Profile measurement system based on linnik-type interferometric microscope for visible-light region and infrared-light region

A profile measurement system consisting of linnik-type interferometric microscope, light source and cameras is developed based on white-light scanning interferometry extending from the visible-light region to the infrared-light region. Three-dimensional profiles of microstructures are obtained via a phase-stepping algorithm using a CMOS array camera for the visible-light region and an InGaAs CCD array camera for the infrared-light region. Errors of the measurement system along with extensive applications in MEMS device profile reconstruction of top surface, sidewall and internal structures are discussed in detail.     

Infrared-light interferometry and a phase-stepping algorithm for measuring the three-dimensional topography of components covered with GaAs or Si

White-light scanning interferometry is extended from the visible-light region to the infrared-light region to measure the three-dimensional (3D) topography of components. An infrared-light interference system based on a linnik-type interferometric microscope is developed according to the principle of transmission of semiconductor materials in the infrared-light region. The 3D topography is measured using the components covered with a Si or GaAs wafer based on a phase-stepping algorithm. The 3D topography can be obtained accurately and relative step heights can be determined within an error less than 3% compared with the instrument MSA 400, a well-known commercially available apparatus used in the field of 3D topography measurement.     

一种简单精准的渐变折射率分布光波导分析方法

渐变折射率分布的光波导分析对光波导器件的设计和研究至关重要, 近年来已提出了多种分析方法, 然而在简便性或准确性上都存在着不足. 为此, 提出了一种分析渐变折射率分布光波导的方法, 能够结合现有的Wentzel-Kramers-Brillouin近似法和离散化的波动方程, 构建模场分布, 再结合变分运算方程和修正的模式本征方程, 计算出较为精确的有效折射率. 与其他分析方法相比, 该方法较为简单, 而且有一定的精度.     

Infrared imaging based hyperventilation monitoring through respiration rate estimation

A change in the skin temperature is used as an indicator of physical illness which can be detected through infrared thermography. Thermograms or thermal images can be used as an effective diagnostic tool for monitoring and diagnosis of various diseases. This paper describes an infrared thermography based approach for detecting hyperventilation caused due to stress and anxiety in human beings by computing their respiration rates. The work employs computer vision techniques for tracking the region of interest from thermal video to compute the breath rate. Experiments have been performed on 30 subjects. Corner feature extraction using Minimum Eigenvalue (Shi–Tomasi) algorithm and registration using Kanade Lucas–Tomasi algorithm has been used here. Thermal signature around the extracted region is detected and subsequently filtered through a band pass filter to compute the respiration profile of an individual. If the respiration profile shows unusual pattern and exceeds the threshold we conclude that the person is stressed and tending to hyperventilate. Results obtained are compared with standard contact based methods which have shown significant correlations. It is envisaged that the thermal image based approach not only will help in detecting hyperventilation but can assist in regular stress monitoring as it is non-invasive method.     

高能量粒子再分布模型在CFETR上的应用

在中国聚变工程实验堆(CFETR)设计参数下,利用一种高能量粒子(EP)物理简化模型分析了磁流体动力学(MHD)不稳定中新经典撕裂模(NTM)引起的粒子再分布和损失。相位矢量旋转法利用EP相空间中小间隔区域内跟踪探测粒子对来判定粒子轨道随机与否,即记录连接矢量旋转角的方法标记该区域是否存在KAM面破缺,以此为据修正相空间的粒子分布函数和判断粒子损失。利用相空间探测粒子对相位矢量旋转法标记一定NTM幅度下的随机区域分布并迭代得到稳态分布剖面。对捕获粒子区域的共振岛探测结果表明,低频或零频率扰动不会与高能量α粒子形成有效共振,MHD扰动和有效碰撞效应可能使捕获-通行轨道边界附近形成损失通道。     

A probe-based method for measuring the transport coefficient in the tokamak edge region

A new method for measuring the diffusion coefficient in the edge plasma of fusion devices is presented. The method is based on studying the decay of the plasma fluctuation spectrum inside a small ceramic tube having its mouth flush with a magnetic surface and its axis aligned along the radial direction. The plasma fluctuations are detected by an electrode, radially movable inside the tube. In the experiment described herein, which was performed in the edge region of the CASTOR tokamak, the electrode measured the floating potential. The experimental arrangement is the same used for the direct plasma potential measurements according to the “Ball-pen probe” [1], the design of which is based on the Katsumata probe principle. When the electrode protrudes from the tube, the measured signal shows the floating potential fluctuations of the plasma. Retracting the electrode into the tube, the signal power spectrum displays a decay. This decay is different for different frequencies, and is exponential. Assuming a mainly diffusive behaviour of the plasma inside the tube, the spectrum decay length can be used to derive a value of the diffusion coefficient. The measurement were performed at different radial positions in the CASTOR edge region, so that a radial profile of the diffusion coefficient was obtained. Typical values ofD are of (2–3) m²/s, consistent with expectations from the global particle balance. The radial profile shows a tendency of the diffusion coefficient to increase going deeper into the plasma.     

利用简正模态相位关系的浅海声源深度分辨方法

针对浅海波导声源深度分辨问题,本文提出了一种利用简正波的相位关系进行声源深度分辨的方法。该方法通过对垂直阵接收到的信号进行简正波分解,得到简正波系数,在已知声源距离的情况下通过对简正波系数项的处理得到各阶简正波的相位关系,根据相位关系估计声源的深度区间。该方法在阵元数较少时依然可以分辨声源深度,而且对宽带信号、窄带信号、连续信号和脉冲信号均适用。理论分析和数值仿真的结果说明:只有近水面处声源激发的简正波满足相位一致的特性,利用此特性可分辨水面水下目标。仿真和海试结果证明:在海水声速随深度不变或缓变的水文环境下,该方法可以准确的分辨声源深度区间,并且在深度采样不充分的情况下仍然适用。      

利用阵列多信息对大区域地层电导率的反演

提出利用变形玻恩迭代方法将阵列多信息用于实际大区域地层反演的新方法。该区域是由复杂的过渡带和没受泥浆侵入的原状地层组成的。该方法基于非线性积分方程,用正则化方法求出电导率分布。在迭代过程中,数值模式匹配法用于求解感应的正演问题。一些数值模拟表明,利用阵列多信息能很好地对复杂地层进行成象,且成象结果与真实电导率剖面分布吻合得比较好。     

A new technique in ramp response for acoustic imaging of underwater objects

The ramp response of an underwater object yields information about the object's size, orientation and geometrical shape. Based on the physical optics approximate, a simple relation between ramp response and the profile function has been obtained in the illuminated region of the object. The same relation in the shadow region has also been presented. With the profile data from three arbitrary looking angles, the 3-D image of the object can be generated through the technique known as “approximate limiting surface”. Instead of the FFT method, a new technique has been developed to obtain a fairly good ramp response. Several different non-dimensional frequency range cases have been discussed for sphere and ellipsoid. And 3-D images have been shown. The study indicates that a fairly good ramp response can be obtained with less frequency domain data.     

Determination of stress-induced intrinsic birefringence in a single-mode fiber by measurement of the two-dimensional stress profile

The two-dimensional (2-D) axial stress profile of a single-mode fiber is obtained with an optical tomographic measurement technique. All stress components of the fiber are calculated from a measured axial stress profile. We demonstrate that the differential group delay induced by intrinsic nonsymmetric stress as well as the induced linear birefringence between two orthogonal polarization modes can be determined with an analytic technique based on a vector perturbation method from a measured asymmetric 2-D stress distribution.     

Surface profiling using fringe projection technique based on Lau effect

In this paper, the surface profile of objects is determined by using a grating projection system. The method is based on the concept of self-imaging, namely, the Lau effect. Periodic fringe patterns are generated from the projection of a grating illuminated by multiple mutually incoherent quasi-plane wavefront. The fringe patterns are then projected on to the object surface and the deformed grating image is captured by a CCD camera for subsequent analysis. Phase shifting techniques have been employed to determine the phase value. With suitable calibration of the system and the phase value obtained, the surface profile of the objects can be determined. The phase variation is achieved by using a linear translation stage incorporated to the grating. In this study, two specimens are tested to demonstrate the validity of the method. One is a spherical cap with a height of 4 mm, and the other is a coin. The experimental results are compared with results obtained by mechanical stylus method. In the case of the spherical cap the results are also compared with fringe projection method based on Talbot effect.     

套管辅助法测量异型预制棒折射率分布

基于光束扫描法的光纤预制棒折射率测试仪主要适用于直径和长度在一定范围内的圆柱形样品折射率分布的测试。提出一种套管辅助法可实现更短长度、更细直径和变直径样品的折射率测试。该方法将待测样品居中放置于一个尺寸符合测试要求的圆柱形套管内,并在套管内注入折射率匹配油,使其没过待测样品后按常规步骤进行测试。对比实验结果表明,套管辅助法与直接测量法的偏差与仪器的测量误差相当。采用套管法,获得了预制棒拉丝终止后变径区不同位置折射率的径向分布,可为拉丝过程的研究提供参考。     

基于深度约束的声速估算方法*

高精度的声速剖面数据是提高水下定位精度的关键。在无法精确获得声速剖面数据的情况下,该文提出了一种基于深度约束,同时根据浮标与水下目标的空间几何距离进行有效声速估算的方法。通过仿真模拟,将该文提出的方法与加权平均声速法、泰勒级数展开法和等效声速剖面法的定位结果进行对比分析。结果表明,新方法不需要依靠声速剖面数据,通过深度约束可有效地估算出声速值,其定位精度与等效声速结果相当,极大地提高了无声速剖面数据下的水下定位精度。     

An approximate method for computing mode-dispersion parameters in two-dimensional diffused-channel waveguides

We develop an approximate analysis based on the effective-index method to obtain the universal chart of the normalized parameters describing the mode dispersion of a two-dimensional diffused-channel wave-guide with an erfc-Gaussian index profile. We have shown that the Gaussian can well be approximated by an hyperbolic-secant-squared profile and we have compared our results with those obtained by using the effective-index method.     

靶丸内表面轮廓的白光共焦光谱测量技术

靶丸内表面轮廓是激光核聚变靶丸的关键参数,需要精密检测。本文首先分析了基于白光共焦光谱和精密气浮轴系的靶丸内表面轮廓测量基本原理,建立了靶丸内表面轮廓的白光共焦光谱测量方法。此外,搭建了靶丸内表面轮廓测量实验装置,建立了基于靶丸光学图像的辅助调心方法,实现了靶丸内表面轮廓的精密测量,获得了准确的靶丸内表面轮廓曲线;最后,对测量结果的可靠性进行了实验验证和不确定度分析,结果表明,白光共焦光谱能实现靶丸内表面低阶轮廓的精密测量,其测量不确定度优于0.1μm。     

Green's formulation for robust phase unwrapping in digital holography

We present, for the first time to the best of our knowledge, a phase unwrapping method based on an algorithm which makes use of Green's first identity. This method aims at recovering the correct phase information encoded in a fringe pattern after digital holography (DH) numerical processing. DH provides a quantitative measurement of the three-dimensional surface profile of objects. The information about the profile can be obtained in principle from the phase-map. However, the measured phase-map provides the actual phase values wrapped mod.2π so that an unwrapping process is required in order to reconstruct the object profile.     

采用小生境遗传算法反演浅海声速剖面研究

针对浅海声速剖面反演问题,采用小生境遗传算法,结合声线搜索的最快本征声线匹配反演,实现浅海负跃层条件下的声速剖面估计.利用经验正交函数对声速剖面的多参数不确定性降维,依据声场计算模型获取的最快特征声线传播时延与观测声传播时长进行匹配,采用小生境遗传优化算法,获取最优经验正交函数估计,实现声速剖面反演.按上述方法反演处理...     

Noise of a turbulent boundary layer flow over smooth and rough plates at low mach numbers

The spectral levels of the quadrupole noise generated by a boundary layer flow over a smooth surface are calculated. Explicit dependences of the noise levels on the Reynolds number are obtained for the low-frequency and high-frequency ranges. It is shown that the logarithmic zone of the velocity profile is responsible for the region of the quadrupole noise spectrum with a hyperbolic dependence on frequency. A method of calculating the dipole noise of a boundary layer flow over a rough surface is developed. The method is based on the use of the combined probability density for the turbulent velocity fluctuations and the random dimensions of protuberances of the rough surface. The two constants involved in this theory are determined from a special experiment. It is shown that the surface roughness noticeably increases the radiation levels of a boundary layer flow in a certain frequency range.     

光波导折射率分布的数值计算法

介绍了光波导折射率分布的数值计算法，采用该方法，可由光波导输出端面的二维光强分布得到的其折射率差的二维分布和沿ｘ，ｙ方向的线分布，文中给出了Ｔｉ：ＬｉＮｂＯ３光波导沿垂直于基片表面方向的折射率差分布的测量结果。     

Dynamic propagation study of phase-controlled infrared-light pulses in low-dimensional semiconductor heterostructures

We study the propagation effects of the phase-controlled infrared-light pulses in semiconductor quantum-well (QW) heterostructures under realistic experimental conditions. By numerically solving the coupled Bloch–Maxwell equations for electrons and fields simultaneously on numerical grids in time and space, we show that the propagation dynamics can be dramatically modified by varying the relative phase of the applied fields. This opens up the possibility to study optimal control of light propagation in the QW solid materials.