飞秒激光在6H SiC晶体表面制备纳米微结构

激光诱导周期性纳米微结构在多种材料包括电介质、半导体、金属和聚合物中观察到。研究了800nm和400nm飞秒激光垂直聚焦于6H SiC晶体表面制备纳米微结构。实验观察到800nm和400nm线偏光照射样品表面分别得到周期为150nm和80nm的干涉条纹,800nm圆偏振激光单独照射样品表面得到粒径约100nm的纳米颗粒。偏振相互垂直的800nm和400nm激光同时照射晶体得到粒径约100nm的纳米颗粒阵列,该纳米阵列的方向随400nm激光强度增加而向400nm偏振方向偏转。利用二次谐波的观点对以上纳米结构的形成给出了解释。     

Nanostructuring of single-crystal silicon carbide by femtosecond laser irradiation in a liquid

The formation of nanostructures on the surface of single-crystal silicon carbide under ablation by femtosecond laser pulses in liquid ethanol has been experimentally investigated. A 800-nm Ti:sapphire laser with a pulse duration of 210 fs was used as a radiation source. Single-scan irradiation of SiC surface leads to the formation of periodic grooves with a period of about 200 nm. Double exposure with a sample rotation by 90° between the scans gives rise to a regular array of nanostructures with average lateral size of 10 to 15 nm. It is determined that the wettability of nanostructured SiC surface is improved in comparison with the initial surface. It is shown that nanostructuring of SiC surface leads to an increase in the red light transmission by a factor of more than 60.     

飞秒激光诱导硒化锌晶体表面自组织生长纳米结构

 以250 kHz高重复频率钛宝石飞秒激光聚焦到硒化锌晶体表面,利用扫描电子显微镜观测飞秒激光辐照后晶体的表面结构。发现线偏振激光辐照的区域形成了自组织周期性纳米结构,其周期为160 nm左右,并且可以通过改变激光的偏振方向调节纳米光栅结构的取向;当晶体相对于激光光束以10 mm/s速度移动,经激光扫描后,在晶体表面形成了长程类布拉格光栅。当飞秒激光光束为圆偏振光时,辐照区域形成均匀的纳米颗粒。     

Femtosecond pulse laser-induced self-organized nanostructures on the surface of ZnO crystal

This paper reports self-organized nanostructures observed on the surface of ZnO crystal after irradiation by a focused beam of a femtosecond Ti：sapphire laser with a repetition rate of 250kHz. For a linearly polarized femtosecond laser, the periodic nanograting structure on the ablation crater surface was promoted. The period of self-organization structures is about 180 nm. The grating orientation is adjusted by the laser polarization direction. A long range Bragglike grating is formed by moving the sample at a speed of 10μm/s. For a circularly polarized laser beam, uniform spherical nanoparticles were formed as a result of Coulomb explosion during the interaction of near-infrared laser with ZnO crystal.     

飞秒激光诱导钛表面形成高空间频率周期条纹结构

利用波长为800 nm的飞秒激光,在空气和去离子水中诱导钛表面形成不同的周期条纹结构。在空气中,激光能量密度为0.265 J/cm2时,钛表面主要形成周期为500~560 nm低空间频率条纹结构;激光能量密度为0.102 J/cm2时,主要形成的是周期为220~340 nm高空间频率条纹结构。两种条纹均垂直于入射激光偏振方向,且条纹周期随着脉冲重叠数的增大而增大。在水中,除形成垂直激光偏振方向、周期为215~250 nm的高空间频率条纹结构,还形成了平行于激光偏振方向且周期约为入射激光波长八分之一的高空间频率条纹结构。利用表面等离子体理论、二次谐波及Sipe理论对各种周期条纹结构的形成机理进行分析,发现周期条纹结构的形成与钛表面氧化层有密切的关系。     

Self-organized periodic surface structures on ZnO induced by femtosecond laser

Self-organized periodic surface structures on ZnO have been observed after multiple linearly polarized femtosecond laser pulse irradiation. The observed self-organized structures are attributed to the second harmonics in the sample surface excited by the incident laser. The grating orientation could be adjusted by the laser polarization direction. We also find that fluences play an important role in the formation of self-organized nanostructures.     

Periodic surface nanostructures on polycrystalline ZnO induced by femtosecond laser pulses

Periodic surface nanostructures induced by femtosecond laser pulses on polycrystalline ZnO are presented. By translating the sample line-by-line under appropriate irradiation conditions, grating-like nanostructures with an average period of 160 nm are fabricated. The dependence of surface morphologies on the processing parameters, such as laser fluence, pulse number and laser polarization, are studied by scanning electronic microscope (SEM). In addition, photoluminescence (PL) analysis at room-temperature indicates that the PL intensity of the irradiated area increases significantly compared with the un-irradiated area. Using femtosecond laser pulses irradiation to fabricate periodic surface nanostructures on polycrystalline ZnO is efficient, simple and low cost, which shows great potential applications in ZnO-based optoelectronic devices.     

飞秒激光制备彩色镍

 采用飞秒脉冲激光在空气条件下扫描处理镍片表面,制备了彩色镍。用扫描电子显微镜、紫外-可见-近红外分光光度计、拉曼光谱仪等对其进行了表征。扫描电子显微镜测量显示,彩色镍表面出现了纳米激光诱导周期表面结构,结构周期为480～510 nm;紫外-可见-近红外分光光度计测量表明,彩色镍对波长为200～2 200 nm的光的反射率大大降低;拉曼谱表明样品表面形成了一定含量的氧化镍。     

采用飞秒激光诱导制备彩色金属

采用脉宽为35～65fs,中心波长为800nm的飞秒脉冲激光对经抛光的镍片进行表面扫描处理,并在金属表面上制备了彩色镍图案;设置不同的激光扫描速度和能量密度扫描处理不锈钢表面,亦制备了彩色图案。介绍了实验过程,分析了实验结果,扫描电子显微镜（SEM）形貌分析显示,经过飞秒激光扫描处理的金属表面出现了纳米量级的激光诱导周期表面结构（NC—LIPSS）,在镍上形成的结构周期约为480—510nm,在不锈钢上形成的结构周期约为480～540nm。     

飞秒激光诱导ZnO :Al薄膜周期结构及其光致发光特性

利用单束800 run飞秒激光在掺杂了Al的ZnO薄膜中制备了纳米周期条纹结构.研究了不同能流密度的飞秒激光在照射不同的时间后,表面纳米周期结构的变化规律及其形成机制.利用He-Ge激光器作为激发光源,研究了ZnO:Al薄膜的光致发光特性及其与纳米周期结构的关系.结果表明,近带隙发光增强的主要原因是800 nm飞秒激光...     

三光束飞秒激光干涉在GaP,ZnSe表面诱导二维复合纳米-微米周期结构

报道了三光束飞秒激光干涉在GaP和ZnSe晶体表面诱导二维复合纳米-微米周期结构.改变三束光的偏振组合方式,可以得到不同的纳米-微米复合结构.理论计算了相应偏振条件下光场强度分布、椭偏度分布和偏振方向分布.实验和理论计算结果表明,烧蚀斑上的微米长周期结构是由三光束干涉的强度花样决定,短周期纳米结构是由光场的偏振干涉花样决定.这些研究在纳米材料制备、超高密度光存储以及材料特性周期性调制等方面有很大的应用前景.     

飞秒激光诱导自组织纳米周期结构及其光学特性的研究进展

飞秒激光具有超快、超强的特点.飞秒激光微纳加工发展非常迅速. 本文综述了近十年来利用飞秒激光在金属、半导体、介质等各类材料中制备的纳米周期结构, 阐述了若干关于飞秒激光诱导纳米周期结构的物理机理的观点.讨论了基于偏振调制的多光束 干涉在半导体表面制备纳米周期结构,简要叙述了周期结构对材料光学特性的影响. 关键词： 飞秒激光 纳米周期结构 多光束干涉 光学特性     

Formation mechanisms of uniform arrays of periodic nanoparticles and nanoripples on 6H-SiC crystal surface induced by femtosecond laser ablation

Uniform arrays of periodic nanoparticles with 80-nm period are formed on 6H-SiC crystal irradiated by circularly polarized 400-nm femtosecond laser pulses. In order to understand the formation mechanism, the morphology evolvement as a function of laser pulse energy and number is studied. Periodic nanoripples are also formed on the sample surface irradiated by linearly polarized 400-, 510- and 800-nm femtosecond laser pulses. All these results support well the mechanism that second-harmonic generation plays an important role in the formation of periodic nanostructures. PACS 79.20.Ds; 42.62.Cf; 61.80.Ba; 81.05.Cy; 78.30.Am     

Self-organized nanogratings in glass irradiated by ultrashort light pulses

Periodic nanostructures are observed inside silica glass after irradiation by a focused beam of a femtosecond Ti:sapphire laser. Backscattering electron images of the irradiated spot reveal a periodic structure of stripelike regions of approximately 20 nm width with a low oxygen concentration, which are aligned perpendicular to the laser polarization direction. These are the smallest embedded structures ever created by light. The period of self-organized grating structures can be controlled from approximately 140 to 320 nm by the pulse energy and the number of irradiated pulses. The phenomenon is interpreted in terms of interference between the incident light field and the electric field of the bulk electron plasma wave, resulting in the periodic modulation of electron plasma concentration and the structural changes in glass.     

Formation of Nanogratings on the Surface of Nanoporous Glass Irradiated by Femtosecond Visible Laser Pulses

JETP Letters - Periodic nanostructures with a period of about 100–150 nm are formed on the surface of nanoporous silicate glass irradiated by sharply-focused laser pulses with a wavelength of...     

Femtosecond laser-induced nanostructure-covered large-scale waves on metals

Through femtosecond (fs) laser pulse irradiation (pulse duration: 65 fs, central wavelength: 800 nm, and repetition rate: 250 Hz), we investigate the morphological evolution of fs laser-induced periodic surface structure on Au and Pt, called a nanostructure-covered large-scale wave (NC-LSW) with a period of tens of microns, densely covered by iterating stripe patterns of nanostructures and microstructures. We show that the surface morphology of NC-LSW crucially depends on the fluence of the laser, the number of irradiating pulses, and the incident beam angle. Our experimental observations allow us to establish a three-step model for the NC-LSW formation: the formation of laser-induced surface unevenness, inhomogeneous energy deposition due to the interference between the incident light and the scattered field, and nonuniform energy deposition due to shielding by the peaks of LSW.     

Fabrication of micro/nano crystalline ITO structures by femtosecond laser pulses

A method is proposed for the fabrication of micro/nano crystalline indium tin oxide (c-ITO) structures using a Ti:Sapphire laser with a repetition rate of 1 kHz and a wavelength of 800 nm. In the proposed approach, an amorphous ITO (a-ITO) thin film is transformed into a c-ITO micro/nano structure over a predetermined area via laser beam irradiation, and the residual a-ITO thin film is then removed using an etchant solution. The fabricated c-ITO structures are observed using scanning electron microscopy (SEM) and cross-sectional transmission electron microscopy (TEM). The observation results show that the use of a low repetition rate laser induces a high thermal cycling effect within the ITO film and therefore prompts the formation of micro-cracks in the c-ITO structure. In addition, it is shown that as the laser power approaches the ablation threshold of the a-ITO thin film, nanogratings and disordered nanostructures are formed along the center lines of the c-ITO patterns formed using linearly polarized and circularly polarized laser beam irradiation, respectively. The nanogratings are found to have a period of approximately 200 nm (i.e. one-quarter of the irradiation wavelength), while the nanostructures have an average diameter of approximately 100–160 nm.     

Femtosecond laser writing of subwave one-dimensional quasiperiodic nanostructures on a titanium surface

One-dimensional quasiperiodic structures whose period is much smaller than the wavelength of exciting radiation have been obtained on a titanium surface under the multipulse action of linearly polarized femtosecond laser radiation with various surface energy densities. As the radiation energy density increases, the one-dimensional surface nanorelief oriented perpendicularly to the radiation polarization evolves from quasiperiodic ablation nanogrooves to regular lattices with subwave periods (100–400 nm). In contrast to the preceding works for various metals, the period of lattices for titanium decreases with increasing energy density. The formation of the indicated surface nanostructures is explained by the interference of the electric fields of incident laser radiation and a surface electromagnetic wave excited by this radiation, because the length of the surface electromagnetic wave for titanium with significant interband absorption decreases with an increase in the electron excitation of the material.     

Femtosecond pulse laser-induced self-organized nanogratings on the surface of a ZnSe crystal

Periodic nanostructures are observed on the surface of ZnSe after irradiation by a focused beam of a femtosecond Ti:sapphire laser, which are aligned perpendicular to the laser polarization direction. The period of self-organized grating structures is about 160 nm. The phenomenon is interpreted in terms of interference between the incident light field and the surface scattered wave of 800-nm laser pulses. With the laser polarization parallel to the moving direction we produce long-range Bragg-like gratings by slowly moving the crystal under a fixed laser focus. The nanograting orientation is adjusted by laser polarization and the accumulation effect. PACS 81.16.Rf; 78.67.-n; 33.80.Rv; 82.53.Mj; 81.16.-c