Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens

The multilayer Laue lens (MLL) is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 μm-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current (DC) magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35-41 μ. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility (SSRF). One-dimensional (1D) focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale.     

Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2 /Si multilayer Laue lens

The multilayer Laue lens (MLL) is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 μm-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current (DC) magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35-41 μm. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility (SSRF). One-dimensional (1D) focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale.     

Nanometer linear focusing of hard x rays by a multilayer Laue lens

We report on a type of linear zone plate for nanometer-scale focusing of hard x rays, a multilayer Laue lens (MLL), produced by sectioning a multilayer and illuminating it in Laue diffraction geometry. Because of its large optical depth, a MLL spans the diffraction regimes applicable to a thin Fresnel zone plate and a crystal. Coupled wave theory calculations indicate that focusing to 5 nm or smaller with high efficiency should be possible. Partial MLL structures with outermost zone widths as small as 10 nm have been fabricated and tested with 19.5 keV synchrotron radiation. Focal sizes as small as 30 nm with efficiencies up to 44% are measured.     

Submicron focusing of XUV radiation from a laser plasma source using a multilayer Laue lens

The focusing properties of a one-dimensional multilayer Laue lens (MLL) were investigated using monochromatic soft X-ray radiation from a table-top, laser-produced plasma source. The MLL was fabricated by a focused ion beam (FIB) structuring of pulsed laser deposited ZrO₂/Ti multilayers. This novel method offers the potential to overcome limitations encountered in electron lithographic processes. Utilizing this multilayer Laue lens, a line focus of XUV radiation from a laser-induced plasma in a nitrogen gas puff target could be generated. The evaluated focal length is close to the designed value of 220 μm for the measurement wavelength of 2.88 nm. Divergence angle and beam waist diameter are measured by a moving knife edge and a far-field experiment, determining all relevant second-order moments based beam parameters. The waist diameter has been found to be approximately 370 nm (FWHM).     

Toward one nanometer X-ray focusing: a complex refractive lens design

We report a design for one nanometer X-ray focusing by a complex refractive lens, which is capable of focusing 20 keV X-rays down to a lateral size of 0.92 nm （full-width at half-maximum （FWHM）） and an axial size of 98 nm （FWHM） with intensity gain of 49050. This complex refractive lens is comprised of a series of kinoform lenses, whose aperture is gradually matched to the converging trace of the X-ray beam so as to increase the numerical aperture （NA）. The theoretical principle of the proposed complex refractive lens is presented. The NAs of these lenses are calculated. The numerical simulation results demonstrate that the proposed design can focus the X-ray beam into sub-nanometer while remaining high gain.     

Point focusing with flat and wedged crossed multilayer Laue lenses

Point focusing measurements using pairs of directly bonded crossed multilayer Laue lenses (MLLs) are reported. Several flat and wedged MLLs have been fabricated out of a single deposition and assembled to realise point focusing devices. The wedged lenses have been manufactured by adding a stress layer onto flat lenses. Subsequent bending of the structure changes the relative orientation of the layer interfaces towards the stress‐wedged geometry. The characterization at ESRF beamline ID13 at a photon energy of 10.5 keV demonstrated a nearly diffraction‐limited focusing to a clean spot of 43 nm × 44 nm without significant side lobes with two wedged crossed MLLs using an illuminated aperture of approximately 17 µm × 17 µm to eliminate aberrations originating from layer placement errors in the full 52.7 µm × 52.7 µm aperture. These MLLs have an average individual diffraction efficiency of 44.5%. Scanning transmission X‐ray microscopy measurements with convenient working distances were performed to demonstrate that the lenses are suitable for user experiments. Also discussed are the diffraction and focusing properties of crossed flat lenses made from the same deposition, which have been used as a reference. Here a focal spot size of 28 nm × 33 nm was achieved and significant side lobes were noticed at an illuminated aperture of approximately 23 µm × 23 µm.     

2D Laue focusing of X-ray radiation by a double-crystal system

The theory of the dynamic 2D focusing of an X-ray wave upon its Laue diffraction by a system of two bent crystals is developed. The reflecting planes of the crystals are perpendicular to their surfaces. 2D focusing is shown to be highly sensitive to the bending radius of the crystals and to the difference in their thicknesses. The effect of astigmatism on 2D Laue focusing is described, and conditions for stigmatic focusing are found. One-dimensional focusing inside the crystals is discussed. The spectral characteristics of a double-crystal 2D-focusing spectrometer are considered.     

On creating multilayer X-ray focusing mirrors

We review the recent studies and results obtained in the last five years at the Institute for Physics of Microstructures (IPM) in the field of multilayer mirror construction for hard X-ray wavelength range ( 7n = 0.05—0.25 nm), E = 25—5 keV)). Mirrors with cylindrical and spheroidal shapes as well as Kirkpatrick-Baez cross systems are considered.     

Focusing performance of a multilayer Laue lens with layer placement error described by dynamical diffraction theory

The multilayer Laue lens (MLL) is essentially a linear zone plate with large aspect ratio, which can theoretically focus hard X‐rays to well below 1 nm with high efficiency when ideal structures are used. However, the focusing performance of a MLL depends heavily on the quality of the layers, especially the layer placement error which always exists in real MLLs. Here, a dynamical modeling approach, based on the coupled wave theory, is proposed to study the focusing performance of a MLL with layer placement error. The result of simulation shows that this method can be applied to various forms of layer placement error.     

First X-ray fluorescence CT experimental results at the SSRF X-ray imaging beamline

X-ray fluorescence CT is a non-destructive technique for detecting elemental composition and distribution inside a specimen. In this paper, the first experimental results of X-ray fluorescence CT obtained at the SSRF X-ray imaging beamline (BL13W1) are described. The test samples were investigated and the 2D elemental image was reconstructed using a filtered back-projection algorithm. In the sample the element Cd was observed. Up to now, the X-ray fluorescence CT could be carried out at the SSRF X-ray imaging beamline.     

First X-ray fluorescence CT experimental results at the SSRF X-ray imaging beamline

X-ray fluorescence CT is a non-destructive technique for detecting elemental composition and distribution inside a specimen. In this paper, the first experimental results of X-ray fluorescence CT obtained at the SSRF X-ray imaging beamline (BL13W1) are described. The test samples were investigated and the 2D elemental image was reconstructed using a filtered back-projection algorithm. In the sample the element Cd was observed. Up to now, the X-ray fluorescence CT could be carried out at the SSRF X-ray imaging beamline.     

New focusing multilayer structures for X-ray and VUV plasma spectroscopy

We investigate the spectral characteristics of new focusing multilayer structures used as dispersive elements in a high-transmission X-ray spectrometer with cylindrical geometry (Hamos scheme): W/B₄C structures in a wavelength range of λ = 8.0?9.5 Å and Cr/Sc structures in a range of λ = 30?40 Å (the range is not accessible for natural crystals). The results of demonstration experiments on laser-produced plasma spectra recording are considered. It is shown that the luminosity of a Hamos spectrometer with multilayer dispersive elements is an order of magnitude higher than the luminosity of grazing-incidence grating spectrographs with a comparable spectral resolution.     

Advances in X-ray excitation of Kossel patterns by a focusing polycapillary lens

In this paper, the polychromatic X-ray excitation of Kossel patterns by an X-ray tube and a focusing polycapillary lens will be presented. Additionally, it will be shown that the lateral resolution of the Kossel technique under X-ray tube excitation can be improved and the exposure times can be strongly reduced by using a polycapillary lens. The advantageous combination of X-ray fluorescence and crystal structure analysis by means of Kossel microdiffraction will be demonstrated.     

Thin-film X-ray waveguide based on a multilayer structure with a nanocavity

Resonant excitation of waveguide modes in the conducting channel of a thin-film X-ray waveguide based on a multilayer structure with a nanocavity, with X rays incident near the first Bragg reflection, has been theoretically considered within the plane-wave approximation.     

Polycapillary X-ray lens for the secondary focusing Beijing synchrotron radiation source

According to intensity distribution of the synchrotron radiation source focused by a toroidal mirror at the Beijing synchrotron radiation biological macromolecule station, theoretical modeling of the Beijing synchrotron radiation source is developed for capillary optics. Using this theoretical modeling, the influences of the configuration curve of the polycapillary X-ray lens on transmission efficiency and working distance are analyzed. The experimental results of the transmission efficiency and working distance at the biological macromolecule station are in good agreement with the theoretical results.     

X-ray and vacuum-ultraviolet plasma spectroscopy with the use of new focusing multilayer structures

The spectra of a laser plasma in the soft x-ray (0.8–0.95 nm) and vacuum ultraviolet (3–4 nm) ranges are recorded with the use of new focusing multilayer structures. It is demonstrated that the electron temperature of the light-element plasma produced by a laser pulse with an energy of ～1 mJ can be measured by using the relative intensities of the satellites and the lines of ions with different charges.     

Microfocus small-angle X-ray scattering at SSRF BL16B1

Offering high-brilliance X-ray beams on micrometer length scales,the μSAXS at SSRF BL16 B1 has been established with a KB mirror system for studying small sample volumes,or probing microscopic morphologies.The SAXS minimum q value is 0.1 nm~(-1) with a flux of 1.5×10~(10) photons/s.Two position-resolved scanning experimental methods,STXM and CT,are combined with μSAXS.To improve the significant smearing effect in the horizontal direction,an effective and easy-to-use desmearing procedure for two-dimensional SAXS patterns based on blind deconvolution was developed,and the deblurring results demonstrate the good restoration effect for the defocused image.Finally,a bamboo sample was used in the SAXS-CT experiment to illustrate the performance of the μSAXS method.     

The beam-based calibration of an X-ray pinhole camera at SSRF

A pinhole camera for imaging X-ray synchrotron radiation from a dipole magnet is now in operation at the Shanghai Synchrotron Radiation Facility (SSRF) storage ring. The electron beam size is derived by unfolding the radiation image and the point spread function (PSF) with deconvolution techniques. The performance of the pinhole is determined by the accuracy of the PSF measurement. This article will focus on a beam-based calibration scheme to measure the PSF system by varying the beam images with different quadrupole settings and fitting them with the corresponding theoretical beam sizes. Applying this method at SSRF, the PSF value of the pinhole is revised from 37 to 44 μm. The deviation in beam size between the theoretical value and the measured value is minimized to 4% after calibration. This optimization allows us to observe the horizontal disturbance due to injection down to as small as 0.5 μm.     

X-ray focusing using an x-ray lens composed of multi-square polycapillary slices

A new type of x-ray lens composed of multi-square polycapillary slices(ASPXRL)used in focusing parallel x-ray beam was presented in this paper.Compared with conventional x-ray polycapillary lens,ASPXRL can provide smaller and brighter focus.The effects of the manufacturing imperfections on focusing quality of ASPXRL were evaluated with the values of transmission efficiency and discussed.It is suggested that ASPXRL has application prospects as a condenser lens for x-ray microscopy and flux collectors for x-ray analytical instruments.     

基于Zemax的He-Ne激光光束聚焦物镜的设计

 为了得到一个合理的He-Ne激光光束聚焦物镜,采用以正前凸型为基础的高折射率双片结构,应用Zemax软件进行优化设计,获得了弥散斑直径为0.002mm的He-Ne激光聚焦物镜,该镜头只需校正轴上点球差。实验结果表明：设计的镜头比低折射率单片透镜得到的弥散圆直径更小,达到0.0019mm,球差被控制在-0.05mm～+0.05mm范围内,MTF曲线所围面积变大,中心点亮度增高,符合实际需要。