New aspects of the plastic deformation of silicon – prerequisites for the reshaping of silicon microelements

New shapes of silicon microelements which can be partially situated outside the wafer plane can be created by the combination of wet anisotropic etching and plastic deformation at high temperatures. Therefore new applications become possible. In order to characterize the plastic behaviour of the silicon microelements bending tests in the 3-point manner were carried out at monocrystalline, differently orientated beams with variation of temperature, bending rate and maximum bending. Additionally the fracture strength at room temperature of deformed and undeformed beams was determined. The dislocation content introduced during the deformation was analysed by the etch pit technique. The deformation is characterized by the formation of dislocations, a pronounced yield point effect, and an orientation-dependent strengthening. The yield points depend strongly on temperature. Because of the strong dependence on the deformation parameters it is possible to create the same amount of irreversible deformation at different stages of the stress–bend diagrams resulting in different dislocation contents and therefore different properties. The analysis of the fracture strength values by means of the Weibull statistics shows a slightly decreased average fracture strength of the deformed material in comparison to the undeformed silicon but a strongly increased Weibull modulus. Received: 22 September 1998 / Accepted: 29 January 1999 / Published online: 28 April 1999     

点缺陷对单晶硅力学性能影响的分子动力学研究

本文采用分子动力学方法模拟了含有不同大小点缺陷的单晶硅在恒定应变率作用下的破坏过程,以及点缺陷对单晶硅屈服强度的影响,结果表明:点缺陷能显著减小单晶硅的屈服强度,且屈服强度的变化趋势和点缺陷的大小服从指数函数关系,经过分析发现是点缺陷诱发的应力集中效应降低了屈服强度.通过利用已有的四类强度理论进行校核,发现米塞斯强度理论最适合描述单晶硅的屈服强度,且单晶硅晶体的破坏过程可以由米塞斯应力的演化和聚集效应来说明.最后,在可视化分析破坏后的结构时,发现破坏过程产生的微结构沿着解理面分布,其微观构造类似于二维网格.本文研究结果为评估点缺陷对单晶硅屈服强度的影响机理提供了参考.     

一种高重频废束桶束窗的设计及热结构分析

深圳中能高重频X射线自由电子激光（S3FEL）将建设成为全球唯一软X射线波段的高重频自由电子激光。废束桶是S3FEL装置的重要设备,在系统调束中发挥着重要作用。废束桶束窗是废束桶的重要组成部件,用于隔离和保护加速器超高真空环境。本文对几种常用的废束桶束窗材料进行了对比分析,最终选择铍作为束窗的材料,并依此设计了一种带有水冷结构的束窗。通过蒙特卡罗方法计算得到不同厚度束窗的沉积功率,采用有限元分析方法对不同厚度的束窗进行热结构计算与分析,得到厚度为1.6 mm的水冷铍窗效果最佳,其最大温度为121.6℃,低真空为1 Pa时的最大应力与中心变形分别为198.7 MPa和0.000 82 mm,低真空为101 325 Pa时的最大应力与中心变形分别为204.2 MPa和0.097 mm,结果均满足使用要求。此研究为S3FEL的废束桶束窗设计提供了重要的理论依据。     

Experiments and simulation on laser bending of silicon sheet with different thicknesses

Based on the requirements for silicon sheets with different thickness in MEMS, and according to the experimental results, the element of the temperature distribution was investigated by calculation with ANSYS, and the bending mechanism of different thicknesses of the silicon sheet is proposed. The results showed that the plastic deformation was delayed as the thickness is increased. The bending angle was bigger with the increment being smaller as the scanning numbers increased, and the biggest bending angle was obtained finally.     

一种废束站束窗结构设计与优化

废束站束窗是废束站的重要部件。利用束流的束斑尺寸及功率确定束窗能量的高斯分布方式;通过蒙特卡罗方法计算束窗的沉积能量。利用ANSYS稳态分析确定束窗的材料、截面形状和厚度。通过计算比较束窗在不同材料、截面形状和厚度条件下的温度、应力和变形,得出合适的束窗材料、截面形状和厚度,从而确定束窗的最终结构。最后利用瞬态方法模拟束窗调束时的温度分布情况。     

化学钢化光学窗口玻璃强度分析与检测

以脆性材料的断裂力学为基础,根据化学钢化光学窗口玻璃表面应力分布状态,分析了化学钢化对光学窗口玻璃强度的影响。将Weibull模型与玻璃微裂纹生长理论相结合,分析并提出了化学钢化光学窗口玻璃的强度检验和寿命预测方法,为化学钢化光学窗口玻璃的强度设计和检验提供指导。     

Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

Amorphous silicon (a-Si) films were prepared by sputtering method with polycrystalline and monocrystalline silicon targets. Structural, optical and electrical properties of the a-Si films have been systematically studied. The deposition power is from 100 to 200 W. Compared with the a-Si films deposited by using monocrystalline silicon target, the a-Si films prepared with polycrystalline silicon target exhibit better growth property, similar optical band gap, and own the highest mobility of 1.658 cm²/Vs, which make a good match with the optimal window of optical band gap for a-Si solar cells. The results indicated that the polycrystalline silicon target is superior to the monocrystalline silicon target when used to prepare a-Si films as the intrinsic layer in a-Si solar cells.     

脉冲激光作用单晶硅的等离子体光谱分析

从激光与物质相互作用理论出发,对脉冲激光作用单晶硅的热特性进行分析。建立一套实验装置,所用激光光源的波长为1 064 nm,脉宽为10 ns,重复频率为1 Hz。得到单晶硅的等离子体谱及热辐射谱,在单晶硅的光电性质基础上对其热表面损伤进行理论分析。提取380~460 nm波段的单晶硅等离子体光谱,分析了谱图中SiⅠ390.52 nm,SiⅡ385.51 nm,SiⅡ413.12 nm三条谱线的相对强度与激光输出功率密度的对应关系。     

Low-loss germanium strip waveguides on silicon for the mid-infrared

Mid-infrared photonics in silicon needs low-loss integrated waveguides. While monocrystalline germanium waveguides on silicon have been proposed, experimental realization has not been reported. Here we demonstrate a germanium strip waveguide on a silicon substrate. It is designed for single mode transmission of light in transverse magnetic (TM) polarization generated from quantum cascade lasers at a wavelength of 5.8 μm. The propagation losses were measured with the Fabry-Perot resonance method. The lowest achieved propagation loss is 2.5 dB/cm, while the bending loss is measured to be 0.12 dB for a 90° bend with a radius of 115 μm.     

ITER真空室支撑筋板结构设计与强度分析

作为真空室的重要部件,支撑筋板既需要支撑真空室双层壳体,又需要支撑中子屏蔽层。在实际工作中,支撑筋板必须满足运行时的各项强度要求。分析了真空室结构特点,以及真空室支撑筋板的平面布局与结构要求。运用CATIA软件设计了支撑筋板,并在ANSYS Workbench环境下对其作了有限元分析,得到支撑筋板在真空室内工况下的强度应力云图和应变云图。结果分析表明,支撑筋板的结构和强度均满足设计要求,很好地保证了ITER真空室的正常运行。     

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As an important part of vacuum vessel, supporting rib not only supports double layer shell, but also supports neutron shielding layer. It must meet all strength requirement from them in practice. Vacuum vessel structure feature, supporting rib layout and structure requirement were analyzed. Supporting rib was designed with CATIA. Its strength stress nephogram and deformation nephogram were obtained with finite element analysis under the ANSYS Workbench environment. From the result, supporting rib structure and stress can meet the design requirement, so as to assure its normal working in ITER vacuum vessel.     

Transient deformation of thin metal sheets during pulsed laser forming

The transient deformation of thin grade 304 stainless steel metal sheets heated by a single pulse of a CO₂ laser beam is simulated in this paper. The laser beam is assumed to be line-shaped and the problem is treated as three-dimensional thermo-elastoplastic. The temperature field, deformation pattern, stress–strain states and the residual stress distribution of the specimens have been calculated numerically and the transient response of the bending angle has been validated by experiments. Good agreement has been obtained between the numerical simulation and the experiments under various operating conditions. The numerical study reveals that a high temperature gradient exists for a positive bending angle and a low one for a negative angle. It transpires that the mechanisms of pulsed laser forming are dependent mainly upon the laser power, the heating time, the clamping arrangement, as well as the geometry, the thermal properties and the original stress states of the specimen.     

微米尺度结构最大抗扭强度的在线测试和研究

提出了一种新型的测试结构，对面积为微米量级下键合的最大抗扭强度进行了测试.实验设计一系列的单晶硅悬臂梁结构测试键合面积在微米量级时的最大剪切力，键合面为常用的矩形其边长从6μm到120μm，并根据实际移动距离计算得出的最大剪切力.并实验实际得出最大剪切扭矩和相应的键合面积的曲线，以及最大扭转剪切破坏应力与悬臂梁加载距离的关系，并针对60μm×60μm的矩形键合结构进行了加载和位移的重复性实验测量，两次测量结果符合较好.微电子机械系统(microelectromechanical system, MEMS)器件的设计人员可以根据结论曲线，针对所需的抗扭强度设计相应的键合面积，为MEMS器件工艺的在线定量测试与设计提供参考. 关键词： 阳极键合 硅深刻蚀 键合强度 最大抗扭强度     

Strength statistics and the distribution of earthquake interevent times

The Weibull distribution is often used to model the earthquake interevent times distribution (ITD). We propose a link between the earthquake ITD on single faults with the Earth’s crustal shear strength distribution by means of a phenomenological stick–slip model. For single faults or fault systems with homogeneous strength statistics and power-law stress accumulation we obtain the Weibull ITD. We prove that the moduli of the interevent times and crustal shear strength are linearly related, while the time scale is an algebraic function of the scale of crustal shear strength. We also show that logarithmic stress accumulation leads to the log-Weibull ITD. We investigate deviations of the ITD tails from the Weibull model due to sampling bias, magnitude cutoff thresholds, and non-homogeneous strength parameters. Assuming the Gutenberg–Richter law and independence of the Weibull modulus on the magnitude threshold, we deduce that the interevent time scale drops exponentially with the magnitude threshold. We demonstrate that a microearthquake sequence from the island of Crete and a seismic sequence from Southern California conform reasonably well to the Weibull model.     

用于强流中子发生器的低能束流传输线的设计模拟

兰州大学设计研发的ZF-400强流中子发生器设计D-T中子产额6×1012 n/s,主要由ECR离子源、低能束流传输线（LEBT）、加速管、旋转靶等部分组成。LEBT负责将从离子源引出的束流进行分析聚焦并注入到加速管中。LEBT对束流的聚焦及分析的好坏程度决定了加速管中束流的损失程度、中子的产额以及靶的寿命。本工作就该强流中子发生器所需的低能传输线进行了设计。使用螺线管、分析磁铁和四极透镜组合的方案。利用TRACK软件对此方案进行模拟,得到符合要求的束流线及元件的参数。用TraceWin进行了验证模拟,验证结果符合要求。另外,通过软件模拟确定了杂质离子损失的位置,据此设计了束流管道冷却方案。通过模拟发现,这种透镜的组合方式可以让整个LEBT以较低的功率获得低损失、高纯度的打靶束流。The ZF-400 Intense Neutron Generator, which is designed by Lanzhou University with an expected neutron yield of 6×1012 n/s, is consist of ECR ion source, low energy beam transport (LEBT) line, accelerating tube and rotating target. The beam extracted from ECR source is analyzed and focused through LEBT, then, the beam is introduced into the accelerating tube. The focus and analysis ability of LEBT is very important for the beam loss, neutron yield and target's life. A LEBT line for intense neutron generator is designed in this paper, the project consisted of a solenoid, a bend magnet and three quadrupole lens. The qualified LEBT and its parameters have been got through the simulation with TRACK code. Then TraceWin program was employed to check this simulation and the result satisfied our requirement. Besides, the loss position of impurity ions was known through the simulation, and a project of beam line's cooling system was designed according to this result. Through the simulation, we find the optimal lens combination plan which can obtain lower beam loss and higher beam purity at low running power of LEBT.     

CSNS反角白光中子源束线控制系统研制

中国散裂中子源(CSNS)反角白光中子源束线主要由中子束窗、中子开关、中子准直器和真空管道等组成。为了保证CSNS反角白光中子源束线安全、稳定、可靠地运行,研制了基于EPICS(Experimental Physics and Industrial Control System)软件架构的控制系统。该系统主要由中子束窗、中子开关及中子准直器的运动控制系统、真空控制系统和控制室三部分组成,实现了对反角白光中子源束线主要设备的远程监测和控制。测试结果表明,该系统具有稳定可靠性高、人机交互友好的特点,很好地满足了反角白光中子源束线运行的需要。     

环形分布激光束引起光学窗口镜热变形理论分析

 用有限Hankel变换就常见的环形分布激光束情形，推导得到了激光束辐照透过窗口镜引起热传导温度场和热变形分布的理论解，以此计算结果与实验值相比较，分析了白宝石、石英两种窗口镜在激光辐照下的热变形情况。分析结果表明，在激光束辐照的4s时段内，温升场主要集中在激光束辐照的环形区内，在镜面内远未拉平，由此引起的厚度方向热膨胀变形也很不均匀。材料对激光的吸收系数和热膨胀系数以及热扩散率分别是决定热变形量值大小和空间分布的最主要的物性参数。     

基于D-T紧凑型中子源的快中子照相准直屏蔽体设计及中子束特性模拟研究

中子照相是一种重要的无损检测技术,它能用于火工产品、毒品和核燃料元件等的检测。基于紧凑型D-T中子发生器,完成了一个用于快中子照相的准直屏蔽体系统（BSA）的物理设计。根据D-T中子源的能谱和角分布建立了中子源模型,采用MCNP4C蒙特卡罗程序,模拟了准直屏蔽体系统中中子和γ射线的输运,准直中子束相对于单位源中子的中子注量可以达到9.30×10-6 cm-2,准直中子束中主要是能量大于10 MeV的快中子;在设置的样品平面直径14 cm的照射视野范围,准直束中子注量的不均匀度为4.30%,准直束中中子注量与γ注量的比值为17.20,中子通量和中子注量比值J/Φ为0.992,说明准直中子束有好的平行性;准直屏蔽体外的泄露中子注量率与准直束中子注量率相比降低了2个量级。所设计的准直屏蔽体能满足快中子照相的要求。Neutron radiography is an important nondestructive testing technique. It can be used to detect the explosive devices, drug and the nuclear fuel element, etc. A beam-shaping-assembly (BSA) based on a compact D-T neutron generator is designed for fast neutron radiography in this paper. D-T neutron source model is constructed based on the neutron energy spectrum and angular distribution data. The transportation of neutron and γ-ray in the BSA is simulated using MCNP4C code. The neutron fluence of the collimated neutron beam with respect to the neutron source of the unit source is 9.30×10-6 cm-2. The collimated neutron beams is mainly fast neutrons with energies greater than 10 MeV. In the irradiation field range with a diameter of 14 cm, the neutron fluence uniformity of the collimated beam is 4.3%, the ratio of the neutron fluence to the gamma fluence in the collimated beam is 17.20, and the neutron flux and the neutron fluence ratio (J/Φ) is 0.992 which indicates that the collimated neutron beam has good parallelism. The leakage neutron fluence in outside of BSA is two orders of magnitude lower than that of the collimated neutron beam. The designed BSA can meet the need of fast neutron radiography.     

激光窗口热透镜效应对光束质量的影响

 分析了高功率激光通过窗口时，引起的窗口热透镜效应及其对激光光束质量的影响。用冲量定理方法，推导了二维热传导方程的广义傅里叶级数解，然后按照平面热应力问题，运用有限元方法数值计算热变形。考虑热变形、折射率随温度变化，忽略光弹性效应，解出出光面的波前相差分布，讨论了远场光束质量。以空心环形光束为例，计算了熔融石英(SiO₂)和白宝石(Al₂O₃)两种常用窗口的温升分布、热变形、波前相差和光束质量，分析了冷却、辐照时间、光强分布的空间梯度和各种材料参数对光束质量的影响。     

Bonse-Hart angular profiles realized for multiply Bragg reflected neutrons

We have produced a monochromatic neutron beam with the sharpest angular profile to date. Multiple Bragg reflections from optimally designed channel-cut silicon single crystals have produced neutron beams with theoretical Darwin angular profiles. This experiment constitutes the first realization of the proposal made by Bonse and Hart 35 years ago and opens up avenues for ultrasmall angle neutron scattering studies down to wave vector transfers of 10(-5) A(-1).