Optical emission spectroscopic studies on laser ablated TiO2 plasma

Optical emission spectroscopic investigations of the plasma produced during Nd:YAG laser ablation of sintered TiO₂ targets, in oxygen and argon gas environments are reported. The spatial variations of electron temperature (T_e) and electron number density (N_e) are studied. The effect of oxygen/argon pressure on electron temperature (T_e) and electron number density (N_e) is presented. The kinematics of the emitted particles and expansion of plume edge are discussed. Spatio-temporal variations of various species in TiO₂ plasma were recorded and corresponding velocities were calculated. The effect of oxygen pressure on intensity of neutral/ion species and their corresponding velocities is also reported.     

Optical spectroscopic studies of titanium plasma produced by an Nd : YAG laser

We present optical emission characteristics of the titanium plasma produced by the fundamental (1064 nm) and second (532 nm) harmonics of a Q-switched Nd: YAG laser using laser induced breakdown spectroscopy (LIBS). The experimentally observed line profiles of neutral titanium (Ti I) have been used to extract the electron temperature (T _e ) using the Boltzmann plot method. The electron number density (N _e ) is calculated using the Stark broadening profile of 368.73 nm spectral line. Beside we have studied the spatial variation of electron temperature and number density as a function of laser energy for titanium plasma by placing the target material in air (at atmospheric pressure). We have determined the electron temperature and the electron number density along the axial position of the plasma plume.     

Optical emission studies of sulphur plasma using laser induced breakdown spectroscopy

We present the optical emission studies of sulphur (S) plasma generated by the first (1064 nm) and second (532 nm) wavelengths of a Q-switched Nd:YAG laser. The target material was placed in front of laser beam in air at atmospheric pressure. The experimentally observed line profiles of neutral sulphur have been used to extract the electron temperature (T _e ) using the Boltzmann plot method, whereas the electron number density (N _e ) has been determined from the Stark broadening. The electron temperature is calculated by varying, distance from, the target surface along the line of propagation of plasma plume and also by varying the laser irradiance. Beside we have studied the variation of number density as a function of laser irradiance as well as its variation with distance from the target surface. It is observed that electron temperature and electron number density increases as laser irradiance is increased.     

Electron density and temperature in the photoionized background gas (N2) surrounding a laser-produced plasma

An approach to obtain the electron density (N_e) and temperature (T_e) in nitrogen photoionized by radiation from a laser-produced plasma is described. The method is based on absolute intensities of the 3371 and 3914 Å bands and does not require quantitative knowledge of the photoionizing radiation. Applications are made using experimentally obtained data to find N_e and T_e.     

Effect of ambient conditions on laser-induced breakdown spectra

The role of different ambient conditions on LIBS signal intensity was investigated for better understanding and performance of LIBS as a quantitative and qualitative analytical technique. For this purpose, the relative LIBS signal intensities were measured for a standard Cr line (520.8 nm) at different gas pressures of Ar, He, and air. The plasma was generated using a Q-switched pulsed Nd:YAG laser having wavelength of 1064 nm and pulse duration of 8 ns. The analysis revealed that the intensities of the spectral atomic Cr line (520.8 nm) were strongly enhanced under the argon environment in 10?C40 mbar range. The electron excitation temperature (T _e ) and number density (n _e ) were estimated by using a Boltzmann plot and a Stark broadening profile, respectively. For optimum dependence of LIBS, laser energy and pressure dependence was also studied. The electron temperature and number density showed an increase with increase in ambient gas pressure.     

Diagnostics of Tin Plasma Produced by Visible and IR Nanosecond Laser Ablation

We present the optical emission spectroscopic studies of the Tin (Sn) plasma, produced by the fundamental (1064 nm) and second (532 nm) harmonics of a Q switched Nd: YAG pulsed laser having pulse duration of 5 ns and 10 Hz repetition rate which is capable of delivering 400 mJ at 1064 nm, and 200 mJ at 532 nm using Laser Induced Breakdown Spectroscopy (LIBS). The laser beam was focused on target material by placing it in air at atmospheric pressure. The experimentally observed line profiles of four neutral tin (Sn I) lines at 231.72, 248.34, 257.15 and 266.12 nm were used to extract the electron temperature (T_e) using the Boltzmann plot method and determined its value 6360 and 5970 K respectively for fundamental and second harmonics of the laser. Whereas, the electron number density (N_e) has been determined from the Stark broadening profile of neutral tin (Sn I) line at 286.33 nm and determined its value 5.85 x 10¹⁶ and 6.80 x 10¹⁶cm^–3 for fundamental and second harmonics of the laser respectively. Both plasma parameters (T_e and N_e) have also been calculated by varying distance from the target surface along the line of propagation of plasma plume and also by varying the laser irradiance. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Experimental transition probabilities for several spectral lines arising from the 5d 6s{8s, 7p, 5f, 5g} electronic configurations of Pb III

Transition probabilities for 30 spectral lines, arising from the 5d¹⁰ 6s{8s, 7p, 5f, 5g} electronic configurations of Pb III (20 measured for the first time), have been experimentally determined from measurements of emission line intensities in a plasma lead induced by ablation with a Nd:YAG laser. The line intensities were obtained with the target placed in molecular argon at 6 Torr, recorded at a 400 ns delay from the laser pulse, which provides appropriate measurement conditions, and analysed between 200 and 700 nm. They are measured when the plasma reaches local thermodynamic equilibrium (LTE). The plasma under study had an electron temperature (T) of 21,400 K and an electron number density (N_e) of 7×10¹⁶ cm⁻³. The influence of self-absorption has been estimated for every line, and plasma homogeneity has been checked. The values obtained were compared with previous experimental values and theoretical estimates where possible.     

Plasma dynamics from laser ablated solid lithium

Emission plasma plume generated by pulsed laser ablation of a lithium solid target by a ruby laser (694 nm, 20 ns, 3 J) was subjected to optical emission spectroscopy: time and space resolved optical emission was characterised as a function of distance from the target surface. Propagation of the plume was studied through ambient background of argon gas. Spectroscopic observations can, in general, be used to analyse plume structure with respect to an appropriate theoretical plasma model. The plume expansion dynamics in this case could be explained through a shock wave propagation model wherein, the experimental observations made were seen to fit well with the theoretical predictions. Spectral information derived from measurement of peak intensity and line width determined the parameters, electron temperature (T _e) and electron number density (n _e), typically used to characterise laser produced plasma plume emission. These measurements were also used to validate the assumptions underlying the local thermodynamic equilibrium (LTE) model, invoked for the high density laser plasma under study. Some interesting results pertaining to the analysis of plume structure and spatio-temporal behaviour of T _e and n _e along the plume length will be presented and discussed.     

Langmuir probe and optical emission spectroscopy studies for RF magnetron sputtering during TiON thin film deposition

Low-pressure plasma of gas mixture of Ar, O₂ and N₂ generated by RF magnetron sputtering was characterized by Langmuir probe and optical emission spectroscopy (OES). The electron temperature (T_e), ion density (n_i) and electron energy distribution function (EEDF) in Ar-O₂-N₂ plasma atmosphere were calculated from I-V characteristic of Langmuir probe. Boltzmann plot method was applied for calculating the vibrational temperature (T_vib) of the second positive system of N₂ (N₂SPS) in Ar-O₂-N₂ plasma. The T_e, n_i, EEDF and T_vib in Ar-O₂-N₂ plasma were studied as a function of O₂ percentages. It was found, the T_vib increased from 0.47 eV to 0.55 eV as the oxygen percentage in Ar-N₂-O₂ plasma increased from 10% to 40%. Further, the T_e increased from 1.6 eV to 3 eV as the O₂ concentration increased from 10% to 40%.     

Spectroscopic Measurement of Electron Temperature and Density in an Argon Plasma Jet Based on Collisional‐Radiative Model

The present paper describes a spectroscopic method or determining electron temperature T_e and density N_e in an argon plasma jet on the basis of a Collisional‐Radiative model of argon. Electron temperature and density in the argon plasma were measured by the method developed, and comparison of them was discussed with those obtained with a Langmuir probe. The results or T_e and N_e obtained by the spectroscopic method agreed roughly with those by the probe.     

Electron impact ionization and excitation rate coefficients in the negative glow region of a glow discharge

Some easy to use reasonable approximations for electron impact rate coefficients have been considered. The most important rate coefficients for electron collisions in noble gases are electron-neutral ionization and electron impact excitation. Electron-neutral ionization besides electron impact excitation of some states of the argon and helium atom in direct current (dc) glow discharge plasma has been calculated. The plasma parameters of electron are significant factors for computing the rate coefficients. We present first results of probe diagnostic that includes the double probe measurements of the plasma parameters, namely, electron temperature (T_e) and electron density (n_e). Electron properties obtained from the double probe characteristic curves including T_e and n_e as well as the calculated rate coefficients (ionization and excitation) were studied as a function of the axial distance from the cathode while the discharge operating parameters of voltage and pressure were varied. Two regions of the glow discharge were investigated: cathode fall region and negative glow. Particular emphasis was placed on the negative glow region.     

On the pumping of plasma lasers by a high-frequency-modulated electron beam

The possibility of effective pumping of plasma lasers by a high-frequency-modulated electron beam, i.e. an electron beam in the form of a periodic train of electron bunches, is discussed. It is shown that if such parameters of the medium as the relaxation times of the electron temperature ρ_Te and the electron density ρ_Ne are in agreement with the pulse width ρ_p and the interval between pulses, 1/?_m, this will facilitate effective laser pumping and amplitude modulation of the laser radiation. Existing microwave tubes, such as a traveling-wave tube and a klystron, provide the required parameters of a periodic train of current pulses (electron bunches) over a wide range of pulse widths ρ_p and pumping current amplitudes.     

电子回旋共振等离子体特性及其对生长氮化镓晶膜的影响

为了解并优化在电子回旋共振等离子体辅助化学汽相沉积GaN晶膜的工艺研究中的等离子体特性,利用朗缪尔探针及法拉第筒系统地测量了离子密度(N_i)、等离子体势(V_p)、电子温度(T_e)及离子流强(J_i)等多个等离子体参量随微波功率(P_w)及沉膜室气压(p)变化的关系.给出了在P_w＝850W,p＝0.22Pa时,上述等离子体参量的轴向及径向分布.GaN晶膜的生长速率、电学及晶体学性能 关键词：     

Space- and time-resolved measurements of temperatures and electron densities of plasmas formed during laser ablation of metallic samples

Temperature and electron-density profiles in a laser-produced plasma have been measured at various distances from the sample surface and different delay times from the laser pulse. The plasma is produced with a Nd:YAG laser focused on a low-alloy steel sample in air at atmospheric pressure. The determination of the parameters is made starting from the distinct emission spectra emitted by the plasma along a direction parallel to the sample surface and measured simultaneously by a CCD detector. The experimental relative error is 1.5% for temperatures and 4.5% for electron densities. A small spatial variation of the plasma temperature ((T󾉨 K) is obtained except for the outer regions, were the intensity is weak. A higher spatial variation is obtained for the electron density, especially at initial times ((N_e᜖¹⁷ cm^-3 at t=3 7s).     

The He I 706.52 nm line shape characteristics in the plasma diagnostics

On the basis of the precisely recorded 706.52 nm He I line shape we have obtained the basic plasma parameters i.e. electron temperature (T) and electron density (N) using our new line deconvolution procedure in the case of five various plasmas created in a linear, low-pressure, pulsed arc discharge. Plasma parameters have been also measured using independent experimental diagnostical techniques. Excellent agreement was found among the two sets of the obtained parameters. This enables our deconvolution procedure to recommendation for plasma diagnostical purposes, especially in astrophysics where direct measurements of the plasma parameters (T and N) are not possible. Besides, on the basis of the observed asymmetry of the Stark broadened line profile we have obtained its ion broadening parameter (A) caused by influence of the ion microfield to the line broadening mechanism and also the influence of the ion dynamic effect (D) to the line shape. Our A and D parameters represent the first data obtained experimentally using the line profile deconvolution procedure. We have found stronger influence of the ion contribution to the 706.52 nm He I line profile than the existing theoretical approximations estimate. This can be important for plasma modeling or for diagnostics. Received 30 October 2002 Published online 15 April 2003 RID="a" ID="a"e-mail: vladimir@ff.bg.ac.yu     

Electron temperature (T e) measurements by Thomson scattering system

Thomson scattering technique based on high power laser has already proved its superoirity in measuring the electron temperature (T _e and density (n _e) in fusion plasma devices like tokamaks. The method is a direct and unambiguous one, widely used for the localised and simultaneous measurements of the above parameters. In Thomson scattering experiment, the light scattered by the plasma electrons is used for the measurements. The plasma electron temperature is measured from the Doppler shifted scattered spectrum and density from the total scattered intensity. A single point Thomson scattering system involving a Q-switched ruby laser and PMTs as the detector is deployed in ADITYA tokamak to give the plasma electron parameters. The system is capable of providing the parameters T _e from 30 eV to 1 keV and n _e from 5 × 10¹²cm⁻³−5 × 10¹³cm⁻³. The system is also able to give the parameter profile from the plasma center (Z=0 cm) to a vertical position of Z=+22 cm to Z=−14 cm, with a spatial resolution of 1 cm on shot to shot basis. This paper discusses the initial measurements of the plasma temperature from ADITYA.     

Electron temperature determination in LTE and non-LTE plasmas

A method is presented for calculating electron temperatures (T_e) in dense plasmas, which does not assume equivalence with the excited level distribution temperatures (T_ex). The method involves the upper-level Saha ionization equation at the ionization limit, the limiting weighted population density (N_I/g_I) obtained from measured population densities and the experimentally obtained electron density. Electron temperatures calculated for 0.1-bar hydrogen and 1-atm helium and argon arcs are found to be up to twice as large as excited level distribution temperatures. For subatmospheric argon arcs, the calculated T_e are equivalent to the excitation temperature of the middle levels, but are two to three times smaller than the quoted T_ex for the highest levels. Reasons are discussed for the apparent invisibility of true electron temperatures and for differences between them and the excitation temperatures.     

Optical emission spectroscopy investigation of sputtering discharge used for SiOxNy thin films deposition and correlation with the film composition

The r.f. discharge of sputtering silicon target using argon-oxygen-nitrogen plasma was investigated by optical emission spectroscopy. Electronic temperature (T_e) and emission line intensity were measured for different plasma parameters: pressure (from 0.3 to 0.7 Pa), power density (0.6-5.7 W cm⁻²) and gas composition. At high oxygen concentration in the plasma, both T_e and the target self-bias voltage (V_b) steeply decrease. Such behaviour traduces the target poisoning phenomenon. In order to control the deposition process, emission line intensity of different species present in the plasma were compared to the ArI (λ = 696.54 nm) line intensity and then correlated to the film composition analysed by Rutherford Backscattering Spectroscopy.     

Energy relaxation of electrons in the (100) n-channel of a Si-MOSFET: II. Surface phonon treatment

The electron energy relaxation is investigated as a function of the “electron temperature” T_e in the n-channel of a (100) surface silicon MOSFET device by inspecting the phenomenological energy relaxation time τ_ε(T_e). τ_ε is determined theoretically and compared to experimental results in order to identify the energy relaxation mechanism(s) present at the interface. Two dimensional electron transport is assumed. Single activation temperature (θ) Rayleigh wave scattering and acoustic Rayleigh wave scattering are studied as possible energy loss processes. The effects of electric subbanding near the surface are included. τ_ε is calculated for T_e ? 15 K in the electric quantum limit. We find that a single θ = 12.0 K Rayleigh phonon fits theory to experiment for a single electron inversion density (N_inv) case, but can not provide a fit simultaneously for more than one N_inv value. Theory and experiment disagree when Rayleigh wave acoustic scattering is assumed.     

Elimination of the mott interband s-d enhancement of the electrical resistance of nickel and platinum owing to the excitation of electrons by femtosecond laser pulses

The dependence of electrical, σ, and thermal, κ, conductivities of metals on the electron temperature T _e at high (～1 eV) T _e values has been calculated. The two-temperature states for which the temperature T _e of heated electrons exceeds the temperature T _i of ions in the crystal lattice result from the excitation of electrons by femtosecond laser pulses. It is well known that the existence of empty d levels with a high density of states near the Fermi surface (as, e.g., in nickel, platinum, and iron) leads to a pronounced enhancement of the electrical resistance (Mott, 1936). This is due to an increase in the statistical factor related to the electron transitions to the empty states induced by collisions with phonons. It is found that the excitation of the electron subsystem significantly reduces the electron-phonon scattering to unoccupied d states since the chemical potential μ(T _e ) rises above the upper edge of the d band. The decrease in the scattering probability leads to the anomalous behavior of the conductivity σ_el-ph, which increases with the temperature T _e . Such a behavior turns out to be inverse with respect to the usual situation in condensed matter.