Formation of nano-textured conical microstructures in titanium metal surface by femtosecond laser irradiation

We report for the first time that a regular array of sharp nano-textured conical microstructures are formed on the titanium metal surface by irradiation with ultrafast laser pulses of 130 fs duration, 800 nm wavelength in vacuum (∼1 mbar) or in 100 mbar He. The microstructures are up to 25 μm tall, and taper to about 500 nm diameters at the tip. Irradiation in the presence of SF₆, air or HCl creates a textured surface but does not create sharp conical microstructures. The surfaces of these microstructures exhibit periodic nano-texture of feature size comparable to the wavelength of light consistent with ripple formation. Contrary to pillar formation by femtosecond laser irradiation of silicon where the initial ripples evolve into the pillars and the ripples disappear, the ripples on titanium pillars have a much smaller periodicity than the pillars and remain on the surface of the pillars. The textured surface is pitch black compared to its original silver-grayish color, i.e, it exhibits greatly reduced reflectivity throughout the measured visible spectrum. PACS 52.38.Mf; 79.20.Ds; 81.07.-b; 81.16.-c; 82.53.-k     

Fabrication of microstructures in Foturan glass using infrared femtosecond laser pulses and chemical etching

In this study, a method for the fabrication of microstructures on the surface and inside Foturan glass by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an 8% HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). The results demonstrated that the etching time is an important parameter in the fabrication of microstructures on Foturan glass. An example of a tapered U-shaped microchannel with a minimized neck diameter of about 5 μm at the central point for cell detection is presented.     

Lithographical laser ablation using femtosecond laser

Lithographical laser ablation was demonstrated using a femtosecond laser with a lithographical optical system. In this method, a femtosecond laser beam passes through a mask and the pattern is imaged on a film by a coherent optical system. As a result, the film is lithographically ablated, and a micron-sized pattern can be generated in a single shot. The resolution of generation was 13 m, and the narrowest width of a generated line was about 4 m. Moreover, the system was applied to transmission gratings as masks, and nano-sized periodic structures such as nano-sized hole matrices and nano-meshes were generated in a single shot. PACS 52.38.Mf; 42.25.Hz; 42.82.Cr; 81.16.-c     

Colorizing mechanism of brass surface by femtosecond laser induced microstructures

In this paper, we exhibit the colorizing of brass surfaces by forming femtosecond laser induced microstructures on the sample surfaces. A variety of single colors such as brown, yellow, green, and black are introduced on brass surfaces by engineering periodic microgratings, microholes, and ring-shaped micro-patterns using Single Beam Direct Laser Writing (SBDLW) technique. The color of the micro-structured brass surfaces is certainly dependent on the width, depth, and period of the microstructures. Finally, we explain, in brief, the colorizing mechanism of metals by femtosecond laser induced microstructures.     

飞秒脉冲激光加热金属薄膜的理论和实验研究

超短脉冲激光加热可应用于研究材料中载能子之间的超快相互作用,同时也广泛应用于超快激光加工.此前人们提出的双温度模型和抛物一步模型都只能用于描述超短脉冲激光加热金属薄膜后热量传递过程的特定片段.基于双温度模型和傅里叶导热定律,提出普适的理论模型可用于完整描述飞秒激光加热金属薄膜/基底时的整个热量传递过程.同时在300 K温度下,采用背面抽运-表面探测瞬态热反射法实验研究了飞秒脉冲激光加热金属薄膜的热量传递过程,理论预测曲线和实验测量结果符合较好,验证了理论模型的正确性.基于此模型测量得到了金薄膜的电子-声子 关键词： 飞秒脉冲激光 电子-声子耦合 界面热导 瞬态热反射     

Ablation of microstructures applying diffractive elements and UV femtosecond laser pulses

A new method for simple and economic fabrication of diffractive optical elements (DOEs) with three and four phase levels, by UV nanosecond (ns) laser ablation is presented. The technique is based on the combination of two sequentially generated complementary 2-level phase elements. During the fabrication, complete ablative removal of a highly absorbing silicon suboxide layer by pixelated backside illumination ensures the necessary high precision and optical quality. Full functionality of the new DOEs is demonstrated by fabricating micro-structures using UV femtosecond pulses.     

单光束飞秒激光诱导微纳周期结构的现象与机理

飞秒激光具有超快和超强（聚焦后局域电场达到10^10V／cm，相当于氢原子的库仑场强）的特点，因此它与材料发生相互作用时会产生多光子吸收、多光子电离、自聚焦等非线性效应．文章介绍最近发现的单光束飞秒激光在物质内部诱导自组装纳米光栅，沿光束传播方向排列成行的纳米周期孔洞结构以及材料表面诱导纳米周期结构等新现象，并对这些现象的机理作了阐述．     

Spectroscopic investigations of femtosecond laser irradiated polystyrene and fabrication of microstructures

We report microfabrication of structures in bulk and thin films of polystyrene (PS) using femtosecond (fs) laser pulses. For the first time to our knowledge, we report emission from the fs laser modified regions of bulk and thin films of PS when excited at 458, 488, and 514 nm. Moreover, we report the existence of peroxide type free radicals, for the first time, in fs laser irradiated bulk PS. We observed the suppression of Raman modes in case of structures fabricated at higher energies and the same effect was noticed in central portion of the structures fabricated. No appreciable broadening was observed in the case of structures fabricated at low energies. Possible applications resulting from such structures are discussed briefly.     

单光束飞秒激光诱导微纳周期结构的现象与机理

飞秒激光具有超快和超强（聚焦后局域电场达到1010 V/cm,相当于氢原子的库仑场强）的特点,因此它与材料发生相互作用时会产生多光子吸收、多光子电离、自聚焦等非线性效应.文章介绍最近发现的单光束飞秒激光在物质内部诱导自组装纳米光栅,沿光束传播方向排列成行的纳米周期孔洞结构以及材料表面诱导纳米周期结构等新现象,并对这些现象的机理作了阐述.     

数值模拟飞秒激光加热金属的热电子发射

研究了超短超强激光脉冲与薄膜靶相互作用中产生的电子热发射.当超短激光脉冲与薄膜靶相互作用时,首先入射超短脉冲激光对吸收深度内的自由电子进行热激发,接下来热激发电子将能量传递到附近的晶格,再通过电子和晶格二体系的热传导,以及电子晶格间的热耦合,将能量传递到材料的内部.因此,电子在皮秒级甚至更短的时间内不能与晶格进行能量耦合,使电子温度超出晶格温度很多,电子热发射就变得非常明显了.用双温方程联合Richardson-Dushman方程的方法对飞秒脉冲激光照射金属靶的电子热发射进行了研究,结果发现电子热发射对飞     

飞秒激光热反射系统测量金属薄膜中的热波

金属材料中的热波现象可以利用包含电子弛豫时间影响的双曲两步模型进行理论分析.通过飞秒激光热反射实验系统对金属薄膜材料进行了测量.利用偏振分光棱镜将飞秒激光分成抽运光和探测光,其中较强的抽运光用于加热金属薄膜而较弱的探测光用于探测薄膜表面反射率随时间的变化,两束光之间的光程差通过步进电机进行精确控制.利用金属薄膜反射率和电子温度的正比例关系就可以得到电子温度随时间的变化规律.实验发现在加热激光脉冲过后的电子温度下降区间会出现另一个较弱的电子温度波峰,并利用相同厚度的两块金属薄膜样品重复测量对实验结果进行了验证.理论上这一现象可以解释为金属薄膜中热波在背面反射的结果,并且实验结果和双曲两步模型给出的热波理论计算结果相符合.根据实验结果计算出热波传递速度约为5×105m/s,对应的电子弛豫时间为60fs.     

飞秒激光脉冲与金属光阴极相互作用

本文从理论上分析了飞秒激光与光阴极相互作用过程，采用双温模型分析了飞秒激光脉冲辐照下金属薄膜的温度效应。通过建立一个简单的光电效应模型，获得了最佳的金属光阴极厚度，通过该模型可以发现，产生的光电流对在飞秒激光脉冲辐照下的电子温度和晶格温度有着很大的依赖关系。     

不同气氛下飞秒激光诱导硅表面微结构

利用钛宝石飞秒激光脉冲对单晶硅在SF6、空气和真空环境中进行了累积脉冲辐照,研究了硅表面微结构的演化。在SF6气氛中,在激光辐照的初始阶段,硅表面形成了１维的波纹结构,随着辐照脉冲数的增加,波纹结构演化成了２维凹凸结构。累积600个脉冲后,硅表面产生了准规则排列且具有大纵横比的锥形尖峰结构。该结构呈现高度相对较低、锥形尖端小球不明显的特征,分析认为主要与环境气压的大小有关。对比空气、SF6和真空中的微结构发现,尖峰的数密度依次减小;SF6中形成的尖峰高度最大,其次为真空,再次为空气。研究结果表明,真空、SF6和空气3种环境下微结构的形成及表面形貌主要由激光烧蚀、化学刻蚀和氧化决定。     

Modeling of femtosecond laser damage threshold on the two-layer metal films

The heating processes of the single-layer gold thin film and the two-layer film assembly of gold padded with other metal (silver, copper and nickel) irradiated by femtosecond laser pulse are studied by the two-temperature model. It is found that the substrate metal can change energy transport, which is corresponding to the temperature changing process, and the thermal equilibrium time. Compared with the single-layer gold film at the same laser fluence, the two-layer film structure can change the damage threshold of the gold surface. Our results indicate that we can maximize the damage threshold of the gold film surface by altering the thickness ratio of the gold layer and the substrate layer in the two-layer film assembly.     

Action of femtosecond laser pulses on metal nanoparticles in a liquid

A theoretical model describing the influence that ultrashort laser pulses have on spherical metal nanoparticles placed in a liquid is proposed. The kinetics of excitation and damping of acoustic vibrations in gold nanoparticles is studied, and the propagation processes of acoustic disturbances in their environment are discussed.     

飞秒多脉冲激光烧蚀金属过程中的能量剩余现象

提出了描述整个飞秒多脉冲激光烧蚀过程的物理模型,模型考虑了多脉冲烧蚀的新的特点,考虑靶材吸收率随温度的变化和蒸发效应,建立了激光烧蚀不同阶段的热传导方程,给出了相应的定解条件。以金靶材为例,利用有限差分法,求解了热传导动力学方程,分别给出单脉冲和多脉冲作用下相应的靶材电子和离子亚系统的温度演化图像,及多脉冲激光作用下能量剩余系数和脉冲个数的变化规律,发现理论曲线与相应的实验数据吻合较好。研究结果充分证明多脉冲激光烧蚀过程中剩余能量的存在。     

Peculiarity of metal drilling with a commercial femtosecond laser

A commercial femtosecond pulse laser was used to study the interaction of ultrashort laser pulses with aluminum. Tests were conducted to measure the average drilling rate over a range of laser pulse energies in both air and vacuum at the wavelengths corresponding to the fundamental and second harmonic of the laser. For the fundamental wavelength, it was observed that the drilling rates in vacuum were significantly higher than that for drilling in atmospheric air. For the laser beam that was converted to second harmonic, the drilling rate in vacuum at the same energy was slightly lower than that for drilling in air. The observed results can be explained by the presence of an energetic nanosecond pedestal in the laser pulse produced by the femtosecond laser system. This nanosecond component provides a major contribution into drilling and it is strongly affected by the optical breakdown plasma that reduces the drilling rate in air. Conversion to second harmonic reduces the relative energy content of the nanosecond component resulting in a higher contrast femtosecond pulse that is not affected by the near surface plasma. The presence of air results in self-focusing of the second harmonic laser beam, causing an increased drilling rate as compared to the interaction in vacuum.     

Fabrication of microstructures on paraffin substrate using laser heating

In this paper, a technique of forming convex microstructures on a paraffin substrate using laser heating is described. This technique makes use of a phenomenon that solid paraffin, melted by continuous laser irradiation, grows into a pillar-shaped structure with a high aspect ratio in a liquid. Two-dimensional structures, such as line- and wall-shaped structures, are available by scanning irradiation. Also, it is possible to fabricate oblique structures with an inclined laser irradiation. In addition, some characteristics of this fabrication method, such as the laser power and the material temperature, are investigated. Furthermore, the mechanism of this fabrication method is presented. PACS 07.10.Cm; 47.55.Pf; 65.40.De; 79.20.Ds; 81.05.-t     

Fabrication of high-aspect-ratio microstructures using excimer laser

An excimer laser micromachining system is developed to study the ablation of high-aspect-ratio microstructures. The study examines the ablation efficiency, specifically, the impact of changing major laser operating parameters on the resulting microstructural shapes and morphology. The study focuses on glass, although results on silicon and aluminum are also included for comparison. In ablating grooved structures, the ablation depth has been observed to be linearly proportional to the operating parameters, such as the pulse number and fluence. The results specifically indicate that ablation at low fluence and high repetition rates tends to form a V-shaped cross-section or profile, while a U-shaped profile can be obtained at high fluence and low repetition rate. The ablation rate or ablated volume has then been quantified based on the ablation depth measured and the ablated profile observed. The threshold fluence has also been obtained by extrapolating experimental data of ablation rate. The extrapolation accuracy has been established by the good agreement between the extrapolated value and the one predicted by Beer's law. Moreover, a one-dimensional analytical solution has been adopted to predict the ablated volume so as to compare with the experimental data. The reasonable agreement between the two indicates that a simple analytical solution can be used for guiding or controlling further laser operations in ablating glass structures. Finally, the experimental results have shown that increasing the repetition rate favors the morphology of ablated surfaces, though the effect of repetition rate on ablation depth is insignificant.