The modified Beckmann–Kirchhoff scattering theory for surface characteristics in-process measurement

This paper focuses on how the scattering theory can be applied to the analysis of the surface characteristics in an in-process optical measurement. The mean scattered intensity distributions from a surface without and with the additional layers are presented based on the modified Beckmann–Kirchhoff scattering theory. The results show that the introduction of the additional layers only affects rough surfaces. The light scattered from a rough surface under the additional layers seems to be scattered from a bare rough surface with a different surface parameter in the small angle approximation. The experiment is conducted with pixel gray value measurement along the main direction of light scattering stripe to verify the theoretical analysis. The experimental curves can well fit the proposed model, which testifies the correction of the modified Beckmann–Kirchhoff scattering theory.     

In-process roughness measurement on moving surfaces

A new optical technique, which utilises the combined effects of interference and light scattering, was developed for surface roughness measurements. This paper presents the technique applicable to extracting the roughness of moving surfaces under high rotational speeds up to 3.7 m/s. The applicability of the technique to in-process roughness measurement was demonstrated with a cylindrical grinding process.     

基于杂散光抑制要求的光学表面粗糙度控制方法研究

光学表面加工误差引起的散射是影响光学系统成像性能的重要因素.描述表面总散射能量的均方根粗糙度是评定光学表面粗糙度的通用指标,但因其未能体现散射能量的空间分布,在表征光学表面散射对具体光学系统杂散光性能影响时存在准确度不足的局限.本文基于全积分散射及双向散射分布函数理论,针对杂散光抑制要求提出一种光学表面粗糙度控制的新方法.首先通过分析确定光学表面纹理中影响系统杂散光的空间频率范围,然后度量该频率带限范围内的表面均方根粗糙度,作为控制光学表面粗糙度的指标.以太阳磁场望远镜(MFT)为例进行方法验证,确定主镜表面纹理有效频率范围为0—18 mm~(-1),分析了主镜表面带限均方根粗糙度对MFT杂散光性能的影响.结果表明,带限均方根粗糙度与MFT杂散光性能之间的关系稳定性能大幅提高,由此验证了采用带限均方根粗糙度描述光学表面粗糙度,能更为准确地控制其对具体光学系统杂散光性能的影响.     

The dynamic angle-limited integrated scattering (DALIS) method for measuring scattering of light from optical surfaces with random roughness

A new and simple dynamic angle limited integrated scattering (DALIS) method is developed to examine optically smooth reflective surfaces with defined surface form. Our experimental results from two systems show advantages over conventional angle resolved scattering measurement (ARS) methods. By collecting scattered light in a given solid angle, our methods do not require a detection unit with an extremely large dynamic range. Unlike in the common ARS measurement method, here we use a simple linear translation stage to scan scattered light. The power spectrum density function and the autocorrelation function of the surface roughness can be recovered from the measured scattering pattern. This method can be applied to in-workshop inspection of optical polishing processes.     

Rapid in-process measurement of surface roughness using adaptive optics

We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R(2)) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ.     

Investigation of chatter marks on ground surfaces by means of optical methods

In order to characterise chatter marks, in this work, various ground samples are investigated by means of two different optical surface analysis techniques: by using a confocal white light microscope and an angle-resolved light scattering sensor, respectively. The latter is also applied to an industrial belt grinding process in both roughness- and waviness-modes of measuring. These in-process measurements are found in good agreement with those of visual counting. Data processing in terms of the Fourier transformation it is shown to equally well accesses the wavelength of chatter marks in both roughness- and waviness-modes. Therefore it is concluded that chatter marks occurring during the industrial belt grinding can be seen as a superposition of roughness changes and waviness.     

Surface roughness investigation of semi-conductor wafers

Conventionally, surface roughness is predominantly determined through the use of stylus instruments. However, there are certain limitations involved in the method, particularly when a test specimen, such as a silicon wafer, has a smooth mirror-like surface. Hence, it is necessary to explore alternative non-contact techniques. Light scattering has recently been gaining popularity as an optical technique to provide prompt and precise inspection of surface roughness. In this paper, the total integrated scattering (TIS) model is modified to retrieve parameters on surface micro-topography through light scattering. The applicability of the proposed modified TIS model is studied and compared with an atomic force microscope. Experimental results obtained show that the proposed technique is highly accurate for measuring surface roughness in the nanometer range.     

Effect of surface roughness on the determination of tissue optical properties

The scattering phase functions of the nylon film with different surface roughnesses were measured by the goniophotometric measurement technique, and the corresponding anisotropy factors of the nylon film with different surface roughnesses were determined subsequently. Consequently, the scattering coefficients of nylon with different surface roughnesses were determined. The fluence rates of intralipid with different interface roughnesses for a board beam irradiation were measured and the penetration depths were determined. The experimental results indicate that the surface roughness obviously affects the determination of the optical properties of nylon. This study suggested that the determination of tissue optical properties should take surface roughness into account.     

光盘信息符散斑图的统计特性研究

提出了一种用激光散斑测量光盘信息符统计特性的方法.利用散斑统计理论中衍射散斑场的平均对比度与散射屏表面粗糙度近似成线性关系,把光盘等效为弱散射屏,对未刻录、刻录及存在缺陷的CD-R光盘不同区域形成的衍射散斑图进行了对比研究.实验结果表明,该方法具有可量化、全场测量的优点,能够表征光盘信息符的某些统计特性,这为测量光盘刻录质量提供了一种新的方法和途径.     

银薄膜对光学基底表面粗糙度及光散射的影响

为了研究金属银薄膜与光学基底表面粗糙度和光散射的关系,提出了通过对光学薄膜矢量散射公式积分来获得界面粗糙度完全相关模型和完全非相关模型下其表面的总反射散射的方法.理论计算了光学基底上两种模型在不同厚度银膜下的总反射散射和双向反射分布函数.结果表明,当沉积在光学基底上的银薄膜的厚度大于80 nm后,两种模型下计算的银薄膜的表面总反射散射都等于基底的总积分散射,银薄膜能较好地复现出基底的粗糙度轮廓.实验研究表明为了复现基底的粗糙度,银薄膜的最佳厚度应在80~160 nm之间.     

An optical method and neural network for surface roughness measurement

The measurement of surface roughness using stylus equipment has several disadvantages. A non-contact optical method is needed for measuring the surface roughness of engineering metals with improved accuracy. One candidate for an optical method is the use of a laser source, where the laser light intensity reflected from the surface represents the surface roughness of the illuminated area. A relation can be developed between the reflected laser beam intensity and the surface roughness of the metal. The present study examines the measurement of the surface roughness of the stainless steel samples using a He-Ne laser beam. In the measurement a Gaussian curve parameter of a Gaussian function approximating the peak of the reflected intensity is measured with a fast response photodetector. In order to achieve this, an experimental setup is designed and built. In the experimental apparatus, fiber-optic cables are used to collect the reflected beam from the surface. The output of the fiber-optic system is fed to a back-propagation neural network to classify the resulting surface profile and predict the surface roughness value. The results obtained from the present study are then compared with the stylus measurement results. It is found that the resolution of the surface texture improves considerably in the case of optical method and the neural network developed for this purpose can classify the surface texture according to the control charts developed mathematically.     

表面粗糙度对固体内部超声背散射的影响

超声背散射法可通过多晶体金属内部的空间方差信号,实现微观结构参数的无损评价,但表面粗糙度对评价模型的精度及实用性存在显著影响.基于高斯声束理论推导垂直入射粗糙界面的纵波声场,以此研究声能的Wigner分布规律;在超声的波长远大于粗糙度的前提下,构造表面粗糙度修正系数,并建立粗糙界面的单次散射响应模型,揭示粗糙度对超声波背向散射的影响规律.用304不锈钢制备轮廓均方根值为0.159μm的光滑试块和25.722μm的粗糙试块开展超声背散射实验,结果表明模型在粗糙度修正前后均可实现光滑试块的晶粒尺寸有效评价,但未经修正的传统模型对粗糙试块的晶粒尺寸评价结果与金相法结果的相对误差高达-21.35%,而本模型的评价结果与金相法结果符合得很好,相对误差仅为1.35%.可见,本模型能有效补偿粗糙度引起的超声背散射信号衰减,从而提高晶粒尺寸无损评价的精度.     

An optical method and neural network for surface roughness measurement

The measurement of surface roughness using the stylus equipment has several disadvantages. A non-contact optical method becomes demanding for measuring the surface roughness of the engineering metals with improved accuracy. One of the candidates for the optical method is the use of a laser source in which case the reflected laser light intensity from the surface may represent the surface roughness of the illuminated area. Consequently, a relation can be developed between the reflected laser beam intensity and the surface roughness of the metals. The present study examines the measurement of the surface roughness of the stainless-steel samples using a He–Ne laser beam. In the measurement, a Gaussian curve parameter of a Gaussian function approximating the peak of the reflected intensity is measured with a fast response photodetector. To achieve this, an experimental setup is designed and realized. In the experimental apparatus, fiber-optic cables are used to collect the reflected beam from the surface. The output of the fiber-optic system is fed to a backpropagation neural network to classify the resulting surface profile and predict the surface roughness value. The results obtained from the present study is, then, compared with the stylus measurement results. It is found that the resolution of the surface texture improves considerably in the case of optical method and the neural network developed for this purpose can classify the surface texture according to the control charts developed mathematically.     

弯曲增敏型光纤曲率传感器机理的研究

近年国外出现一种直接检测弯曲的低成本光纤曲率传感器,采用弯曲增敏技术提高光纤对弯曲的灵敏度。这种传感器的线性范围宽,能区分正向弯曲和负向弯曲,在测量较大弯曲变形的场合更具优势;并且适合埋入结构内部检测,通过转换还可测量轴向应变。然而其传感机理方面的研究仍处于探索阶段。通过分析光辐射度余弦定律理论、回音壁光线理论、沟槽角度理论等国内外对该传感器机理的研究成果,并基于平面波导的光散射损耗理论,提出了光纤曲率传感器的机理。指出弯曲引起光纤敏感区表面散射损耗的改变是导致光传输损耗改变的原因;推导出损耗与光纤弯曲半径、表面特性、光纤结构参量关系的数学模型,并通过实验验证了模型的有效性。     

表面散射光对激光三角法位移测量的影响

三角测量法是一种位移测量方法, 其测量精度不但受到传感器本身因素如光源、探测器、机械结构特性等因素的影响, 还受到被测表面特性如色泽、材料、粗糙度、倾斜度以及外界环境的影响。国内外的一些学者提出了许多提高传感器测量精度的方法, 但这些研究都是针对某一特性表面进行的, 没有涉及到对不同表面的测量时存在的问题。利用随机行走理论对物体表面的散射场进行了分析, 给出了不同粗糙度表面下弱散射光强与散射角及入射角的关系。由于设计制造的传感器量程范围内接收散射光的角度在15°至25°内变化, 因此取20°作为散射角角度, 理论计算模拟的三种不同粗糙面散射光强变化最大能达到300%左右。该结果对于优化激光三角传感器的设计和提高测量精度有一定的意义。     

光学针描法的理论与实验研究

在光纤探针描描使表面轮廓对光产生调的基础上提出了光学针找法的粗糙度测量技术。对光学针描法的理论基础，如表面轮廓原理和光耦合区理论进行限较为深入的分析。对单模光纤探针式轮廓仪的实验系统进行了介绍，最后给出了实验结果和误差分析。     

Fatigue damage detection using a speckle-contrast technique

An optical setup based on speckle-contrast measurement is proposed as an alternative to analyze fatigue damage on surfaces of metal samples. Based on the dispersion of the light, generated by a laser beam reflected by the surface, roughness and fatigue damage are analyzed after a specially designed fatigue test of metallic samples. The experimental results are obtained from an aluminum alloy type A319 modified with strontium with nodular silicon precipitates that was subjected to a fatigue procedure based in the norm ASTM E647.     

Investigation of interface roughness cross-correlation properties of optical thin films from total scattering losses

The interface roughness and interface roughness cross-correlation properties affect the scattering losses of high-quality optical thin films. In this paper, the theoretical models of light scattering induced by surface and interface roughness of optical thin films are concisely presented. Furthermore, influence of interface roughness cross-correlation properties to light scattering is analyzed by total scattering losses. Moreover, single-layer TiO₂ thin film thickness, substrate roughness of K9 glass and ion beam assisted deposition (IBAD) technique effect on interface roughness cross-correlation properties are studied by experiments, respectively. A 17-layer dielectric quarter-wave high reflection multilayer is analyzed by total scattering losses. The results show that the interface roughness cross-correlation properties depend on TiO₂ thin film thickness, substrate roughness and deposition technique. The interface roughness cross-correlation properties decrease with the increase of film thickness or the decrease of substrates roughness. Furthermore, ion beam assisted deposition technique can increase the interface roughness cross-correlation properties of optical thin films. The measured total scattering losses of 17-layer dielectric quarter-wave high reflection multilayer deposited with IBAD indicate that completely correlated interface model can be observed, when substrate roughness is about 2.84 nm.     

银薄膜对光学基底表面粗糙度及光散射的影响

为了研究金属银薄膜与光学基底表面粗糙度和光散射的关系,提出了通过对光学薄膜矢量散射公式积分来获得界面粗糙度完全相关模型和完全非相关模型下其表面的总反射散射的方法．理论计算了光学基底上两种模型在不同厚度银膜下的总反射散射和双向反射分布函数．结果表明,当沉积在光学基底上的银薄膜的厚度大于80nm后．两种模型下计算的银薄膜的表面总反射散射都等于基底的总积分散射,银薄膜能较好地复现出基底的粗糙度轮廓．实验研究表明为了复现基底的粗糙度,银薄膜的最佳厚度应在80～160nm之间．     

Streuung elektromagnetischer Wellen an rauhen Oberflächen mit anisotroper Autokorrelationsfunktion

Scattering of Electromagnetic Bulk Waves from Rough Surfaces with Anisotropic Autocorrelation Function Starting with the theory of light scattering given in [1]. a general theory of scattering of electromagnetic waves from a rough surface is deduced. In the general case of arbitrary anisotropic autocorrelation functions (acf) the spectral power densities for all different possibilities of polarisation variants of excitation and scattered light will be presented. In the special case of an elliptically anisotropic acf of surface roughness the measurement of the position of the acf-main axes will be described and the strategy of analyse of the measured indicatrix of scattered light for determining the acf will be given.