点衍射干涉检测技术

本文介绍了点衍射干涉仪不同发展阶段的特点和应用。点衍射干涉仪由波长量级的针孔产生高质量的球面波作为参考波前,能够得到衍射极限性能的分辨率。按照不同的光路特点,点衍射干涉仪可分为点衍射共路干涉和点衍射非共路干涉两种结构,主要应用于高精度波前检测和面形检测。共路干涉结构简单紧凑,对环境振动不敏感,对光源相干度要求不高,可利用光束偏振态及光栅衍射分束的特性对传统点衍射板进行改造,在全共路点衍射干涉仪中引入时间相位调制技术和干涉对比度可调技术,可进一步提高波前检测精度。采用反射式针孔和各种光纤结构发展了非共路点衍射干涉仪,实现了大口径、高精度球面反射镜面形的测量。本文重点阐述了用于极紫外光刻投影物镜中高精度球面反射镜面形检测的反射式针孔点衍射干涉仪,并展望了点衍射检测技术在生物检测等领域的应用前景和发展趋势。     

Reference-free Shack-Hartmann wavefront sensor

The traditional Shack-Hartmann wavefront sensing (SHWS) system measures the wavefront slope by calculating the centroid shift between the sample and a reference piece, and then the wavefront is reconstructed by a suitable iterative reconstruction method. Because of the necessity of a reference, many issues are brought up, which limit the system in most applications. This Letter proposes a reference-free wavefront sensing (RFWS) methodology, and an RFWS system is built up where wavefront slope changes are measured by introducing a lateral disturbance to the sampling aperture. By using Southwell reconstruction two times to process the measured data, the form of the wavefront at the sampling plane can be well reconstructed. A theoretical simulation platform of RFWS is established, and various surface forms are investigated. Practical measurements with two measurement systems-SHWS and our RFWS-are conducted, analyzed, and compared. All the simulation and measurement results prove and demonstrate the correctness and effectiveness of the method.     

Wavefront measurement with a phase-shifting lateral-shearing Sagnac interferometer operating in broadband light

A phase-stepping lateral shearing Sagnac interferometer for wavefront measurement is described. Phase shifting is implemented using a polarisation modulator operating on the wavelength independent Pancharatnam's phase allowing accurate measurement of phase maps even with broadband light. We demonstrate the interferometer by measuring a range of different wavefront shapes using both laser and white light.     

针孔直径对自参考干涉波前传感器测量精度的影响

针孔直径的大小是影响自参考干涉波前传感器测量精度的重要因素,在实际应用中应根据测量精度要求以及强度通过率来选择.首先基于傅里叶光学理论分析了针孔直径对参考波前质量以及强度通过率的影响,然后通过数值仿真和实验对其进行证实.研究结果表明,当针孔直径等于艾里斑直径的一半时可以产生高质量的参考波前,对于峰谷值不小于一个波长的畸变波前,其参考波前的均方根值低于λ/100.这些理论分析和实验结果可为自参考干涉波前传感器的设计和精度分析提供有价值的参考和指导. 关键词： 自适应光学 自参考干涉波前传感器 针孔直径 强度通过率     

基于波长移相剪切干涉的准直波前重构技术

为了实现干涉仪出射准直波前的重构,提出了基于波长调谐移相的横向剪切干涉技术。干涉仪出射波前分别经楔板的前后表面反射,通过角锥棱镜返回后在干涉仪CCD上形成剪切干涉条纹。采用波长移相方法提取剪切干涉条纹的相位信息从而实现准直波前重构。分析相对剪切比对波面重构精度的影响,推导相对剪切比和其影响因素间的关系公式,给出波长移相中光程差常数分量的估算方法。测量干涉仪的三组出射波前,波前的峰谷值分别为3.22λ、2.10λ、0.83λ。该方法简化了传统测量干涉仪准直波前的横向剪切干涉装置,提高了测量精度,特别适合于测量波长移相干涉仪的出射波前。     

可变温条件下材料表面的双向反射分布函数测量

基于双向反射分布函数单一参考测量法的测量原理,研制了一套测量温度最高可达500℃的双向反射分布函数测量系统。系统利用转角装置来实现不同角度位置的变换,用加热炉对试样进行加热,采用模糊PID控制器进行温度的控制。在25℃～500℃的温度范围内,对铜表面的双向反射分布函数进行了测量实验,光源采用可见光波长0.6328μm,功率约8mW的He-Ne激光器,选用Si1336-5BK光电探测器。实验表明：随着试样表面温度的升高,铜表面的BRDF测量值发生了改变;在温度上升或下降到同一温度时,铜表面的BRDF测量值不同。最后,对实验现象的形成机理进行了深入分析。上述实验结论对材料表面空间反射特性的研究具有重要意义。     

二次光栅在波前测量中的应用

采用一种特殊的二次光栅用于激光波前测量,它对非零级衍射光束具有不同的聚焦效应,其光栅线为圆弧型而非直线。导出了在会聚光束情况下的两平面成像在单一像平面上的距离关系,实验上实现了二次光栅用于会聚光束的波前测量,测量得到会聚光束具有较大的散焦(-2.93λ)和球差(1.34λ),与该透镜引起波前的离焦像差理论理想值(-2.695λ)基本符合。该技术可以实现波前的高空间分辨力和高精度实时测量,大大减少光学元件数量,降低装置成本。由于大功率激光束的不稳定性,其波前变化非常快,所以该方法的实时性非常适合于这种波前变化的测量。     

Enhancement of measurement sensitivity in determination of changes in the shape of a wavefront by holographic lateral-shearing interferometry

A method for increasing measurement sensitivity in the visualization of dynamics of changes in wavefront shape with the use of holographic lateral-shearing interferometry is considered. At the first stage of this method, a photograph of a reference shear interferogram obtained with tuning to closely spaced fringes is recorded under linear conditions. After chemical treatment, the photograph of the reference shear interferogram is installed in exactly its initial position. At the second stage, a series of photographs of lateral-shear interferograms of the wavefront under study is recorded under nonlinear conditions using the photograph of the reference interferogram. The photographs of the lateral-shear interferograms are optically processed by two coherent beams with selection of the highest diffraction orders, which makes it possible to visualize the dynamic component of the wavefront deformation with an increase in the measurement sensitivity (the static component is excluded in this case). The effect of the degree of nonlinearity of photograph recording on the range in which the measurement sensitivity can be controlled during the optical processing of a pair of matched photographs or one double-exposure photograph of interferograms recorded at different values of a lateral shift is analyzed.     

The study of wavelength-dependent wavefront aberrations based on individual eye model

Theoretical calculations of the wavelength dependence of the ocular wavefront aberrations are performed with individual eye model. Individual eye model, based on the traditional Gullstrand-Le Grand eye model, has been established with measured individual cornea data, eyeball depth and wavefront aberrations. We analyze the wavelength-dependent wavefront aberrations at 12 different visible wavelengths (between 400 and 750 nm) for eight eyes. The change of defocus with wavelength (longitudinal chromatic aberration, LCA) is noticeable, and in good agreement with the results from references. In most cases, the primary spherical aberration changes significantly with wavelength. In comparison with the primary spherical aberration, the other higher-order wavefront aberrations have a smaller change with wavelength. These results have potential applications in those situations where defocus or higher-order wavefront aberrations information in arbitrary wavelength is required.     

Determining large step heights using zero-order interference fringe identification and an external cavity diode laser

Zero-order interference fringe identification is a powerful tool for measuring large step heights. In contrast to white light scanning interferometry, this study utilizes an external cavity diode laser as the light source. The zero-path difference point can be accurately identified by combining wavelength scanning interferometry, in which the laser wavelength is continuously changed, with single wavelength interferometry, in which the laser wavelength is fixed. The experimental apparatus is a two-arm interferometer containing the sample in the measurement arm. The step height denotes the distance between two locations of a zero-order interference fringe, which are obtained by continuously varying the length of the reference arm. The accuracy of a sample of 10 mm step height was found to be 0.33 μm.     

用于复色哈特曼人眼波像差测量的折/衍混合调焦系统

设计了一个折/衍混合多色调焦系统,可用于哈特曼波前传感器测量不同波长下人眼的波像差.系统由两片折射透镜和一个二元衍射面构成,焦距调整范围为－200～200 mm.系统性能达到衍射受限,在0.488～0.655 μm波长范围内,焦点色位移小于3 μm.整个系统结构简单、紧凑,同哈特曼波前传感器相匹配,可用于普通人群眼波像差的测量.     

近红外瞬态脉冲波前高精度干涉检测技术

惯性约束聚变(ICF)系统中高能瞬态脉冲激光由于脉冲时间短、能量高、波前畸变大,通常的检测方法难于检测脉冲激光波前。提出了一种基于空间相位调制技术可用于近红外瞬态波前高精度检测的环形径向剪切干涉仪。该系统可以以30~150 mm的圆瞳和方瞳口径、对波长为1064 nm的近红外纳秒级脉宽的脉冲激光波前实现共路、无参考面的瞬态、高精度的检测。系统的波前重构理论经过计算机仿真验证,精度达1/1000λ以上;检测结果与ZYGO数字波面干涉仪进行了比对,峰谷值、均方根值均优于1/15λ,并具有很好的可重复性。该系统目前已用于惯性约束聚变系统的脉冲检测,并且该技术适用于各种可见光和红外波段激光。     

分布式光纤Bragg光栅波长校准方法

提出了一种利用标准参考光谱进行波长校准的方法。实验中利用由宽带光源和光纤可调谐滤波器组成的可调谐光源分别扫描了参考光谱和传感光栅的光谱。在参考通道,ITU标准参考模块的输出是具有固定波长的梳状光谱。利用高斯拟合算法计算出由标准参考透射谱峰值输出的对应的驱动电压,通过样条插值函数获得了滤波器输出波长与驱动电压的关系。计算光栅反射谱峰值对应的驱动电压,利用上面获得的滤波器输出波长与驱动电压的关系式可以计算出传感光栅的Bragg波长。实验结果表明,在较大的波长范围内实现了对多个传感光栅的波长校准,减小了由滤波器非线性输出造成的测量误差,具有较高的重复性。     

圣诞树底座灯系统的光学参数对照测量与数据分析

某公司生产的圣诞树由于质量问题在销往国外时被烧毁。采用故障样品和参照样品比较测量法,在同等条件下,分别测量两个样品的光谱辐射照度分布,波段积分辐射照度,色温,以及温度特性等参数。实验结果表明:故障样品与参照样品的色温分别为2722K和3060K。在紫外波段、可见波段和近红外波段,故障样品的积分辐射照度分别是正常样品的1.7倍、2.4倍和10.7倍。故障样品的灯系统未进行任何技术处理,而参照样品的灯系统进行了可见与近红外吸收处理,因此总辐射照度显著减弱。温度特性实验结果表明:在同样的受辐照时间7min内,故障样品的温升高达101.5℃,而参照样品的温升只有46.4℃。这些参数的差异可能是导致圣诞树烧毁的主要原因。     

哈特曼测量大气相干长度研究

研究了利用哈特曼波前传感器测量大气相干长度的两种方法:一种是测量两个子孔径恒星光波到达角起伏方差的差分像运动法;另一种是测量恒星波前分布,通过波前分布的剩余方差推算得到大气相干长度。试验测量结果表明,两种方法得到的测量结果基本一致,得到了大气相干长度的可靠数据,两种方法得到了相互验证,实现了在应用哈特曼波前传感器测量大气波前分布时,同时得到当前的大气信息,对分析哈特曼波前传感器的测量结果有参考意义。     

Rapid and accurate analysis of surface and pseudo-surface waves using adaptive laser ultrasound techniques

A method has been developed to measure the phase velocity of laser generated and detected surface acoustic waves. An optical grating produced by an electronically addressable spatial light modulator (SLM) was imaged onto the sample surface to generate surface acoustic waves whose frequency and wavefront was controlled by the SLM. When the grating period matched the surface acoustic wavelength, the surface wave was strongly excited, thus the wavelength and, thereby the phase velocity was determined. We present results with this method that allows the phase velocity and the angular dispersion of the generalized surface wave as well as the pseudo-surface wave on the (100) nickel to be measured. Measurements on (111) silicon single crystals are also presented. The measurement precision is approximately 0.2%. Methods to further improve the measurement precision are also discussed.     

Digital holography at millimetre wavelengths

In this paper, we describe a method for wavefront reconstruction at millimetre wavelengths using off-axis holography, a frequently used image recording technique at visible wavelengths first demonstrated in the 1960’s. Millimetre radiation has been highlighted recently in the imaging of non-conducting materials and objects, which often show significant transparency at these long wavelengths, even though opaque at visible and infrared wavelengths. Holography provides a method for recording a lens-less image of an object thus reducing loss of spatial frequency information, which is important for obtaining maximum resolution at long wavelengths. An experimental arrangement based on a simple form of Fresnel off-axis holography is described, with the object illumination and reference beams derived using two radiating horn antennas fed by a single coherent source (a Gunn diode oscillator operating at 100 GHz – wavelength 3 mm) via a 3 dB cross-guide coupler. The process is discussed in the context of imaging and in the validation of millimetre wave radiation sources (horns). We show that the entire fields from these and other components can be analysed using computational optics with data derived from a single measurement obtained using inexpensive equipment.     

基于衍射光栅曲率波前传感器的实时波前重构研究

自适应光学系统要求波前传感器能实现动态实时测量,曲率波前传感技术符合这一发展要求。一种新型的基于扭曲衍射光栅的曲率波前传感器在探测装置的实现方法方面具有较大优势,其波前重构已应用于光学度量。根据衍射光学理论,对其探测信号进行数值模拟,并利用Neumann边界条件的Green函数法对其波前重构进行数值模拟。结果表明：Green函数法归结为2矩阵相乘,计算速度快,达到实时重构要求; Green函数法对阶数不高的Zernike多项式重构效果较好;影响重构误差的主要因素是光强梯度的边界噪声。     

FFT动态相位重建算法的滤波窗影响分析

为了优化相位重建算法,针对波面干涉图的傅里叶频谱,分析了不同滤波窗口的分布特征和频谱响应,通过计算机仿真和实验测试,确定了FFT动态相位重建算法的最佳滤波窗口类型。其中处理仿真干涉图重建的波面与原始波面的波面峰谷值残差为0.008 5λ,波面均方根值残差为0.000 1λ;处理实验干涉图获得的波面与移相干涉测量法获得的波面峰谷值残差为0.009 3λ,波面均方根值残差为0.000 5λ。结果表明:选取Hamming窗进行滤波处理并重建的相位经拟合后得到的波面较参考波面的面形残差最小,相位重建精度优于0.01λ,可进一步应用于大口径光学元件的测量中。     

Auto-correction method for differential attenuation in a fiber-optic distributed-temperature sensor

A novel method to improve the accuracy of fiber-optic distributed-temperature measurements derived from Raman backscatterings is presented. This method utilizes two light sources with different wavelengths, such that the wavelength of the primary source's return anti-Stokes component overlaps with the incident wavelength of the secondary light source to cancel out the nonidentical attenuations generated by the wavelength differences between Stokes and anti-Stokes. The concept is successfully verified by the experimental results obtained from several sample fibers. The correction can be made automatically and continuously without any interruptions during the whole measurement periods.