A detailed study of metallic surface-relief grating

This paper presents a more detailed interaction of an electromagnetics light with a metallic surface-relief subwavelength grating utilizing the rigorous coupled-wave analysis. The focus of this work is the accurate modeling of undetermined aspects of diffraction patterns produced by binary metallic grating structures, specially gold grating. First-order diffraction efficiency for rectangular-groove gold grating with equal groove and ridge widths are presented for various wavelengths as a function of period, groove depth, polarization and angle of incidence. We also studied diffraction efficiency of both of TE and TM polarization modes against increasing of incident angle as well as TE polarization against increment of grating period. As a result, very low reflectivity at zero-order was found out for TE and TM polarizations at the pitch of Λ = 2λ. Having been studied diffraction efficiency of metallic surface-relief gratings, we also examined polarization-dependent efficiency of diffraction orders, for different groove depths. Simulation results have been completely presented.     

亚波长金属偏振分束光栅设计分析

结合有效介质理论和薄膜光学的抗反射设计方法,设计了基于0.65μm工作波长的亚波长金属偏振分束光栅,给出了光栅的优化设计参数,采用严格耦合波理论分析了光栅的偏振分束特性.结果表明,亚波长金属光栅对TE偏振表现为金属膜特性,具有高反射,对TM偏振表现为介质膜特性,具有高透射,在-30°<θ<30°的大入射角范围和0.47μm<λ<0.80μm的宽入射波谱内,该光栅的透射光和反射光均具有高偏振消光比和低插入损耗的特点. 关键词： 亚波长金属偏振分束光栅 有效介质理论 薄膜光学 严格耦合波理论     

一维金属光栅的光学反射吸收

利用RCWA(rigid coupled-wave analysis)方法研究了一维金属光栅的反射特性,考察了 瑞利反常、表面等离激元驻波共振和几何共振三种共振吸收机理,分析了这三种机理的相互作用,如表面等离激元驻波共振和几何共振可以形成混合模式. 在反射式复合金属光栅中,确认了第四种共振形式,即相位共振. 数值计算表明相位共振对光学吸收的影响有两种形式: 当光栅周期大于一个波长时,相位共振导致尖锐的吸收峰,峰位在几何共振吸收峰一侧;当光栅周期小于一个波长时,相位共振导致混合模式的共振吸收峰发生劈裂. 对一维金属光栅反射特性的研究增加了对金属光栅共振吸收模式及其相互作用的认识. 关键词： 一维金属光栅 瑞利反常 表面等离激元 相位共振     

Influence of uniaxial crystal material cladding on reflectivity and dispersion of uniform fiber Bragg grating

The fiber Bragg grating with cladding made of uniaxial crystal material whose optical axis is parallel to the axis of fiber Bragg grating proposed in the paper published in 2003 was investigated again and an error was corrected in the calculation, its effective index, reflectivity and dispersion were examined using coupled-mode theory and numeric solution. The calculated results indicate that no low frequency cutoff phenomenon exists in the HE₁₁ mode, more power is transmitted by the core of the fiber with cladding made of isotropic material, the reflectivity of the fiber Bragg grating with cladding made of uniaxial crystal material is much higher than that with cladding made of isotropic material, the parameter K_cl, i.e., the ratio of the extraordinary to the ordinary ray refractive index, has a stronger impact on the reflectivity, Bragg wavelength and the dispersion of this kind of fiber Bragg grating when it varied from 1.00 to 1.01 than in other regions. This means that the characteristics of the fiber Bragg grating with uniaxial crystal cladding can be changed through adjusting K_cl while keeping its length, periodicity and the other parameters as constants.     

一维矩形刻槽相位栅的减反特性与结构优化

 为了得到一种结构简单、便于制作的可应用于可见光波段的减反射膜,利用等效介质理论研究了表面具有矩形刻槽周期分布形式的介质膜的减反射特性,比较了4种不同基底材料的减反特性,选用聚甲基丙烯酸甲酯（PMMA）作为基底分析了一维单层矩形光栅结构的减反射膜的占空比、蚀刻深度、入射波长和入射角度对减反射特性的影响;给出了可见光波段的减反射膜的结构设计参数。研究结果表明：当入射角小于30°时,可见光中的短波段（0.4 μm～0.55 μm）反射率低于2%;当入射角小于10°时,该减反射膜可以使0.4 μm～0.8 μm可见光的反射率低于2%。     

Time-resolved nonlinear surface plasmon optics

A new surface-sensitive method of time-resolved optical studies is proposed. The method consists in the independent excitation of several surface electromagnetic waves (SEW) by two laser femtosecond pulse beams with varied time delay Δτ and distance Δr between corresponding excitation regions on the surface. To fulfill the phase-matching condition for plasmon-photon coupling, metal grating is used. Due to nonlinear plasmon interaction, the optical radiation with ω₁ + ω₂ and 2ω₁ ? ω₂ (where ω₁, ω₂ are corresponding laser beam frequencies) is generated. The intensity of this nonlinear response versus Δτ and Δr are studied. The direct measurements of the SEW temporal properties are presented. Experiments of this type are important for the development of femtosecond surface plasmon optics.     

Research on multiple-beam interference of pointolite and measurement of minute wedge angle

The intensity distribution of pointolite interference fringes and its characters are discussed by the theory of interference on the condition of glass plate thickness being non-uniform. A novel method of measuring wedge angle of plate is deduced and improved by selecting appropriate reflectivity (R). So, the glass plate with appropriate reflectivity should be adopted to improve the measurement precision for R has a much effect on fringes. The experiments and analysis show it is suitable that R is less than 0.5. By using the equations deduced, the wedge angle was measured and its value is 3.7 ÿ 10^?4.     

Optical properties of excitons in semiconductor superlattices and microcavities

The optical response of Mott–Wannier excitons is investigated in semiconductor superlattices and microcavities. p-Polarized light is considered to calculate the reflectivity R_pand dispersion relation of the collective normal modes in superlattices accounting for extrinsic Morse potential wells, andR_p in microcavities. Results of R_pexhibit well-defined peaks of the exciton bound states in the Morse potentials for both transverse and longitudinal modes. Comparisons ofR_p with experimental reflectivity data of light for semiconductor microcavities exhibit good qualitative agreement as well as Rabi splitting.     

Influence of groove depth and surface profile on fluorescence enhancement by grating-coupled surface plasmon resonance

The fluorescence intensity of a sample placed on a metal grating pattern is enhanced due to excitation by the electric field of the grating-coupled surface plasmon resonance (GC-SPR). The dependence of the enhancement on groove depth and surface profile was studied with the aim of improving the sensitivity of fluorescence detection. The enhancement was found to depend on the groove depth, with intensity most enhanced on grating substrate of about 20 nm depth, which produced an intensity about 30 times greater than that on a flat borosilicate glass substrate. Rigorous coupled wave analysis calculation showed that the shape of the groove influenced GC-SPR, suggesting that controlling not only the depth but also the shape of the grating surface profile can be an important factor in improving the sensitivity of detection by fluorescence microscopy.     

全息光刻中的驻波效应研究

对光刻胶内光强分布进行了计算与模拟, 结果表明, 来自基底的反射光与入射光干涉, 光强在垂直基底的方向上呈现强弱周期性变化, 即驻波效应. 进一步的分析与实验结果表明, 随着基底反射率的增加, 驻波效应变得严重, 进而影响光栅掩模的槽形、占宽比并限制线条高度. 为减弱驻波效应的影响, 尝试了使用减反射膜降低基底反射光强度, 实验结果表明, 在基底与光刻胶之间增加一层减反射膜吸收来自基底的反射光强度, 减弱驻波效应的效果显著. 关键词： 全息光刻 驻波 减反射膜     

Light trapping in amorphous silicon solar cells with periodic grating structures

We report on the design of amorphous silicon solar cells with the periodic grating structures. It is a combination of an anti-reflection structure and the metallic reflection grating. Optical coupling and light trapping in thin-film solar cells are studied numerically using the Rigorous Coupled Wave Analysis enhanced by the Modal Transmission Line theory. The impact of the structure parameters of the gratings is investigated. The results revealed that within the incident angles of ? 40^° to + 40^° the reflectivity of the cell with a period of 0.5 μm, a filling factor of 0.1 and a groove depth of 0.4 μm is 4%–22.7% in the wavelength range of 0.3–0.6 μm and 1%–20.8% in the wavelength range of 0.6–0.84 μm, the absorption enhancement of the a-Si layer is 0.4%–10.8% and 20%–385%, respectively.     

Groove depth dependence of IR transmission spectra through silicon gratings: experiment versus theory

Infrared normal transmission through diffraction gratings micromachined on (1 1 0) silicon wafer with differing periods, groove widths and groove depths was experimentally and theoretically studied. Numerical simulations using rigorous electromagnetic theory of gratings, and a method of smoothing the substrate-derived interference fringes in the simulated spectra were carried out to account for the measured spectra. High sensitivity of the spectra at wavelengths smaller than the grating period to the precise value of the groove depth was studied. By adjusting the groove depth values input in the simulations, a fair agreement between theory and experiment was achieved. The results of the study suggest a possibility of an all-optical method of checking the depth of lamellae obtained in a non-self-stopping etch process, or of measuring in-depth structural dimension during microelectronic fabrication.     

焊接薄板中S0兰姆波对槽型缺陷响应特性的数值研究*

采用数值仿真方法,就焊接薄板中S_0兰姆波对槽型缺陷的响应特性以及焊缝对S_0兰姆波槽型缺陷检测灵敏度的影响开展了数值研究。数值仿真结果表明,S_0_R信号(经槽型缺陷反射的S_0兰姆波回波信号)的反射比率随槽型缺陷深度的增大而单调增加;S_0_R信号的反射比率随槽型缺陷宽度的变化呈非单调变化关系,可将S_0_R信号的反射比率及其持续时间一并加以考虑,以评价槽型缺陷宽度的变化。随着焊缝余高的增加,S_0兰姆波对槽型缺陷的检测灵敏度将降低;随着焊缝宽度的增加,S_0兰姆波对槽型缺陷检测灵敏度的影响并不明显;相比之下,焊缝余高是影响S_0兰姆波槽型缺陷检测灵敏度的主要因素。研究结果表明,将S_0兰姆波用于检测隐藏于焊缝背后的槽型缺陷,是具有可行性的。所得结果对于发展焊接薄板的超声兰姆波无损检测技术,具有一定的理论指导意义和实际参考价值。     

Optical spectra of CsI,CsBr, ZuGeP2, and SbSI

We report here the study of the normal reflectivity spectra R and the corresponding derivative spectra (1/R) dR/dE of SbSI between 2 and 6 eV. The spectra show very strong anisotropy. We have also tried to use the change of the wavelength modulation spectrum to monitor the change in the band structure of SbSI due to the phase transition at 292 °C (D_2h¹⁶→C_2v⁹). Careful examination of the spectra at various temperatures around T_c shows no observable change. We report also the wavelength-modulated reflectivity spectra of the chalcopyrite crystal ZnGeP₂ at 5 K between 2 and 6 eV, for E∥ C and E⊥ C. The experimental results are compared with the theoretical band structure calculation by de Alvarez and Cohen. We also present measurements on CsBr, CsI in the vacuum uv (between 5 and 8 eV) at 1.8K, showing noticeable difference with previous reflectivity measurements at 77 K.     

Frequency detuning dependence of oscillation condition for a semilinear photorefractive optical resonator in a photorefractive material with reflection gratings

Frequency detuning dependence of four-beam coupling in a photorefractive crystal pumped with two counter-propagating waves for a semilinear coherent optical resonator on the oscillation conditions has been analyzed in the case of non-degenerate-wave mixing under the slowly varying amplitude approximation method. Self oscillation can be achieved when the gain arising from the four-beam coupling is large enough to overcome the cavity loss. The effects of frequency detuning (i.e., non-degeneracy), dielectric constant and photoconductivity of the photorefractive materials on the performance of the semilinear photorefractive coherent resonator with the reflection grating configuration have also been studied in detail. The phase-conjugate reflectivity of the pumped crystal and oscillation intensity has been calculated for different input pump beam intensity ratio, intensity reflectivity of the conventional mirrors, degenerate energy coupling strength of the interacting beams. It has been found that for the higher value of the photoconductivity σ_p(>2.0 pS/cm) of photorefractive crystal, the semilinear resonator can oscillate at almost any frequency detuning (Ω) of the oscillation beam with respect to the fixed frequency of the pump waves whereas for the lower value of photoconductivity σ_p(<0.1 pS/cm) oscillation occurs only when the frequency detuning is limited to small region around Ω = 0. But reverse of the case is found for dielectric constant (?), pump intensity ratio (p) and conventional mirror reflectivity (R).     

Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region

The efficiency of an ion-etched laminar holographic grating was measured at near-normal incidence in the 14.5-16.0-nm wavelength range. The grating had an electron-beam-evaporated Mo/Si multilayer coating matched to the grating groove depth. The efficiency peaked at 16.3% in the first inside order at 15.12 nm and 15.0% in the first outside order at 14.94 nm. These are believed to be the highest efficiencies obtained to date from a multilayer-coated laminar grating at near-normal incidence in the EUV (lambda<30.0nm) . Zero and even orders were almost completely suppressed. The grating groove efficiency in the first order approached the theoretical limit of 40.5%.     

对史密斯-帕塞尔自由电子激光光栅的研究

为了研究史密斯-帕塞尔自由电子激光的输出频率和光栅槽深、光栅槽长、光栅槽宽的关系,对于基于矩形光栅的史密斯-帕塞尔自由电子激光利用粒子模拟软件进行模拟和理论分析。首先,利用粒子模拟软件模拟对于基于矩形光栅的史密斯-帕塞尔自由电子激光进行了研究,发现史密斯-帕塞尔自由电子激光的输出频率随光栅槽深、光栅槽长、光栅槽宽的增大而减少。接着,对史密斯-帕塞尔自由电子激光的光栅槽进行了理论分析,发现每个光栅槽都可以等效为一个LC谐振电路,并发现在史密斯-帕塞尔自由电子激光中存在两种辐射,一种是史密斯-帕塞尔辐射,另一种是LC振荡辐射。最后,对光栅槽的LC振荡辐射进行了估算,发现史密斯-帕塞尔自由电子激光输出频率的模拟值与光栅槽的LC振荡辐射估算值的数量级均为102 GHz,且变化规律上一致。据此推测决定史密斯-帕塞尔自由电子激光输出频率的应该是光栅槽,而不是谐振腔。     

对称面形光栅TE模的衍射特性

本文采用耦合波方法计算了对称面形光栅的衍射效率,分析了光栅截面面形为正弦、三角形、矩形、梯形光栅衍射效率与光栅周期、沟槽深度的关系,计算了光栅的峰值衍射效率。理论计算表明:合理地选择光栅周期、沟槽深度,对称面形光栅都可以达到很高衍射效率,接近100%;光栅的峰值衍射效率基本出现在Bragg衍射且光栅的周期等于衍射波长时。     

Spectral characteristics for a fiber grating external cavity laser

A numerical investigation has been carried out on the influence of the antireflection (AR) coating of laser, the coupling efficiency of laser and fiber (), and the reflectivity of fiber grating (R _g) on the side-mode suppression ratio (SMSR) of the fiber grating external cavity laser (FGECL). The FGECL was fabricated by the assembly of the multimode Fabry–Perot (FP) laser chip and fiber grating. The results showed that the FGECL with a lower AR coating, higher and R _g exhibited a better SMSR. A comparison of the SMSR dependence on the and R _g showed that SMSR increased more rapidly with increasing than SMSR for R _g. These spectral characteristic studies of the SMSR dependence on the device parameters of the AR coating, , and R _g may provide useful device designs for the practical fabrication of a FGECL for use in dense wavelength division multiplexing (DWDM) applications.     

Influence of end reflectivity on gain saturation in a planar distributed feedback laser

An approximate method for the analysis of planar-waveguide distributed-feedback lasers is extended to include a nonvanishing reflectivity at the ends of the structure. An index grating structure with parasitic losses is investigated. An expression for the small-signal gain coefficient ^0MN as a function of the output power P ^MNout normalized to the saturation power P ^s , coupling coefficient K, complex reflectivity R of end reflectors, and waveguide parameters is presented.