and control but also contributes to current understanding of pyrolysis.     

时间域混合像元分析在海冰密集度变化研究中的应用

传统意义混合像元分析方法是对有不同光谱特征的地物进行分解(spectral mixture analysis,SMA),得到各个组分在该像元内所占的百分数。而将光谱域的混合像元分析延伸至时间域内(temporalmixture analysis,TMA),提取的表征时间特性的端元用于像元分解所得残差小于8.5%,说明TMA提取南极地区海冰密集度时间变化特性具有可行性。将获取的多年平均端元用于2005年和2010年海冰密集度数据,得到残差分别为(1.4±2.42)%和(1.7±2.87)%,高于多年平均残差精度(1±1.53)%,在一定程度上反映某年海冰密集度数据相对多年平均值的变化。因此,TMA为全球变暖背景下的海冰密集度的时空特性研究提供了新思路。     

Study of laser-induced plasma shock waves by the probe beam deflection technique

Laser probe beam deflection technique is used for the analysis of laser-induced plasma shock waves in air and distilled water. The temporal and spatial variations of the parameters on shock fronts are studied as functions of focal lens position and laser energy. The influences of the characteristics of media are investigated on the well-designed experimental setup. It is found that the shock wave in distilled water attenuates to an acoustic wave faster than in air under the same laser energy. Good agreement is obtained between our experimental results and those attained with other techniques. This technique is versatile, economic, and simple to implement, being a promising diagnostic tool for pulsed laser processing.     

The application of a capacitive probe technique for direct observation of electromechanical processes in the guinea pig cochlea

The demonstration of evoked mechanical responses of the outer hair cells in the mammalian cochlea by indirect measurements introduces a new range of problems into direct mechanical measurements. Direct and indirect measurements indicate that the frequency spectra of evoked electromechanical responses may extend well into the range of audio frequencies, revealing a need to develop terminology and protocols for distinguishing evoked mechanical responses from the traditional traveling wave when both are apparently superimposed on the motion of the basilar membrane in the normally functioning cochlea. Details are presented of a frequency-modulation capacitive probe technique for measurement of vibrating structures of the guinea pig ear. Considerations include the design of the transducer, calibration, sensitivity, linearity, and sources of noise, as well as the influence of the technique upon the animal preparation, and in particular the issues associated with draining scala tympani for the measurement. Relative advantages and disadvantages of the technique are compared with salient features of other techniques currently available. In view of the apparent complexity of cochlear mechanics some preliminary experiments are required to elucidate some of the key questions about reverse-transduction processes in general. A "simple" first experiment is to test existence of any rectifying or motile response.     

等离子体增强化学气相沉积中对尘埃颗粒诊断

采用SiH4,C2H4和Ar在射频容性耦合柱状放电室中产生了尘埃颗粒,利用发射光谱测得射频尘埃等离子体放电室中的一些基本碎片的发射光谱,并给出了这些碎片的光发射强度随着实验条件变化的曲线。随着功率和气压的增加,碎片的光发射强度逐步增加,尤其是随功率增加得更快,这说明功率对硅烷和乙烯的离解作用明显。随着硅烷和乙烯流量的增加,碎片的光发射强度随之下降。利用朗缪尔探针的实验结果得出尘埃密度的变化趋势,给出了尘埃密度随射频功率变化的曲线,其结果与硅烷和乙烯的离解变化趋势基本吻合。     

等离子体增强化学气相沉积中对尘埃颗粒诊断

采用SiH4,C2H4和Ar在射频容性耦合柱状放电室中产生了尘埃颗粒,利用发射光谱测得射频尘埃等离子体放电室中的一些基本碎片的发射光谱,并给出了这些碎片的光发射强度随着实验条件变化的曲线。随着功率和气压的增加,碎片的光发射强度逐步增加,尤其是随功率增加得更快,这说明功率对硅烷和乙烯的离解作用明显。随着硅烷和乙烯流量的增加,碎片的光发射强度随之下降。利用朗缪尔探针的实验结果得出尘埃密度的变化趋势,给出了尘埃密度随射频功率变化的曲线,其结果与硅烷和乙烯的离解变化趋势基本吻合。     

Determination of plasma properties with electron drainage to the probe

Certain aspects of probe diagnostics of plasmas which are related to the electron drainage to the probe are discussed. Even small values of the drainage parameter greatly distort the second derivative of the electron current drawn by the probe. At large values of the drainage parameter, the zero of the second derivative occurs well away from the actual space potential. Also at large values of the drainage parameter, the distribution function which is being sought is proportional to the first derivative of the electron current drawn by the probe.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 3, pp. 34–39, March, 1984.     

Heterogeneous sono-Fenton-like process using nanostructured pyrite prepared by Ar glow discharge plasma for treatment of a textile dye

The plasma-treated pyrite (PTP) nanostructures were prepared from natural pyrite (NP) utilizing argon plasma due to its sputtering and cleaning effects resulting in more active surface area. The NP and PTP were characterized using X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FT-IR), Brunauer–Emmett–Teller (BET) and scanning electron microscopy (SEM) methods. The performance of the PTP was greater than NP for treatment of Reactive Red 84 (RR84) by the heterogeneous sono-Fenton process. The optimum amounts of main operational parameters were obtained as PTP of 4 g/L, initial dye concentration of 10 mg/L, pH of 5, and ultrasonic power of 300 W after 120 min of reaction time. Also, the effects of enhancers, and inorganic salts and t-butanol as hydroxyl radical scavengers on the degradation efficiency were investigated. Gas chromatography–mass spectroscopy analysis (GC–MS) was applied for detection of some degradation intermediates. Environmentally friendly plasma modification of the NP, in situ production of H₂O₂ and OH radicals, low leached iron concentration and repeated reusability at the milder pH are the significant benefits of the PTP utilization.     

Results of TDLS application for ammonia monitoring in a process of high-purity arsine and phosphine production

Using the TDLS method it has been found that ammonia (NH₃) is the main impurity in arsine (AsH₃) and phosphine (PH₃), produced by hydrolysis of magnesium arsinide and phosphinide, respectively. NH₃ behavior is abnormal in solutions of these hydrides: NH₃ reveals the properties of a more volatile impurity in relation to arsine and phosphine, although its boiling temperature is higher than that of AsH₃ and PH₃. The observable anomaly is connected with the fact that in solutions of arsine and phosphine NH₃ shows properties differing from the properties of pure ammonia. It was supposed that the influence of intermolecular interaction between ammonia molecules, when diluted by arsine or phosphine, decreases. During the purification of arsine or phosphine one must continuously monitor the NH_3.concentration in the extraction of the light fraction in order to define the point at which to terminate the purification process.     

Measurement of electronegativity during the E to H mode transition in a radio frequency inductively coupled Ar/O_2 plasma

This paper presents the evolution of the electronegativity with the applied power during the E to H mode transition in a radio frequency(rf)inductively coupled plasma(ICP)in a mixture of Ar and O2.The densities of the negative ion and the electron,as well as their ratio,i.e.,the electronegativity,are measured as a function of the applied power by laser photo-detachment combined with a microwave resonance probe,under different pressures and O2 contents.Meanwhile,the optical emission intensities at Ar 750.4 nm and O 844.6 nm are monitored via a spectrograph.It was found that by increasing the applied power,the electron density and the optical emission intensity show a similar trench,i.e.,they increase abruptly at a threshold power,suggesting that the E to H mode transition occurs.With the increase of the pressure,the negative ion density presents opposite trends in the E-mode and the H-mode,which is related to the difference of the electron density and energy for the two modes.The emission intensities of Ar 750.4 nm and O 844.6 nm monotonously decrease with increasing the pressure or the O2 content,indicating that the density of high-energy electrons,which can excite atoms,is monotonically decreased.This leads to an increase of the negative ion density in the H-mode with increasing the pressure.Besides,as the applied power is increased,the electronegativity shows an abrupt drop during the E-to H-mode transition.     

Picosecond coherence coupling in the pump and probe technique

A general expression for the coherent artifact in photoinduced absorption measured by coherent polarized pump and probe beams is derived. The conditions for its reduction in isotropic media by using cross-polarized beams is discussed. Examples of experimental data illustrating the conclusions of the theory are shown.     

Results of investigation of the langmuir and upper-hybrid plasma turbulence evolution by means of stimulated ionospheric emission

The results of investigations of the temporal evolution of high-frequency plasma turbulence obtained by measurements of stimulated ionospheric emission (SIE) features for different stages of interaction of powerful radio emission, with an ionospheric F region plasma are presented. It is found that the relaxation time decreased up to 2–4 times with increase in the pump duration and pumping power under the conditions of striction parametric instability (excitation of Langmuir plasma turbulence) over times t≤2.00 ms. A similar decrease of the SIE relaxation time was also observed under the conditions of thermal parametric instability (excitation of upper-hybrid plasma turbulence) in long-term quasicontinuous heating of ionospheric plasma. The possible mechanisms of collisionless dissipation of plasma turbulence energy are discussed to explain the observed dependence of the plasma wave damping rate on the temperal stage of development and intensity of plasma turbulence. Radiophysical Research Institute, Nizhny Novgorod, Russia. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 41, No. 3, pp. 313–347, March, 1998.     

毛细管等离子体射流技术研究现状及应用前景

 毛细管放电等离子体是近年来发展起来的一种新型脉冲高能粒子源，可以产生高温、高密和高速等离子体射流，具有推进、发射、加速等功能，可以加热或引燃化学工质，具有广泛的应用前景。介绍了毛细管等离子体的基本原理和特点，综述了国内外研究现状，对毛细管等离子体应用前景进行了展望，以期引起我国对这一技术研究的重视，促进毛细管等离子体技术的发展。     

毛细管等离子体射流技术研究现状及应用前景

毛细管放电等离子体是近年来发展起来的一种新型脉冲高能粒子源,可以产生高温、高密和高速等离子体射流,具有推进、发射、加速等功能,可以加热或引燃化学工质,具有广泛的应用前景。介绍了毛细管等离子体的基本原理和特点,综述了国内外研究现状,对毛细管等离子体应用前景进行了展望,以期引起我国对这一技术研究的重视,促进毛细管等离子体技术的发展。     

Exploitation of the Z-scan technique as a method to optically probe pK(a) in organic materials: application to porphyrin derivatives

We demonstrate the use of the Z-scan technique as a method to measure a chemical parameter, the pK(a) value, that characterizes the equilibrium constant in acid-base reactions. The measurements were performed with picosecond pulses at 532 nm in Fe(III)-meso-tetrakis(4-N-methyl-pyridyl) porphyrin. The results were compared with linear absorption measurements and electron paramagnetic resonance, the usual techniques employed to determine pK(a) values in aqueous solutions, and showed excellent agreement.