Theoretical model for study of the voltage-current curve of a Langmuir-probe used in the hot region of the ECR plasma

In the last years the ATOMKI-ECRIS group started a local plasma diagnostics research project, to adapt the probe to the ECR plasma conditions. Until now we made progress in the study of the cold plasma region. The results has been reported in e.g. [L. Kenéz, S. Biri, J. Karácsony, A. Valek, Nucl. Instrum. Methods Phys. Res. B 187 (2) (2002) 249; L. Kenéz, S. Biri, J. Karácsony, A. Valek, T. Nakagawa, K.E. Stiebing, V. Mironov, Rev. Sci. Instrum. 73 (2) (2002) 617]. In this Letter we make a step further report the first experiments carried out in the hot ECR plasma. We used a simple probe inserted in the hot resonant plasma. We point out that this probe works as emitting probe. We developed a theoretical model to explain the unusual shaped voltage-current characteristics and tested its validity using computational study of the presented theory.     

VUV-spectroscopy of the plasma light emission generated by the pulsed arc cluster ion source (PACIS)

A pinhole grid spectrometer is used to measure the light emission from the plasma of the pulsed arc cluster ion source (PACIS). Spectra of various metals and carbon have been measured between 20 and 100 nm. In the case of carbon the average electron temperature is estimated to about 0.69 eV. Higher temperatures up to 0.79 eV are measured when inserting seeding gas which flushes the discharge volume with approx. one atmosphere of helium. An operation under this source conditions leads to the generation of an intense charged cluster beam. The application of the source as a bright light source in the VUV region is discussed. Received: 26 February 1998 / Revised: 12 May 1998 / Accepted: 14 May 1998     

Unstable plasma characteristics in mirror field electron cyclotron resonance microwave ion source

Electron cyclotron plasma reactor are prone to instabilities in specific input power [3–7] region (150–450 watts). In this region power absorption by gas molecules in the cavity is very poor and enhanced input power gets reflected substantially without increasing ion density. There are abrupt changes in plasma characteristics when input power was decreased from maximum to minimum, it was observed that reflected power changed from <2% to ∼50%. Minimum two jumps in reflected power were noticed in this specific power region and these appear to be highly sensitive to three stub tuner position in the waveguide for this particular input power zone. Unstable plasma region of this source is found to be dependent upon the magnetic field strength. Some changes in reflected power are also noticed with pressure, flow and bias and they are random in nature.     

Effect of electron emission and potential perturbations of a hot filament in high voltage pulsed glow discharge

The high voltage dc pulsed glow discharge can be ignited earlier by putting an electron emitting filament in the plasma chamber. The electrons emitted from the filament act as a seed and can cause earlier ignition. The potential of the hot filament shows some periodic positive perturbations (electron loss signals) when it is kept floating in the plasma chamber. It is observed that the positive perturbations disappear as potential difference between the plasma and the filament is made smaller by directly connecting the filament to the grounded chamber.     

Growth of electron energies with ion beam injection in a double plasma device

This paper reports about the observed energy growth of both high and low energetic electron species in the target plasma region with the increase in plasma potential in the source region of a double plasma device. This situation can be correlated to the injection of an ion beam from source to target plasma region. Plasma is solely produced in the source region and a low-density diffuse plasma is generated in the target region by local ionization between the neutral gas and the high energetic electrons coming from the source region. The growth of electron energy is accompanied by a decrease in diffuse plasma density. It is observed that although energy of high energetic group increases with the injected beam energy, the diffuse plasma density falls due to their decreasing population.     

Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation

In enhanced glow discharge plasma immersion ion implantation (EGD-PIII) that involves a small pointed anode and large area tabular cathode, the high negative substrate bias not only acts as the plasma producer but also supplies the implantation voltage. Consequently, an electric field is created to focus the electrons and the electron focusing field in turn enhances the glow discharge process. In this work, the discharge characteristics of EGD-PIII are investigated experimentally. The discharge initiation and extinction characteristics during pulsed biasing are discussed. The duration of the post pulse-off plasma is explained from the viewpoint of particle motion and experimentally verified by employing an auxiliary disk. Our experiments show that a dual-pulse method may be utilized to determine the remnant plasma.     

Study of the plasmas produced during the deposition of TiC/SiC thin films in a hybrid magnetron-laser system

Time- and spatially-resolved optical emission spectroscopy was performed to characterize the plasma produced in a hybrid magnetron-sputtering-laser deposition system, which is used for TiC or SiC thin films preparation. A graphite target was ablated by a KrF excimer laser (λ=248 nm,τ=20 ns) and either Ti or Si targets were used for DC magnetron sputtering in argon ambient. Spectra were measured in the range 250–850 nm. The evolution of the spectra with varying magnetron powers (0–100 W) and argon pressures (0.3–10 Pa) was studied. Spectra of the plasmas produced by a) the magnetron alone, b) the ablation laser alone, and c) the magnetron and the ablation laser together, were recorded. Spectra (a) were dominated by Ar atoms and Ar⁺ ions. Emission lines of Ti and Si were detected, when Ti target and Si target was used, respectively. Spectra (b) revealed emission of C, C⁺, C₂, Ar, Ar⁺. Spectra (c) showed presence of all previously mentioned species and further of Ti⁺ ions emission was detected. The research was supported by Grant Agency of the Czech Republic No. 202/06/02161, GA ASCR project number A1010110/01 and Institutional Research Plan AV CR No. AV0Z 10100522.     

微型电子回旋共振离子推力器离子源结构优化实验研究

微型电子回旋共振(ECR)离子推力器可满足微小航天器空间探测的推进需求. 为此, 本文开展直径20 mm的微型ECR离子源结构优化实验研究. 根据放电室内静磁场和ECR谐振区的分布特点, 研究不同微波耦合输入位置对离子源性能的影响, 结果表明环形天线处在高于ECR谐振强度的强磁场区域时, 微波与等离子体实现无损耦合, 电子共振加热效果显著, 引出离子束流较大. 根据放电室电磁截止特性, 结合微波电场计算, 研究放电容积对离子源性能的影响, 实验表明过长或过短的腔体长度会导致引出离子束流下降甚至等离子体熄灭. 经优化后离子源性能测试表明, 在入射微波功率2.1 W、氩气流量14.9 μg/s下, 可引出离子束流5.4 mA, 气体放电损耗和利用率分别为389 W/A和15%.     

A probe-based method for measuring the transport coefficient in the tokamak edge region

A new method for measuring the diffusion coefficient in the edge plasma of fusion devices is presented. The method is based on studying the decay of the plasma fluctuation spectrum inside a small ceramic tube having its mouth flush with a magnetic surface and its axis aligned along the radial direction. The plasma fluctuations are detected by an electrode, radially movable inside the tube. In the experiment described herein, which was performed in the edge region of the CASTOR tokamak, the electrode measured the floating potential. The experimental arrangement is the same used for the direct plasma potential measurements according to the “Ball-pen probe” [1], the design of which is based on the Katsumata probe principle. When the electrode protrudes from the tube, the measured signal shows the floating potential fluctuations of the plasma. Retracting the electrode into the tube, the signal power spectrum displays a decay. This decay is different for different frequencies, and is exponential. Assuming a mainly diffusive behaviour of the plasma inside the tube, the spectrum decay length can be used to derive a value of the diffusion coefficient. The measurement were performed at different radial positions in the CASTOR edge region, so that a radial profile of the diffusion coefficient was obtained. Typical values ofD are of (2–3) m²/s, consistent with expectations from the global particle balance. The radial profile shows a tendency of the diffusion coefficient to increase going deeper into the plasma.     

电子回旋共振离子源等离子体的密度测量

 诊断电子回旋共振离子源等离子体的传统方法是采用传统的单探针无发射时测量伏安曲线,并根据曲线的拐点由理论公式计算出的等离子体密度。本文设计并研制了等离子体密度的测量装置。采用单根朗缪尔探针（该探针可以用来发射电子）测量等离子体的伏安特性。在探针有发射和无发射两种状态下测量得到两条伏安曲线,根据这两条曲线的"分叉点"得到等离子体电位,然后根据该电位直接由计算机计算出电子温度、电子密度。采用该新方法,测量得到的等离子体参量空间电位约为17 V,悬浮电位约为-5 V,电子温度约为4.4 eV,离子密度为1.10×10¹¹cm^-3,与传统方法计算出的等离子体1.12×10¹¹cm^-3相比,两者相差仅1.8％,但新方法效率和精度更高。     

Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures

Electron mean energy and the effects of gas mixture are studied theoretically and experimentally. The electron mean energy in O2 and its mixtures is obtained by solving Boltzmann＇s equation. The experiments of the Langmuir probe system and spectral analysis are carried out. It is shown that electron temperature goes down with the increasing pressure, narrowing pulse width and the addition of helium and argon. According to the intensity of oxygen atom at 777.19 nm, xenon is more effective in inhibition of O2 decomposition than helium and argon.     

Target-ion source unit ionization efficiency measurement by a method of stable ion beam implantation

At the IRIS facility a rather precise method of the target-ion source unit ionization efficiency measurement has been developed. The method exploits an off-line mass-separator for the implantation of the ion beams of selected stable isotopes into a tantalum foil placed inside a Faraday cup in the focal plane of the mass-separator. After the implantation of the required amount of the investigated species, tantalum foil has been inserted into the volume of the target-ion source unit prepared for the on-line utilization at the IRIS on-line separator. The first tests have ensured the ionization efficiency values (90±10)% for Rb and (85±10)% for Cs in the empty combined target-ion source unit, which was used as a reference one. For the target-ion source unit with UC target material inside the measured value of the ionization efficiency of Rb was (52±20)%.     

微波ECR全方位离子注入制备类金刚石碳膜的结构及摩擦学性能研究

利用微波ECR全方位离子注入技术，在单晶硅（100）衬底上制备类金刚石薄膜.分析结果表明，所制备的类金刚石碳膜具有典型的类金刚石结构特征，薄膜均匀、致密，表面粗糙度小，摩擦系数小.其中，薄膜的结构和性能与氢流量比关系密切，随氢流量比的增加，薄膜的沉积速率减小，表面粗糙度降低，且生成sp³键更加趋向于金刚石结构，表面能 更低，从而使摩擦系数大幅降低. 关键词： 全方位离子注入 类金刚石碳膜 拉曼光谱 摩擦磨损     

Investigations on ionic processes and dynamics in the sheath region of helium and hydrogen discharges by laser spectroscopic electric field measurements

Temporally and spatially resolved measurements of the electric field distribution in the sheath region of RF and dc discharges provide a detailed insight into the sheath and ion dynamics. The electric field is directly related to the sheath ion and electron densities, the sheath voltage, and the displacement current density. Under certain assumptions also the electron and ion conduction current densities at the electrode, the ion current density into the sheath from the plasma bulk, the ion energy distribution function, and the power dissipated in the discharge can be inferred. Furthermore, the electric field distribution can give an indication of the collision-induced conversion between different ion species in the sheath. Laser spectroscopic techniques allow the noninvasive in situ measurement of the electric field with high spatial and temporal resolution. These techniques are based on the spectroscopic measurement of the Stark splitting of Rydberg states of helium and hydrogen atoms. Two alternative techniques are applied to RF discharges at 13.56 MHz in helium and hydrogen and a pulsed dc discharge in hydrogen. The measured electric field profiles are analyzed, and the results discussed with respect to the ion densities, currents, energies, temporal dynamics and species composition. Received: 26 July 2000 / Accepted: 12 December 2000 / Published online: 3 April 2001     

Diagnosis of Methane Plasma Generated in an Atmospheric Pressure DBD Micro-Jet by Optical Emission Spectroscopy

Diagnosis of methane plasma, generated in an atmospheric pressure dielectric barrier discharge （DBD） microplasma jet with a quartz tube as dielectric material by a 25 kHz sinusoidal ac power source, is conducted by optical emission spectroscopy （OES）. The reactive radicals in methane plasma such as CH, C2, and Ha are detected insitu by OES. The possible dissociation mechanism of methane in diluted Ar plasma is deduced from spectra. In addition, the density of CH radical, which is considered as one of the precursors in diamond-like （DLC） film formation, affected by the parameters of input voltage and the feed gas flow rate, is emphasized. With the Boltzmann plots, four Ar atomic spectral lines （located at 675.28nm, 687.13nm, 738.40nm and 794.82nm, respectively） are chosen to calculate the electron temperature, and the dependence of electron temperature on discharge parameters is also investigated.     

Measurements of electron density and Stark width of neutral helium lines in a helium arc plasma

Electron densities in an atmospheric helium arc plasma have been measured with the Stark broadening parameters of helium spectral lines. The spatially distributed radiation intensities are converted to plasma emission coefficients at every wavelength by means of Abel inversion. From the inverted profiles of He I lines of 4713 ?, 5016 ?, and 6678 ? electron density has been calculated, which ranges from 0.5 ×10¹⁶ to 4 ×10¹⁶ cm^-3 for a helium arc with current 200 A. Stark widths of He I lines of 3889 ? and 7065 ? are determined based on the measurements and compared with existing data.     

电子回旋共振离子推力器放电室等离子体数值模拟

电子回旋共振离子推力器属于静电型推力器,具有寿命长、比冲高、结构简单、可靠性高等优点,适用于深空探测等长时间空间飞行任务.放电室是一个关键部件,其内部通过电子回旋共振产生等离子体.针对放电室内等离子体流场建立飘移-扩散近似模型,采用迎风格式有限差分法对该模型进行数值求解,得到了放电室内不同时刻的等离子体流场分布及其演化规律.数值模拟结果可以为推力器的设计和实验研究提供有用信息.     

2cm电子回旋共振离子推力器离子源中磁场对等离子体特性与壁面电流影响的数值模拟

电子回旋共振离子推力器(electron cyclotron resonance ion thruster,ECRIT)离子源内等离子体分布会影响束流引出,而磁场结构决定的ECR区与天线的相对位置共同影响了等离子体分布.在鞘层作用下,等离子体中的离子或电子被加速对壁面产生溅射,形成壁面离子或电子电流,造成壁面磨损和等离...     

Control of composition and crystallinity in hydroxyapatite films deposited by electron cyclotron resonance plasma sputtering

Hydroxyapatite (HAp) films were deposited by electron cyclotron resonance plasma sputtering under a simultaneous flow of H₂O vapor gas. Crystallization during sputter-deposition at elevated temperatures and solid-phase crystallization of amorphous films were compared in terms of film properties. When HAp films were deposited with Ar sputtering gas at temperatures above 460 °C, CaO byproducts precipitated with HAp crystallites. Using Xe instead of Ar resolved the compositional problem, yielding a single HAp phase. Preferentially c-axis-oriented HAp films were obtained at substrate temperatures between 460 and 500 °C and H₂O pressures higher than 1×10⁻² Pa. The absorption signal of the asymmetric stretching mode of the PO₄³⁻ unit (ν₃) in the Fourier-transform infrared absorption (FT-IR) spectra was the narrowest for films as-crystallized during deposition with Xe, but widest for solid-phase crystallized films. While the symmetric stretching mode of PO₄³⁻ (ν₁) is theoretically IR-inactive, this signal emerged in the FT-IR spectra of solid-phase crystallized films, but was absent for as-crystallized films, indicating superior crystallinity for the latter. The Raman scattering signal corresponding to ν₁ PO₄³⁻ sensitively reflected this crystallinity. The surface hardness of as-crystallized films evaluated by a pencil hardness test was higher than that of solid-phase crystallized films.