Multi-order diffractive optical elements for achromatic interconnections at 1.30 μm and 1.55 μm

We propose a class of diffractive components allowing free-space optical systems to operate at the two telecommunication wavelengths simultaneously. These are fifth order diffractive components working at the sixth order at 1.30 μm and at the fifth order at 1.55 μm. Simulation results showing the link efficiency between two single-mode fibres as a function of the wavelength are presented. The width of the two transmission windows depends on the architecture of the whole system, which must be designed in accordance with technological realizability.     

Introduction of the Impulse Response Function in Common-Path Interferometers with Fourier Plane Filters

In the present paper it will be shown how the introduction of a Fourier plane filter can create various types of common-path interferometers for measuring changes in surface tilt or curvature of an object surface. This is obtained by placing a holographic optical element in the Fourier plane of a 4-f optical system. The interferometers are analysed by using the paraxial approximation of the Huygens-Fresnel integral formalism, and the interferometer functions are given by a novel formalism using impulse response functions. Based on this technique, an interferometer for measuring dedicated changes in surface deflection is presented. This interferometer is insensitive to rigid surface rotations and displacements. The interferometer can be embedded in systems based on single point measurement of a time dependent deflection, i.e. vibrometers, as well as in full-field measurements such as electronic speckle interferometers.This paper was originally presented at the 2001 International Conference (2nd Joint OSJ-SPIE Conference) on Optical Engineering for Sensing and Nanotechnology, ICOSN 2001 which was held June 6-8, 2001 at the Pacifico-Yokohama Conference Center, Yokohama, Japan.     

多层衍射光学元件成像特性的研究

讨论了多层衍射光学元件的光学成像性质.给出了优化设计多层衍射光学元件最大光栅厚度的方法,分析了构成多层结构的每块单层衍射元件的衍射效率对整体衍射效率的贡献作用.在0.436～0.656 μm的可见光波段,多层衍射光学元件最低衍射效率可达到98%以上,克服了单层衍射元件偏离设计波长后衍射效率显著下降的缺点,改善了宽波段衍射效率.将多层衍射光学元件应用在折、衍射混合光学系统中能够明显提高系统的成像质量,同时使得光学系统体积减小,重量减轻,并且在某些系统中可以避免使用昂贵的特殊材料,从而可以降低光学系统的成本价格.     

Using diffractive optical element and Zygo interferometer to test large-aperture convex surface

A valid method for measuring the large-aperture convex surface by using a curved diffractive optical element (DOE) and a Zygo interferometer is demonstrated experimentally. In this method, the direct use of source and high-resolution CCD camera of Zygo interferometer represents a major advance in the areas of adjustment. The DOE, fabricated by combining laser direct writing and lithography, results in higher accuracy, efficiency and lower cost for testing aspheric compared with other types of DOE employed. We have fabricated one optical test system and measured a 110-mm-diameter convex surface of errors 44.3 nm rms and 311 nm P–V.     

Formation of diffractive microrelief on diamond film surface

The fabrication of diamond-based optical elements for high-power CO₂ lasers is of particular interest because of low optical absorption, high thermal conductivity and weak temperature dependence of the refractive index of diamond. In earlier publications, we presented the results of the implementation of ion-chemical etching technology for generating a diffraction grating on the surface of a diamond film. The results on generating diamond diffractive optical elements and a sub-wavelength antireflection structure by plasma etching were also presented. In this paper, we study the generation of the grating on the diamond surface by ion-chemical etching. The choice of (Ar+O₂) mixture as a working gas and use of niobium as a masking layer are substantiated. The results of studying a diffraction microrelief generated on the diamond-film surface through ion-chemical etching are discussed.     

同时实现多角度非垂轴面均匀照明的衍射光学器件

本文利用长焦深器件设计思路,提出了通过设计衍射光学器件相位分布使得在三个垂轴面上满足均匀照明要求来间接实现非垂轴面均匀照明的设计方法,并完成了同时实现多种角度非垂轴面均匀照明的衍射光学器件设计.基于爬山法和模拟退火法相结合的混合算法,设计了器件的相位分布,在30°、45°、55°非垂轴面上光斑不均匀性分别为5.91%、4.00%、3.38%.该方法可推广至二维情形,实现任意曲面均匀照明的要求.     

基于位相分布限制衍射光学元件的散斑抑制方法

根据散斑产生的机理,利用像素点之间干涉的概念,提出了通过限制光场的位相分布范围来抑制投影图像中散斑对比度的方法.在部分发展散斑的条件下,推导了位相均匀分布情况下的散斑对比度公式,揭示了当相位分布范围在0.6π~2π之间时,散斑对比度随相位分布范围的变化而震荡变化,当把相位分布范围限制在0.6π以下时,散斑对比度会随相位分布范围的减小而迅速下降.建立了理想仿真模型和实际仿真模型来验证该方法的正确性和可行性.在理想仿真模型中,当位相分布范围从2π变到0,所得散斑图样对比度从66.44%降到0;在实际仿真模型中,模拟了实际激光投影系统的光路结构,并运用了两片衍射光学元件,一片用于激光整形匀化,一片用于光场的位相分布范围限制,散斑图样对比度从92.78%降低到2.09%.该方法稳定性高、耗能低、使用元件尺寸小,为全息投影显示的散斑抑制提供了参考.     

光电设备中球罩的视轴误差研究

光学窗口是光电设备中必不可少的光学元件,对处于大视场成像或全方位扫描工作模式的光电系统,常采用曲面形式的同心球罩作为光学窗口。球罩加工过程中的球心偏差和装配过程中与光电系统入瞳中心的偏差都会对光电系统的视轴角度带来误差。推导了球罩加工、装调误差对光电系统视轴影响的数学表达式,分析了各误差对光电系统视轴的影响,得到了球罩的各误差环节对光电系统视轴影响的规律,对球罩的设计和在光电系统中的使用具有重要的意义。     

GRIN透镜干涉仪光学系统模型和分析

较完整地提出GRIN透镜干涉仪的数学模型,分析了光学系统处于六种不同模态下的特点,讨论了有关结构因素,特别是GRIN透镜长度对干涉仪工作性能的影响,有关分析和相关结论可作为GRIN透镜干涉仪系统设计和测量计算的依据。     

多光谱光学系统光轴平行性组合测试装置

介绍一种激光、白光和热像仪(或微光)三光合一观测仪器的捆绑式新型组合测试装置及其测试原理，并详细叙述了用该装置测试“三光”光轴平行性的过程和注意事项。该装置十字分划线的设计未采用常规的玻璃刻线工艺，而是选取电阻率较高的钨丝制成十字分划线，并在分划线的两端焊上电极，避免了测试时由于更换十字分划线靶标而可能产生的误差。该装置通过对观测仪器光轴平行性的检测和调试，为精确调校提供了依据，从而使3种光学系统的光轴平行性达到所需精度要求，对保证观瞄及测距的方向一致性起到了准确指示的作用。     

一种基于光学倍乘原理的绝对距离干涉测量系统

介绍了一个基于光学倍乘原理的绝对距离干涉测量系统。系统包括两个干涉仪:采用半导体激光器作为光源的定位干涉仪和测量位移的外差干涉仪。介绍了光源的选择,系统的设计以及信号的采集和处理方案。采用这套绝对测量系统,可以实现长度为2m以内的绝对距离测量,定位精度可以达到±0.5μm。     

点衍射干涉仪波面参考源误差及公差分析

为了保留光纤点衍射干涉仪容易对准以及衍射光束易于控制的优点,同时又能实现大数值孔径（NA）光学系统的检测,设计了一种新型的波面参考源（WRS）,它保留了光纤点衍射和微孔点衍射的优点,可满足大NA极紫外光刻物镜系统波像差检测的要求。本文在分析各种误差的基础上,搭建了WRS原理光路并对WRS的系统误差标定算法进行详细的研究,得到WRS标定时旋转平台的角度公差为0.5°,跳径时偏离系数为0.5%。这一新型WRS误差分析及标定对于实现高精度的检测具有十分重要的意义,最终为实现WRS系统误差标定提供理论基础。     

适合于内窥成像的共路型光学相干层析成像系统

提出了一种采用光纤型迈克耳孙干涉仪进行光程补偿的菲佐型光学相干层析成像(OCT)系统.该系统的传感探头为共路干涉结构,以解决现有内窥光学相干层析成像系统中存在的探头运动导致图像失真、以及更换使用不同探头时需进行色散和偏振态调节等问题.光程补偿和振动干扰实验结果表明,光程补偿方法正确可行,系统对环境干扰不敏感.利用研制的系统对反射镜和近红外卡进行了成像实验,验证了系统的有效性.提出的方法非常适合于内窥成像,并给出了把系统扩展为内窥光学相干层析成像系统的具体实现过程.     

便携式泰曼格林型干涉仪装调方法研究

 为满足光学系统对高精度检测的要求,依据一种新型便携式干涉仪的设计方案,研究了装调方法。该型干涉仪基于改进的泰曼-格林光路结构,其设计测试精度达到λ/10（P-V,λ=630 nm）,具有参考镜离轴、体积小巧、便携、精度较高、成本低及便于批量装备等新特点。针对该新型干涉仪的结构特点,研究了以两个互相垂直的光轴为基准对整体结构进行装调的新方法,并用装调完善的干涉仪进行了实测试验和比对试验。试验结果表明,该新型干涉仪器对已知面型精度为λ/10（P-V,λ=630 nm）的标准球面镜进行检测,其精度可达到0.09 λ;在相同的测试条件下进行比对实验时,该新型干涉仪对普通标准球面镜的检测结果为0.053 λ（RMS,λ=630 nm）,ZYGO干涉仪的检测结果为0.051 λ（RMS,λ=632.8 nm）,两者测量能力较为接近。采用新装调方法进行装调的该新型便携式干涉仪的实际检测精度达到了设计要求,新装调方法可以满足该新型干涉仪的指标要求。     

精密测量中的纳米计量技术

随着纳米科学的迅速发展,对纳米计量技术也提出了更高要求。目前,纳米计量技术已经实现在几十微米量程范围内具有亚纳米甚至皮米量级的测量分辨率。回顾了现在主要的纳米计量技术,包括激光干涉仪、差拍F P干涉仪、X射线干涉仪、光学+X射线干涉仪、基于频率测量技术和光频梳技术等,介绍了其工作原理、技术特点、应用范围及其最新研究进展。     

An Approach to Optical Reflection Tomography along the Geometrical Thickness

We propose and demonstrate a novel optical reflection tomography along the geometrical thickness. This technique is based on simultaneous measurement of refractive index n and thickness t of a sample using the combination of a low coherence interferometer and confocal optics. The interferometer provides optical coherence tomography (OCT) of the dimension of the optical thickness (=n × t) along the optical axis, while the confocal optics gives us another type of reflection tomography, having the thickness dimension of nearly t/n along the optical axis. This sort of tomography can be called confocal reflection tomography (CRT) and has not yet been demonstrated, to our knowledge. Simple image processing of OCT and CRT results in the desired reflection tomographic image, showing two-dimensional refractive index distribution along the geometrical thickness.     

Simplified mesh techniques for design of beam-shaping diffractive optical elements

This paper describes a simplified mesh generation technique that is based on the finite element method of calculation of beam-shaping diffractive optical elements (DOEs). The mesh generation technique uses the inherent symmetry of the incident beam to generate a mesh. Using the meshes so generated, DOEs that convert a Gaussian intensity beam to one of a specified shape, are calculated. Simulations of the results of such beam-shaping elements will be presented. Such elements have uses in industrial and medical applications where both the shape as well as the intensity distribution on the material that is to be processed is very important. For example, in industrial applications the beam may be used to uniformly heat up a specific area in which case the intensity has to be uniform across the beam. The Gaussian intensity variation of a laser has to be converted to a flat-top beam in order to achieve this. To reiterate, beam shaping refers to changing both the intensity distribution and the shape of the beam. Experimental results of the fabricated gratings will also be presented. These results will include experimental data on the method of additive lithography which can be used to improve the efficiency of DOEs.     

静态应力作用下预测光学系统性能的计算方法

本文通过计算预测光学性能的方法表征在光学系统组装和外界环境因素影响下的光学系统灵敏度。该方法即通过调制传递函数来表征静态机械应力对光学物镜性能的影响。采用光学干涉仪对经过加工、组装且存在机械应力的光学物镜进行测试,并比较实验调制传递函数与计算模拟分析的调制传递函数。结果表明,计算结果与实验结果相符,证实了本文方法的有效性。     

Design considerations for efficient planar-optical systems

Planar integrated free-space optics is well suited for various applications, e.g., in telecommunication, optical interconnects and security application. However the overall efficiency of purely diffractive systems is low, i.e., in the range of a few percent. We show that it is possible to raise the efficiency significantly by integration of refractive optical elements (prisms, wedges) for coupling into the substrate. In this case, the systems design is particularly challenging. We compare the impact of different coupling mechanisms on the optical designs of integrated 4f-imaging systems.     

采用分步迭代算法设计制作衍射光学元件

 结合均匀照明相位器件的设计实例，介绍最新提出的基于迭代框架的优化方法，并应用该方法设计制作了16台阶的衍射光学元件并对其进行了测试，验证了设计原理及方法的正确性，且对加工中可能出现的误差进行了分析和讨论。测试结果验证了采用多台阶相位结构的设计方案能有效提高工艺宽容度。