Analysis on fringe pattern demodulation by use of 2-D CWT

We discuss the wavelet transform profilometry based on the continuous wavelet transform technique as viewed from frequency analysis. We deduce the expression of one-dimensional (1-D) and two-dimensional (2-D) wavelet transform in frequency domain and analyze their characteristics in the application of demodulating the fringe patterns. We also compare 1-D CWT and 2-D CWT in demodulating the oblique fringe patterns with dual carrier frequency components. When oblique fringe patterns are processed, the direction normal to the grating line and x axis or y axis is not identical. By 1-D CWT, in which wavelet transform is carried out row by row, we cannot obtain the most similarity between local signal and the wavelet functions with different dilation values. While a fan 2-D continuous wavelet transformation can deal with the fringe pattern as a 2-D unit as well as has multi-directions, its advantage is that it can be used to exact the information in the spatial direction. However, its spatial localization ability is not very good, which leads that it is not suitable for demodulating the fringe patterns with high phase variation. Computer simulations and experiments have verified our analysis.     

On window size selection in the windowed Fourier ridges algorithm

The windowed Fourier ridges (WFR) algorithm can be used to extract the frequency and phase information from an exponential or carrier fringe pattern. The selection of the window size for this algorithm is investigated in this paper. For exponential phase fringe patterns, the window size does not need to be adjusted according to the signal frequency. Hence the scaling strategy of the wavelet transform is not necessary. Instead, the window size should be selected according to the balance between the linear phase approximation error and the noise level. For carrier fringe patterns, the influence of the conjugate component should also be considered. However it can be ignored when the lowest frequency of the fringe pattern is higher than 1.5/σ (σ is used to represent the window size).     

基于希尔伯特变换的干涉条纹相位解调新算法

提出了一种新的应用希尔伯特变换解调干涉条纹相位的算法,可以从单幅干涉条纹图中解调出全场相位分布.在实际应用中,常借助傅里叶变换实现希尔伯特变换算法,但是会忽略负频率成分,造成相位信息的丢失.对于相位分布非单调变化的干涉条纹,提出了一种判断函数,用来计算相位信息零频率点的分布.利用相位的零频率点分布构造了一个二元模板,使用该模板对本文提出的两次希尔伯特变换法产生的包裹相位图进行修正.对修正后的包裹相位图进行解包裹处理,可以得到连续的全场相位分布.对该方法用计算机模拟进行了验证.     

Demodulation of a single interferogram based on continuous wavelet transform and phase derivative

A novel method based on continuous wavelet transform (CWT) and guidance of phase derivative is developed to measure the phase of a single fringe pattern which contains closed fringes. Wrapped phase values are retrieved by ridge extraction algorithms based on CWT which has the capability of better noise reduction and thus increases the resolution of measurement significantly. To further reduce the noise, the scales detected by maximum ridge algorithm are filtered iteratively before retrieval of wrapped phase. The proposed method also identifies any ambiguous point in a non-monotonous fringe pattern by directly tracking an inflexion point from an unwrapped phase map without the use of a carrier. The algorithm developed is validated by computer simulation and experimental results. Based on micro interferometry the experimental results for both static and dynamic deformations of a micro structure demonstrate that the proposed method is an effective tool for the analysis of closed fringe patterns and subsequent deformation measurement. However, the proposed technique is limited to measurement of surface which is relatively smooth compared to the mean wavelength of the light source. In addition, prior knowledge of the sign of surface slope is required in cases where a spatial carrier is not available or adaptable.     

一种基于傅里叶变换的分析载波条纹的新方法

针对传统傅里叶变换法处理光载波干涉条纹图时会有边缘效应产生的问题,提出了一种基于傅里叶变换法的外推延拓方法,并从理论上进行了数学推导。为了验证这种方法的正确性,分别对一维数字信号和二维空间载波条纹图进行了数值模拟,进一步分析了误差产生的原因,并与传统的傅里叶变换法对比。结果表明该法可以有效抑制传统傅里叶变换法处理光载波干涉条纹图时边缘效应所造成的较大误差,在基于空间域相位调制技术的波面干涉测量中,对空间载波条纹图进行处理,可以使相位的计算精度达到3.3 mrad。     

小波相位分析测量成像径向畸变

为了测量光学成像像面各个像素的径向畸变大小,提出将小波变换载频条纹相位分析应用于径向畸变测量。采用正弦载波条纹作为测量模板,把径向畸变转化为径向调制相位。应用条纹相位分析导出径向调制相位和径向畸变的转化关系。采用小波频率估计和相位估计提取变形条纹的相位,由于变形条纹中心点是零畸变,中心点的瞬时频率和相位可以计算参考条纹的基频相位。两种基频相位之差就是与所有像素径向位置畸变分布对应的三维调制相位——称为径向畸变分布。利用校正公式和立方卷积插值算法对彩色畸变图像进行校正,给出详细的理论分析和实验结果。     

Discuss the measuring range of dual-frequency wavelet transform profilometry

We discuss the structure condition and sampling condition of wavelet transform profilometry (WTP) based on dual-frequency fringe pattern in this work. In the mentioned method a grating fringe with dual-frequency components is projected onto an object. And two wavelet ridge lines can be extracted by means of wavelet analysis, from which we can calculate two groups of wrapped phase information. Afterwards the retrieved phase with higher precision can be obtained through phase unwrapping process. However, it should be noted that the spectral aliasing of the deformed fringe pattern must be avoided in order to restore the correct phase information. And the two fringe carrier frequencies have to obey some rules as well. In this paper, the structure condition and sampling condition of the proposed method is deduced from the point of view of frequency analysis. It is proven that there would be no frequency overlapping in the deformed fringe pattern only when both of the two conditions mentioned previously are fulfilled. The results of computer simulations and experiments verify the validity of our theory.     

Two-dimensional multiscale windowed Fourier transform based on two-dimensional wavelet transform for fringe pattern demodulation

A two-dimensional multiscale windowed Fourier transform (2D-MWFT), based on two-dimensional Gabor wavelet transform (2D-GWT), for the phase extraction from a spatial fringe pattern in fringe projection profilometry is presented. First, the instantaneous frequencies on x and y direction of the modulated fringe pattern are determined by 2D-GWT, and then the local stationary lengths are obtained. The 2D-MWFT with different two-dimensional Gaussian windows whose width is set according to the local stationary length is preformed for each section of the modulated fringe pattern to achieve multiresolution analysis and phase demodulation. Comparing the result of the phase demodulated by 2D-GWT and two-dimensional windowed Fourier transform (2D-WFT) with that by 2D-MWFT in a numerical simulation, we show that the 2D-MWFT method is superior to these methods, especially for the local non-stationary signal with low frequency. The theory and the results of a simulation and experiment are shown.     

小波变换轮廓术在双频光栅条纹中的应用

为了解决非连续物体三维面形测量中所存在的非连续相位解包问题,采用计算机生成的两频率之比为一无理数的电子光栅作为空间载频光栅条纹投影到待测物体表面。另外结合伽博小波变换分析的相位解调原理,在一幅变形双频光栅图像中分析得到两个频率各自所对应的包络相位分布,并且应用钟金钢等所提出的双频条纹查表法进行解包得到确定的调制相位分布。提出的双频光栅-小波变换-查表相位解包法很好地解决了傅里叶变换轮廓术,以及连续相位解包法在非连续物体三维面形测量中所存在的问题。给出了详细完整的理论推导过程、计算机模拟以及实验验证,证实了该方法的可行性。     

Phase recovery from fringe patterns using the continuous wavelet transform

Interferometry is well established as an optical technique in which a measurand is encoded as the phase of a periodically varying intensity pattern. In view of the inherent accuracy of interferometry, many methods have been developed to retrieve the phase from images of the fringe pattern. Our focus in this paper is one such technique—the continuous wavelet transform (CWT). We begin by reviewing the CWT and the space–spatial–frequency localisation properties of wavelets. We show that a path which follows the maximum modulus of the CWT (the wavelet ridge) gives the instantaneous fringe frequency as a function of spatial displacement. The phase is automatically and trivially obtained, without discontinuities, by integration. Examples of practical wavelets are given and algorithms to isolate the wavelet ridge reviewed.     

Optical phase distribution evaluation by using an S-transform

An experimental study of the use of an S-transform to evaluate the phase distribution from a two-dimensional fringe pattern by introducing the carrier frequencies in two spatial directions, x and y, is presented. The phase distribution is extracted from the optical fringe pattern by using an S-transform gradient and S-transform phase methods. The experimental result for the Fourier transform profilometry algorithm is compared with the results of the S-transform analysis.     

A digital spatial carrier for wavelet phase extraction

In this paper, we present a new method to digitally add a high-frequency spatial carrier in order to use the wavelet phase extraction algorithm, which leads directly to the phase without the unwrapping process. The method needs a fringe pattern and its π/2 shifted version. The application is performed with two shifted fringe patterns obtained from the phase shifting images of the thermomechanical study of an MOS power transistor. A comparison with the phase shifting results is made.     

Applications of windowed Fourier fringe analysis in optical measurement: A review

The applications of windowed Fourier fringe analysis in the past decade are reviewed. Because fringe patterns from different optical measurement systems are similar, the reviewed applications are classified according to the functions of the windowed Fourier transform being used in fringe pattern analysis: denosing exponential phase fields, demodulating carrier fringe patterns, getting phase derivatives, and utilizing local properties. From these applications, the windowed Fourier transform is shown to be effective and versatile for fringe pattern analysis.     

光刻对准中干涉条纹相位解析研究

针对光刻对准中双光栅产生的具有多频率的干涉条纹,提出了一种基于二维解析小波变换进行条纹分析的方法。该方法首先通过二维小波变换的多尺度对条纹的多频率进行分析,并通过解析小波基函数将条纹的幅度与相位进行分离,最终通过二维小波脊方法提取出与偏移量相关的相位。在相位提取的同时通过二维小波脊所处点的角度分布来移除封闭条纹处理中常见的相位符号不确定性。数值模拟与实验验证了该方法的可行性并与传统的基于频域的相位分析方法进行了对比分析。结果表明,该方法能在获得所需相位信息的同时较好地滤除掉由光路抖动引起的噪声,具有很强的适应性。     

小波变换轮廓术的测量范围研究

利用小波“脊”处的小波系数来提取变形条纹中的相位信息可以在很大程度上抑制条纹图中有用的基频分量与零频和其它谐波频率分量的混叠,弥补了傅里叶变换轮廓术的不足。从离散信号频域分析角度,推导了变形条纹小波变换的频谱描述形式,讨论了其测量范围,包括结构条件和抽样条件。结果表明,只有在无周期内瞬时频谱混叠,即任意位置处物体瞬时高度变化满足h/xx=b<1/3条件时,和不存在抽样引起的周期间瞬时频谱混叠的抽样条件下(即一个周期内的抽样点数m≥4时),小波变换轮廓术才能正确恢复被测物体的三维面型。计算机模拟和实验验证了该结论。     

Parallel computing for fringe pattern processing: A multicore CPU approach in MATLAB environment

In the process of measurements such as optical interferometry and fringe projection, an important stage is fringe pattern analysis. Many advanced fringe analysis algorithms have been proposed including regularized phase tracking (RPT), partial differential equation based methods, wavelet transform, Wigner–Ville distribution, and windowed Fourier transform. However, most of those algorithms are computationally expensive. MATLAB^® is a general algorithm development environment with powerful image processing and other supporting toolboxes. It is also commonly used in photomechanical data analysis. With rapid development of multicore CPU technique, using multicore computer and MATLAB^® is an intuitive and simple way to speed up the algorithms for fringe pattern analysis. The paper introduces two acceleration approaches for fringe pattern processing. The first approach is task parallelism using multicore computer and MATLAB^® parallel computing toolbox. Since some algorithms are embarrassing problems, our first approach makes use of this characteristic to parallelize these algorithms. For this approach, parallelized windowed Fourier filtering (WFF) algorithm serves as an example to show how parallel computing toolbox accelerates the algorithm. Second, data parallelism using multicore computer and MATLAB^® parallel computing toolbox is proposed. A high level parallel wrapping structure is designed, which can be used for speeding up any local processing algorithms. WFF, windowed Fourier ridges (WFR), and median filter are used as examples to illustrate the speedup. At last, the results show that the parallel versions of former sequential algorithm with simple modifications achieve the speedup up to 6.6 times.     

单幅条纹图相位解调的小波分析方法

相位解调是条纹相位分析的关键问题.本文提出一种应用小波频率估计联合频率导数对变形条纹进行瞬时频率分析,从中提取参考基频,从而依靠单一变形条纹实现相位解调的方法.首先,理论上证明了当变形条纹瞬时频率空间导数等于零,该空间点的瞬时频率等于参考基频频率;其次,引入Gabor小波提取变形条纹的瞬时频率空间分布,利用变形条纹瞬时频率的空间导数分布识别提取参考基频,从而实现相位解调.利用该方法进行了三维形貌测量的实验,结果表明该方法在实现相位解调中效果良好.     

单幅条纹图相位解调的小波分析方法

相位解调是条纹相位分析的关键问题.本文提出一种应用小波频率估计联合频率导数对变形条纹进行瞬时频率分析,从中提取参考基频,从而依靠单一变形条纹实现相位解调的方法.首先,理论上证明了当变形条纹瞬时频率空间导数等于零,该空间点的瞬时频率等于参考基频频率;其次,引入Gabor小波提取变形条纹的瞬时频率空间分布,利用变形条纹瞬时频率的空间导数分布识别提取参考基频,从而实现相位解调.利用该方法进行了三维形貌测量的实验,结果表明该方法在实现相位解调中效果良好.     

Phase retrieval of speckle fringe pattern with carriers using 2D wavelet transform

A novel two-dimensional (2D) Gabor continuous wavelet transform (CWT) for phase retrieval and fringe filtering of speckle fringe patterns with spatial carriers is proposed. Theoretical analysis of 2D Gabor CWT is presented and results are compared with advanced fan 2D CWT using both the computer simulated and experimental speckle fringe patterns. It is shown that noise reduction by 2D Gabor CWT demonstrates better results than that of the advanced fan 2D CWT. Two-dimensional Gabor CWT is also compared with 2D Fourier transform and results show that 2D Gabor CWT algorithm has better noise immunity.