Theoretical model for study of the voltage-current curve of a Langmuir-probe used in the hot region of the ECR plasma

In the last years the ATOMKI-ECRIS group started a local plasma diagnostics research project, to adapt the probe to the ECR plasma conditions. Until now we made progress in the study of the cold plasma region. The results has been reported in e.g. [L. Kenéz, S. Biri, J. Karácsony, A. Valek, Nucl. Instrum. Methods Phys. Res. B 187 (2) (2002) 249; L. Kenéz, S. Biri, J. Karácsony, A. Valek, T. Nakagawa, K.E. Stiebing, V. Mironov, Rev. Sci. Instrum. 73 (2) (2002) 617]. In this Letter we make a step further report the first experiments carried out in the hot ECR plasma. We used a simple probe inserted in the hot resonant plasma. We point out that this probe works as emitting probe. We developed a theoretical model to explain the unusual shaped voltage-current characteristics and tested its validity using computational study of the presented theory.     

VUV-spectroscopy of the plasma light emission generated by the pulsed arc cluster ion source (PACIS)

A pinhole grid spectrometer is used to measure the light emission from the plasma of the pulsed arc cluster ion source (PACIS). Spectra of various metals and carbon have been measured between 20 and 100 nm. In the case of carbon the average electron temperature is estimated to about 0.69 eV. Higher temperatures up to 0.79 eV are measured when inserting seeding gas which flushes the discharge volume with approx. one atmosphere of helium. An operation under this source conditions leads to the generation of an intense charged cluster beam. The application of the source as a bright light source in the VUV region is discussed. Received: 26 February 1998 / Revised: 12 May 1998 / Accepted: 14 May 1998     

Effect of electron emission and potential perturbations of a hot filament in high voltage pulsed glow discharge

The high voltage dc pulsed glow discharge can be ignited earlier by putting an electron emitting filament in the plasma chamber. The electrons emitted from the filament act as a seed and can cause earlier ignition. The potential of the hot filament shows some periodic positive perturbations (electron loss signals) when it is kept floating in the plasma chamber. It is observed that the positive perturbations disappear as potential difference between the plasma and the filament is made smaller by directly connecting the filament to the grounded chamber.     

Unstable plasma characteristics in mirror field electron cyclotron resonance microwave ion source

Electron cyclotron plasma reactor are prone to instabilities in specific input power [3–7] region (150–450 watts). In this region power absorption by gas molecules in the cavity is very poor and enhanced input power gets reflected substantially without increasing ion density. There are abrupt changes in plasma characteristics when input power was decreased from maximum to minimum, it was observed that reflected power changed from <2% to ∼50%. Minimum two jumps in reflected power were noticed in this specific power region and these appear to be highly sensitive to three stub tuner position in the waveguide for this particular input power zone. Unstable plasma region of this source is found to be dependent upon the magnetic field strength. Some changes in reflected power are also noticed with pressure, flow and bias and they are random in nature.     

Growth of electron energies with ion beam injection in a double plasma device

This paper reports about the observed energy growth of both high and low energetic electron species in the target plasma region with the increase in plasma potential in the source region of a double plasma device. This situation can be correlated to the injection of an ion beam from source to target plasma region. Plasma is solely produced in the source region and a low-density diffuse plasma is generated in the target region by local ionization between the neutral gas and the high energetic electrons coming from the source region. The growth of electron energy is accompanied by a decrease in diffuse plasma density. It is observed that although energy of high energetic group increases with the injected beam energy, the diffuse plasma density falls due to their decreasing population.     

Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation

In enhanced glow discharge plasma immersion ion implantation (EGD-PIII) that involves a small pointed anode and large area tabular cathode, the high negative substrate bias not only acts as the plasma producer but also supplies the implantation voltage. Consequently, an electric field is created to focus the electrons and the electron focusing field in turn enhances the glow discharge process. In this work, the discharge characteristics of EGD-PIII are investigated experimentally. The discharge initiation and extinction characteristics during pulsed biasing are discussed. The duration of the post pulse-off plasma is explained from the viewpoint of particle motion and experimentally verified by employing an auxiliary disk. Our experiments show that a dual-pulse method may be utilized to determine the remnant plasma.     

Study of the plasmas produced during the deposition of TiC/SiC thin films in a hybrid magnetron-laser system

Time- and spatially-resolved optical emission spectroscopy was performed to characterize the plasma produced in a hybrid magnetron-sputtering-laser deposition system, which is used for TiC or SiC thin films preparation. A graphite target was ablated by a KrF excimer laser (λ=248 nm,τ=20 ns) and either Ti or Si targets were used for DC magnetron sputtering in argon ambient. Spectra were measured in the range 250–850 nm. The evolution of the spectra with varying magnetron powers (0–100 W) and argon pressures (0.3–10 Pa) was studied. Spectra of the plasmas produced by a) the magnetron alone, b) the ablation laser alone, and c) the magnetron and the ablation laser together, were recorded. Spectra (a) were dominated by Ar atoms and Ar⁺ ions. Emission lines of Ti and Si were detected, when Ti target and Si target was used, respectively. Spectra (b) revealed emission of C, C⁺, C₂, Ar, Ar⁺. Spectra (c) showed presence of all previously mentioned species and further of Ti⁺ ions emission was detected. The research was supported by Grant Agency of the Czech Republic No. 202/06/02161, GA ASCR project number A1010110/01 and Institutional Research Plan AV CR No. AV0Z 10100522.     

A probe-based method for measuring the transport coefficient in the tokamak edge region

A new method for measuring the diffusion coefficient in the edge plasma of fusion devices is presented. The method is based on studying the decay of the plasma fluctuation spectrum inside a small ceramic tube having its mouth flush with a magnetic surface and its axis aligned along the radial direction. The plasma fluctuations are detected by an electrode, radially movable inside the tube. In the experiment described herein, which was performed in the edge region of the CASTOR tokamak, the electrode measured the floating potential. The experimental arrangement is the same used for the direct plasma potential measurements according to the “Ball-pen probe” [1], the design of which is based on the Katsumata probe principle. When the electrode protrudes from the tube, the measured signal shows the floating potential fluctuations of the plasma. Retracting the electrode into the tube, the signal power spectrum displays a decay. This decay is different for different frequencies, and is exponential. Assuming a mainly diffusive behaviour of the plasma inside the tube, the spectrum decay length can be used to derive a value of the diffusion coefficient. The measurement were performed at different radial positions in the CASTOR edge region, so that a radial profile of the diffusion coefficient was obtained. Typical values ofD are of (2–3) m²/s, consistent with expectations from the global particle balance. The radial profile shows a tendency of the diffusion coefficient to increase going deeper into the plasma.     

Target-ion source unit ionization efficiency measurement by a method of stable ion beam implantation

At the IRIS facility a rather precise method of the target-ion source unit ionization efficiency measurement has been developed. The method exploits an off-line mass-separator for the implantation of the ion beams of selected stable isotopes into a tantalum foil placed inside a Faraday cup in the focal plane of the mass-separator. After the implantation of the required amount of the investigated species, tantalum foil has been inserted into the volume of the target-ion source unit prepared for the on-line utilization at the IRIS on-line separator. The first tests have ensured the ionization efficiency values (90±10)% for Rb and (85±10)% for Cs in the empty combined target-ion source unit, which was used as a reference one. For the target-ion source unit with UC target material inside the measured value of the ionization efficiency of Rb was (52±20)%.     

Investigations on ionic processes and dynamics in the sheath region of helium and hydrogen discharges by laser spectroscopic electric field measurements

Temporally and spatially resolved measurements of the electric field distribution in the sheath region of RF and dc discharges provide a detailed insight into the sheath and ion dynamics. The electric field is directly related to the sheath ion and electron densities, the sheath voltage, and the displacement current density. Under certain assumptions also the electron and ion conduction current densities at the electrode, the ion current density into the sheath from the plasma bulk, the ion energy distribution function, and the power dissipated in the discharge can be inferred. Furthermore, the electric field distribution can give an indication of the collision-induced conversion between different ion species in the sheath. Laser spectroscopic techniques allow the noninvasive in situ measurement of the electric field with high spatial and temporal resolution. These techniques are based on the spectroscopic measurement of the Stark splitting of Rydberg states of helium and hydrogen atoms. Two alternative techniques are applied to RF discharges at 13.56 MHz in helium and hydrogen and a pulsed dc discharge in hydrogen. The measured electric field profiles are analyzed, and the results discussed with respect to the ion densities, currents, energies, temporal dynamics and species composition. Received: 26 July 2000 / Accepted: 12 December 2000 / Published online: 3 April 2001     

Measurements of electron density and Stark width of neutral helium lines in a helium arc plasma

Electron densities in an atmospheric helium arc plasma have been measured with the Stark broadening parameters of helium spectral lines. The spatially distributed radiation intensities are converted to plasma emission coefficients at every wavelength by means of Abel inversion. From the inverted profiles of He I lines of 4713 ?, 5016 ?, and 6678 ? electron density has been calculated, which ranges from 0.5 ×10¹⁶ to 4 ×10¹⁶ cm^-3 for a helium arc with current 200 A. Stark widths of He I lines of 3889 ? and 7065 ? are determined based on the measurements and compared with existing data.     

2cm电子回旋共振离子推力器离子源中磁场对等离子体特性与壁面电流影响的数值模拟

电子回旋共振离子推力器(electron cyclotron resonance ion thruster,ECRIT)离子源内等离子体分布会影响束流引出,而磁场结构决定的ECR区与天线的相对位置共同影响了等离子体分布.在鞘层作用下,等离子体中的离子或电子被加速对壁面产生溅射,形成壁面离子或电子电流,造成壁面磨损和等离...     

Control of composition and crystallinity in hydroxyapatite films deposited by electron cyclotron resonance plasma sputtering

Hydroxyapatite (HAp) films were deposited by electron cyclotron resonance plasma sputtering under a simultaneous flow of H₂O vapor gas. Crystallization during sputter-deposition at elevated temperatures and solid-phase crystallization of amorphous films were compared in terms of film properties. When HAp films were deposited with Ar sputtering gas at temperatures above 460 °C, CaO byproducts precipitated with HAp crystallites. Using Xe instead of Ar resolved the compositional problem, yielding a single HAp phase. Preferentially c-axis-oriented HAp films were obtained at substrate temperatures between 460 and 500 °C and H₂O pressures higher than 1×10⁻² Pa. The absorption signal of the asymmetric stretching mode of the PO₄³⁻ unit (ν₃) in the Fourier-transform infrared absorption (FT-IR) spectra was the narrowest for films as-crystallized during deposition with Xe, but widest for solid-phase crystallized films. While the symmetric stretching mode of PO₄³⁻ (ν₁) is theoretically IR-inactive, this signal emerged in the FT-IR spectra of solid-phase crystallized films, but was absent for as-crystallized films, indicating superior crystallinity for the latter. The Raman scattering signal corresponding to ν₁ PO₄³⁻ sensitively reflected this crystallinity. The surface hardness of as-crystallized films evaluated by a pencil hardness test was higher than that of solid-phase crystallized films.     

(e,2e) electron spectroscopy of surfaces

Received: 21 March 1997/Accepted 12 August 1997     

Characterisation of laser-produced tungsten plasma using optical spectroscopy method

This paper describes results of spectroscopic investigation of laser-produced tungsten plasma. The laser intensity on the target surface reached up to 30 GW/cm² depending on the focusing conditions. Optical spectra emitted from plasma plumes which were formed under vacuum conditions in front of the tungsten target due to the interaction of Nd-YAG laser pulses (1.06 μm, 0.5 J), were characterised by means of an optical spectrometer (λ/Δλ= 900) in the wavelength range from 300 to 1100 nm. The spectra were recorded automatically with the use of a CCD detector with exposition time varied from 100 ns to 50 ms. On the basis of WI and WII lines it was possible to estimate electron temperature and electron density which corresponded to the expansion phase of the plasma. T_e and N_e were measured as 1.1 eV and 8×10¹⁶ cm^-3, respectively. The spectra collected by the ion energy analyser showed that the plasma included tungsten ions up to 6+ ion charge. Signals from the ion collector allowed to estimate the average value of ion energy of tungsten as 4.6 keV. Basing on this value the electron temperature corresponding to the initial stage of the plasma formation was estimated to be about 320 eV. Optical microscope investigation showed that laser irradiation caused structural changes on the surface of the target.     

Nitrogen incorporation in amorphous SiCN layers prepared from electron cyclotron resonance plasmas

Electron cyclotron resonance plasma chemical vapor deposition with nitrogen, methane, and argon-diluted silane as precursors has been used to prepare SiCN thin films. Optical emission from CN species in the plasma has been observed. Infrared measurements show that most of the nitrogen is incorporated to the thin solid films in the form of Si-N, C=N and C≡N bonds suggesting a basic structure of incomplete SiN tetrahedra with C=N and C≡N bridging bonds. The deposited films are nearly transparent in the visible range with a weak absorption threshold between 2.2 and 3.5 eV. Received: 3 April 1998 / Accepted: 5 January 1999 / Published online: 31 March 1999     

Integrated target-ion source unit for on-line production of radioactive short-lived isotopes

A new version of integrated target-ion source unit (ionising target) has been developed for the on-line production of radioactive single-charged ions. The target is able to withstand temperatures up to 2500 ^°C and acts also as an ion source of the surface and laser ionisation. Off-line and on-line experiments with the ionising target, housing tantalum foils as a target material, have been carried out at the IRIS (Investigation of Radioactive Isotopes on Synchrocyclotron) facility. The off-line surface ionisation efficiency measured for stable atoms of Li, Rb and Cs was correspondingly 6% , 40% and 55% at the target temperature of 2000 ^°C and 3-10% for atoms of rare-earth elements Sm, Eu, Tm and Yb at a temperature of 2200 ^°C. The off-line measured values of the ionisation efficiency for stable Gd and Eu atoms by the laser beam ionisation inside the target were 1% and 7%, respectively. The radioactive beam intensities of neutron-deficient rare-earth nuclides from Eu to Lu produced by the integrated target-ion source unit have been measured at a temperature of 2500 ^°C. The results of the integrated target-ion source unit use for on-line laser resonance ionisation spectroscopy study of neutron-deficient Gd isotopes have been also presented.     

Splitting of the cyclotron resonance in two-dimensional electron systems

A large splitting of the cyclotron resonance line, observed in two different two-dimensional electron systems, remains unexplained. The splitting resembles an anti-level crossing with an unidentified mode of the semiconductor system. Here, we review our data on this splitting, and highlight some results of recent experiments.