LP-MOCVD生长InGaAs/InP应变量子阱的研究

本文研究了LP-MOCVD对不同x值的In_1-xGa_xAs/InP生长条件,并且生长了压缩应变为0.5%三个不同阱宽的InGaAs/InP量子阱结构,利用77KPL光谱分析了能级同阱宽的关系,实现最窄阱宽为4.4nm,最小全半高峰宽为17.0mev.     

LP—MOCVD研制InGaAs/InP应变量子阱LD

本文指出在LP-MOCVD生长过程中,采用量子阱有源区和上限制层不同的生长温度以及生长非掺杂过渡层等技术能有效地控制InGaAs/InP量子阱激光器的p-n结结位,给出了采用DEZn和H₂S做掺杂源在InP材料中p型和n型杂质溶度和p-n结控制的条件,并研制出有源区阱层InGaAs与InP存在0.5%压缩应变量子阱激光器,这一结构LD实现室温脉冲激射,得到峰值功率为106mW以上,阈值电流密度为2.6kA/cm².     

InGaAs/GaAs应变量子阱激光器线宽展宽因子的理论研究

详细地介绍了计算线宽展宽因子(α因子)的理论基础及推导过程, 建立了α因子的简便模型. 该模型分别考虑了带间跃迁、带隙收缩和自由载流子效应对α因子的影响, 利用不同载流子浓度下的增益曲线得到光子能量随载流子浓度的变化速率以及微分增益, 进而对α因子进行近似计算. 模拟计算了InGaAs/GaAs量子阱激光器的增益曲线及α 因子的大小, 计算结果与文献报道的实验值相符. 进一步讨论了InGaAs/GaAs量子阱阱宽及In组分对α 因子的影响. 结果表明, α 因子随In组分和阱宽的增加而增加.     

InGaAs/InAlAs多量子阱结构的量子限制Stark效应研究

通过吸收光电流谱的测量.观察到用国产MBE设备生长的与InP衬底晶格匹配的In-GaAs/InAlAs多量子阱结构的量子限制Stark效应及其与光偏振方向有关的各向异性电吸收特性.报道了可用于波导型调制器制作的MQW样品材料的X射线双晶衍射结果,并用计算机模拟出与实测十分相似的曲线,得到了可靠的量子阱结构参数,证明样品材料具有优良的外延质量.利用等效无限深阱模型进行的理论计算表明,应考虑样品p-i-n结内建电场的影响,才能使算出的吸收边红移与实验值符合. 关键词：     

LP－MOCVD生长InGaAs／InP应变量子阱的研究

本文研究了ＬＰ－ＭＯＣＶＤ对不同ｘ值的Ｉｎ１－ｘＧａｘＡｓ／ＩｎＰ生长条件，并且生长了压缩应变为０．５％三个不同阱宽的ＩｎＧａＡｓ／ＩｎＰ量子阱结构，利用７７ＫＰＬ光谱分析了能级同阱宽的关系，实现最窄阱宽为４．４ｎｍ，最小全半高峰宽为１７．０ｍｅｖ。     

InGaAs/GaAs单量子阱PL谱的温度变化特性

采用分子束外延方法制备了InGaAs/GaAs单量子阱,利用自组装的光致荧光探测系统,对其进行了光致荧光谱研究。考察了不同温度下荧光峰波长、峰形的影响。研究结果表明:高温时荧光主要是源于带—带间载流子跃迁,而在低温时则来源于束缚在量子阱中激子的跃迁。     

Si杂质扩散诱导InGaAs/AlGaAs量子阱混杂的研究（英文）

光学灾变损伤(COD)常发生于量子阱半导体激光器的前腔面处,极大地影响了激光器的出光功率及寿命。通过杂质诱导量子阱混杂技术使腔面区波长蓝移来制备非吸收窗口是抑制腔面COD的有效手段,也是一种高效率、低成本方法。本文选择了Si杂质作为量子阱混杂的诱导源,使用金属有机化学气相沉积设备生长了InGaAs/AlGaAs量子阱半导体激光器外延结构、Si杂质扩散层及Si 3 N 4保护层。热退火处理后,Si杂质扩散诱导量子阱区和垒区材料互扩散,量子阱禁带变宽,输出波长发生蓝移。退火会影响外延片的表面形貌,而表面形貌则可能会影响后续封装工艺中电极的制备。结合光学显微镜及光致发光谱的测试结果,得到825℃/2 h退火条件下约93 nm的最大波长蓝移量,也证明退火对表面形貌的改变,不会影响波长蓝移效果及后续电极工艺。     

InGaAs(S)/InP应变量子阱能带计算和有源区材料的选择

本文利用K·P能带理论和形变势模型计算了应变对量子阱结构能带及能级的影响,提出了在压缩应变情况下,当固定发射波长时,利用InGaAsP做阱材料可对应变大小和阱宽进行独立控制,克服了应变较大时InGaAs阱材料阱宽较窄的困难。在伸张应变情况下,利用InGaAs做有源区较为合适。     

InGaAs(S)/InP应变量子阱能带计算和有源区材料的选择

本文利用K·P能带理论和形变势模型计算了应变对量子阱结构能带及能级的影响,提出了在压缩应变情况下,当固定发射波长时,利用InGaAsP做阱材料可对应变大小和阱宽进行独立控制,克服了应变较大时InGaAs阱材料阱宽较窄的困难。在伸张应变情况下,利用InGaAs做有源区较为合适。     

Electric field controlled g-factor in parabolic well determined by transport measurements

The Shubnikov de Haas oscillations in parabolic well are studied in the tilted magnetic field. The electric field displaces the electron wave function along Z-axis and leads to the strong variation of the average bare g-factor in such system. From the measurements of the filling factor ν_c at which the spin gap collapse occurs, we deduce the total Zeeman energy, which consists of the bare Zeeman energy and exchange-correlation term. By investigating of the variation of ν_c in tilted field we reliably extract the bare g-factor as a function of the gate voltage.     

Investigation of Mn incorporation in fifteen-period InGaAs/GaAs quantum well system

A ferromagnetic ordering with a Curie temperature of 50 K of fifteen layer of InGaMnAs/GaAs multi quantum wells (MQWs) structure grown on high resistivity (100) p-type GaAs substrates by molecular beam epitaxy (MBE) was found. It is likely that the ferromagnetic exchange coupling of sample with Curie temperature of 50 K is hole-mediated resulting in Mn substituting In or Ga sites. Temperature and excitation power dependent PL emission spectra of InGaMnAs MQWs sample grown at temperature of 170 °C show that an activation energy of Mn ion on the first quantum confinement level in InGaAs quantum well is 36 meV and impurity Mn is partly ionized. It is found that the activation energy of 36 meV of Mn ion in the QW is lower than the activation energy of 110 meV for a substitutional Mn impurity in GaAs. These measurements provide strong evidence that an impurity band existing in the bandgap due to substitutional Mn ions and it is the location of the Fermi level within the impurity band that determines Curie temperature.     

InGaAs(P)/InP量子阱混合处理对其光电特性的影响

用离子注入诱导无序（IICD）和无杂质空位扩散诱导无序（IFVD）方法研究了InGaAs(P)/InP量子阱结构的混合造成材料光电特性变化，带隙蓝移的规律。研究结果发现，IICD造成的带隙蓝移与离子注入的种类、剂量、注入后退火温度，时间有关，也和样品存在的应力有关。具有压应力的样品产生的蓝移量比具有应力的大。IFVD方法造成的带隙蓝移量与介质膜的种类，后继退火温度，退火时间有关。同时还发现，蓝移量与半导体盖层成分和介质层成分的组合有关，InGaAs与SiO2组合产生的蓝移比InP与SiO2组合的大。介质层的掺杂也影响蓝移量，掺P的SiOxPyNx可以产生高达224meV的蓝移，目前尚未见其他报道，二次离子质谱（SIMS）研究说明，量子阱层元素的互扩散可能是造成带隙蓝移的主要原因。     

InGaAs/GaAs应变量子阱的光谱研究

分别用光致发光谱（PL），光伏谱（PV）及时间分辨谱（TRPL）的方法，测量了应变InGaAs/GaAs单量子阱和多量子阱在不同温度下的光谱，发现单量子阱与多量子阱有不同的光学4性质。多量子阱PL谱发光峰和PV谱激子峰的强度与半高宽都比单量子阱的大，但单量子阱的半高宽随着温度的升高增大很快，这是由激子－声子耦合引起的，通过时间分辨谱研究发现了量子阱子能级之间的跃迁，多量子阱的发光寿命明显比单量子阱的长，我们利用形变势模型对量子阱的能带进行了计算，很好地解释了实验结果。     

弱耦合GaAs/AlGaAs/InGaAs双势阱隧穿结构的磁隧穿特性研究

研究了低温(15 K)条件下弱耦合GaAs/AlGaAs/InGaAs双势阱结构的纵向磁隧穿特性. 研究表明,器件在零偏压下处于共振状态. 通过分析不同偏压下的磁电导振荡曲线,可以得到双量子阱中的基态束缚能级随偏压的变化规律,从而可以确定隧穿电流峰对应的隧穿机制. 所得结果可为弱耦合双量子点器件的制备提供基础. 关键词： 双量子阱 隧穿结构 磁电导振荡     

Quantum point contacts on InGaAs/InP heterostructures

For the first time we have observed quantized conductance in a split gate quantum point contact prepared in a strained In_0.77Ga_0.23As/InP two-dimensional electron gas (2DEG). Although quantization effects in gated two-dimensional semiconductor structures are theoretically well known and proven in various experiments on AlGaAs/GaAs and also on In_0.04Ga_0.96As/GaAs, no quantum point contact has been presented in the InGaAs/InP material with an indium fraction as high as 77% so far. The major problem is the comparatively low Schottky barrier of the InGaAs (φ_B≈ 0.2 eV) making leakage-free gate structures difficult to obtain. Nevertheless this heterostructure—especially with the highest possible indium content—has remarkable properties concerning quantum interference devices and semiconductor/superconductor hybrid devices because of its large phase coherence length and the small depletion zone, respectively. In order to produce leakage-free split gate point contacts the samples were covered with an insulating SiO₂layer prior to metal deposition. The gate geometry was defined by electron-beam lithography. In this paper we present first measurements of a point contact on an In_0.77Ga_0.23As/InP 2DEG clearly showing quantized conductance.     

High Power 980 nm InGaAs/AlGaAs Strained Quantum Well Lasers

By low-pressure metalorganic chemical vapor deposition (LP-MOCVD) system,InGaAs/AlGaAs graded-index separate-confinement heterostructure strained quantum well lasers are grown with carbon doped the upper cladding layer and the capping layer. Carbon tetracholride (CCl4) is used as the carbon source. 100 μm oxide stripe lasers are fabricated,and the laser output power per facet (uncoated) reaches 1.2 W with 2A injection current under the room temperature continuous wave (CW) operation. The threshold current density is 150 A/cm2 with 1000 μm cavity length. The slope efficiency per facet reaches 0.53W/A,and the total external differential quantum efficiency is above 85%. The relations between the threshold current densities,the differential quantum efficiency and the cavity length are studied.     

High Power 980 nm InGaAs/AlGaAs Strained Quantum Well Lasers

1lntroductionCarhan,aIVcolutnnelement,hasmanyadvantagesinGaAsAlGaAsmaterials,suchasIowdiffudricoefficient,relativelowactivateenergyabout26meV,highincmptiOnconcentratboandhighm0bilityduetothelowcomensaterate.SocarbonhasbeenwidelyusedinGaAsAlGaAsheter0unctionbipoartransistors(HBT),modulationdoPingfieldeffecttransistors(m),tunneldiodes,iInPurityinducedlayerdisorderinglaserdiodeS,anddistributedBraggreflectors(DBRs)intheverticalcavitysurfaceedrittinglasers(VCSEL).Ingeneral,therearesever…     

生长温度和结构参数对InGaAs／GaAs量子阱光学特性的影响

研究了不同生长温度下制备的In0.15Ga0.85As/GaAs应变量子阱的PL谱,结果表明,生长温度越高,In偏析和In-Ga互混越严重,同时,导致更多的In脱附,PL谱发光峰蓝移。对不同In含量的和不同InGaAs厚度的InGaAs/GaAs量子阱进行PL谱测试,分析表明In含量<0.2,生长温度低于560℃时,In含量和InGaAs层量子阱的厚度对In偏析、脱附和In-Ga互混基本没有影响。