“三光合一”系统用的立方棱镜二向色分光膜的研制

论述研制高反射（1．6μm）、透射（0.4～0.9μm）立方棱镜二向色分光膜、其技术关键是最大限度地减小光偏振带来的损失。探讨一般生产中可采用的减编振方法。运用G|ABCB|mG膜系结构原理，研制出ρ1.06μm＞98％，τ0.48～0.9μm＞95％，透过峰位＞98％的高效立方二向色分光棱镜。如再增加膜层教，可使τ1.06μm＜0．2％，基本解决了该类立方棱镜的消偏振难题。     

红外探测装置中光谱分光镜的设计与制备

在红外探测装置中,光谱分光镜是用来把3 μm～5 μm和8 μm～12 μm 2个波段的光谱分开的零件.介绍了一种在通用镀膜机上制备光谱分光镜的新工艺.在该膜系的设计过程中,把Willey公式引入到对其平均透过率最高值进行估算的过程中,同时针对国产镀膜机控制精度不高的特点,尽量使用规整膜层进行设计.为了进一步提高8 μm～12 μm波段的透过率,在膜系的最外侧引进了一层自行配制的低折射率氟化物材料,制备出了符合技术指标的红外光谱分光镜.     

50～11O nm波段高反射率多层膜的设计与制备

阐述了50～110 nm强吸收波段亚四分之一波长多层膜的设计方法.这种膜系是由强吸收材料叠加而成,每层膜光学厚度小于四分之一个波长.与常规周期多层膜相比,这种膜系更适用于提高强吸收波段的反射率.利用该方法设计了50 nm处高反射多层膜,并以此为初始条件通过Levenberg-Marquart优化方法完成了50～110 nm强吸收波段宽带高反射率Si/W/Co多层膜的设计,其平均反射率达到45%.采用直流磁控溅射方法制备了Si/W/Co多层膜,用X射线衍射仪(XRD)对膜层结构进行了测试,测试结果表明制作出的多层膜结构与设计结构基本相符.     

50~110 nm波段高反射率多层膜的设计与制备

阐述了50~110 nm强吸收波段亚四分之一波长多层膜的设计方法.这种膜系是由强吸收材料叠加而成，每层膜光学厚度小于四分之一个波长.与常规周期多层膜相比，这种膜系更适用于提高强吸收波段的反射率.利用该方法设计了50 nm处高反射多层膜，并以此为初始条件通过Levenberg-Marquart优化方法完成了50~110 nm强吸收波段宽带高反射率Si/W/Co多层膜的设计，其平均反射率达到45%.采用直流磁控溅射方法制备了Si/W/Co多层膜,用X射线衍射仪(XRD)对膜层结构进行了测试，测试结果表明制作出的多层膜结构与设计结构基本相符.     

应用于投影显示系统的偏振分光镜的设计和制备

讨论了应用于投影显示系统的满足宽光谱范围、大的入射角、高的消光比的偏振分光镜的设计和制备。提出了一种偏振分光镜的新的设计方法 :采用多对迈克尼尔对组合来满足宽入射角范围的要求 ,采用多个中心波长不同的λ 4膜堆来满足宽光谱范围。设计的偏振分光镜在 42 0nm～ 6 70nm的波段范围内 ,在 41.34°～ 48.6 6°的入射角范围内 ,达到p偏振光的平均透过率大于 85 % ,p偏振光的平均透过率与s光的平均透过率之比大于 10 0 0。并给出了设计实例和样品的实测结果     

1 064, 532和680 nm波长的反射-吸收复合型防护膜的研制

 针对1 064, 532 和 680 nm波长激光, 以聚碳酸酯 （PC） 为镀膜基底, 钕玻璃激光中心波长为1 064 nm, 采用六分之一加三分之一膜系的反射膜系设计,以氧化锆为高折射率膜层材料,氯化酞菁铝掺杂的氧化硅为低折射率膜层材料,通过溶胶-凝胶法镀21层膜,并在多层反射膜与PC基底之间插入张力匹配层,实现了钕玻璃激光器1 064 nm主频和532 nm二倍频波长激光的反射,以及680 nm波长红宝石激光的同时吸收,1 064,532和680 nm波长处的透射率分别为1.67％,18.24％和2.4％。     

卫星激光通信滤光膜的研制

为满足卫星激光通信中超高速数据传输的特殊要求,采用电子束和离子辅助沉积技术,制备了532nm、632nm和1 064nm波长处高反射,808nm和1 550nm处高透射的多波段滤光膜.选取了H4和SiO2作为高低折射率材料,通过对膜系设计曲线的不断优化,减少了灵敏层的个数,得到了相对易于制备的膜系结构;采用电子束加热蒸发方法并加以离子辅助沉积系统制备薄膜,采用光控与晶控同时监控的方法控制膜厚;通过不断调整工艺,提高了薄膜的抗激光损伤能力,减小了膜厚控制误差,提高了透射波段的透过率及反射波段的反射率,最终得到了光谱性能较好的滤光膜.该薄膜能够承受雨淋、盐雾、高低温等环境测试,满足使用要求.     

121.6 nm远紫外高反射薄膜研究

远紫外波段高反射薄膜的研究具有重要应用价值。为了实现高反射率,采用高温三步蒸发法沉积MgF_2膜以保护Al膜,制备了远紫外宽带高反射薄膜,并对样品进行退火处理。结果显示,改进制备工艺和退火工艺后,紫外宽带高反射薄膜在121.6 nm处的反射率高达90%,接近理论设计值。同时分析了散射损耗的影响。采用优化的LaF_3/MgF_2膜系结构,制备了窄带反射滤光薄膜,其在中心波长122.5 nm处的峰值反射率为75%且半峰全宽为8 nm,达到了理论设计的预期效果,但退火处理损伤了薄膜表面,散射损耗增加,薄膜反射率下降。     

卫星激光通信滤光膜的研制

为满足卫星激光通信中超高速数据传输的特殊要求,采用电子束和离子辅助沉积技术,制备了532 nm、632 nm和1 064 nm波长处高反射,808 nm和1 550 nm处高透射的多波段滤光膜.选取了H₄和SiO₂作为高低折射率材料,通过对膜系设计曲线的不断优化,减少了灵敏层的个数,得到了相对易于制备的膜系结构;采用电子束加热蒸发方法并加以离子辅助沉积系统制备薄膜, 采用光控与晶控同时监控的方法控制膜厚;通过不断调整工艺,提高了薄膜的抗激光损伤能力,减小了膜厚控制误差,提高了透射波段的透过率及反射波段的反射率,最终得到了光谱性能较好的滤光膜.该薄膜能够承受雨淋、盐雾、高低温等环境测试,满足使用要求.     

特宽光谱分光膜的镀制

设计了550～1100nm波段高透、8000～12000nm波段高反的特宽光谱分光膜膜系，即采用｜ZnS｜Ag｜ZnS｜基本膜系结构，外加保护膜，并用该膜系镀制出了透可见、近红外波段，反中远红外波段的平面分光镜。实际使用表明，该膜系效果较好。     

Optimized design of parallel beam-splitting prism

A large lateral shearing distance of parallel beam-splitting prism is often needed in laser modulation and polarization interference. In this letter, we present an optimized design of parallel beam-splitting prism and list some different cases in detail. The optimized design widens the use range of parallel beam-splitting prism. At the wavelength of 632.8 nm, the law that the enlargement ratio changes with the refractive index and the apex angle is verified.     

冰洲石-玻璃组合平行分束偏光镜的设计研究

为了既节省稀有昂贵的冰洲石晶体材料，又实现偏振光的大剪切差输出，采用冰洲石晶体与光学玻璃组合的方法，设计了一种新型平行分束偏光镜。该棱镜的前后半块分别为ZBaF₃玻璃和冰洲石晶体，由大折射率液态胶合剂溴代萘胶合而成。实验测试表明：该棱镜透射的2束平行光的消光比，o光可达10^－5；尽管受到光学玻璃的影响，e光的消光比仍优于10^－3；透射比均与纯冰洲石晶体材料的棱镜基本相当。理论分析表明：该棱镜自身结构带来的性能影响在一定情况下完全可以忽略，因此具有较好的应用前景。     

Wavelength tunable high power laser using a double-clad Er:Yb doped fiber

We experimentally demonstrated a stable, wavelength-tunable fiber laser using a polarization-maintaining, double-clad Er:Yb doped fiber amplifier in the cavity. The output wavelength is tunable over the range from 1535 to 1567 nm using a fixed grating and the dichroic mirror placed on a rotational mount; under rotation of the dichroic mirror the tuning ratio of 50 nm/deg was found. We studied the wavelength tuning range dependence on the amplifier fiber length and achieved a maximal output power of 850 mW. This configuration can be Q-switched for high peak power and its narrow bandwidth is suitable for nonlinear optics applications, such as parametric teraherthz generator.     

Metal-based transparent heat mirror for ultraviolet curing applications

Metal-based transparent heat mirror for ultraviolet curing applications was designed in terms of induced transmission principle, good ultraviolet transparency and high infrared ray (IR) reflection properties can be obtained by the means of optimal layers design. After a comprehensive analysis to materials properties, TiO₂/Ag/TiO₂ nano-multilayers with a Ultraviolet (UV) transmission of 81% (at 365 nm) and an IR reflectivity of 90% (at 1600 nm) were designed and prepared by conventional evaporation. The multilayers exhibit a sharp interface between dielectric and metal layers by spectroscopic ellipsometry analysis. The experiment results prove that critical thickness of metal layer determined in light of admittance match and skin effect has no applicable meaning in long-wavelength UV region. Dependence of transmittance in near UV spectra on the thickness of metal layer is less sensitive than that in near IR. This transparent heat mirror can be applied in the “windows” of ultraviolet curing system for heat insulation.     

Observation of Resonant Photon Tunneling in Photonic Double Barrier Structures

Reflectance and transmittance of 632.8 nm He-Ne laser light for photonic double barrier structures (consisting of a SF10 prism, SiO₂ layer, Al or Al₂O₃ active layer, SiO₂ layer and SF10 prism) were measured as a function of the angle of incidence for both the ρ- and s-polarized incidence. Sharp reflection dips and transmission peaks were observed at angles larger than the critical angle of total reflection. The appearance of the transmission peaks can be attributed to resonant photon tunneling through the photonic double barrier structures analogous to resonant electron tunneling through double potential barrier structures. Resonant tunneling is mediated by the long-range surface plasmon polariton in the case of the Al active layer and the electromagnetic guided modes in the case of the Al₂O₃ layer.This paper was originally presented at the seventh Meeting on Near Field Optics, which was held on July 1, 1998 at Nagoya University, Nagoya, organized by Research Group on Near Field Optics, the Optical Society of Japan, an affiliate of Japan Society of Applied Physics. The authors have won the Near Field Optics Award for their best presentation at the meeting.     

1 319和1 338 nm双波长Nd:YAG脉冲激光输出实验研究

 根据计算得到的双波长激光振荡的阈值条件,激光实验中对全反镜镀制1 319和1 338 nm的全反膜（其反射率大于99.73%,而对1 064 nm激光的反射率约为7%）;输出镜采用对1 064 nm强谱线95%的高透过率,而对1 319和1 338 nm谱线的透过率分别为34.7%,32.5%,有效抑制了强线1 064 nm振荡,成功实现了1 319和1 338 nm Nd:YAG同时双波长激光脉冲输出。当输入能量为125 J时,1 319和1 338 nm脉冲双波长激光的单脉冲总输出能量为0.89 J,电-光转换效率为0.71%,斜率效率为0.89%。输出的双波长激光的中心波长分别在1 318.8和1 338.2 nm处,谱线宽度（FWHM）分别为0.35和0.48 nm,强度之比为36:44。     

Cubic ZnO films obtained at low pressure by molecular beam epitaxy

A zinc oxide thin film in cubic crystalline phase, which is usually prepared under high pressure, has been grown on the Mg O(001) substrate by a three-step growth using plasma-assisted molecular beam epitaxy. The cubic structure is confirmed by in-situ reflection high energy electron diffraction measurements and simulations. The x-ray photoelectron spectroscopy reveals that the outer-layer surface of the film(less than 5 nm thick) is of ZnO phase while the buffer layer above the substrate is of ZnMgO phase, which is further confirmed by the band edge transmissions at the wavelengths of about 390 nm and 280 nm, respectively. The x-ray diffraction exhibits no peaks related to wurtzite ZnO phase in the film. The cubic ZnO film is presumably considered to be of the rock-salt phase. This work suggests that the metastable cubic ZnO films, which are of applicational interest for p-type doping, can be epitaxially grown on the rock-salt substrates without the usually needed high pressure conditions.     

薄膜法布里-珀罗滤光片中的超棱镜效应

基于薄膜法布里珀罗滤光片在其峰值波长处具有较大群延迟的特性,设计并从实验上验证了光束倾斜入射时这种结构中存在的超棱镜效应。根据光学薄膜理论中的特征矩阵法,数值模拟计算了器件的群延迟和空间色散曲线,镀制并对器件进行了测试。测试结果表明器件在透射峰值波长处因超棱镜效应引起的空间色散最大位移值达到65μm,与理论计算结果非常吻合;相对于传统的光栅和棱镜器件而言器件具有更高的空间角度色散,实际测试在784.5 nm至786.5 nm波长范围内器件的角色散达到30°/nm。     

LCOS投影PBS分束器膜系设计

给出了一种全新的膜系设计方法,该方法与目前常用的偏振分束器PBS分光镜所采用的多组膜堆周期膜系的设计方法有着本质上的区别。全新的PBS膜系的设计引入一种有序对偶递变方法,它是基于周期性有序地变换成递变非周期性设计,目的是扰动针对45入射布鲁斯特角的敏感。采用了两种折射率材料光学厚度的递变,在SF75系列玻璃棱镜内部入射光能满足45角(5～6)变化、P偏振态的透射率平均不低于70%、S偏振态的反射率不高于99.6%的光学特征指标,而且偏振截止带的带宽可以扩展到400 nm～700 nm。简化了工艺难度,大幅度缩减镀膜时间,降低了投影显示器件制造成本,并提高了光学特征指标。     

立方角锥棱镜的有效反射区

定义了立方角锥棱镜的有效反射区 ,证明了立方角锥棱镜底面角部区域 (即非有效反射区 )入射光与出射光不平行 ,并且在入射光垂直棱镜底面入射情况下计算得有效反射区的面积为底面的三分之二。