基于DMD的外腔量子点激光器性能研究

为了取得更加完善的外腔量子点激光器(QDL)测试 数据,构建了基于数字微镜器件(DMD,digital micro-mirror device)的InAs/InP量子 点外腔QDL。测量了其 光谱特性以及调谐范围,得到了基于DMD的外腔QDL调谐范围和相应的模式变 化。在理论和实验上与基于光栅的外腔QDL性能进行了比较,得到了在角色 散和反射光谱中与光栅的区别,实现了将DMD应用于外腔QDL中而获得的一种 新方法。     

高性能InAs/GaAs量子点外腔激光器

为了获得高性能的量子点外腔激光器(ECL),利用InAs/GaAs量子点Fabry-Perot(FP)腔激光器研制了光栅外腔可调谐ECL。对InAs/GaAs量子点ECL进行了一系列的性能测试,主要包括单模稳定性测试、单模调谐范围测试、阈值电流密度测试、无跳模连续调谐测试和输出功率测试。在室温条件下获得了24.6nm的连续调谐范围,覆盖波长从999.2nm到1 023.8nm,并且实现了波长无跳模连续调谐。在调谐范围内最低阈值电流密度为1 525A/cm2,而且在中心波长处获得的单模输出功率为15mW,单模边模抑制比(SMSR)高达35dB。研究结果表明,通过构建光栅外腔可以实现高性能的InAs/GaAs量子点ECL。     

大范围连续调谐的InAs/InP(100)外腔量子点激光器

实现了一种工作在连续波(CW)模式下InAs/InP(100)外腔量子点激 光器(EC-QDL)。激光器采用小型化的Littrow 外腔结构,中心波长为1.6μm且输出光方向固定。在室温条件下, 对InAs/InP(100)量子点外腔激光器进行 了一系列性能测试。实验结果表明,器件的单模大范围波长调谐达56.5nm,覆盖波长从1566.9623.4 nm,获得30 GHz的无跳模连续调谐范围,在中心波长1.6μm附近单 模输出功率达8mW,并 在无跳模连续调谐范围内获得了30dB以上的边模抑制比(SMSR)。     

InAs/GaAs多层堆垛量子点激光器的激射特性

利用固态源分子束外延技术，按S-K模式生长出五层堆垛InAs/GaAs量子点（QD）微结构材料. 用这种QD材料制成的激光器，内光学损耗为2.1cm-1，透明电流密度为15±10 A/cm2. 对于条宽100μm，腔长2.4mm的激光器（腔面未经镀膜处理），室温下基态激射的波长为108μm，阈值电流密度为144A/cm2，连续波光功率输出达2.67W（双面），外量子效率为63%，特征温度为320K. 研究了QD激光器翟激射特性，并对结果作了讨论.     

InAs/GaAs多层堆垛量子点激光器的激射特性

利用固态源分子束外延技术,按S-K模式生长出五层堆垛InAs/GaAs量子点(QD)微结构材料.用这种QD材料制成的激光器,内光学损耗为2.1cm-1,透明电流密度为15士10 A/cm2.对于条宽100μm,腔长2.4mm的激光器(腔面未经镀膜处理),室温下基态激射的波长为1.08μm,阈值电流密度为144A/cm2,连续波光功率输出达2.67W(双面),外量子效率为63%,特征温度为320K.研究了QD激光器翟激射特性,并对结果作了讨论.     

InAs/GaAs多层堆垛量子点激光器的激射特性

利用固态源分子束外延技术,按S-K模式生长出五层堆垛InAs/GaAs量子点(QD)微结构材料.用这种QD材料制成的激光器,内光学损耗为2.1cm-1,透明电流密度为15士10 A/cm2.对于条宽100μm,腔长2.4mm的激光器(腔面未经镀膜处理),室温下基态激射的波长为1.08μm,阈值电流密度为144A/cm2,连续波光功率输出达2.67W(双面),外量子效率为63%,特征温度为320K.研究了QD激光器翟激射特性,并对结果作了讨论.     

InAs/InP量子点激光器制备工艺研究

报道了通过化学湿刻蚀制备窄脊条InAs/InP量子点激光器的方法。激光器脊条主要是由半导体材料InGaAs和InP构成,通过选择合适配比的H2SO4∶H2O2∶H2O和H3PO4∶HCl腐蚀溶液和InP的腐蚀方向,在室温下选择性地腐蚀了InGaAs和InP,获得了窄脊条宽为6μm的量子点激光器。此激光器能够在室温连续波模式下工作,激射波长在光纤通信重要窗口1.55μm,单面最大输出功率超过12mW。     

InAs/InP量子点激光器中欧姆接触合金层特性研究

合金层与InAs/InP量子点激光器的接触电阻对激光 器的性能有很大影响,而接触电阻的 大小与合金材料、退火温度和退火时间有关。本文采用Au/Ni/Au/Ge做InAs/InP量子点激光 器的欧姆接触合金层,通过改变退 火温度和退火时间调节量子点激光器中接触电阻的阻值。实验发现,退火时间对接触电阻的 改变不 大,但是提高退火温度却能极大地降低接触电阻的阻值。实验获得了Au/Ni/Au/Ge 合金层与InAs/InP量子点激光器最佳欧姆接触条件,通过矩阵传输法测得相应接触电阻率为 1.34×10－6 Ω·cm²。在此条件下,制备激射中心波长为 1.577μm的多模量子点 激光器,室温下单面最大输出功率达到和超过39mW。     

InAs/GaAs量子点材料和激光器

介绍了近年来长波长InAsG/aAs量子点材料的生长、结构性质和量子点激光器的研究进展。     

1550nm InAs/GaAs量子点调Q光纤激光器

调Q光纤激光器在光纤传感、激光雷达、激光加工和光纤通信等众多方面有着广泛的应用。半导体量子点(QD)由于具有较高的损伤阈值和宽光谱特性,是一种优良的可饱和吸收体(SA),但是目前制备发光中心波长为1 550 nm的QD SA依然是一个巨大的挑战。通过在分子束外延(MBE)生长InAs QD过程中加入两次间断制备了1 550 nm InAs/GaAs量子点半导体可饱和吸收镜(QD-SESAM),并通过构建光纤直线腔,研制出发光中心波长约为1 550 nm的被动调Q光纤激光器。该激光器最大输出功率约为2.5 mW,实现了55 kHz的重复频率,同时达到了1.45μs的脉冲宽度和45.36 nJ的单脉冲能量,表现出了InAs/GaAs QD材料在1 550 nm调Q光纤激光器应用中的巨大潜力。     

Calibration-Free and High-Sensitivity Microwave Detectors Based on InAs/InP Nanowire Double Quantum Dots

At the cutting-edge of microwave detection technology, novel approaches which exploit the interaction between microwaves and quantum devices are rising. In this study, microwaves are efficiently detected exploiting the unique transport features of InAs/InP nanowire double quantum dot-based devices, suitably configured to allow the precise and calibration-free measurement of the local field. Prototypical nanoscale detectors are operated both at zero and finite source-drain bias, addressing and rationalizing the microwave impact on the charge stability diagram. The detector performance is addressed by measuring its responsivity, quantum efficiency and noise equivalent power that, upon impedance matching optimization, are estimated to reach values up to ≈2000 A W⁻¹, 0.04 and ≈${10}^{-16}\mathrm{W}/\sqrt{Hz}$, respectively. The interaction mechanism between the microwave field and the quantum confined energy levels of the double quantum dots is unveiled and it is shown that these semiconductor nanostructures allow the direct assessment of the local intensity of the microwave field without the need for any calibration tool. Thus, the reported nanoscale devices based on III-V nanowire heterostructures represent a novel class of calibration-free and highly sensitive probes of microwave radiation, with nanometer-scale spatial resolution, that may foster the development of novel high-performance microwave circuitries.     

Effects of growth interruption on the evolution of InAs/InP self-assembled quantum dots

We investigated the change in the structural and optical properties of InAs/InP quantum structures during growth interruption (GI) for various times and under various atmospheres in metalorganic chemical vapor deposition. Under AsH₃ + H₂ atmosphere, the mass transport for the 2D-to-3D transition was observed during the GI. Photoluminescence peaks from both quantum dots (QDs) and quantum wells were observed from the premature QD samples. The fully developed QDs showed the two distinct temperature regimes in the PL peak position, full width at half maximum (FWHM) and wavelength-integrated peak intensity. The two characteristic activation energies were obtained from the InAs/InP QDs: ∼10 meV for intra-dot excitation and 90 ∼ 110 meV for the excitation out of the dots, respectively. It was also observed that the QD evolution kinetics could be suppressed in PH₃ + H₂ and H₂ atmospheres. The proper control of GI time and atmosphere might be a useful tool to further improve the properties of QDs.     

Wavelength controlled InAs/InP quantum dots for telecom laser applications

This article reviews the recent progress in the growth and device applications of InAs/InP quantum dots (QDs) for telecom applications. Wavelength tuning of the metalorganic vapor-phase epitaxy grown single layer and stacked InAs QDs embedded in InGaAsP/InP (1 0 0) over the 1.55-μm region at room temperature (RT) is achieved using ultra-thin GaAs interlayers underneath the QDs. The GaAs interlayers, together with reduced growth temperature and V/III ratio, and extended growth interruption suppress As/P exchange to reduce the QD height in a controlled way. Device quality of the QDs is demonstrated by temperature-dependent photoluminescence (PL) measurements, revealing zero-dimensional carrier confinement and defect-free InAs QDs, and is highlighted by continuous-wave ground-state lasing at RT of narrow ridge-waveguide QD lasers, exhibiting a broad gain spectrum. Unpolarized PL from the cleaved side, important for realization of polarization insensitive semiconductor optical amplifiers, is obtained from closely stacked QDs due to vertical electronic coupling.     

Capacitance-voltage analysis of InAs quantum dots grown on InAlAs/InP(0 0 1)

The electronic properties of InAs quantum dots (QDs) grown on InAlAs/InP(0 0 1) were studied by using capacitance-voltage (C-V) analysis and photoluminescence (PL) measurements. The level positions of electrons and holes could be studied separately by using n- and p-type InAlAs matrices, respectively. The holes are found to be more confined than electrons in these kinds of dots.     

Electron beam pre-patterning for site-control of self-assembled InAs quantum dots on Inp surfaces

A site control technique for individual InAs quantum dots (QDs) formed by self-assembling has been developed, using scanning electron microscope (SEM) assisted nano-deposition and metal organic vapor phase epitaxy (MOVPE). In a first step we characterize a device with randomly distributed InAs QDs on InP, using resonant tunneling and transmission electron microscopy (TEM). Secondly, we use nano-scale deposits, created at the focal point of the electron beam on an InP based heterostructure, as “nano growth masks”. Growth of a thin InP layer produces nano-holes above the deposits. The deposits are removed by oxygen plasma etching. When InAs is supplied on this surface, QDs are self-assembled at the hole sites, while no InAs dots are observed in the flat surface region. A vertical single electron tunneling device is proposed, using the developed technique.     

Increasing the quantum efficiency of InAs/GaAs QD arrays for solar cells grown by MOVPE without using strain‐balance technology

Research into the formation of InAs quantum dots (QDs) in GaAs using the metalorganic vapor phase epitaxy technique is presented. This technique is deemed to be cheaper than the more often used and studied molecular beam epitaxy. The best conditions for obtaining a high photoluminescence response, indicating a good material quality, have been found among a wide range of possibilities. Solar cells with an excellent quantum efficiency have been obtained, with a sub‐bandgap photo‐response of 0.07 mA/cm² per QD layer, the highest achieved so far with the InAs/GaAs system, proving the potential of this technology to be able to increase the efficiency of lattice‐matched multi‐junction solar cells and contributing to a better understanding of QD technology toward the achievement of practical intermediate‐band solar cells. Copyright © 2016 John Wiley & Sons, Ltd.     

快速率生长MBE InAs/GaAs(001)量子点

用快速率(1.0ML/s)生长MBE InAs/GaAs(001)量子点。原子力显微镜观察结果表明,在量子点体系形成的较早阶段,量子点密度N(θ)随InAs沉积量θ的变化符合自然指数形式N(θ)∝ek(θ-θc),这与以前在慢速生长(≤0.1ML/s)条件下出现的标度规律N(θ)∝(θ-θc)α明显不同。另外,在N(θ)随θ增加的过程中,快速率生长量子点的高度分布没有经历量子点平均高度随沉积量θ逐渐增加的过程。这些实验观察说明,以原子在生长表面作扩散运动为基础的生长动力学理论至少是不全面的,不适用于解释InAs量子点的形成。这些观察和讨论说明,即使在1.0ML/s的快速率生长条件下,量子点密度也可以通过InAs沉积量有效地控制在1.0×108cm-2以下,实现低密度InAs量子点体系的制备。     

Stable Temperature Characteristics of InAs／GaAs Quantum Dots at Long Wavelength Emission

The time-resolved photoluminescence and steady photoluminescence (TRPL and PL) spectra on self-assembled InAs/GaAs quantum dots (QDs) are investigated. By depositing GaAs/InAs short period superlattices (SLs), 1. 48μm emission is obtained at room temperature. Temperature dependent PL measurements show that the PL intensity of the emission is very steady. It decays only to half as the temperature increases from 15 K to room temperature, while at the same time, the intensity of the other emission decreases by a factor of 5 orders of magnitude. These two emissions are attributed to large-size QDs and short period superlattices (SLs), respectively. Large-size QDs are easier to capture and confine carriers, which benefits the lifetime of PL, and therefore makes the emission intensity insensitive to the temperature.     

Studies of liquid-phase deposition-oxide/InP structure by liquid-phase deposition

Silicon-dioxide (SiO₂) growth on an indium-phosphide (InP) substrate by use of room-temperature (∼30°C) liquid-phase deposition (LPD) is demonstrated. The produced LPD-SiO₂ is of good quality and reliability because of the suppression of interdiffusion by use of relatively low temperatures. Because LPD is difficult without residual OH on the substrate, an InP surface rich in hydroxyls (In-OH) is created by pretreating the wafer substrate in a (29% NH₄OH:H₂O₂=1:1) solution. The LPD-SiO₂/InP is used to fabricate a metal-oxide semiconductor (MOS) capacitor with a device area of 1.12×10⁻⁴ cm², yielding a leakage-current density of 8.1×10⁻⁹ A/cm² at 3 MV/cm. A mechanism for the LPD deposition of SiO₂ on InP is also presented.     

InAs/GaAs自组装量子点结构的能带不连续量

为确定异质结界面带阶,结合光致发光(PL)谱和深能级瞬态谱(DLTS)测量结果,利用有效质量近似理论,计算得到了InAs/GaAs自组装量子点结构的能带不连续量,其中导带不连续量ΔEc＝0.97 eV,价带不连续量ΔEv＝0.14 eV.