聚合物电光调制器中M-Z波导TM模分析

M-Z光波导是聚合物电光调制器的重要结构单元。利用有效折射率法计算聚合物脊形波导的横向折射率分布，将三维光波场传播简化为二维传播。从导模满足的标量波动方程出发，结合透明边界条件，采用Crank-Nicholson差分格式，得出有限差分束传播法的基本计算格式。通过对M Z型波导结构中TM模的传播及损耗特性进行理论分析，系统地研究了脊宽、分支角等结构参数对损耗的影响。研究表明，有效折射率法与二维有限差分束传播法的结合可以较好地解决脊形M Z波导的设计问题。该方法具有精度高、计算量小及效率高等优点，为聚合物电光调制器的制备提供了理论依据。     

Modeling of graded index waveguide fabricated by ion exchange on Er3+ doped glass

A general numerical tool,based on thermal diffusion equation and full-vectorial eigen-mode equation,has been presented for the systematic analysis of graded index channel waveguide fabricated by ion exchange on Er3+ doped glass.Finite difference method with full-vectorial formulation(FV-FDM) is applied to solving the full-vectorial modes of graded index channel waveguide for the first time.The coupled difference equations based on magnetic fields in FV-FDM are derived from the Taylor series expansion and accurate formulation of boundary conditions.Hybrid nature of vectorial guided modes for both pump(980 nm) and signal light(1550 nm) are demonstrated by the simulation.Results show that the fabrication parameters of ion exchange,such as channel opening width and time ratio of second step to first step in ion exchange,have large influence on the properties of waveguide.By optimizing the fabrication parameters,maintenance of monomode for signal light and improvement of the gain dynamics can be achieved in Er3+ doped waveguide amplifier(EDWA) fabricated by ion exchange technique.This theoretical model is significant for the design and fabrication of EDWA with ion exchange technique.Furthermore,a single polarization EDWA,which operates at wavelength from 1528 nm to 1541 nm for HE polarization,is numerically designed.     

一种基于光学偏置的新型Math—Zehnder调制器结构设计

设计了一种基于光学偏置并以有机聚合物PMMA／DRI作为光波导材料的新型Mach-Zehdner调制器。利用有效折射率法（EIM）,分析了脊波导的有效折射率随脊波导结构参数变化情况,包括脊宽训、脊高b和芯层厚度d,以及上下包层厚度。采用微带线单电极调制方式结合脊波导的结构设计,实现了微波和光波的速率匹配。针对优化的结构参数,采用BPM方法进行光场和功率传输的模拟仿真,完成了非等臂Math—Zehnder调制器的结构设计,实现了两臂89．84。的初始相位差,消光比约为27dB。     

Fabrication techniques for colymer/Si optical waveguide

In this paper fabrication techniques were investigated for polymer/Si optical waveguide. The aluminum film was used as photolithographic mask instead of photoresist to improve waveguide profile. The influence of aluminum metal cladding produced by sputtering process on the optical character of the device was discussed. The absorption loss was calculated and measured by using effective index method and cut-back method, respectively. Optimized etching parameters were given in reactive ion etching using oxygen, such as radio frequency power and gas flow rate. Measured near-field mode pattern indicated fabrication waveguide achieved single-mode transmission at wavelength 1.55 μm.     

A novel MMI–MZ all-optical switch

This paper presents a novel all-optical switch based on multi-mode interference (MMI) and Mach–Zehnder (MZ) using self-imaging principle and optical Kerr effect of organic polymer material. A branch waveguide is inserted into one of Mach–Zehnder interferometer arms, where the controlling beam is introduced. The device with a core of azo polymer is simulated by the beam propagation method (BPM). The result shows that, the bent branch waveguide of 2 μm width is inserted in MZ interferometer arm at 100 μm has the minimal impact on the original waveguide. And a good light switching function is achieved via controlling light intensity of 4 mW.     

减少聚合物阵列波导光栅损耗的蒸气回溶技术

阵列波导光栅(AWG)器件是波分复用(WDM)系统的一种关键器件,其中,聚合物阵列波导光栅由于其制备工艺、器件集成等方面的优势而受到人们的日益关注。侧壁散射损耗是聚合物阵列波导光栅损耗的一个主要因素,减少阵列波导光栅波导的侧壁损耗对制备低损耗阵列波导光栅具有重要意义。一种蒸气回溶技术被用来有效地减少硅基聚合物阵列波导光栅的散射损耗,该技术的机理是饱和溶剂分子融入并软化波导侧壁,增加其流动性,从而降低波导侧壁粗糙度。用扫描电镜方法验证了用该技术能获得更光滑的波导侧壁。对直波导和阵列波导光栅样品进行回溶处理,测试后得到直波导的侧壁散射损耗减少2.1 dB/cm,阵列波导光栅中心信道和周边信道的插入损耗分别减少5.5 dB和6.7 dB,串扰减少2.5 dB。     

Design and fabrication of a three-dimensional polymer optical waveguide polarization splitter

We present a design and fabrication of a three-dimensional polymer optical waveguide polarization splitter by taking into consideration of the induced birefringence effect of the polymer. We show that it is not possible to couple TM light from one waveguide to the other but evanescent coupling for TE light is possible. Hence the polarization splitter can be designed by considering TE mode coupling alone. This has an advantage of short interaction length of the device. Based on this consideration, we fabricated a polarization splitter with a TE extinction ratio of 15 dB and TM extinction ratio of 21 dB.     

Simple process for fabricating a monolithic polymer optical waveguide

A simple and economical fabrication process for a monolithic polymer optical waveguide in which different materials are serially grafted is proposed and demonstrated. A cladding layer with a waveguide core groove is fabricated by microtransfer molding. An epoxy resin solution is spin coated onto the cladding before selective photoexposure to form a transparent waveguide core. An optical functional polymer solution is then spin coated to form a serially grafted waveguide structure. Thus two types of polymer fill the groove to realize a monolithically integrated waveguide. Controlling the groove shape results in a flat surface. A low connection loss between the two polymers, less than 0.01 dB/point, is obtained.     

掺铒聚合物光波导放大器的数值分析

针对掺铒聚合物光波导放大器(EDWA),提出了一种基于Douglas离散格式改进的有限差光束传播法(FD-BPM)的数值计算方法。对每一传输步长结合多能级速率方程计算出EDWA中光场传输强度分布,及掺铒光波导放大器的增益传输特性。设计并研究了掺铒聚合物通道波导和Y形分束器的放大增益特性。在掺铒聚合物直波导中,Er3 浓度为9.0×1025ions·m-3,输入信号和泵浦光功率分别为1μW和2mW,其增益为1.6dB/cm;在掺铒聚合物Y形分束器中,输出信号光分束比相等,并能实现无损耗分束。     

Mode field distribution of an integrated-optical waveguide generated by UV-laser radiation at the surface of a planar polymer chip

An integrated-optical strip-waveguide is directly written into the surface of a planar polymer substrate by an excimer laser beam. The mode field distribution, the surface refractive index and the refractive index depth profile of the waveguide have been examined. The intensity distribution of the mode field strongly depends on the refractive index depth profile, on the light coupling conditions and on the waveguide fabrication process parameters.     

基于KH560修饰的有机/无机杂化材料电光波导制备

利用溶胶-凝胶法制备了硅烷偶联剂KH560修饰的有机/无机杂化电光材料,分析了KH560的水解缩合的反应机理.对制备好的电光薄膜进行了表面形貌、折射率和电光特性的表征,并用反射法测量得出了该材料的电光系数为3.5pm/V.针对这种材料柔韧的特性,设计了上加载条形电光波导,并利用Opti-BPM软件模拟了二维和三维光场.摸索了其制备的加工工艺,制备了该结构的光波导,最后得到了这种波导的近场输出.     

Reflective-type configuration for nearly phase-matching cerenkov second-harmonic generation in a nonlinear-optical polymer waveguide

A new technique for achieving efficient Cerenkov-type second-harmonic generation (SHG) in a nonlinear-optical (NLO) polymer waveguide is presented. The configuration, which can prevent the losses of light caused by relatively long-distance propagation and the multiple reflections that appear in the conventional Cerenkov technique, exhibits ease of fabrication and compactness. We experimentally observed a conversion efficiency of 1.6% W(-1) cm(-1), which to our knowledge is the highest value reported for Cerenkov SHG in polymer, by tuning both the thickness and the refractive index of the polymer film close to phase matching between a guided fundamental wave and a guided harmonic wave. The experimental results agreed well with the theoretical prediction.     

感应耦合等离子体刻蚀在聚合物光波导制作中的应用

提出了利用感应耦合等离子体(ICP)刻蚀技术提高聚合物光波导器件性能的方法,介绍了ICP刻蚀技术的原理和优点。选取聚甲基丙烯酸甲酯-甲基丙烯酸环氧丙酯(P(MMA-GMA))作为波导材料,采用氧气作为刻蚀气体,研究了ICP参数变化对刻蚀效果的影响。介绍了倒脊形光波导的制备过程,采用改变单一工艺参数的方法,分析了刻蚀效果随时间、功率、压强、气体流量等参数的变化,对参数优化后刻蚀得到的凹槽和平板结构进行了表征。实验结果表明:在天线射频功率为300 W,偏置射频功率为30 W,气体压强为0.5 Pa,氧气流速为50 cm³/min的条件下,可获得侧壁陡直、底面平整的P(MMA-GMA)凹槽结构。     

基于有机聚合物的M-Z波导设计

M-Z光波导是有机聚合物电光调制器的重要结构单元.将有效折射率法与二维差分束传播法相结合,利用有效折射率法计算了聚合物脊形波导的横向折射率分布及有效折射率.由Maxwell方程出发,结合辐射透明边界条件,采用Crank-Nicholson差分格式,得出有限差分束传播法的计算格式.通过对M-Z型波导结构中TM模的传播及损...     

Augmented low index waveguide for confining light in low index media

Guiding light in the low index region of a high refractive index contrast waveguide can be beneficial for many applications including sensing, nonlinear optics and electro‐optics. Existing methods to achieve this goal suffer from fabrication complexity, large loss, or poor optical confinement. We propose a simple structure to achieve a significant enhancement of light confinement in the low index medium. We explain the guiding principle of this structure using geometrical optics, and suggest a number of applications where this guiding structure can provide significant performance benefits. The combination of simplicity, ease of fabrication, and good confinement makes this waveguide an attractive choice for a wide range of applications. To illustrate this, we consider the integration of a nonlinear polymer with a silicon photonic waveguide, and show that significantly better performance with an easier fabrication process can be achieved using this new scheme.

     

基于双矩形腔边耦合波导的等离子体诱导透明效应

为了降低功耗、实现超快速响应,设计了一种基于双矩形腔边耦合等离子体波导系统,并研究了其等离子体诱导透明效应.采用光学Kerr效应超快调控石墨烯-Ag复合材料波导结构,实现1 ps量级的超快响应时间.动态调控等离子体波导的传输相移,当泵浦光强为5.83 MW/cm^2时,等离子体诱导透明系统能够实现透射光谱π相移,这是因为基于石墨烯-Ag复合材料结构等离子体波导具有大的等效光学Kerr非线性系数,表面等离子体激元局域光场和等离子体诱导透明效应慢光对光学Kerr效应产生了协同增强作用,大大降低了系统获得透射光谱π相移的泵浦光强.等离子体诱导透明效应透明窗口的可调谐带宽为40 nm,系统的群延时控制在0.15 ps到0.85 ps之间,并且光波通过间接耦合或者相位耦合机制实现了等离子体诱导透明效应相移倍增效应.耦合模式理论计算结果很好地吻合了时域有限差分法仿真模拟结果,研究结果对于低功耗、超快速非线性响应和紧凑型光子器件的设计和制作具有一定的参考意义.     

An azobenzene functionalized polymer for laser direct writing waveguide fabrication

We report on non-lithographic laser direct writing fabrication of optical waveguides by using a 4′-hydroxy-4-nitroazobene dye-functionalized polymer film. The polymer film reveals permanent change of refractive index at high laser illumination intensity. A focused continuous wave low power green laser beam at 532 nm wavelength is used to directly write waveguide structures on the polymer film. The magnitude of refractive index increase at film surface is about 0.006. One-step laser writing results in graded index waveguides in film depth direction under ambient conditions without pre- and post-processing. As a by-product, the laser writing also results in a very small air valley at the boundary between the laser written and non-written regions which may contribute in part although minimal to the waveguide lateral confinement and can be used for visual observation of waveguide patterns. The fabricated waveguide is found to be stable and easily reproducible.     

Reverse-symmetry waveguides: theory and fabrication

We present an extensive theoretical analysis of reverse-symmetry waveguides with special focus on their potential application as sensor components in aqueous media and demonstrate a novel method for fabrication of such waveguides. The principle of reverse symmetry is based on making the refractive index of the waveguide substrate less than the refractive index of the medium covering the waveguiding film (n_water=1.33). This is opposed to the conventional waveguide geometry, where the substrate is usually glass or polymers with refractive indices of ≈1.5. The reverse configuration has the advantage of deeper penetration of the evanescent electromagnetic field into the cover medium, theoretically permitting higher sensitivity to analytes compared to traditional waveguide designs. We present calculated sensitivities and probing depths of conventional and reverse-symmetry waveguides and describe schemes for easy implementation of reverse symmetry. Polymer waveguides are demonstrated to be candidates for cheap, mass-producible reverse-symmetry sensor modules. The grating-coupled waveguiding films of controlled thickness are produced by soft lithography. The resulting films are combined with air-grooved polymer supports to form freestanding single-material polymer waveguides of reverse symmetry capable of guiding light. Received: 20 December 2001 / Published online: 14 March 2002     

M-Z型极化DANS聚合物电光波导强度调制器研究

研究了Mach-Zehnder型极化聚合物电光波导强度调制器的制备工艺.器件采用DANS (4-dimethylamino-4′nitro-stlibene)聚合物为电光波导材料,由电光波导层、上下介质缓冲层、上下金属电极层构成五层波导结构.对五层光波导各层之间的光学、化学以及微加工工艺的相互兼容性进行了深入研究.采用紫外光漂白方法制备出侧壁光滑的条波导,采用钨丝电晕极化方法对DANS聚合物波导进行有效极化,使其具有电光特性.通过优化器件制备工艺,研制出工作波长为1300 nm的M-Z型电光波导强度调制器原型器件.实验测得器件半波电压约为10 V,调制带宽约为1 GHz.     

Direct electron-beam irradiation: a new technique for the erasure of second-order nonlinearity and the fabrication of channel waveguides by use of optical polymeric films

We demonstrate a novel and simple technique for fabrication of a nonlinear-optical polymeric waveguide device by direct electron-beam irradiation. To form a periodically poled nonlinear-optical polymer waveguide, we exposed dye-doped polymer films directly to electron beams with an energy of 25keV. It became clear that irradiation with electron beams erased the second-order nonlinearity of poled polymer film. We could also confirm that a ridge-type channel waveguide was realized by means of this simple technique.