Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry

This study extends the use of holographic interferometry to measure the nanoscale out-of-plane displacement with high surface resolution. It is noted that if the deformation is less than half of the optical wavelength, it is hard to find an obvious fringe pattern. Under such a situation, in general, the phase shift method is used. However, it needs to take more than 3 images for phase shifting and phase reconstruction In this paper, a more simple hybrid method of gray-level and holographic interferometry is used to extract fringe skeletons, in which it just needs to take one or two images for the normal deformation measurement directly, even if there exists no obvious fringe pattern. The displacement field with high surface resolution can also be obtained. The proposed method yielded a theoretical precision of 0.15 nm for out-of-plane displacement with a monochromatic CCD camera of 10-bit gray scale (1024 gray scales) sensitivity and microscale surface resolution for millimeter scale object with 640×480 pixels image resolution by an He–Ne LASER (632.8 nm wavelength) light source. The gray-level method is proposed to calculate the non-obvious interferometry fringe by traditional holographic interferometry hologram, and the result showed that this method works for this purpose.     

Application of the holographic carrier fringe and FFT technique for deformation measurement

This paper describes a holographic system based on the use of fibre optics and automatic spatial carrier fringe pattern analysis. Carrier fringes are generated by simply translating the object beam between two exposures. Single-mode optical fibres are used to transfer both the object and reference beams. The fast Fourier transform method is used to process the interferograms: it extracts phase from fringe patterns resulting from the interference of tilted wavefronts. The method is illustrated by measuring the deformation of an arbitrarily clamped, uniformly loaded circular plate. The results are given for the perspective plot of the out-of-plane deformation field, the maps of wrapped and unwrapped phase, and a contour map of the unwrapped phase.     

The governing equations of Moiré interferometry II. Gratings at ±45° to the measurement axes

The effects of tilting of the grating plane on moiré interferometric fringe patterns are studied using the method of Livnat and Post (Experimental Mechanics, 25(4) (1985) 6–360). Tilting may result either from rigid-body rotations or from out-of-plane displacement gradients. Tilting may introduce a significant error if it is assumed that the fringes represent contours of in-plane displacement, particularly if the in-plane deformation is small compared with the out-of-plane displacement gradient. Knowledge of the surface slope appears to be sufficient to correct the error. It is also shown that the fringe patterns do not capture the added displacement caused by rigid-body rotations exactly. The implications of these effects are briefly discussed for an experiment measuring the deformation at the tip of a crack in a ductile steel, in which the out-of-plane displacement gradients are relatively large.     

The separation of out-of-plane displacement from in-plane components by fringe carrier method based on large image-shearing ESPI

A fringe carrier method for separating out-of-plane displacement from in-plane components based on large image-shearing electronic speckle pattern interferometry (ESPI) is presented. If the test object is respectively illuminated by two expanded symmetric illuminations in large image-shearing ESPI, two interferometers are formed. Carrier fringe patterns can be introduced by tilting reference surface a small angle. The carrier fringe patterns are demodulated after deformation of the object. Two phase maps, which include out-of-plane and in-plane displacement, can be obtained by using Fourier transform. Then out-of-plane displacement can be easily separated from in-plane displacement by simple operation between two unwrapped phase distributions. The principle of spatial carrier frequency modulation in large image-shearing ESPI is discussed. A typical three-point-bending experiment is completed. Experimental results are offered. The results show that the method offers high visibility of carrier fringes. And the system presented does not need a special beam as a reference light and has simple optical setup.     

Improved 3D displacement measurements method and calibration of a combined fringe projection and 2D-DIC system

An improved measurement method and an automatic calibration procedure are proposed for a combined 2D Digital Image Correlation and Fringe Projection system that allows measuring in- and out-of-plane displacement maps with only one image at each deformation stage of a specimen. The proposed method increases the accuracy and range of the out-of-plane displacements by taking into account the divergences of both the projected fringes (uncollimated) and the camera (with non-zero FOV). The calibration is performed automatically by acquiring a sequence of images of a reference plane by displacing perpendicular to it the camera and fringe projector with a motorized translation stage. The acquired images are then used to obtain a fringe function for each pixel and the necessary parameters required for the correction of the in-plane displacements. Furthermore, a closed form expression is obtained that relates the out-of-plane displacements with the shifted phase at each pixel for a given experimental set-up. This expression is in good agreement with the fringe function obtained by fitting a simple 2nd order polynomial to the experimental obtained calibration data. Finally, the polynomial approach is proposed as a fringe function because it avoids the errors in the determination of the required parameters of the theoretical expression as well as some small misalignment or aberration effects.     

Fast full-field out-of-plane deformation measurement using fringe reflectometry

Full-field out-of-plane deformation measurement of specular surfaces can be implemented quickly and conveniently using fringe reflectometry. The system configuration is simple and processing is fast. With the assistance of an advanced fringe pattern processing technique, the windowed Fourier ridges method, only a single two-directional fringe pattern is necessary for determination of the deformed surface profile. Thus, the whole measurement only requires a single image with the potential for high speed or even real time measurement.     

Additive-subtractive phase-modulated speckle interferometry: Fringe visibility under partial decorrelation

Additive-subtractive phase modulated speckle interferometry (ASPMSI) is a technique that minimizes the susceptibility of speckle methods to environmental noise while providing fringes of good visibility. The method requires the acquisition of two consecutive video frames of additive-speckle images of the same two deformed states of an object at a rapid enough rate such that ambient noise is not a problem. The additive-speckle images as expected are of very poor visibility due to the presence of the self-interference term. An interframe phase-modulation is introduced and the two additive-speckle images are digitally subtracted to improve the fringe visibility by removing the self-interference term. The ASPM-SI method works with in-plane and out-of-plane deformation sensitive ESPI as well as with displacement-gradient sensitive speckle-shearing interferometry. It is shown that the ASPM-SI scheme has higher visibility than conventional additive-SI and performs consistently better than subtractive-SI schemes in the presence of partial interframe speckle decorrelating optical noise. Furthermore, it is shown that the fringe visibility of the out-of-plane displacement sensitive interferometer which uses a protected reference beam separate from the object beam can be made to be essentially unity even at complete interframe decorrelation.     

Deformation and profile measurement using the digital projection grating method

This paper presents a digital projection grating method for full field measurement of out-of-plane deformation and shape of an object. Two grating patterns on an object before and after deformation are captured by a CCD camera and stored in a computer. With the aid of Fast Fourier Transform (FFT) and signal demodulating techniques, a wrapped phase map is generated. The phases are expanded in the range of 0–2π and compared with the resulting moiré pattern. An unwrapping procedure is used to obtain a continuous phase. In addition, a digital method for fractional fringe multiplication is also developed. Results on deformation and object profile measurements are presented.     

Use of projection moiré for measuring the instantaneous out-of-plane deflections of composite plates subject to bird strike

For the new generation aircraft families, the use of fibre-reinforced plastics is considered for the leading edge of the wings. However, this leading edge is very prone to bird strike impact.This paper presents the use of the projection moiré technique to measure the instantaneous out-of-plane deflections of composite plates subject to bird strike. Very strict constraints with regard to (i) high-speed image acquisition, (ii) vibrations of the impact chamber, and (iii) projection and observation angles, complicated substantially the development of the set-up. Moreover, the high frame rates (12,000 fps) required a very intensive illumination.In the optimized configuration, a specially designed grating with gradually changing period is projected by means of special halide hydride lamps through one of the side windows of the impact chamber onto the composite plate riveted in a steel frame. The digital high-speed camera is mounted on the roof of the impact chamber and records through a mirror the object surface with the projected fringe pattern on it.Numerical routines based on local Fourier transform were developed to process the digital images to extract the phase and the out-of-plane displacements. The phase evaluation is possible due to the carrier frequency nature of the projected moiré pattern. This carrier frequency allows separation of the unwanted additive and multiplicative fringe pattern components in the frequency domain via the application of a proper mask. The numerical calculations were calibrated for the bird strike on an aluminum plate, where the plastic deformation could be checked after the test.     

基于条纹中心线的载波散斑条纹解调方法

针对传统傅里叶变换法在处理含有多突起的载波散斑条纹图时,由于存在频谱展宽会出现严重的解调相位失真,提出了一种基于条纹中心线的载波散斑条纹解调方法.根据载波调制时所采用平行调制方式和倾斜调制方式,分别从理论上对相关的中心线解调法进行数学推导,并进一步采用最小二乘三次曲面拟合法获得被测物面全场的离面位移信息.实验结果表明:利用上述中心线解调法和曲面拟合法能解调出复杂的载波条纹图,并获得具有亚像素定位准确度、连续光滑的全场离面位移信息.     

A dual-function ESPI system for the measurement of out-of-plane displacement and slope

A dual-function ESPI system is developed for the measurement of out-of-plane displacement and its slope change. The proposed system is convenient and also efficient to switch over from an out-of-plane sensitive configuration to shearography. A difference-of-phase method with a five-step algorithm is used for speckle fringe analysis.     

Digital speckle pattern interferometric (DSPI) and thermo-graphic investigations on the thermal responds in human teeth

Human dentine is a composite material made up of constituents of varying thermal properties, which when subjected to changes in temperature experiences complex thermal effects. In this study, the response of functionally adapted dentine to temperature changes in physiological range is analyzed using a digital speckle pattern interferometer (DSPI) and thermography in conjunction with an advanced digital fringe processing technique. The advanced digital fringe processing is conducted using an asymmetric and central peak Gaussian filter, in order to remove noise and, subsequently, enhance the quality of the images. This investigation demonstrates the responds of functionally adapted dentine to temperature changes in its own plane and out of plane. Distinct pattern of out-of-plane and in-plane displacement was observed on the dentine by the DSPI analysis. The thermo-graphic analysis was used to rationalize the above nature of deformation in the dentine. These analyses showed that the inner, cervical dentine exhibited conspicuous deformation at the maximum temperature rise and equilibrated last during temperature drop.     

Simultaneous quantitative evaluation of in-plane and out-of-plane deformation by use of a carrier method of large image-shearing shearography

A carrier method for separating out-of-plane displacement from in-plane components based on large imageshearing shearography is presented. A reference surface is fixed on the side of a test object. They are illuminated by two expanded symmetric illuminations respectively. The carrier is introduced by rotating the reference surface to modulate the displacement of an object. By using Fourier transform to demodulate the modulated fringe pattern, two phase maps, which include out-of-plane and in-plane displacements, can be obtained. Then the out-of-plane displacement can be easily separated from in-plane displacement by subtraction and addition of the two unwrapped phase distributions. The principle of the method is presented and proved by a typical three-point-bending experiment. Experimental results show that the method enjoys high visibility of carrier fringes. The system does not need a special beam as a reference light and has simple optical setup.     

基于条纹等值线相关的散斑条纹图处理新方法

在数字散斑干涉术中,通常由物体变形前后得到的两幅原始散斑场用相减方法来得到条纹图,并由相移后的多幅(三幅以上)条纹图来求取相位场。介绍了一种基于条纹等值线相关的条纹图生成新方法,并在此基础上提出了基于单幅干涉条纹图的相位场提取新方法和基于条纹等值线相关的单步相移新方法。实验结果表明,该方法具有良好的结果和发展前景。     

基于液晶显示投影技术的数字影栅云纹相移实现方法

影栅云纹是物体离面变形和表面形貌测量常用的一种比较简单的方法,用单纯的影栅云纹法即便在最好的光学系统配置情况下测量精度也只有1~100μm左右,在影栅云纹测试方法中引进相移技术是提高测量精度的主要手段。采用液晶投影仪和数字图像处理技术实现数字影栅云纹测量的准确数字相移,避免了在影栅云纹法中使用结构比较复杂或特制的相移机构。由计算机产生相移条纹图经液晶显示投影,应用实时图像灰度算术相减技术得到数字相移影栅云纹条纹图。该方法具有“基准栅”的栅距和相移步长实时可调,配置高速图像采集系统和图像后处理软件,可将相移技术引入动态测量中,从而提高动态测量的精度的优点。最后的悬臂梁实验结果证实了该方法的有效性。     

Monitoring/measurement of out-of-plane vibrations using shearing interferometry and interferometric grating

In this paper, an application of shear plate interferometry combined with moiré readout to monitor/measure out-of-plane vibrations is presented. Moiré fringes are produced between the fringe pattern from the shear plate and interferometric grating recorded by photographing the interference pattern generated from the shear plate. It is demonstrated that the method can be used to study periodic and non-periodic vibrations.     

Microscopic surface contouring by fringe projection method

This paper describes the use of optical fringe projection method for 3D surface profile and deformation measurement of micro-components. In this method, sinusoidal linear fringes are projected on a micro-component surface by a grating phase shifting projector and a long working distance microscope (LWDM). The image of the fringe pattern is captured by a high-resolution CCD camera and another LWDM and processed by phase-shifting technique. A simple procedure is described which enables calibration of the optical set-up for subsequent quantitative measurement of micro-components of unknown shapes. This method is relatively simple and accurate, and is capable of conducting fully automated measurements. In this paper, two micro-components, a micro-mirror (0.1 mm×0.1 mm) and a micro-electrode pad are used to demonstrate deformation measurement and microscopic surface contouring.     

Measurement of static and vibrating microsystems using microscopicTV holography

This paper describes a microscopic TV holographic arrangement to study the static and vibrating microsystems. In the optical setup, the object beam and the reference beam arms are provided with a phase shifting mirror and a bias phase modulation mirror to carry out the measurement of the out-of-plane deformation and the vibration amplitude fields, respectively. A long working distance microscope is used in the setup for magnifying and imaging the objects on to the CCD camera. For static fringe analysis, the system is used in double exposure subtraction mode of operation, while for vibration fringe analysis, it is used in the time average contrast reversal refreshing mode of operation. An improved approach for qualitative analysis of time averaged fringes helps in reducing the number of frames required for analysis. The usefulness of the system is demonstrated by examples of static and vibration measurements for different microobjects.     

A fringe carrier technique for unambiguous determination of fringe orders in shearography

Shearography is an interferometric method which measures displacement derivatives. This paper presents a technique which eliminates the ambiguity in shearographic fringe interpretation. The technique is based on generating a carrier fringe pattern. Introduction of the carrier fringes results in the formation of a fringe pattern which has monotonically increasing fringe orders, thus allowing fringe orders to be determined in a straightforward manner and without ambiguity. The phase change due to deformation alone is then obtained by simply subtracting the known undeformed carrier fringe orders from the deformed carrier fringe orders. Elimination of fringe ambiguity has paved a way for automatic data acquisition in shearography.     

电子散斑干涉条纹信号实时处理系统的研究

本文给出一种电子散斑干涉条纹信号实时处理系统的实现方案;详细分析了物体变形前后信号延迟对相关性的影响;并导出条纹信号频率范围与离面位移的关系式及散斑背景噪音最低频率估算式,从获取低背景噪音条纹图角度给出光学系统优化设计的依据;最后给出实验结果．